4th production equipment conference thin film schiller reischl
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1 04/03/09 © SCHILLER AUTOMATION
New integrated logistics and automation concept for mass production of thin film solar modules
Dr. Andreas ReischlProduct Manager Photovoltaics
SCHILLER AUTOMATION GmbH & Co. KGSonnenbühl
Automation a key technology focusing on the requirements of the process equipments
PTS Munich 5. March 2009
4th PV production equipment conference (tf)
INTRODUCTION INLINECONCEPT BATCH
Outline
■ Introduction• Our basic ideas for automation
■ Inline logistics concept for FAB automation• Inline logistics schematic• Logistics components• Comparison
■ Batch logistics concept• Batch Logistics schematic• Logistics components • Comparison
■ Summary & Outlook
04/03/09 © SCHILLER AUTOMATION2
Thin Film Solar FAB Automation
INTRODUCTION INLINECONCEPT BATCH
Company profile
04/03/09 © SCHILLER AUTOMATION3
■ Founded in 1978 by Sieghard Schiller
■ 100% family-owned
■ 280 employees & 52 M€ turnover
■ Certified quality management DIN ISO 9001
■ Management board
• Stefan Schiller• Karl-Heinz Bahnmüller• Martin Speidel• Hans-Peter Hennig• Herbert Höhn 39,7%
31,3%
17,8%
11,2%
Photovoltaics Cristalline
MicroelectronicsPhotovoltaics Thin Film
Services
INTRODUCTION INLINECONCEPT BATCH
© SCHILLER AUTOMATION4
SCHILLER Automation –know how incorporated in our Thin Film PV solutions
Semiconductor Flat Panel Display Microelectronics
TF Photovoltaics
Handling of Glass Substrates
Inline Concepts
TF Process AutomationData Tracking
Logistic Concepts
Cleanroom
Stocker Management
Introduction: our experience
04/03/09
upon these experience we have based our concept
INTRODUCTION INLINECONCEPT BATCH
Introduction: our concept
■ Focus on requirements of process equipments, can be• Batch or inline processing• Times: cycle time, maintenance time, MTBF, …• Buffering: before and / or after process, I/O• Environment: temperature, clean room, …• Orientation: front in/out, sunny side up, short side leading
■ Focus on production plans• Fast projecting, fast ramp-up to mass production• Flexibility of production: # products, engineering lots, …• Scalability: increase in production volume
■ Focus on cost of ownership• Maximal utilization of costly process equipments
04/03/09 © SCHILLER AUTOMATION5
Automation the key technology in mass production
Automation a process between processes serving their requirements
INTRODUCTION INLINECONCEPT BATCH
Concepts
© SCHILLER AUTOMATION6
Thin Film Solar FAB automation
→ Inline concept
→Batch concept
Process A Process B
Euklid: Any two points can be joined by a straight line.
04/03/09
INTRODUCTION INLINECONCEPT BATCH
Concept: inline overview BE
■ Handling of substrates via • logistics automation and• Interface automation components• Data handling with common data base
© SCHILLER AUTOMATION7
Data Tracking / Line Controller
Logistic Automation
Interface Automation
Process Equipment
contacting Edge isolation
Foil lay-up
marriagelaminationEdge trimming
QC sorterJunction box setting
04/03/09
INTRODUCTION INLINECONCEPT BATCH
Contact-ing
Edge Isolation
FoilLay-up
MarriageLamination
Lamination
EdgeTrim-ming
TapingJunction
Box QC Sorter
Centering
Barcode
Buffer
I/O port
Concept: inline BE
04/03/098
possible layout details of automation
© SCHILLER AUTOMATION
logistics
INTRODUCTION INLINECONCEPT BATCH
Concept: inline logistics
04/03/09 © SCHILLER AUTOMATION9
• Conveyor unit
• Corner turn unit
• Corner transfer unit
automation components
Logistic Automation
Interface Automation
Process Equipment
INTRODUCTION INLINECONCEPT BATCH
Concept: inline logistics
04/03/09 © SCHILLER AUTOMATION10
■ Buffer 100 substrates
■ Overhead logistics: possible to pass underneath
■ Optional cooling
■ Optional sensors
■ ….
Logistics automation: bufferLogistic Automation
Interface Automation
Process Equipment
INTRODUCTION INLINECONCEPT BATCH
Concept: inline
Advantages■ Simple logistics
-> resulting in high uptime
-> and cost advantages
■ Work in process minimized
-> short substrate processing time (dwell time within production)
■ ….
