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A Map for Phase-Change Materials Invited talk at the IEEE Nano Symposium on "Emerging Non-volatile Memory Technologies" in Santa Clara, CA, USA April, 6th 2012 Martin Salinga

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Page 1: A Map for Phase-Change Materials - IEEE Web Hosting · Overview! Introduction!! Part 1: Crystallization kinetics!!- Viscosity and glass formation!!- Crystallization speed!!- Distinction

A Map for Phase-Change Materials !

Invited talk at the IEEE Nano Symposium on !"Emerging Non-volatile Memory Technologies"!

in Santa Clara, CA, USA!!

April, 6th 2012!Martin Salinga!

Page 2: A Map for Phase-Change Materials - IEEE Web Hosting · Overview! Introduction!! Part 1: Crystallization kinetics!!- Viscosity and glass formation!!- Crystallization speed!!- Distinction

6/IV/2012! M. Salinga IEEE Nano Symposium 2012! 2!

Why are people interested in phase change materials?!

Unique physics !- (meta-)stable in amorphous and crystalline state!- very fast phase transitions!- strong property contrast between both states!- unusual electronic behavior!

Application in memory devices!

Samsung press release!

Google Data Center, Finland!

Page 3: A Map for Phase-Change Materials - IEEE Web Hosting · Overview! Introduction!! Part 1: Crystallization kinetics!!- Viscosity and glass formation!!- Crystallization speed!!- Distinction

6/IV/2012! M. Salinga IEEE Nano Symposium 2012! 3!

Switching principle of phase change materials!

Tm

t1 t2

Ω

crystallization amorphization

Pow

erTe

mpe

ratu

reRe

sistiv

ity

regime of fastcrystallization

Ω

Ω

Time

Page 4: A Map for Phase-Change Materials - IEEE Web Hosting · Overview! Introduction!! Part 1: Crystallization kinetics!!- Viscosity and glass formation!!- Crystallization speed!!- Distinction

Relevant scientific questions!

6/IV/2012! M. Salinga IEEE Nano Symposium 2012! 4!

GeTe!

Why is there such a strong property contrast between amorphous and crystalline phase?!⇒  physics of bonding!

How do switching times depend on structure size and pulse parameters? !⇒  crystallization kinetics!

How is the amorphous phase stabilized against crystallization at moderate temperatures?!=> physics of glass formation!

How does the electronic excitation of the material work?!⇒  electronic properties!

The ultimate question: How does all this change upon a variation of composition?!Tm

t1 t2

Ω

crystallization amorphization

Pow

erTe

mpe

ratu

reRe

sistiv

ity

regime of fastcrystallization

Ω

Ω

Time

Page 5: A Map for Phase-Change Materials - IEEE Web Hosting · Overview! Introduction!! Part 1: Crystallization kinetics!!- Viscosity and glass formation!!- Crystallization speed!!- Distinction

6/IV/2012! M. Salinga IEEE Nano Symposium 2012! 5!

Overview!

Introduction!!Part 1: Crystallization kinetics!

!- Viscosity and glass formation!!- Crystallization speed!!- Distinction between nucleation and growth!

!Part 2: Physics of bonding!!Part 3: Compositional trends!!Part 4: Electronic behavior!

Page 6: A Map for Phase-Change Materials - IEEE Web Hosting · Overview! Introduction!! Part 1: Crystallization kinetics!!- Viscosity and glass formation!!- Crystallization speed!!- Distinction

What drives crystallization?!

6/IV/2012! M. Salinga IEEE Nano Symposium 2012! 6!

•  System minimizes Gibbs free enthalpy in equilibrium!!•  Crystallization is not favorable above Tm!!•  Crystalline state is favored below Tm!!•  ∆GV is driving force!

However, the system is hindered from following the thermodynamic driving force by a limited atomic mobility. (Locally there must be an activation barrier, !otherwise it would just crystallize immediately)!

Page 7: A Map for Phase-Change Materials - IEEE Web Hosting · Overview! Introduction!! Part 1: Crystallization kinetics!!- Viscosity and glass formation!!- Crystallization speed!!- Distinction

6/IV/2012! M. Salinga IEEE Nano Symposium 2012! 7!

Connection between crystallization speed and viscosity!

How is a glass formed?!

How does this influence crystallization?!

temperature↑= viscosity↓= atomic mobility↑= crystallization rate↑!

Page 8: A Map for Phase-Change Materials - IEEE Web Hosting · Overview! Introduction!! Part 1: Crystallization kinetics!!- Viscosity and glass formation!!- Crystallization speed!!- Distinction

amorphouscrystalline crystalline

Crystallization – a kinetic process!

6/IV/2012! M. Salinga IEEE Nano Symposium 2012! 8!

300

400

500

600

700

800

900

1000

10−9 10−6 10−3 100 103 106 109Trt

Tg

Tl

Tem

pera

ture

T /

K

Time t / s

Liquid

Amorphous

Crystalline

10%90%

10 yrs.

10−12 10−6 100

η−1 / (Pa·s)−1

Atomic mobility

0.00 0.25 0.50ΔG / Hf

Driving force

D. Lencer, M. Salinga, M. Wuttig!Advanced Materials, 23, 2030–2058 (2011)!

Page 9: A Map for Phase-Change Materials - IEEE Web Hosting · Overview! Introduction!! Part 1: Crystallization kinetics!!- Viscosity and glass formation!!- Crystallization speed!!- Distinction

12 14 16 18 20 22 24 26 28 30−2

0

2

4

6

8

10

12

14

log 10

(d /

Pois

e)1/(kbT) in 1/eV

m=30m=40m=50m=60m=70m=80m=90m=100m=110m=120m=130m=140

900 800 700 600 500 400 T in K

6/IV/2012! M. Salinga IEEE Nano Symposium 2012! 9!

Connection between crystallization speed and viscosity!

How is a glass formed?!

