a monolithic cmos microhotplate-based gas sensor system
DESCRIPTION
A Monolithic CMOS Microhotplate-Based Gas Sensor System. Muhammad Y. Afridi John S. Suehle Mona E. Zaghloul David W. Berning Allen R. Hefner. Elliott Cooper-Balis. MEMS Overview. - PowerPoint PPT PresentationTRANSCRIPT
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A Monolithic CMOS Microhotplate-Based Gas Sensor
SystemMuhammad Y. Afridi
John S. Suehle
Mona E. Zaghloul
David W. Berning
Allen R. Hefner
Elliott Cooper-Balis
![Page 2: A Monolithic CMOS Microhotplate-Based Gas Sensor System](https://reader036.vdocuments.net/reader036/viewer/2022062422/56813432550346895d9b21f6/html5/thumbnails/2.jpg)
MEMS Overview
The integration of mechanical elements, sensors, actuators, and electronics on a common silicon substrate through micro-fabrication technology
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Gas Sensor Motivations
• Use existing CMOS technology
• Low power
• Low cost
• Reliable detection
• Applications :
• Detection of harmful substances in public places
• Detection of freshness of food
• Detection of toxic leaks in manufacturing facilities
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Microhotplate Gas Sensor
Key Features :
• Suspended trampoline structure
• Polysilicon resistor heating element (2-kΩ)
• Metal-oxide film-based sensing element (Tin or Titanium)
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Microhotplate Gas Sensor
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Gas Sensor System
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Gas Sensor System
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Gas Sensor System
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Gas Sensor System
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Gas Sensor System
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Thank You!