제 13 장 cmos process integration -...
Post on 01-Sep-2021
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제 13 장 CMOS Process
Integration
1. CMOS 단면도 (예제)
2. 0.5μm CMOS Process
▢ Device Structure
▢ Mask Sequence
① Well mask
② Active mask
③ NVT mask
④ PVT mask
⑤ PLY mask
⑥ NSD mask
⑦ PSD mask
⑧ Contact mask
⑨ Metal-1 mask
⑩ VIA mask
⑪ Metal-2 mask
⑫ Pad mask
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