How does this influence crystallization?!

temperature↑= viscosity↓= atomic mobility↑= crystallization rate↑!

viscosity η drops at glass transition !3.2. TEMPERATURE DEPENDENCE OF THE VISCOSITY

Arrhenius-like behaviour is observed depending on the material. Liquids with approxi-

mately Arrhenius behavior are called strong. Those materials tend to be of tetrahedral

network structure. A typical representative of this group is GeO2

. Some Zr-rich Zr-Cu

alloys, however, also proved to be strong liquids [65]. Liquids that show a pronounced

deviation from Arrhenius behavior are called fragile. Fragile liquids tend to be more

highly coordinated ionic liquids or aromatic hydrocarbons [65]. Interestingly elemental

Selenium turns out to be a rather fragile liquid, too [66, 67].

To quantify this deviation from Arrhenius behavior, the kinetic fragility m is most

commonly defined as the steepness of the temperature dependence of the viscosity ⌘(T )

in the undercooled liquid next to the glass transition temperature Tg [67]:

m =@ log

10

⌘(T )

@⇣

Tg

T

������T=Tg

. (3.2)

Or as Sastry nicely phrased [68]: “Fragility measures the rapidity with which a

liquid’s properties (such as viscosity) change as the glassy state is approached.” Ex-

perimentally determined fragilities have been reported to range from around m = 20

(for GeO2

) up to m = 145 (for cis-/trans-decalin) [67].

Over the years various equations have been proposed for a mathematical description

of the temperature dependence of the viscosity in undercooled liquids [65]. While

many of them are limited to a specific group of materials, the Vogel-Fulcher-Tammann

equation has been generally applied to all types of materials:

⌘(T ) = ⌘0

· exp

✓DTFV

T � TFV

◆(T > TFV ) , (3.3)

where ⌘0

, D, and TFV < Tg are constants.

This equation is the most frequently applied one, particularly when the use of

its equivalent, the Williams-Landel-Ferry equation, is taken into account [70]. The

latter equation is applied to polymer liquids and rubbers concentrating on the term

including the temperature dependence and therefore eliminating the pre-exponential

term of Eq. 3.3. Like several of the other equations, the Vogel-Fulcher-Tammann

equation is provocative because of its implication that a singularity exists for a non-

zero temperature TFV , where relaxation times diverge. This distinctive feature will be

discussed from a thermodynamic point of view later in the context of the Kauzmann

paradoxon.

The Vogel-Fulcher-Tammann equation shows best agreement with experimental

data for liquids that show only small deviations from Arrhenius behavior, which include

most of the common liquids of the geochemical and technological world. For most of

32

Definition of fragility: steepness of temperature dependence of viscosity at glass transition temperature!

Page 10: A Map for Phase-Change Materials - IEEE Web Hosting · Overview! Introduction!! Part 1: Crystallization kinetics!!- Viscosity and glass formation!!- Crystallization speed!!- Distinction

Fragility!

6/IV/2012! M. Salinga IEEE Nano Symposium 2012! 10!

M. Wuttig and M. Salinga, Nature Materials 11, 270–271 (2012);!M. Salinga, PhD thesis RWTH Aachen (2008)!

1.0 1.2 1.4 1.6 1.8 2.0 2.2 2.410!12

10!9

10!6

10!3

100

Tm/T

crysta

l gro

wth

veloc

ity /

m/s

SiGe2Sb2Te5

SiO2

12 14 16 18 20 22 24 26 28 30−2

0

2

4

6

8

10

12

14

log 10

(d /

Pois

e)

1/(kbT) in 1/eV

m=30m=40m=50m=60m=70m=80m=90m=100m=110m=120m=130m=140

900 800 700 600 500 400 T in K

Using ultra-fast calorimetry Greer et al. found a strong deviation from Arrhenius behavior in Ge2Sb2Te5 at high temperatures: !

J. Orava, A. L. Greer, et al., !Nature Materials 11, 279–283 (2012)!

High fragility => pronounced increase !of crystallization speed !above glass transition temperature!

Page 11: A Map for Phase-Change Materials - IEEE Web Hosting · Overview! Introduction!! Part 1: Crystallization kinetics!!- Viscosity and glass formation!!- Crystallization speed!!- Distinction

Measuring fast crystallization by laser heating!

Reflectivity change upon recrystallization of a melt-quenched amorphous mark:!

6/IV/2012! M. Salinga IEEE Nano Symposium 2012! 11!

10 20 30

10

20

30

40

50

pulse width (ns)

puls

e po

wer

(mW

)

reflectivity change (%) due to varying pulseafter pre−pulse (70ns,45mW)

0

1

2

3

4

5

M. Salinga !PhD Thesis, RWTH Aachen (2008)!

300

400

500

600

700

800

900

1000

10−9 10−6 10−3 100 103 106 109Trt

Tg

Tl

Tem

pera

ture

T /

K

Time t / s

Liquid

Amorphous

Crystalline

10%90%

10 yrs.

10−12 10−6 100

η−1 / (Pa·s)−1

Atomic mobility

0.00 0.25 0.50ΔG / Hf

Driving force

Ge15Sb85!

Transmission Electron Microscopy on Ge2Sb2Te5: evidence for formation of multiple crystallites in one laser spot!

Page 12: A Map for Phase-Change Materials - IEEE Web Hosting · Overview! Introduction!! Part 1: Crystallization kinetics!!- Viscosity and glass formation!!- Crystallization speed!!- Distinction

Driving Force ~r³

Interface ~r²

Total Enthalpy

r

�Gcluster(r)

Formation of critical nuclei!

6/IV/2012! M. Salinga IEEE Nano Symposium 2012! 12!

Vc Gr

Δ−=

σ2( )2

3

316

Vc GG

Δ=Δ

σπ

rc

�Gcluster(r) =43�r3�GV + 4�r2⇥

�GC

2r

Consider interfacial energy!!

Page 13: A Map for Phase-Change Materials - IEEE Web Hosting · Overview! Introduction!! Part 1: Crystallization kinetics!!- Viscosity and glass formation!!- Crystallization speed!!- Distinction

Nucleation and growth: AgInSbTe!

6/IV/2012! M. Salinga IEEE Nano Symposium 2012! 13!

