· with the character of high voltage operationalamplifier. according to the results of the...

Design the Driving Circuit of Pizeo-ActuatorsBy Using High Voltage Power Operational

Amplifier

! ! ! !

ii

!"#$%&'()*+,-(./012345678

9:;< =>

?;@ABC*DEFG*DEHI*D@JKL*D

MNOPQ8RSTUVQWXYZ[\V]9^_`aWbc

>

de@AfghijkEl*EmnEoIEpqErst

u/vVw=xyz|~=Q>

>

>

>

>

>

>

>

>

>

>

>

>

>

>

>

>

>

>

>

>

iii

(~Jx,

! E¡¢£¤¥J¦§!¨~©ª«¬®

¯!°¨Q±²³´µ¶·ª¥J!®!¸¹²³´

·º´»¼¡u½¾¿¯À½ÁÂÃÄ

e!®ºx!¯¡ÅÆ·Ç©

È,»¼®¯!ÉÊ¸¹@»¼ËÌ®!ÍºÎÏ

´ÐÑÒÓ¬9ÔÕÖ`×!¯Ø¡·ÙÚ

c·Û?Ü±¨>

>

>

>

>

>

>

>

>

>

>

>

>

>

>

>

>

>

>

>

iv

>

Abstract

Most of piezo-actuators require high voltage to produce apparent displacement. In

order to get rid of dependency on commercial piezoelectric driving amplifier and

advance the performance of current module, this research will analyze and experiment

with the character of high voltage operational amplifier.

According to the results of the experiment to design a equivalent R-C circuit,

imitating real piezo-actuators, and use the high voltage operational amplifier which has

been compensated to replace the driving amplifier of piezo-actuators to reduce

experiment cost. This research discuss the design specification of amplifier circuit, and

as well as the operation must-know & environment control of high voltage high power

operational amplifier.For piezo-actuated positioning stage, we use our customized high

voltage driven circuit, and prove the possibility by experiment result.

v

……………………………………………………………………...……………....ii

$pÝA………………………………………………………………...…………...…iii

ÞpÝA……………………………………………………………...……………… ..iv

ß………………………………………………………………...……………………v

àß………………………………………………………………………….…viiEviii

áâ> ãä...................................................................................................................1

1-1å.............................................................................................................................1

1-2æ.....................................................................................................................1

áçâ> ®!èé...........................................................................................2

2-1éê®…….................................................................................................2

2-1-1éê®!¦..........................................................................................2

2-1-2ëìÒÓ……..........................................................................................................2

2-1-3®íî¨………………………………………….………………….4

áïâ> ¯ÉÊ¢·ðñò………………………………..…….………7

3-1·ÐÑ´0éóôõö…………………………………………..……….……..7

3-1-1÷..................................................................................................................7

3-1-2óøÙù……………………………………………………………...…………...7

3-2ú!ðñò………………………………………………...………………..7

3-3dû¬ü……………………………………………………...………………..9

3-4ú2……………………………………………………………...……………..9

3-4-1¸¹………………………………………………………………...………...9

3-4-2ý¯…………………………………………………………………...……...9

3-4-3þó………………………………………………………………...…….10

3-5Ó……………………………………………………………………………11

3-5-1Ó8…………………………………………………………...…….11

3-5-2ÜÓ……………………………………………………...……….11

3-5-3Ê®Ó…………………………………………………………...……….12

3-6Íº……………………………………………………………...………....12

vi

3-6-1SOA!à…………….……………………………..………………………12

3-6-2 SOAþ…….……………..………………………………………13

3-6-3ÂÓQ±…..………………..…………………………...……….14

3-7î¨ËÌ……………………………...…………………15

3-7-1 DCËÌ………………………………...…………………………………...16

3-7-2ËÌ………………………………………………………...………….17

3-7-3-¦……………………………………………………………………......18

áâ> ·Éô´Ù……………….……………………………...…………….20

áâ ·¦´º…………………………………………...………………..26

5-1 Pspice¦……………………………………………………...………………….26

5-1-1PA92!¦§…………………………………………………...…………….26

5-1-2ÂOrCAD capture×¯...............................................................................26

