yu shi dept. of materials science & engineering. 10 -6 m10 -7 m10 -8 m10 -9 m10 -10 m10 -5 m10 -11 m...

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Yu Shi Dept. of Materials Science & Engineering

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  • Yu ShiDept. of Materials Science & Engineering

  • 10-6m10-7m10-8m10-9m10-10m10-5m10-11moptical microscopeelectron microscopeScanning probe microscopephotolithographyE-beam lithographyIf you can see, then you should be able to write

  • 4,000 years ago Invention of AFM in 1986 1995 by Jaschke & Butt1999Butt et al. Langmuir 11, 1061 (1995).Mirkin et al. Science 283, 661 (1999).

  • Source: http://www.nanoink.net

  • Mirkin et al. Science 283, 661 (1999).

  • Mirkin et al. Nature Nanotechnology 2, 145 (2007).

  • Mirkin et al. Nature Nanotechnology 2, 145 (2007).55,000 cantilevers and 88,000,000 gold dots!

  • Source: http://www.nanoink.net

  • Q & A

  • DPN is finding applications in certain areas that impact the semiconductor industry such as mask fabrication, inspection and repairHowever, its unique attributes have positioned it on a different path aimed largely at exploiting the properties and applications of nanopatterned soft materials -- C. A. Mirkin (2007)

    Mirkin et al. Nature Nanotechnology 2, 145 (2007).

    Current state of the art photolithography tools use deep ultraviolet light with wave lengths of 248 and 193 nm, which allow minimum feature sizes down to 50 nm.

    Current EBL have produced linewidths on the order of 10 nm or smaller.*Direct write on the surface, free from mask, resist ?Various interactions between tip and sample. Sometimes we need to get rid of it, but sometimes we can utilize it.The inspiration for this methodology came from the study of a problem that has plagued the AFM science since its invention*Imaging and lithography. When the tip is hot enough, the ink melts and flows onto the substrate. No deposition occurs when the tip is cold. Imaging w/o any unintended deposition is possible.Electron pen lithography on OTS surface. Terminal group of the OTS is converted to a reactive group terminated surface by applying a voltage. Ink molecules are delivered to the surface and form a second layer.Ink can be fed from a reservior via the annular aperture of the volcano tip. Molecules are transferred by diffusion from the interface to a substrate and a wafer meniscus is formed by capillary condensation.*