Dimensions: 3 µm by 3 µm. Anneal temperature: 160°C (DSC furnace). Film thickness: 30 nm. !

5 min ! ! !7 min ! ! !9 min!

growth!nucleation!

J. Kalb, !PhD Thesis, RWTH Aachen (2006)!

AFM scans on AgIn-Sb2Te: Crystals (dark) are visible in amorphous surrounding (bright). !

Direct measurement of growth velocity and nucleation rate at a certain temperature!

Page 14: A Map for Phase-Change Materials - IEEE Web Hosting · Overview! Introduction!! Part 1: Crystallization kinetics!!- Viscosity and glass formation!!- Crystallization speed!!- Distinction

Why is it important to be aware of nucleation and growth?!

6/IV/2012! M. Salinga IEEE Nano Symposium 2012! 14!

crystalline!

amorphous!

1µm!

Format

Year of introduction

Track pitchWavelength

Min. mark length

Cross-sectionof focused beam

Distance disc surfaceto phase change layer

2µm 0.19µm1µm 0.19µm

0.1mm0.075mm

1.2mm 0.6mm +0.025mm

0.850.850.5 0.6Numerical Aperture

1997 2000 2003 2004

Capacity

CD-RW DVD-RAM BD-RE (single) BD-RE (dual)

650MB 4.7GB 23.3GB 50GB

0.833 µm1.60 µm

!"# 780 nm

0.41 µm1.615 µm

!"#"$%& nm

0.149 µm0.32 µm

!"#"'&% nm

0.149 µm0.32 µm

!"#"'&% nmHow long does it take to crystallize a certain volume? !How does it crystallize?!

amorphous!

crystalline!

Nucleation very rare!!

amorphous!

crystalline!

“nucleation dominated”!“growth dominated”!

=> It depends on the material.!Often materials with high nucleation rates were

chosen for faster crystallization.!

Page 15: A Map for Phase-Change Materials - IEEE Web Hosting · Overview! Introduction!! Part 1: Crystallization kinetics!!- Viscosity and glass formation!!- Crystallization speed!!- Distinction

Why is it important to be aware of nucleation and growth?!

6/IV/2012! M. Salinga IEEE Nano Symposium 2012! 15!

crystalline!

amorphous!

1µm!

amorphous!

crystalline!

Nucleation very rare!!

amorphous!

crystalline!

“nucleation dominated”!“growth dominated”!

Phase-change material

Bottom electrode

Top electrode

SiO2

Heatingcontact

Switchable region

20nm x 50nm!=> It depends on the size.!

For electronic memory: materials with low nucleation rates can be good candidates, since crystal growth velocities become crucial for switching speeds.!

How long does it take to crystallize a certain volume? !How does it crystallize?!

The smaller the volume the more growth dominated it will crystallize.!

Page 16: A Map for Phase-Change Materials - IEEE Web Hosting · Overview! Introduction!! Part 1: Crystallization kinetics!!- Viscosity and glass formation!!- Crystallization speed!!- Distinction

Resis

tance in O

hm

2.3 ± 0.7 M! 4.2 ± 0.5 M! 6.2 ± 1.0 M!5.2 ± 0.7 M!

1 2 4 8 16 32 64 128

0.0

0.4

0.8

1.2

1.6

Length in ns

Curr

ent in

mA

104

105

106

107

Resis

tance in

Ohm

1 2 4 8 16 32 64 128

0.0

0.4

0.8

1.2

1.6

Length in ns

Curr

ent in

mA

104

105

106

107

Resis

tance in

Ohm

1 2 4 8 16 32 64 128

0.0

0.4

0.8

1.2

1.6

Length in ns

Curr

ent in

mA

104

105

106

107

Resis

tance in

Ohm

1 2 4 8 16 32 64 128

0.0

0.4

0.8

1.2

1.6

Length in ns

Curr

ent in

mA

104

105

106

107

Resis

tance in

Ohm

1 2 4 8 16 32 64 128

0.6

0.8

1.0

1.2

1.4

1.6

1.8

2.0

2.2

Length in ns

Voltage in V

104

105

106

107

Resis

tance in

Ohm

1 2 4 8 16 32 64 128

0.6

0.8

1.0

1.2

1.4

1.6

1.8

2.0

2.2

Length in ns

Voltage in V

104

105

106

107

Resis

tance in

Ohm

1 2 4 8 16 32 64 128

0.6

0.8

1.0

1.2

1.4

1.6

1.8

2.0

2.2

Length in ns

Voltage in V

104

105

106

107

Resis

tance in

Ohm

1 2 4 8 16 32 64 128

0.6

0.8

1.0

1.2

1.4

1.6

1.8

2.0

2.2

Length in ns

Voltage in V

104

105

106

107

Resis

tance in

Ohm

1 2 4 8 16 32 64 128

0.0

0.4

0.8

1.2

1.6

Length in ns

Curr

ent in

mA

104

105

106

107

Resis

tance in

Ohm

Curr

ent in

mA

Voltage in V

Pulse Length in ns

2.2

1.4

1.0

0.6

1.8

1.6

0.8

0.4

0

1.2

1 64164 1 64164 1 64164 1 64164

104

105

106

107

6/IV/2012! M. Salinga IEEE Nano Symposium 2012!

G. Bruns et al., Applied Physics Letters 95, 043108 (2009)!

GeTe!

Extremely fast switching speeds! !Phase-change material

Bottom electrode

Top electrode

SiO2

Heatingcontact

Switchable region

current!!!

voltage!!!

0!!!1!!!2!!!3!!!

0!!!

3!!!

2!!

1!!

16!

In the range of DRAM, but non-volatile!!

!!

Resis

tance in O

hm

2.3 ± 0.7 M! 4.2 ± 0.5 M! 6.2 ± 1.0 M!5.2 ± 0.7 M!