5-2·ÙÚ…………………………………………………………...……….………29

áâ Ùä……………………………………………………...…………………..34

üp…………………………………………………………...…………………..35

vii

à 2.1®! ©¦ ……………………………………………………......2

à2.2®! ©ë!Ù…………………………………………………...3

à2.3¯...……………………………………………………………… 3

à 2.4"!¯…………………………………………………………………………4

à 2.5y#$®………………………………………………………………4

à 2.6®!%&'à………………………………………………………6

à3.1ý¯………………………………………………………………………..10

à3.2þó……………………………………………………………......……11

à3.3%SOA (î…………………………………………………………...…….13

à3.4)*+,7þ…………………………………………………………..14

à3.5Ó-.ó……………………………………………………………..16

à3.6AC PDOUT/µ0……………………………………………………….…17

à3.7ËÌ¬1234…………………..……………………....18

à4.1PA92!5Ù…………………………...……………..……...………….…20

à4.2PA92!6………………………………...…………………………...………21

à 4.3PA92®!78……………………………..…………………….….21

à 4.4PA92 + EK16 Kit…………………………………………..……………..….…22

à 4.5EK16!§9:………………………………………..………………….….23

à 4.6;<¾…………………………………………………..……………….…..24

à 4.7 =ç4>………………………………………………..……………….…..24

à4.83?@ABC………………………………………..……………..…..25

à 5.1 20D!ë!¯à……………………………………………..….26

à 5.21E 10V p-p 1KHzF&GH!¦ÙÚ……………………………….…..27

à 5.3–VsI=!¯µ¶………………………………………………….….28

viii

à 5.4–VsI=!¯¦ÙÚ…………………………..………………..….28

à 5.5+VsJ 150V!12ÙÚ…………………………..………………..…..29

à 5.6·Iµ………………………………………………………………………..30

à 5.71E&K………………………………………………………………………..31

à 5.8ë!¯µ¶ÙÚ………………………………………………………..31

à 5.9–VsI=!¯µ¶ÙÚ………………………..……………………….32

à 5.10ª1E&K£x 1KHz 2V(p-p)!F&LMÙÚ……………………………32

1

1.1

NOEP¢QRS"TUV´WVXYÇxZ[\]^

_`ab ICELCDcdefGtuTghiXÇx¥a¢"&

ji"WklQmPno ¡p! AOq\rTghiscs

t¬?9!u8Avw¹rl9ExµÉô$d AØ

V>Ü%yzWuÔÕ>

T|8uÔÕ$~9³8E2E¨E2

u?(Ö7>r¡7>L×Ç

¡~J0VLJ

¸¹©«¬?¯²³E»¼Q

r?£¤!´Q>

1.2

Zkc(ZL

!¸¹V!"\rQ61L!¸¹(

u ¡Ø¢¹£¤©¡ÆÇ©Q±¢4·é¥

¦R¬!¯Q´»¼§¨¡!©!"

Ç©©ÆËÌ®º2ª«¯)§

¨¬þ?®¯½~´¯u8>

>

>

>

>

>

>

>

>

>

2

#George Philbrickï°±2/Á²³®°¨KX

,ª´¡V²7>³®Burr-BrownEADµ¶·¸¹

Ai¨~º83>¯±»#Fairchid>·¸Ua709¦R¼»