Disadvantages■ No flexibility due to fixed
interconnections
■ Maintenance access difficult -> long ways
■ Difficult to add additional process tools -> expansion nearly impossible without interruption of production
■ Buffer sizes and locations fixed
■ Downtime of machines will immediately have impact on FAB throughput
■ …
04/03/09 © SCHILLER AUTOMATION11
INTRODUCTION INLINECONCEPT BATCH
Concepts
© SCHILLER AUTOMATION12
Thin Film Solar FAB automation
→ Inline concept
→ Batch concept
04/03/09
INTRODUCTION INLINECONCEPT BATCH
© SCHILLER AUTOMATION13
Concept: batch overview FEIn
com
ing
Gla
ss
Cle
anin
g
Fron
t Con
tact
D
epos
ition
Abs
orbe
r D
epos
ition
Patte
rnin
g #2
Bac
k C
onta
ct
Dep
ositi
on
Patte
rnin
g #3
Patte
rnin
g #1
QC
Met
rolo
gy A
rea
Clu
ster
s Pr
oces
ses
Equi
pmen
tIn
terf
ace
Aut
omat
ion
Pro Load TF
GEU+Pro Load TF
6-Axes Robot
Pro Load TF
6-Axes Robot
6-Axes Robot
Man. Interface
GEU+Pro Load TF
GEU+Pro Load TF
Logi
stic
A
utom
atio
n
Logistic System Single Substrates / Batch Transfer Concept
Data Tracking / Line Controller
Dat
aB
ase
■ Equipments are connected by • Common logistics automation and interface automation components
04/03/09
INTRODUCTION INLINECONCEPT BATCH
DepositionPIN
CLEAN
Metrology
FC
NEWProcess
QCDepositionPIN
CCH
CCH Central Cassette HandlerProLoadGEU6-axis robotcassette
LASER
LASER
I/O portbuffer
LASER
BC
BC
BC
BC
Concept: batch schematic
LASER
LASER
FC
FC
FC
14 04/03/09 © SCHILLER AUTOMATION
NEWProcess
CCH
Additional Processes
BE
INTRODUCTION INLINECONCEPT BATCH
© SCHILLER AUTOMATION15
Logistics automation
→between clusters of process equipment
Concepts: logistics
04/03/09
INTRODUCTION INLINECONCEPT BATCH
Concept: cluster / batch
■ Transport of cassettes with 20 substrates■ Maximal length of 240 meter■ Serve left/right side on two levels (buffer)■ Line Controller together with the cluster
control ensures that the individual equipments are optimally utilized
© SCHILLER AUTOMATION16
Cluster-Line production concept based on batch cassette logistic
Logistic Automation
Interface Automation
Process Equipment
Flexible
4 March 2009
INTRODUCTION INLINECONCEPT BATCH
© SCHILLER AUTOMATION17
Interface automation
→between process equipment and logistics
Concept: interface automation
04/03/09
INTRODUCTION INLINECONCEPT BATCH
Concept: interface automation
© SCHILLER AUTOMATION18
Situation automation suppliers facing
■ Technology is defining substrate size
■ Technology is defining process equipment
■ Process equipment is defining requirements for interface automation: • Single substrate / batch-type processing
• horizontal / vertical glass transfer
• Inline same loading / un- position
• Chemical processes / high temp processes
• High throughput machines
■ Depending on requirements different solutions for interface automation will be necessary
6-axis robots used for specific loading applications for process equipment
04/03/09
INTRODUCTION INLINECONCEPT BATCH
© SCHILLER AUTOMATION19
Concept: interface automation
Linear handling system for standard Process Equipment
Logistic Automation
Interface Automation
Process Equipment
Application Samples
■ Loading of several Process Machines
■ Buffer Concepts
■ Logistic interface
ProcessLogistic Interface
• ProLoad handles one (or more) substrates
• Serves up to 4 processes from 6 cassettes over max. 12.5 meters distance
• GEU can exchange substrates in < 8 seconds
04/03/09
INTRODUCTION INLINECONCEPT BATCH
Concept: interface automation
Glass exchange unit (GEU)■ Substrate exchange■ Substrate centering■ Substrate rotation■ Option:
• Quality control• ID tracking
■ …
04/03/09 © SCHILLER AUTOMATION20
Logistic Automation
Interface Automation
Process Equipment
INTRODUCTION INLINECONCEPT BATCH
Concept: batch
Advantages■ Expansion of production by
additional or modified process tools possible
■ Easy service access to process tools
■ Flexibility of substrate routing
■ Buffer sizes and buffer locations flexible
■ Short downtimes have minimal impact on yield
■ Handling of Dummy Substrates possible
Disadvantages
■ More complex => higher costs compared to inline concept
■ WIP high => dwell time of substrates within production high
■ High sophisticated logistic system
■ …
04/03/09 © SCHILLER AUTOMATION21
INTRODUCTION INLINECONCEPT BATCH
Summary and outlook
Summary■ Shown the Schiller FAB automation concept■ Best concept consist of
• Maximal utilization of process equipment• Most reliable during projecting phase, ramp-up and production• Flexibility in production and engineering• Scalability and maintainability
■ Best solution considering all costs
04/03/09 © SCHILLER AUTOMATION22
Outlook■ ProLoad Multi interface logistics handles several substrates■ Big FAB concepts scalability and synergy effects■ Fully automated back-ends with minimal # operators■ New logistics and automation concepts also for crystalline PV■ ...