1 2 4 8 16 32 64 128

0.0

0.4

0.8

1.2

1.6

Length in ns

Curr

ent in

mA

104

105

106

107

Resis

tance in

Ohm

1 2 4 8 16 32 64 128

0.0

0.4

0.8

1.2

1.6

Length in ns

Curr

ent in

mA

104

105

106

107

Resis

tance in

Ohm

1 2 4 8 16 32 64 128

0.0

0.4

0.8

1.2

1.6

Length in ns

Curr

ent in

mA

104

105

106

107

Resis

tance in

Ohm

1 2 4 8 16 32 64 128

0.0

0.4

0.8

1.2

1.6

Length in ns

Curr

ent in

mA

104

105

106

107

Resis

tance in

Ohm

1 2 4 8 16 32 64 128

0.6

0.8

1.0

1.2

1.4

1.6

1.8

2.0

2.2

Length in ns

Voltage in V

104

105

106

107

Resis

tance in

Ohm

1 2 4 8 16 32 64 128

0.6

0.8

1.0

1.2

1.4

1.6

1.8

2.0

2.2

Length in ns

Voltage in V

104

105

106

107

Resis

tance in

Ohm

1 2 4 8 16 32 64 128

0.6

0.8

1.0

1.2

1.4

1.6

1.8

2.0

2.2

Length in ns

Voltage in V

104

105

106

107

Resis

tance in

Ohm

1 2 4 8 16 32 64 128

0.6

0.8

1.0

1.2

1.4

1.6

1.8

2.0

2.2

Length in ns

Voltage in V

104

105

106

107

Resis

tance in

Ohm

1 2 4 8 16 32 64 128

0.0

0.4

0.8

1.2

1.6

Length in ns

Curr

ent in

mA

104

105

106

107

Resis

tance in

Ohm

Curr

ent in

mA

Voltage in V

Pulse Length in ns

2.2

1.4

1.0

0.6

1.8

1.6

0.8

0.4

0

1.2

1 64164 1 64164 1 64164 1 64164

104

105

106

107

Resis

tance in O

hm

2.3 ± 0.7 M! 4.2 ± 0.5 M! 6.2 ± 1.0 M!5.2 ± 0.7 M!

1 2 4 8 16 32 64 128

0.0

0.4

0.8

1.2

1.6

Length in ns

Curr

ent in

mA

104

105

106

107

Resis

tance in

Ohm

1 2 4 8 16 32 64 128

0.0

0.4

0.8

1.2

1.6

Length in ns

Curr

ent in

mA

104

105

106

107

Resis

tance in

Ohm

1 2 4 8 16 32 64 128

0.0

0.4

0.8

1.2

1.6

Length in ns

Curr

ent in

mA

104

105

106

107

Resis

tance in

Ohm

1 2 4 8 16 32 64 128

0.0

0.4

0.8

1.2

1.6

Length in ns

Curr

ent in

mA

104

105

106

107

Resis

tance in

Ohm

1 2 4 8 16 32 64 128

0.6

0.8

1.0

1.2

1.4

1.6

1.8

2.0

2.2

Length in ns

Voltage in V

104

105

106

107

Resis

tance in

Ohm

1 2 4 8 16 32 64 128

0.6

0.8

1.0

1.2

1.4

1.6

1.8

2.0

2.2

Length in ns

Voltage in V

104

105

106

107

Resis

tance in

Ohm

1 2 4 8 16 32 64 128

0.6

0.8

1.0

1.2

1.4

1.6

1.8

2.0

2.2

Length in ns

Voltage in V

104

105

106

107

Resis

tance in

Ohm

1 2 4 8 16 32 64 128

0.6

0.8

1.0

1.2

1.4

1.6

1.8

2.0

2.2

Length in ns

Voltage in V

104

105

106

107

Resis

tance in

Ohm

1 2 4 8 16 32 64 128

0.0

0.4

0.8

1.2

1.6

Length in ns

Curr

ent in

mA

104

105

106

107

Resis

tance in

Ohm

Curr

ent in

mA

Voltage in V

Pulse Length in ns

2.2

1.4

1.0

0.6

1.8

1.6

0.8

0.4

0

1.2

1 64164 1 64164 1 64164 1 64164

104

105

106

107

Resis

tance in O

hm

2.3 ± 0.7 M! 4.2 ± 0.5 M! 6.2 ± 1.0 M!5.2 ± 0.7 M!

1 2 4 8 16 32 64 128

0.0

0.4

0.8

1.2

1.6

Length in ns

Cu

rre

nt

in m

A

104

105

106

107

Re

sis

tan

ce

in O

hm

1 2 4 8 16 32 64 128

0.0

0.4

0.8

1.2

1.6

Length in ns

Cu

rre

nt

in m

A

104

105

106

107

Re

sis

tan

ce

in O

hm

1 2 4 8 16 32 64 128

0.0

0.4

0.8

1.2

1.6

Length in ns

Cu

rre

nt

in m

A

104

105

106

107

Re

sis

tan

ce

in O

hm

1 2 4 8 16 32 64 128

0.0

0.4

0.8

1.2

1.6

Length in ns

Cu

rre

nt

in m

A

104

105

106

107

Re

sis

tan

ce

in O

hm

1 2 4 8 16 32 64 128

0.6

0.8

1.0

1.2

1.4

1.6

1.8

2.0

2.2

Length in ns

Vo

lta

ge

in

V

104

105

106

107

Re

sis

tan

ce

in O

hm

1 2 4 8 16 32 64 128

0.6

0.8

1.0

1.2

1.4

1.6

1.8

2.0

2.2

Length in ns

Vo

lta

ge

in

V

104

105

106

107

Re

sis

tan

ce

in O

hm

1 2 4 8 16 32 64 128

0.6

0.8

1.0

1.2

1.4

1.6

1.8

2.0

2.2

Length in ns

Vo

lta

ge

in

V

104

105

106

107

Re

sis

tan

ce

in O

hm

1 2 4 8 16 32 64 128

0.6

0.8

1.0

1.2

1.4

1.6

1.8

2.0

2.2

Length in ns

Vo

lta

ge

in

V

104

105

106

107

Re

sis

tan

ce

in O

hm

1 2 4 8 16 32 64 128

0.0

0.4

0.8

1.2

1.6

Length in ns

Curr

ent in

mA

104

105

106

107

Resis

tance in

Ohm

Curr

ent in

mA

Voltage in V

Pulse Length in ns

2.2

1.4

1.0

0.6

1.8

1.6

0.8

0.4

0

1.2

1 64164 1 64164 1 64164 1 64164

104

105

106

107

Resis

tance in O

hm

2.3 ± 0.7 M! 4.2 ± 0.5 M! 6.2 ± 1.0 M!5.2 ± 0.7 M!