®-(½H0éF6¾J¿ÀÁ©·LÂApexË

ÌÃä`ÄÅ ©èé¾>

2.1

2.1.1

Æéê®ÆÒÓ`à2.1LcÅ1E«6

¬=d!Ç!bJÃÈ¾É12¾ÉxÊrØ¦Ë¯Ì&xÃÈ

µÆº)ÍºÆgh$`ÚÎJÏË¯*ëìÒÓÅÃ$mº

î¨¦>

>

à2.1>®! ©¦>

2.1.2

¡à2.2x_mºë!¯"1E¾RiÐì¾RfÑx

1E¾ÉÃÈLJþRikþRfµM2"6·Ò>

> >fo

ii

RVV R

= − >>>>>>ÓÔÒAol>I¼ÃÈÕ>>>>>>>>>>>>>>>>>>>Ó2.1Õ>

>

3

>

à2.2>®! ©ë!Ù>

>

¥®XYÖ×ÇÆî¨ðñ®ë!1EØÓRi>

Rf>ÙÕ)ÚI¼"!1EØµÛÜI=12

ÝÞ¡ßÚµÆàáµÆ¥âY,ãÆä²å1E¾É

ÆæRirØÜ¡J(¯1E12ØÆ1Ed-JV"Ì&>

>

à2.3>¯>

µZ¯12·ç`"Ò>

31 2

1 2 3

( )fo

VV VV R R R R= − + + >>>>>>>>>>>>>>>>>>>>>>>>>>>>>>>>>Ó2.2Õ>

4

>

à2.4>"!¯>

¼ä+µèXYéê,"!1EØë2à2.4>12Vo>Vi>!b

àá´Aol>I¼ÃÈWàá`">

> > (1 )f

o ii

RV V R

= + >>>>>>>>>>>>>>>>>>>>>>>>>>>>>>>>>>>>>>>>>Ó2.3Õ>

µÆ¯°½H)ÎJë!Å1E¾ÉI¼ÃÈÌ

&9ª"!ë!¯§ªìÜ~`à2.5Lc>

>

à2.5>y#$®>

Å8 9ãÆRf>¾íî8Å·`"Ò>

> > 31 2 4

1 2 3 4

( )fo

VV V VV R R R R R= − − + + >>>>>>>>>>>>>>>>>>>>>>>>>>>>Ó2.4Õ>

2.1.3

16LJ¼äïÉÆéêð7"ñ1Á5Véê

dò:J.óµ¶Ü~.óÆü$¾ô,2cµ

¶.ó2¥121WÅÏË¯Ì&ºµ.óõ1E.óöì

5

ÓRTIÕ121d.ó1E.ó÷¡"!ØÌ&dæø.óù

Ðú®mºõ9*ëìöì1E"!Øë!Ø!u´ûI

"!ØWãÆ1EØªu91E½HÑxµÆ½H¬9ãÆ1Ec

:üJÛü¦¬9Æéêü¦ª)ýþrV2¥

121õ9ñ¯Ó121JÆü¦.ó½Hªü

¦Óu 5Ü¡F->

>

16LJ¼ä¾Ü¡å+pA¾É»¾rØF-

®ÃÈÌÐ2à2.6ÆÌ&!¬9Ì¦Ë¯&'àµÆ

àc,®Ì¡V¦Ë¯°¨c,Å¯u¨Ð2(

î1ÅÌ¡VJãÆµõ®4öì-(®

&'à¾"à2.6>!10Hz>1MHz>!bÌ-20dB/decade¦Ë

¯¼ä"ïÉÌ&I¼ÃÈ¦Ë¯Ì&ÏË¯Ì&ó

õÐì¯uÛË¯Ì&´Ë¯Ì&#UW éê

ð7à2.6´ÏË¯Ì&20dB>WÓx10à$Üî²ÕÆWÅ

Ë¯Ì&80dBÌË¯Ì&¦R"ÅÝ+100KHz>Wx

ÊµÆ¯ÆWíæI¼éêð7´ÌI¼100KHz> éêð7`

ÚÏË¯Ì&+40dB (x100)Åíéêð7"Ì10Hz>

>

>

>

>

6

>

à2.6>®!%&'à>

7

!"#$%&' !"#$%&' !"#$%&' !"#$%&'

©Ù:ËÌ®Q±·WLðñ!ò>

3.1

3.1.1Electrostatic DischargeESD

> ÷ÓElectrostatic DischargeESDÕÇ(/d/gh

+þ8¨2ÓElectrical OverstressEOSÕ¹AÑµZ

>>¡¢ghuKÇZ¨Ñr>3>¯>

ÓIntegrated Circuits IsÕ¯Ë~rÖM/imºV5æ>> >

Ñ©·LÂ APEX·¸ PA92õ( MOSFETLÇ

®rMOSFET°¿+÷r ?$(

!4ÉÊ¾"U>37>ºx1EÅk÷ PA92

Íº[Î#¤÷óõö$"Q±¡%Ü~¨ÅJdÆ>

3.1.2

`ÚÍºË¯ÑJÜ~¯1Ùù¥â&ÖuU!)

