x ray topography applications
DESCRIPTION
X-ray topography examplesTRANSCRIPT
Camera
1
XRT-100
Geometries
2
Transmission Reflection
XRT-100 XRT-100
Sample holder
3
Sample alignment
4
Find a reflection by omega scan Align tilt angle
CCM (crystal collimator)• Radiation: Cu Kα1 λ = 1.54056 Å• Monochromator: Si(220) x 4• Band width: Δλ/ λ = 6.04 x 10-5
• Beam divergence: Δθ = 5.46 arcsec
5
4H-SiC (2”)
6
g110 g118
Lang / XF (transmission) Berg-Barrett / XF (reflection)
4H-SiC
7
g =118 Cu 50kV-300mA 1.5 hour exposure, ILFORDL4 50μm
2 mm diameter at wafer center(negative image)
CCM / NP
4H-SiC
8
Lang / XF
4H-SiC
9
CCM / XF
10mm
CaF2
10
g-220 g440g440
Lang / XF Berg-Barrett / XF CCM / NP
CaF2
11
5mm×6.7mm
g440
CCM / NP
CaF2 (4”)
12
Lang / IP
MgO
13
- 300 - 200 - 100 0 100 200 300
0
20000
40000
60000
80000
100000
120000
140000
Inte
nsi
ty (
cps)
(arcsec)
30mm
Lang / IP
MgO(002) rocking curves
g220
4 mm pitch x scan
Diamond
14
Lang / IP
Section / NP Section / NP
LiTaO3 (4”)
15
Lang / IP Berg-Barrett / IP
Horizontal Bridgeman grown GaAs
16
Lang / XF
LEC grown GaAs
17
Lang / IP
Silicon
18
Lang / IP Lang / NP
Czochralski grown Si
19
Lang / NP Section / NP
1 mm step
SiOx precipitation after heat treatment