1 2 4 8 16 32 64 128

0.0

0.4

0.8

1.2

1.6

Length in ns

Curr

ent in

mA

104

105

106

107

Resis

tance in

Ohm

1 2 4 8 16 32 64 128

0.0

0.4

0.8

1.2

1.6

Length in ns

Curr

ent in

mA

104

105

106

107

Resis

tance in

Ohm

1 2 4 8 16 32 64 128

0.0

0.4

0.8

1.2

1.6

Length in ns

Curr

ent in

mA

104

105

106

107

Resis

tance in

Ohm

1 2 4 8 16 32 64 128

0.0

0.4

0.8

1.2

1.6

Length in ns

Curr

ent in

mA

104

105

106

107

Resis

tance in

Ohm

1 2 4 8 16 32 64 128

0.6

0.8

1.0

1.2

1.4

1.6

1.8

2.0

2.2

Length in ns

Voltage in V

104

105

106

107

Resis

tance in

Ohm

1 2 4 8 16 32 64 128

0.6

0.8

1.0

1.2

1.4

1.6

1.8

2.0

2.2

Length in ns

Voltage in V

104

105

106

107

Resis

tance in

Ohm

1 2 4 8 16 32 64 128

0.6

0.8

1.0

1.2

1.4

1.6

1.8

2.0

2.2

Length in ns

Voltage in V

104

105

106

107

Resis

tance in

Ohm

1 2 4 8 16 32 64 128

0.6

0.8

1.0

1.2

1.4

1.6

1.8

2.0

2.2

Length in ns

Voltage in V

104

105

106

107

Resis

tance in

Ohm

1 2 4 8 16 32 64 128

0.0

0.4

0.8

1.2

1.6

Length in ns

Curr

ent in

mA

104

105

106

107

Resis

tance in

Ohm

Curr

ent in

mA

Voltage in V

Pulse Length in ns

2.2

1.4

1.0

0.6

1.8

1.6

0.8

0.4

0

1.2

1 64164 1 64164 1 64164 1 64164

104

105

106

107

Reduction of switching time by reduction of amorphous volume!

…as expected for growth dominated crystallization!

Crystallization kinetics in electronic memory!

Page 17: A Map for Phase-Change Materials - IEEE Web Hosting · Overview! Introduction!! Part 1: Crystallization kinetics!!- Viscosity and glass formation!!- Crystallization speed!!- Distinction

6/IV/2012! M. Salinga IEEE Nano Symposium 2012! 17!

M. Salinga and M. Wuttig!Science 332, 543 (2011)!Reduction of energy per switching event!

100 101 102 103 104

10!1

100

101

102

103

Contact Area / nm2

Rese

t Cur

rent

/ µA

10!2

100

102

104

106

108

Current Density / µA / nm2CNT electrodes

State of the art

F. Xiong et al., !Science 332, 568 (2011)!

H. P. Wong et al., !Proc. IEEE 98, 2201 (2010)!

! !and with lower amplitude!

less material to be heated up = less power necessary!

scaling down !device size !=> reduction of power consumption!

Electrical pulses shorter ! ! ! => lower energy consumption!

Page 18: A Map for Phase-Change Materials - IEEE Web Hosting · Overview! Introduction!! Part 1: Crystallization kinetics!!- Viscosity and glass formation!!- Crystallization speed!!- Distinction

6/IV/2012! M. Salinga IEEE Nano Symposium 2012! 18!

Overview!

Introduction!!Part 1: Crystallization kinetics!

!- Viscosity and glass formation!!- Crystallization speed!!- Distinction between nucleation and growth!

!Part 2: Physics of bonding!!Part 3: Compositional trends!!Part 4: Electronic behavior!

Page 19: A Map for Phase-Change Materials - IEEE Web Hosting · Overview! Introduction!! Part 1: Crystallization kinetics!!- Viscosity and glass formation!!- Crystallization speed!!- Distinction

Measurement of FTIR reflectance!

6/IV/2012! M. Salinga IEEE Nano Symposium 2012! 19!

layer stack:!1- substrate!2- gold layer!3- material under investigation!

Reference! Sample!

Analysis: model dielectric function!

M. Woda, !PhD Thesis, RWTH Aachen (2010)!

Chapter 2: Phase change materials

Figure 2.7: Dielectric function of a typical covalent semiconductor, AgInTe2, in the amor-phous and crystalline phase: Based on the experimental spectroscopic data in figure 2.6 theoptical properties are concluded to be very similiar in both structural phases. Taken from[KSM+08].

ARTICLES

Figure 1 Sample cross-section. a, Reference specimen. b, Sample investigated.1: glass substrate, 2: Au layer, 3: semiconductor layer.

Figure 2 Infrared reflectance spectra of an AgInTe2 film with a thickness of0.65µm. Blue: amorphous state, red: crystalline state. The solid lines describe theexperimental data, whereas the dashed lines denote the simulation results.

chalcopyrite structure. There was no significant change in filmthickness. This is consistent with X-ray reflectivity measurementsof the density and thickness of thinner films before and aftercrystallization. The reflectance spectra of both phases closelyresemble each other. Both the maxima of the curves and thepositions of their minima are very similar. The films are transparentbelow their bandgap, measured to be 1.38 eV. This is clearly seenin that the reflectance maxima are close to 1 below this energy.The spacing of adjacent maxima depends on the product ofrefractive index and film thickness, and hence must be similar inboth phases.