'?'(¡)* îb+¯78¦§§IîÙ1Ùù¥âÜ

~¯Þ>½~)Ü~#+9,-.>

3.2

2ÉÊ/¶º012-(¯3ôWª)4È56Iî

JÜ~Ië,IîJÜ~ÎIhdòµ¶»«Ü~ +7+¯¡1µ

¶Ñ8ÄÆ¾JÜ~9=ËÌd?Ê>

ú2Y¯!ðñ¡":;Üä²=ÅÆµ¶5

6>

1<>=>üªÉ,+dU>

2<>ª4É,+dU¢Æüc"?ª¾VA

·@Aú2Ë~cÂ¾BÂ

Ë~)V~CD12E&¿öì

FG;ÖÔHË¿Æõ9!412ç;IJSOAmº

\)KëµÑx127>1"Wç+dr

8

>

3<>xµLMÆúªÓ+dU1E½Hu9ÊW

100MHz>d)c&xµ12ªc&WbÉ,+TN

Þc&O8PQxµRLM\e1EÆ½HxµRLM

`ÚF&U½HÐ212¥þSTUMc09VW¯uð7`Ú2¥L

Mµ0ÅÌO8@2ðñLMR2¥125&d*&

X2LMèÑÑxÆUð7"¯ ©Ë~XY)·Û¯

YmºLAZ"Ü¡Ó4xµd[\ð7_`

æëÖF&¨*+d12u9Vs/2>W¾¨*+µW2

]w+dµVÜ¡#^ù_ÌkÜ¡`ÆËÌ"

X+abL>

4<>Ü~dµÜ¡YúÆdhÍºÐÑ>

5<>´¯0yð7")*¦àºµcdeffgëìÐ¯$

¦àdhu>

6<>´ÆiJÃÄË~W2jkÃÄ¿Ll

I¼#u½¯àÜ¡+ÃÄ¯ØJ:mnoûI+

FET>p4<qØI¼12300Vd)ÆWor0st,

TþuÆãD¿µZ"v

zhâJUw~0x\yþ¿W@ÎJø¿)!FET>

z4X)>

>

>

3.3

!"#

$%&'25(

)*+,-./ &!

0"#$*1203%&4503%&67

(89:-';<=&(>

9

))*+?,@

<A<=BC-*+<=<A<=:5V

30V".*+<=DC-

EF/+012G3*H<A<=#

#

3.4

3.4.1

# )<=4±Vs5>6I<A478±30V59@:J<A

478+50V/-10V5#;<A#478+60V52<=<=D>

KL<A?,MNO6<=B<A<P 5<A?

,?@&E#

#

3.4.2

# AQ<ARP<P B<A?,C!J:

"RP#<STURPS3$*10μF/ A%D*<E&V

WB0<'J(<F<S9@JGW"RP0.)μF#)μF#

HI<S *:"RP<SMX3.1HI<SJ@E+K<A

?,41/4#Y,Z5#<S-.9/Y,#

#

X3.1#<ARP#

3.4.3

# E<=G0[1LMNOPD

=QD=&$*<\RSWET23UDVW45]^X6!W_

10

Y<AMQ&ZE<AM[`<=UD<A<=a?,

M#

;^b\cd^O6!"]7@<A?,<A^O6

<=B<A<=^B]e89<=[

`+@cdJ_=<_4 Metal Oxide VaristorMOV5

:`=]^XEfHZE<M[`<=8a\1LQ?@<

A*+bMc^[`<=

ZE<)<A7dN:U;e9Ec^W"ET!"<A;e

<\ED5W"ETUf4J<F<S<5gWIg=*<_h

4Equivalent Series ResistanceESR5$*ESRgWW"ET@Eh><+

i$i<SSc^?X3.2#

#

#

X 3.2#D<=c[#

3.5

<E_+j2$E&4SOA-JjGN<Pk

a_E OPWV!"Uf75klff$i2@.

<<A_E&*;e<SABETlJmn5gETNM

<ARP<SMETffC#

3.5.1

# /<E_+<P <5oD<E_+$EEUfFL ± 20%

mnl<E_+o.VmnmnQpV7mnkp-Gq

rbVqsC@?)V/<Ekt@U

DHr<E_+uvp0.65V#TF/wWB25pIJ-2.2mv/

xy7]125p*0.43V&0.65Vuv84650-(125-25)(-2.2mv)#

11

wK<EaPCBC6VL@#_YI$M9 "N#

3.5.2

G=_E UD?@G=_E<_ka

<E_+Dst<E<E&z

X<EVODJuf:<_47]P

@C58W*bQR<EW\$%)V9:]e

89SY|$9:@+#

~_E<_4<E_+?,7@592@T\RS

3UVw:JvWX#Y<E_+<P[7hB<Est

^<E_+0&20mAW<=:<E^<E_+&10mA<

PP_E^B_EX<=89#

3.5.3

<5G=<E_+$E$%st12_E<_0<_

IJG=?@X?@$**<EED_E<_9 "N

$%w@+ZV"N<_J@E![aa

.rbuv&\B<_x$@]uvyt8#

0.65( )

