450 mm gate valve -...
Post on 01-Sep-2019
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Series XGT/XGDP-E13-4A
Variations
Slit Valve/Door Valve
For 450 mmwafer
NewNewBody
thickness(mm)
For 200 mmwafer
For 300 mmwafer
For 450 mmwafer
¡46 x 236 mm¡32 x 222 mm
* Suitable for opening sizes of 70 x 500 mm and 100 x 750 mm. * Contact your SMC sales representative for other opening sizes.
70
200 300 450 Opening width (mm)
60
50
Top accessibleImproved installation and reduced maintenance time
Replaceable bellowsImproved installation and reduced maintenance time
Implemented a two-stage operating structure
Built-in end-lock mechanismHolds last gate position even after air supply source is cut-off
P.1
P.1
P.1
¡56 x 496 mm
Non-cassette type Cassette type Door valve
Slit valve
Slit valve Door valve
Slit valve Door valve
Slit valve
Slit valve
P.1211
¡50 x 336 mm
Gate Valve
Door valve
Refer to the catalog on our website or the Best Pneumatics No. 8 for details on 200 mm and 300 mm.
qRemove the body
Chamber
Machine screw
Chamber
Gate Gate
Side plate
wRemove the fixing bolt
wRemove the side plates
eRemove the gate from the body
eRemove the bellows
Top access Slit valve
Replaceable bellows Slit valve
qRemove the top plate
Gate construction for two-stage operation consisting of a direct upand down movement and a clamp operation to seal the gate.
Implemented a two-stage operating structure Slit valve Door valve
wUpward eClamp/Gate blockedqGate open
Gate
Set screw
1
Series XGT/XGD
Up
war
d
Clamp
Specifications
Door valve
SpecificationsOpening size (Height x Width) 56 mm x 496 mm
Operating environmental pressure Atmospheric pressure to 1 x 10−6 Pa (abs)
Operating pressure range 0.4 to 0.6 MPa
Leak 6.5 x 10−10 Pa·m3/s*1
Operation temperature 5 to 60°CFluid Inert gas
Mounting direction Vertical (Cylinder-underside)
End-lock mechanism With lock mechanism at closing position*2
Weight 12 kg
Auto switch None, D-A93 selectable
Connector Multiple connector or D-sub connector selectable
*1 In the case of O-ring FKM at normal temperature (Not including gas permeation)
*2 �When releasing the valve lock without an operating pressure, apply pressure to the pilot port to maintain the closed position, and then switch the operation valve before releasing the lock.
Door valve
Non-cassette type Cassette type
SpecificationsOpening size (Height x Width) 56 mm x 496 mm
Operating environmental pressure Atmospheric pressure to 1 x 10−6 Pa (abs)
Operating pressure range 0.45 to 0.6 MPa
Internal leak 6.5 x 10−10 Pa·m3/s*1
Internal leak at reversed pressure 6.5 x 10−8 Pa·m3/s*1, *2
External leak 6.5 x 10−11 Pa·m3/s*1
Operation temperatureGate part: 5 to 150°C
Actuator part: 5 to 80°CFitting/Auto switch part: 5 to 60°C
Fluid Inert gas
Mounting direction Vertical
End-lock mechanism With lock mechanism at opening/closing position*3
WeightNon-cassette type: 17 kg
Cassette type: 25 kg
Auto switch None, D-A93 selectable
Connector Multiple connector or D-sub connector selectable
*1 In the case of O-ring FKM at normal temperature (Not including gas permeation)
*2 Reversed pressure: 0.1 MPa (abs) or less.*3 �When releasing the valve lock without an operating pressure, apply
pressure to the pilot port to maintain the current condition, and then switch the operation valve before releasing the lock.
Slit valve
2
450 mm Gate Valve Series XGT/XGD
56
49670
69
485
6312
3.5
496
622
56
142.5 144
75
514
3710
7.5
485
142.5 144 69
67 (
Str
oke)
56 (
Ope
ning
siz
e)56
(O
peni
ng s
ize)
80 (
Str
oke)
74
514
37
315
5615
4
148
110
2 x ø44
496 (Opening size)
496 (Opening size)
64
Dimensions
Slit valve/XGT
Cassette type
Non-cassette type
Door valve/XGD
Series XGT/XGD
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