The resulting dielectric function is shown in SupplementaryInformation, Fig. S1. For energies below 0.75 eV, both curvesshow no significant absorption and have a similar, constant realpart of the dielectric function, "1(!), that is, constant refractiveindex. This implies that their chemical bonding is very similar,as discussed later. Thus, the small diVerence in optical propertiesis not suYcient for rewritable optical storage applications. Inaddition, AgInTe2 has rather slow crystallization rates (not shownhere). Hence, AgInTe2 does not possess phase-change properties9.

A very diVerent behaviour is seen in the reflectance curvesof the phase-change alloy Ge2Sb1Te4 in Fig. 3. Again, the bluecurves are for the as-deposited amorphous state and the redcurves for the crystalline film with rocksalt structure10. Theas-deposited film was 0.53 ± 0.01 µm thick, and decreased to0.50 ± 0.01 µm after crystallization. This 6 ± 3% decrease isconsistent with X-ray reflectivity measurements on thinner films.

0

0.2

0.4

0.6

0.8

1.0

0.2 0.4 0.6 0.8

R

E (eV)

Drude contribution

Difference in reflectance oscillation frequency due to change of (n ! t ) on crystallization

Optical bandgap (oscillations decrease)

Amplitude decrease from complete reflectance level due to absorption

AmorphousCrystalline

Figure 3 Infrared reflectance spectra of a Ge2Sb1Te4 film. Blue: amorphous state,red: crystalline state. The solid lines describe the experimental data, whereas thedashed lines denote the simulation results. On crystallization, the thicknessdecreased from 0.53 to 0.50µm. The contributions of different phase-change filmproperties to the reflectance curve are marked.

There are three significant diVerences between the amorphous andcrystalline curves. These are also denoted in the figure. First, theinterference fringes extend to much higher photon energies forthe amorphous than the crystalline phase, owing to the largerbandgap of the amorphous phase7. Second, the reflectance maximaare lower in the crystalline phase, owing to subgap (Drude-like)absorption by free carriers. Third, and most important, is thepronounced diVerence in spacing of the reflectance minima. Thespacing is about 40% smaller in the crystalline phase, which addedto the thickness diVerence, implies that the refractive index is⇠50% larger in the crystalline phase. This is supported by adetailed analysis of the spectra in Fig. 4a–d, which show boththe real and imaginary part of the dielectric function, that is, "1

and "2.The reflectance spectra of all investigated phase-change

materials show a similar eVect; "1 is much larger in their crystallinephase. This is also visible in the two extra measurements shown inthe Supplementary Information, and was also noted by Mendoza-Galvan and Gonzalez-Hernandez8. As can be seen from Fig. 4a–d,the excess of "1 for the crystalline phase is significant and reachesvalues over 200%. This diVerence is a generic feature of phase-change materials. Whereas the spectra of the amorphous phasesresemble that of amorphous AgInTe2, the crystalline spectra show adistinct diVerence. This is clear evidence for a diVerence in bonding.We consider the origin of this diVerence.

First, we model the observed dielectric function from 0.05 to3 eV. We can exclude phonon contributions that lie below 0.03 eV.We include a Drude-like term for free carriers plus a single Tauc–Lorentz oscillator, following Jellison11. "1(!) and "2(!) therebyautomatically obey the Kramers–Kronig relationship.

We find no contribution from free carriers for the amorphousphases. As their bandgaps are larger than 0.5 eV, the extinctioncoeYcient k is zero below 0.5 eV and "1(!) = n2, where n isthe refractive index. For the crystalline phases, there is a Drude-like absorption. Its contribution can be subtracted out within thismodel to simplify comparisons. The dielectric functions seen inFig. 4 show a single peak due to bonding–antibonding transitions.

We now analyse the optical dielectric constant "1, that is,the low energy-limit of "1 in the range studied here, by the

654 nature materials VOL 7 AUGUST 2008 www.nature.com/naturematerials

Figure 2.8: FTIR data of a typical PCM in the amorphous and crystalline phase. The spec-tra of Ge2Sb1Te4 reveals drastic changes in the energy dependent reflectivity behaviour. Themost striking feature is the large change in interference fringe positions, which must be at-tributed to a large increase of the refractive index (taking into account an almost constantfilm thickness upon crystallization). Additionally a bandgap decrease (position of vanishingoscillation), a subgap absorption and Drude contribution is present only in the crystallinestate. [KSM+08].

20

Page 20: A Map for Phase-Change Materials - IEEE Web Hosting · Overview! Introduction!! Part 1: Crystallization kinetics!!- Viscosity and glass formation!!- Crystallization speed!!- Distinction

Modeling dielectric function!

6/IV/2012! M. Salinga IEEE Nano Symposium 2012! 20!

K. Shportko et al., !Nature Materials 7 , 653-658 (Aug. 2008)!

What is the origin of this !polarizability enhancement?!

Page 21: A Map for Phase-Change Materials - IEEE Web Hosting · Overview! Introduction!! Part 1: Crystallization kinetics!!- Viscosity and glass formation!!- Crystallization speed!!- Distinction

‘Resonance bonding’ in the crystalline phase!

6/IV/2012! M. Salinga IEEE Nano Symposium 2012! 21!

ΦI

ΦII

2!2!

2! 2!

1!1!1! 1!

groundstate ψ

- with Nsp ~ 5 resp. Np ~ 3!- octahedral coordination ~ 6 bonds!- covalent bonding, !but unsaturated bonds!- prototype: GeTe!!

Pauling, Nature of Chemical Bond (Cornell Univ. Press, NY, 1939)‏!Lucovsky and White, Phys. Rev. B, Vol. 8, Nr. 2 (1973)‏!

Littlewood and Heine, J. Phys. C.: Solid State Phys. Vol. 12 (1979)‏!Littlewood, J. Phys. C.: Solid State Phys. Vol. 12 (1979)‏!Robertson et al, Thin Solid Films 515, 7538–7541 (2007).!

Strong coupling between phonons !and electronic states!→ Large Born effetive charges Z*

T!→ Large value of dielectric constant ε∞!

resonant bonding relies on long-range order, only feasible for crystalline phase!→ contrast !