( )CLLIM

ohmsAR I

= #####################################43.15#

# ( ) 0.65*CL

LIMwatts

RP I= ##################################43.25#

LIMI #&'R_E#ktJ.^f[#

3.6Safe Operating AreaSOA

3.6.1SOA

<-$%_*E|?X3.35z_

+8#

15#<EE|#@KSOA#sC`=|C*<EE|z

=?C(abXcd<EVOE#

2%$%&~*%$%E|!" CMefM*

<EfMVs-Vo#&fgh(SOA#sC&i$%C78

Tc=25 C:J%&B(%

$%o.W i$%C8:#ji$%CzGq

12

$%kcsCj2Xa%&4JMNE

3&]e89]e89&^b<Xl<^mn^<=)l<^<E

aQaEn^zB<EVopq=&o.

VWq=<EVWrVWDst&

24<X2gMOSFET$%5]e89_+u`]e89C

4T=0.5ms#T=1ms#T=5ms5v&10%w7X3.5#

Vs-Vo=60V#*1.5A<E75ms xd50ms#nEQ

jWVyB]e89-GSOA#`

-G[`-z&gKAQQD@+E#

#

X3.3#rb|~sC#

3.6.2SOA

B@U_RSyt%$%&6w;

B\SRSzB<=<EA6H-W%$

%#

X3.4a&SRSOPDV[`D=MNwSRShA<

-Vsa)::mn018<EILim#

<SA<t= 0+<S&<=A8cd<=<A<=

8<E4_E5T#

X3.4b#\RS6[`D=MN'*@K<

ARS<E*Iloada):R:mn018

13

*@KR<A<=t=0+<\&<EA2

Iload#<SRSMN9>&(8cd<=

<=l<EE#

!"w`01<YRS_RSD&

aB<YRS5$%ClM&RSM#

#

X3.4#hRS[`D=#

3.6.3!" #$%!" #$%!" #$%!" #$%

)<A<=<E_+@JTSOA:J

<E_+@*U<APPIK[#&9:<E*E

|*[*UPPMN8<E'R<A<=p!DC SOA

sCZ#fM@<A<=w*UPP"

.Vo=0$iVs-Vo=Vs#wSOA#sCZ#@*<E?

X3.5@?J2A#_+<E±30V25@

K*PP[!"Z%&LW<E_+*[*

1"<APPMN8_E'RDC SOA#sC)VssZ#2

uf:<E_+<A<=)Vs-Vo#fM

mSOA#sCM12Z#_EX3.5

7@?0.7A<E_+@*1<APPK[2

K[)2*<EUf&QMN12"

N#];U![$%]y0Q[2z

9:*<E2![q<E_+9>&Cv<E_

+#

14

X3.5#<E_+c[#

3.7 !" !" !" !"

2Uw$%:RS_*$%2$%

501*$%%$%&6I:_Y<Yv

RS8W=%$%Z<P'yTc^<YWg%#

![%&Dsj25] yt=%$

%] D(j2&_*$

%l$%#

*yt%$%DC#*:B60HZ#01GDC#5

*<X-&T_&E|j25z&q)&Oo."

%W*<X<XZ-&T".$%wD

*5g&8&T_i&_9:IHz#

=&7f6B<X7T(2Vg$i5

¡E1KHz#_¢6=&7fT(2P|o&T@

J$%5g):&_w 0M¡a"%7-£¢e

¤yt&£Q¤¥st,:¥60Hz#uv

:B60Hz#JD$%)DC&_¦§J5g$%)AC&_#

3.7.1 DC&'()&'()&'()&'()

*<XM/$%IB*<EXb=9<A<=)

*<=Vs-VoEB_RS%$%Vo=1/2Vs#8#

15

# #

2

(max)4 L

VsPD R= #¨©ª«¬®#«¬¯°¯±°²¬#³´µ#³¶®·###########43.35#

Vs]<A<=#RL]RS_#

<YRS01&:B60HzZE01¸RSC

%$%m![%&##

¹º&DClj2J:"&»_+&"

