a specialty nanomaterials product company · 2009. 6. 5. · nbo 2, nb 2 o 5, y 2 o 3, sno, sno 2,...
TRANSCRIPT
1Confidential
A Specialty NanoMaterials Product Company
Nanomanufacturing Summit 2009 - May 27-29 - Boston, MA
Sean Stewart
2Confidential
$35B Market
Opportunity
Solar
Modules
Proven Ability to Generate High Value Commercial Products from Nanotechnology
A Specialty
NanoMaterials
Product
Company for
12 Years
Planar Lightwave
Circuits -
Transceivers
>$100M Revenues
>1,000 Employees
Implantable
Batteries$48M Acquisition by
Our Core Technology Expertise
Particle Deposition Dispersion
Making NanoParticles
Depositing Thin Films
Evenly Dispersing Particles in Solution
Silicon Ink
Films Phosphors Deposition
Today
3Confidential
NanoParticle Manufacturing (NPM™)
Subatmospheric Process,
High Vacuum Not Required
Tightly Controlled Particle Size– 10nm < Dmean < 200nm
Narrow Particle Size Distribution– Dmax < 2 x Dmean
Gas, Vapor Aerosol Precursors
Diverse Materials Portfolio– Oxides, Nitrides, Carbides, Metals,…
– Rare earth-doping, oxidation state
– High chemical purity
High Throughput, Continuous Flow
– Reactor Modules Scaled to > 1kg/Hr
– Process Scaleable to >100T/Yr
Unparalleled Dispersion
Uniformity and Stability
Superior Surface Modification
Techniques
Laser Pyrolysis Technology Matched to Silicon
4Confidential
Core Technology:Laser Reactive Deposition (LRD™)
Gas, Vapor and Aerosol
Precursor Forms Enable Wide
Range of Complex
Film Compositions
Thick Film Deposition
High Rate vs. PECVD
Single Pass at 30+ µm
Complex Compositions
Multi-Layer
Porous or Dense Films
Uniform Thickness and Composition
Variety of Substrate Materials and Geometries
Material Be Collectedas Powder
Versatile, Efficient Manufacturing Platform
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Unparalleled Composition FlexibilityGrowth Engine for New BusinessExamples from the NanoGram library
Fe, Ag, Ni, Co, Pt, Bi, Si and metal alloys
TiO2, ZnO, VO2, V2O3, V2O5, MnxOy, MoO3, FexOy, Ta2O5, NbO2, Nb2O5, Y2O3, SnO, SnO2, CuxOy, NiO, CoxOy, Ag2O, In2O3, ZrO2, SiO2, MgO, Al2O3, Er2O3, and others
LiMn2O4, Li2Mn4O9, Li4Mn5O12, LiCoO2, LiNiO2, LiAlO2, Li1+yMn2-yO4, Li4Ti5O12, Y2MoO6, Ag2V4O11, Zr0.92Y0.08O1.92,...
LiNi0.8Co0.2O2, LiNi1-yCoyO2, LiMn2-yAlyO4, LiMn2-yCoyO4, BPSG, La1-xSrxMnO3, and others
Eu:BaMgAl10O17, Er:NawAlxSiyOz, and others
V8C7, W2C, SiC, Fe3C, Fe7C3, and others
Si3N4, FeN, AlN, TiN, and others
LiFePO4, BPO4, and others
FexSy, WxSy, ZnS, and others
Li2CO3, and others
• Printable electronics
• Phosphors
• Optical devices
• Solar cells
• Self-cleaning coatings
• AR/Hard coatings
• Li-ion batteries
• Catalysts
• Photostructured glass
• Power devices
• LEDs
• Heat dissipation layers
• Fuel cells
Class Composition Applications
Metals
Metal Oxides
Binary
Ternary
Quarternary
Doped Ceramics
Carbides
Nitrides
Phosphates
Sulfides
Carbonates
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NanoParticle Manufacturing Capability
Pilot Plant with Multiple Reactors
Dispersion Capability
4,000ft2 “Wet Lab”AND
Leveraging Our Core Technology Expertise for Silicon Ink
Our Core Technology Expertise
Particle Deposition Dispersion
7Confidential
Nano-Si Synthesis & Powder Morphology
Laser Pyrolysis
– Clean & high throughput
– Demonstrated n & p doped nano-Si at levels up to 1020 atm./cm3
Nano-Si powder morphology
– Spherical particles
– Narrow size distribution
– Crystalline core & amorphous shell
SiH4 nano-Si + H2
hn
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Nanoparticle-Based Silicon Ink
NanoGram Silicon Ink Solution