Resonance bonding (delocalized bonds) = groundstate ψ (unsaturated bonds) !is superposition !of saturated bond-configurations Φx

K. Shportko et al., !Nature Materials 7 , 653-658 (Aug. 2008)!

Page 22: A Map for Phase-Change Materials - IEEE Web Hosting · Overview! Introduction!! Part 1: Crystallization kinetics!!- Viscosity and glass formation!!- Crystallization speed!!- Distinction

6/IV/2012! M. Salinga IEEE Nano Symposium 2012! 22!

Overview!

Introduction!!Part 1: Crystallization kinetics!

!- Viscosity and glass formation!!- Crystallization speed!!- Distinction between nucleation and growth!

!Part 2: Physics of bonding!!Part 3: Compositional trends!!Part 4: Electronic behavior!

Page 23: A Map for Phase-Change Materials - IEEE Web Hosting · Overview! Introduction!! Part 1: Crystallization kinetics!!- Viscosity and glass formation!!- Crystallization speed!!- Distinction

Impact of local distortions!

6/IV/2012! M. Salinga IEEE Nano Symposium 2012! 23!

Model potential:!V(x) = a x2 + b x4!

!None or strong distortions:!~ harmonic behaviour!!Slight distortions:!pronounced anharmonicity!!flat, 'box-like' potential!!large atomic fluctuations!(~ Debye-Waller factor)‏!!possibly enabling fast kinetics!

Matsunaga and Yamada, JJAP 43, 4704–4712 (2004)‏!

D. Lencer, M. Salinga, et al.,! Nature Materials 7, 972-977 (Dec. 2008)‏!

!What materials have such

slightly distorted structures?!

Static local distortion (Peierls)!

=> reduced resonance bonding effects!

Page 24: A Map for Phase-Change Materials - IEEE Web Hosting · Overview! Introduction!! Part 1: Crystallization kinetics!!- Viscosity and glass formation!!- Crystallization speed!!- Distinction

Classification of structures based on valence radii!

6/IV/2012! M. Salinga IEEE Nano Symposium 2012! 24!

Simons and Bloch, Phys. Rev. B Vol. 7 Nr. 6 (1973)‏!St. John and Bloch, PRL Vol. 33 Nr. 18 (1974)‏!

Littlewood, J. Phys. C.: Solid St. Phys. 13 (1980)‏!Littlewood, CRC Critical Reviews in Solid State !

and Material Sciences Vol. 11, 3 (1985)‏!

D. Lencer, M. Salinga, et al.,! Nature Materials 7, 972-977 (Dec. 2008)‏!

Page 25: A Map for Phase-Change Materials - IEEE Web Hosting · Overview! Introduction!! Part 1: Crystallization kinetics!!- Viscosity and glass formation!!- Crystallization speed!!- Distinction

D. Lencer, M. Salinga, et al.,! Nature Materials 7, 972-977 (Dec. 2008)‏!Introduce coordinates for a map for PCMs!

6/IV/2012! M. Salinga IEEE Nano Symposium 2012! 25!

two coordinates:!!based on valence radii of s- and p-orbitals derived from pseudopotential calculations!!ionicity ~ size difference!hybridization ~ s-p-splitting!!!!!

Littlewood:!

Generalization for non-binaries:!

St. John and Bloch, PRL Vol. 33 Nr. 18 (1974)‏!Littlewood, J. Phys. C.: Solid St. Phys. 13 (1980)‏!

Phillips, Solid. State. Communications Vol. 22 (1977)‏!Chelikowsky and Phillips, Phys. Rev. B Vol. 17 Nr. 6 (1978)‏!

treat materials as effective binaries!!average cations != !A!average anion != !B!

Page 26: A Map for Phase-Change Materials - IEEE Web Hosting · Overview! Introduction!! Part 1: Crystallization kinetics!!- Viscosity and glass formation!!- Crystallization speed!!- Distinction

Map for phase change materials!

6/IV/2012! M. Salinga IEEE Nano Symposium 2012! 26!

D. Lencer, M. Salinga, et al.,! Nature Materials 7, 972-977 (Dec. 2008)‏!

3.4 A Map for Phase-Change Materials

1.5

2

2.5

3

3.5

4

0 0.1 0.2 0.3 0.4 0.5 0.6

Hyb

ridiz

atio

n r !-1

Ionicity r’"

P

As

Sb

Bi

GeO

SiO

SnO

PbO

SiS

GeS

SnS

PbS

SiSe

GeSe

SnSe

PbSe

SiTe

GeTe SnTe

PbTe

Phase Change Materials

AV

AIV BVI

AIV2 BV

2 CVI5

AIV BV2 CVI

4

AIV BV4 CVI

7

Figure �.��.: Shown is the empiric map for materials with about three p-electrons per lattice site andapproximately even numbers of anions and cations. �e axes that span the map are the tendencytowards hybridization, r−1⇡ , and the ionicity, r′� , both de�ned in the text. �e coordinates of a largenumber of materials have been calculated (see Chapter C for a table of materials that for claritycannot be labeled here). Phase-change materials (indicated by green circles) are located within asmall region of the map that is prone to the occurrence of resonant bonding. �e graphs on theoutside illustrate the weakening of resonance e�ects as one leaves this region due to the formation ofless, more saturated covalent bonds via distortions or due to charge localization at the ions due toincreasing ionicity.

71

3.4 A Map for Phase-Change Materials

Figure �.��.: Shown is the empiric map for materials with about three p-electrons per lattice site andapproximately even numbers of anions and cations. �e axes that span the map are the tendencytowards hybridization, r−1⇡ , and the ionicity, r′� , both de�ned in the text. �e coordinates of a largenumber of materials have been calculated (see Chapter C for a table of materials that for claritycannot be labeled here). Phase-change materials (indicated by green circles) are located within asmall region of the map that is prone to the occurrence of resonant bonding. �e graphs on theoutside illustrate the weakening of resonance e�ects as one leaves this region due to the formation ofless, more saturated covalent bonds via distortions or due to charge localization at the ions due toincreasing ionicity.