%03¦§&JNM¼½*^f%&¨k¡ERS

01Vrm_Y rm &QMNJ01

^$%©X3.6$%&@E8 01'R

<=yt$%¢xy<=)<E £T J@¾s01

kt*V5@E¾sVª«&$*RS_Y01

*_Yª«#

15##RS)U7J^_<E¬£<_<E¤7<=J

eX-YU¬£#

25##JeX-Y#U¬£Vo#

3)##¿®¤M/#ytu`$%uv8#

Pdout=(Vs-Vo)Iload

45##SOAsCM¸a$%#¬£&¦ÀÁSOA#

#

16

##

X3.6 AC PDOUT8<£T#

3.7.2* &'()* &'()* &'()* &'()

AC".3$60Hz9¥¦01)<AMNw

;7§8w _RSD0.637Vs#%$

%wX3.7#@?w01V1"¦:mn$&Lc

^uv@yt$%8#

# #

2

(max)2

2L

VsPDRπ

= #¨Purely resistive load only·##########43.45#

Vs]#B<A<=V#

RL]#RS_#

17

X3.7#ZE<A%$%*D<=#Q¦§@JTQJk¡2)%&^fEfS

¥<PsKUDÂÃ1LM¦§ RS6

HZ0¦§uv5kl D!01V#

1&IJ<Ayt_Ä$%8#

# # 2 PEAKIN

Vs IPπ

= ########################################43.55#

2&ytw_ÄRS$%8#

# # (1/ 2)OUT PEAKPEAK

COSVP I θ= ##############################43.65#

3&ytM$%8#

# #INT IN OUTPD P P= − #####################################43.75#

3.7.3++++,,,,-.-.-.-.

&<;v&8$%Ig*<T¦vQ¦v$%@r*<E

Vr*<=&_r*<_w1980#¯APEX#>§|ÅÆJQ;¦

§Tyt)(QÇÈ:8¨`$)zB*<E°T

$6NJ©$TytQVQ¦vytD

(kt2WUf&kÉ2ªu&W=lWWb

¨`$v*<X$%±Q²oD;v>8

5¨`$)*<X$6N&$*¨`$&~5

\\$ÊË$%kcsC&*<X$%E|$i0

18

¦§yt*<XVktW$*¨`<E5ED*<X#

ff&&_Ìt=Q³Z´«³Wl5X

P%&Í,)TNX&µ^ :J

XEfÎÏ4JÐXÑÒ¬%&

19

1 !

"# !$ APEX % PA92PA92

&'()MOSFET !PA92*+,-',./

012 4A301 7A 4

5 !SOA"#6789:$;%&'</=

>6()*+MOSFET ?35@ AB ,-.AB/CD

0&-1EF PA92 :GH 400V

!peak-to-peak

I 4.1PA92$"2J3

20

I 4.2 PA92$4K

I 4.3 PA92 !$

2) PA92$L56 EK16

EK16- PA92/PA93789?36:

;<6MN6=OP&AB'<>Q

?@G@R5STF$AUB

1. @CDVH DUT C1 C2

2. @VH C3 C4E=W3F6NF

3. GHIJ'<X-"4-40 X 1/4" 4-40

X'Y GZYKL@:=6H R

@X[Q\]XKLM6NO4^PQ_

4. RKL\]6KL`a:DQ*S-ST

b6c5UO46KLY

KL:d6 KK-Y!5

21

7MV1KL 180e_?@W

5. 6XD#6 D^KL5F

DUT f! g5FKLh 2#6x1/2 Oij`5

Fk QR?Yl2QH?:^KL

@O4V1KL5KLY"[_KL#

ZKO4#

6. !"# 6-32 X 1/2M$[iKLJ`\m1

-!$[O4$]n]%L5

-^^_Y%Lj`

7. ]R`2Qa6b%,Ro

I 4.4 PA92 + EK16 Kit

22

I 4.5 EK16$L5AU

3cdX

cdX^X?&YN'3(LD6F)+&Xp^_X

.`F(L(*q(+,$eIfr^_b,cdX Xg]

h,D-"s'.3(Lcdi/j0b,(6(&KLV)&

k_3ps

23

I 4.6cdX

GYt6>t.YKL HS23 u'X MP930 1)Y.