INTRODUCTION INLINECONCEPT BATCH
04/03/09 © SCHILLER AUTOMATION23
Thank you for your attention
Andreas Reischl
SCHILLER AUTOMATION GmbH & Co. KGPfullinger Strasse 5872820 Sonnenbuehl-GenkingenGermany
Tel +49 / 7128 / 386-5755Fax +49 / 7128 / 386-299
info@schiller-automation.comwww.schiller-automation.com
INTRODUCTION INLINECONCEPT BATCH
04/03/09 © SCHILLER AUTOMATION24
Our profile
Company
■ In almost 30 years, SCHILLER evolved into one of the most competent automation companies in the microelectronics business.
■ Our strength: Holistic consideration of all sorts of conceptual formulations
■ All from one source: Development Engineering Manufacturing Assembly Installation and start-up After sales support
■ SCHILLER is a 100% family-owned company.
INTRODUCTION INLINECONCEPT BATCH
04/03/09 © SCHILLER AUTOMATION25
Our company structure
Company
Company Management
Quality Management
Customer Center Engineering Production Internal Services
· Sales / Marketing · Mech./Electr. Engineering · Materials Administration · Controlling / PPS
· Project Management · Software Engineering / Document. · Manufacturing · Admin
· Customer Support · Research & Development · Assembly · Information Technology
INTRODUCTION INLINECONCEPT BATCH
04/03/09 © SCHILLER AUTOMATION26
Numbers & Facts
■ Foundation: 1978
■ Management: Stefan Schiller Managing Director Karl-Heinz Bahnmüller Customer Center Martin Speidel Engineering Hans-Peter Hennig Production/Internal Services Herbert Höhn Key Account Manager
■ Certification : DIN ISO 9001:2000
Company: facts & numbers
INTRODUCTION INLINECONCEPT BATCH
04/03/09 © SCHILLER AUTOMATION27
Our products
Company
SCHILLER is a leading supplier of production systems for manufacturing and handling of:
■ Microelectronics components, including power modules and controls & sensors for automotive applications
■ Photovoltaic products, including solar cell manufacturing and fab automation for thin-film solar cell manufacturing
Moreover SCHILLER has know-how and experience in following fields:
■ Semiconductor products in all clean room classes■ Flat panel displays■ Data storage products■ Smart card modules
INTRODUCTION INLINECONCEPT BATCH
04/03/09 © SCHILLER AUTOMATION28
Our references
Company
INTRODUCTION INLINECONCEPT BATCH
04/03/09 © SCHILLER AUTOMATION29
Our strengths –the people at SCHILLER
Company
■ ... with more than 2,500 man-years experience.
■ ... with analytical abilities/competency.
■ ... in interdisciplinary project teams.
■ ... with responsibility for costs, operations and target dates.
■ ... with passion for the common task.
■ ... create success!
INTRODUCTION INLINECONCEPT BATCH
04/03/09 © SCHILLER AUTOMATION30
Our core competences
Core Competences
INTRODUCTION INLINECONCEPT BATCH
04/03/09 © SCHILLER AUTOMATION31
Your benefit
■ Individual solutions
■ Proven modules
■ Automation solutions from one source
■ Lowest TCO
■ After Sales Service
■ Short start-up periode
■ Innovation
Core Competences
INTRODUCTION INLINECONCEPT BATCH
04/03/09 © SCHILLER AUTOMATION32
Our solutions –success story of our customers
■ Microelectronics, Automotive, Power Module
■ Photovoltaics
And■ Semiconductor■ Flat Panel Display■ Data Storage■ Smart Cards
Solutions
INTRODUCTION INLINECONCEPT BATCH
04/03/09 © SCHILLER AUTOMATION33
Photovoltaics
■ Customer specific automation systems for crystalline solar cell production
Interlinking of process equipment Loading/Unloading of process
equipment Customer specific QC lines Fully automatic stocker systems
INTRODUCTION INLINECONCEPT BATCH
04/03/09 © SCHILLER AUTOMATION34
Photovoltaics
■ Customer specific automation systems for thin film solar cell production
Loading/Unloading of process equipment
Modular Schiller 5 axes handling system for glass substrates
Cassette station Cassettes for substrates Stocker systems for cassettes and
single substrates
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