71

3.4 A Map for Phase-Change Materials

Figure �.��.: Shown is the empiric map for materials with about three p-electrons per lattice site andapproximately even numbers of anions and cations. �e axes that span the map are the tendencytowards hybridization, r−1⇡ , and the ionicity, r′� , both de�ned in the text. �e coordinates of a largenumber of materials have been calculated (see Chapter C for a table of materials that for claritycannot be labeled here). Phase-change materials (indicated by green circles) are located within asmall region of the map that is prone to the occurrence of resonant bonding. �e graphs on theoutside illustrate the weakening of resonance e�ects as one leaves this region due to the formation ofless, more saturated covalent bonds via distortions or due to charge localization at the ions due toincreasing ionicity.

71

Page 27: A Map for Phase-Change Materials - IEEE Web Hosting · Overview! Introduction!! Part 1: Crystallization kinetics!!- Viscosity and glass formation!!- Crystallization speed!!- Distinction

1.8

1.9

2

2.1

2.2

2.3

2.4

2.5

0 0.02 0.04 0.06 0.08 0.1 0.12 0.14 0.16 0.18 0.2

Hyb

rid

iza

tio

n r!-1

Ionicity r’"

As

SiSe

GeSe

SiTe

SnTe

Sb

GeTe

SiSb2Te4Si2Sb2Te5

GeSb2Te4Ge2Sb2Te5

GeSb4Te7

Ge4SbTe5

Ge4Sb2Te7

GeBi2Te4

SnSb2Te4

Ge2Sn2Sb2Te7

Ge3Sn1Sb2Te7

Ge2Sb2Te4.5Se0.5

Ge2Sb2Te3.5Se1.5

Ge2Bi0.3Sb1.7Te5

Ge2Bi0.5Sb1.5Te5

(GeSb2Te4)0.85(SnBi2Te4)0.15

Ge4Bi0.5Sb0.5Te5

GeBiSbTe4

Ge2Sb2Se5

Map for phase change materials (zoomed in)!

6/IV/2012! M. Salinga IEEE Nano Symposium 2012! 27!

D. Lencer, M. Salinga, et al.,! Nature Materials 7, 972-977 (Dec. 2008)‏!

Page 28: A Map for Phase-Change Materials - IEEE Web Hosting · Overview! Introduction!! Part 1: Crystallization kinetics!!- Viscosity and glass formation!!- Crystallization speed!!- Distinction

6/IV/2012! M. Salinga IEEE Nano Symposium 2012! 28!

Overview!

Introduction!!Part 1: Crystallization kinetics!

!- Viscosity and glass formation!!- Crystallization speed!!- Distinction between nucleation and growth!

!Part 2: Physics of bonding!!Part 3: Compositional trends!!Part 4: Electronic behavior!

Page 29: A Map for Phase-Change Materials - IEEE Web Hosting · Overview! Introduction!! Part 1: Crystallization kinetics!!- Viscosity and glass formation!!- Crystallization speed!!- Distinction

Voltage-time-dilemma!

6/IV/2012! M. Salinga IEEE Nano Symposium 2012! 29!

300

400

500

600

700

800

900

1000

10−9 10−6 10−3 100 103 106 109Trt

Tg

Tl

Tem

pera

ture

T /

K

Time t / s

Liquid

Amorphous

Crystalline

10%90%

10 yrs.

10−12 10−6 100

η−1 / (Pa·s)−1

Atomic mobility

0.00 0.25 0.50ΔG / Hf

Driving force

D. Lencer, M. Salinga, M. Wuttig!Advanced Materials, 23, 2030–2058 (2011)!

Crystallization kinetics is already extremely sensitive to temperature!

But in phase-change materials an additional strong non-linearity is active …!

Voltage / V!

Tim

e / s!

Page 30: A Map for Phase-Change Materials - IEEE Web Hosting · Overview! Introduction!! Part 1: Crystallization kinetics!!- Viscosity and glass formation!!- Crystallization speed!!- Distinction

Electrical switching!

6/IV/2012! M. Salinga IEEE Nano Symposium 2012! 30!

D. Krebs, !PhD Thesis, RWTH Aachen (2010)!

Page 31: A Map for Phase-Change Materials - IEEE Web Hosting · Overview! Introduction!! Part 1: Crystallization kinetics!!- Viscosity and glass formation!!- Crystallization speed!!- Distinction

Threshold switching: field dependent!

6/IV/2012! M. Salinga IEEE Nano Symposium 2012! 31!

=> existence of a threshold field!

D. Krebs et al.,!Applied Physics Letters 95, 082101 (2009)!

Linear dependence!

Offset => interface effect with electrode material !

Page 32: A Map for Phase-Change Materials - IEEE Web Hosting · Overview! Introduction!! Part 1: Crystallization kinetics!!- Viscosity and glass formation!!- Crystallization speed!!- Distinction

Conclusion on voltage-time-dilemma in phase change materials!

6/IV/2012! M. Salinga IEEE Nano Symposium 2012! 32!

300

400

500

600

700

800

900

1000

10−9 10−6 10−3 100 103 106 109Trt

Tg

Tl

Tem

pera

ture

T /

K

Time t / s

Liquid

Amorphous

Crystalline

10%90%

10 yrs.

10−12 10−6 100

η−1 / (Pa·s)−1

Atomic mobility

0.00 0.25 0.50ΔG / Hf

Driving force

Crystallization kinetics strongly thermally activated!

Heating strongly dependent on electrical threshold switching!

Voltage / V!

Tim

e / s!

+!

+! Extreme non-linearity of voltage and time!

=!

=!

Page 33: A Map for Phase-Change Materials - IEEE Web Hosting · Overview! Introduction!! Part 1: Crystallization kinetics!!- Viscosity and glass formation!!- Crystallization speed!!- Distinction

6/IV/2012! M. Salinga IEEE Nano Symposium 2012! 33!

Thank you for your attention!!

Source: maps.google.de!

Questions?!Contact: [email protected]!

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