vw>xlT(*$cdXmn$O+, PA92$yzJ

20W20ΩcdXO-Xo 10Ω40W'X

4pq7Wg!Zener Diode

GY.vwn|&=r6s\tuv6:d

~ !;&./wk=>]Dpq7

WgZpq7WgR2013Ypq7Wg$2_3,~x

s3/,, rG45 !;./yz

I 4.7 pq7Wg

5|CD.vw016G01k1*+ka6

|CD~Piezomechanik. Dr. Lutz Pickelmann$

FPSt500/10/15HYI4.7RyzY@B

24

I4.8 |CD

7012

33 : 500*10 /d m v−

jeB 3722.5 /kg m

45B 10 26*10 /N m−

(6B2000N

KmB0 ~ 15mm

01B0 ~ 500V

8B20kHz

25

5.1 Pspice

5.1.1 PA92

GY.vw$APEX !PA92yz

$a6Gnba2gZ Pspice model editorq7/CbL

68/ PA92b$bL

5.1.2 OrCAD capture

99:[6:%;b$=gDg= PA92

$bL:,"#g] 10V (p-p) 1KHzhF

20j0bYI 5.1bJlYI 5.2

I 5.1 20$j0I

26

I 5.2 ] 10V p-p 1KHzhF$bJl

!<=]&=

GI 5.2:G;Hb/Jl,j0:G>v PA92bL

NurGY [c(1|] 100V1G[F

,?@A 95Vq-95VBC

GY.vw;01$1d@<01 0~500VG"#

S 2Q(=D,Z !s3Q?>c(A1>

±Vss3"#E?@+Vs[1b-Vs[@!>(A1

h]|*$bYI 5.3&bJlYI 5.4

27

I 5.3 –Vs@$=

I 5.4 –Vs@$bJl

!<=]&=

GI 5.4Jl:;H(=D,A1FDr[,

G<+Vs1@bF 95VBCwk"#+Vs]1

;,d:%H 100VRJlYI 5.5

28

I 5.5 +Vs 150V$Jl

GI 5.5:;Yl+Vs]1Y[,$3[,^

<+Vs@bd%

5.2

AG Pspice br45v5 M:dwB@vwa

R=gH=S:6@H[^OCo*

JFW5 PA92]FR:68C

=%,DN8Cnvw

IbTE"#g PA92p.j0=Gf

PA92$p.3d

29

I 5.6vw@=

"#=] 1KHz 2V(p-p)cFYI 5.7 2041

!±Vs±30V$j0RJlYI 5.8

30

I 5.7],

I 5.8j0=Jl

GI 5.8:;,D?@ 20BCvD PA92p.3dG

"#:Gn@=Ylb T?@+Vs1b-Vs@

;;:dY"#JZ^(=D$,A

v^-Vs[%,[8R@6NKtDNu[^

OCo@FnG=

: ]G*YI 5.7$cFR=JlYI 5.9

31

I 5.9 –Vs@$=Jl

I 5.10^],x 1KHz 2V(p-p)$hJl

GI 5.9&5.10:;(=D$,,ADvD"#*+

dvH"#Q

32

1R1tZ2oq]Km#6

H<ILMh"NGJOo je_Kh=FR

' &LK&PQR&o¡e¢&dV£&g

W&>&Km¡e:\¤¥¦wkYG1¤¥m1

$3d&01h_K¢<R>>Q§ST;Y01

*+

bG011b*+ !Dwo

S¨l21S6l*+©GH6LYª`F«

¬01"# !07$@,.'

DKbdA6x£rGvwvR:3?Qd &

0®[n0§vw dG',.M!/,t.vw

33

[1] APEX Microtechnology, “Application Note 1” , pp.1-12 , 2007



[4] ¤U, “GDSP V¥$3d01¯°(I) ”, WX±²¦YZA§9¨©+N,l[\, pp. 1-5, 2006

[5] Ron Mancini, “OP Amps For Everyone”, TEXAS INSTRUMENTS , pp.2-1 –4-22, 2002

[6] Apex Microtechnology Data Book of Apex, “Power Integrated Circuits Data BookVolume 11”. Corporation.

[7] ]^(Berlin, Howard M.)Z,_,“ !*+hvw”,`ab, 1985

[8] cd, “CDe$K01¢<*+ ”, >t¦IO¨©fgª, 2002

· with the character of high voltage operationalamplifier. according to the results of the...

Documents