p.1005

Slide 1 p.1005

Slide 2 Fig 32-CO, p.1003

Slide 3

4” wafer 4” wafer

Air-core inductor Magnetic-core inductor

Miniature air-core and magnetic inductors (5 mm x 5 mm)

Cu

Si 300 nm thick SiO2

140nm Cu/40 nm TiCu Cu

20nm Au/20 nm Ti

65μmCu

Si

Cu Cu

NiZnCu ferrite

140nm Cu/40 nm Ti

20nm Au/20 nm Ti

20nm Au/20 nm Ti

65μm

3CONFIDENTIAL

Slide 4

Slide 5

Slide 6 Fig 32-1, p.1004

Slide 7 Fig 32-2, p.1005

Slide 8 Fig 32-3, p.1007

Slide 9 Fig 32-17, p.1017

Slide 10 Fig 32-4, p.1008

Slide 11 Fig 32-5, p.1008

Slide 12 Fig 32-6, p.1008

Slide 13 Fig 32-7, p.1009

Slide 14 Fig 32-8, p.1009

Slide 15 Fig 32-9, p.1009

Slide 16 Fig 32-10, p.1010

Slide 17 Fig 32-11, p.1010

Slide 18 Fig 32-11a, p.1010

Slide 19 Fig 32-11b, p.1010

Slide 20 Fig 32-12, p.1010

Slide 21 Fig 32-13, p.1013

Slide 22 Fig 32-14, p.1013

Slide 23 Fig 32-15a, p.1015

Slide 24 Fig 32-15b, p.1015

Slide 25 Fig 32-16, p.1015

Slide 26 Fig 32-17a, p.1017

Slide 27 Fig 32-17b, p.1017

Slide 28 Fig 32-17c, p.1017

Slide 29 Fig 32-17d, p.1017

Slide 30 Fig 32-17e, p.1017

Slide 31 Fig 32-18, p.1018

Slide 32 Fig 32-19, p.1019

Slide 33 Fig 32-20, p.1019

Slide 34 Fig 32-21, p.1020

Slide 35 Fig 32-22, p.1020

Slide 36 Table 32-1, p.1021

Slide 37 Fig 32-23a, p.1022

Slide 38 Fig 32-23b, p.1022

Slide 39 Fig 32-24, p.1022

Slide 40 Fig Q32-5, p.1024

Slide 41 Fig Q32-7, p.1024

Slide 42 Fig P32-12, p.1025

Slide 43 Fig P32-17, p.1026

Slide 44 Fig P32-23, p.1026

Slide 45 Fig P32-25, p.1026

Slide 46 Fig P32-26, p.1026

Slide 47 Fig P32-27, p.1026

Slide 48 Fig P32-45, p.1027

Slide 49 Fig P32-48, p.1028

Slide 50 Fig P32-52, p.1028

Slide 51 Fig P32-64, p.1029

Slide 52 Fig P32-68, p.1029

Slide 53 Fig P32-69, p.1029

Slide 54 Fig P32-71, p.1030

Slide 55 Fig P32-72, p.1030

Slide 56 Fig P32-73, p.1030

Slide 57 Fig P32-75, p.1030

Slide 58 Fig P32-78, p.1031

Slide 59 Fig P32-79, p.1031

Slide 60 Fig P32-79a, p.1031

Slide 61 Fig P32-79b, p.1031

Slide 62 Fig P32-79c, p.1031

Slide 63 Fig 32-2a, p.1005

Slide 64 Fig 32-2b, p.1005

Slide 65 Fig 32-2c, p.1005