Direct Pattern Deposition (vs Lithography)
Direct Doping (vs Ion Implantation)
Printed Device with Poly-si Performance
Large Area Deposition (vs Vacuum-Based)
Si
Silicon Ink Formulated with n- and p-doped Si Nanoparticles
Controlled Doping
Narrow Size Distribution
High Purity
Clean Particle Surface
Laser Pyrolysis Technology Enablesn- and p-Doping During the Process
Portfolio Of Stable Dispersions
Controlled Viscous Dispersion
Enables Ink Jet and Spin-on Deposition
9Confidential
NanoGram’s Nanocrystalline Silicon –Differentiated Process and Product
Factors Critical for Applicationof Silicon Nanoparticles:
– Control of Surface Oxidation
– Control of Crystallinity
– Ability to Include Dopants
NPMTM Produced Silicon Nanocrystals
Nanoparticles of Silicon Are of Interest for:– Printed Electronics
– Solar Cells
– LED Phosphors
– Fluorescent Probes In In-Vitro Diagnostics
Silicon Synthesis Processes:– Plasma Synthesis
– Electrochemical Etching
– Solution Phase Synthesis
– Laser Ablation
– Laser Pyrolysis
Plasma and Solution Phase Synthesis Processes Are:
– Not Readily Scalable
– Difficult to Control – for Size, Crystallinityand Shape
Nanogram’s NPMTM Process, Based on Laser Pyrolysis, Is Ideal for Silicon Nanoparticle Synthesis:
– Highly Efficient – Resonant Absorption bySilane Gas (SiH4)
– Scalable Production
– Produces Highly Uniform Nanocrystals
10Confidential
NanoGram Silicon Ink: Unlocking thePrinted Electronics Opportunity
Nanoparticulate-Based Silicon Inks for Solution-Deposited Applications
Ideal for Low Temperature as Well as Large Area Processes
Doped and Intrinsic Silicon(p+ and n+ Available)
Ink Formulations for Solution-Based Coatings and Inkjet Printing
Stable Dispersions
Key Applications
NanoGram Silicon InkJunctions for Thin-Film
Silicon Photovoltaics
Printed Flat Panel
Display Backplanes
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Inspect
Anneal/
Recrys-
tallize
Strip/
Ash
Etch/Ion
ImplantDevelopPatterning
Spin
Photo-
Resist
DepositionClean
Conventional Process
Multiple Steps, Complex Logistics, Multiple Streams
Expensive, High Vacuum Process Equipment
Printing a TFT Back Plane; Reducing Cost by Streamlining the Manufacturing Process
Printed Process
Eliminates Process Steps, Reduces Logistics and Capital Equipment Costs
Additive Process Reduces Material Use and Environmental Impact
Inspect
Anneal/
Recrys-
tallize
DepositionClean
12Confidential
Printed Electronics Requires a Complete Materials Solution
PASSIVE ELEMENTS
Conductors Ag, Cu, Ni, Fe, Co, Pt, and metal alloys
Dielectrics SiO2, Ta2O5, Si3N4, TiO2, ZrO2, Nb2O5, Y2O3, and others
Inductors Ferrite, Fe alloys (e.g.: Fe-N, Fe-Ni)
ACTIVE ELEMENTS
Semiconductors Si, Doped-Si, Nitrides, Oxynitrides, Carbides, ZnO, and others
Silicon Silicon Nitride TiO2 Nickel
Particle Size, Uniformity, Composition Purity, Dispersibility
NanoGram Core Expertise
13Confidential
Extensive IP Portfolio
56 Patents Issued and Allowed in the U.S.
80 U.S. Patents Pending
51 Foreign Patents Issued
IP Portfolio
Discoveryand
License
Products
IP Portfolio Provides
Broad Application in
Use of Nanostructured
Materials Including:
Solar Cell Devices
Lithium Primary and Secondary Batteries
Capacitor Devices
Fuel Cell Devices
Electromagnetic Shielding
Photocatalysis and UV Block Agents
Polymer Nanocomposites
Refractive Index Engineering
14Confidential
Outside Validation of Our Technology
Joint Development Agreement
November 2008
Recipient of DOE Energy
Innovation Award
March 2008
Thin Film Laser Reactive PV Deposition Equipment
15Confidential