p.1005
DESCRIPTION
p.1005. Fig 32-CO, p.1003. 20nm Au/20 nm Ti. 20nm Au/20 nm Ti. 65 μ m. Cu. Cu. Cu. 140nm Cu/40 nm Ti. 65 μ m. Cu. Cu. Cu. 140nm Cu/40 nm Ti. NiZnCu ferrite. Si. 300 nm thick SiO 2. Si. 20nm Au/20 nm Ti. Miniature air-core and magnetic inductors (5 mm x 5 mm). Air-core inductor. - PowerPoint PPT PresentationTRANSCRIPT
Slide 1 p.1005
Slide 2 Fig 32-CO, p.1003
Slide 3
4” wafer 4” wafer
Air-core inductor Magnetic-core inductor
Miniature air-core and magnetic inductors (5 mm x 5 mm)
Cu
Si 300 nm thick SiO2
140nm Cu/40 nm TiCu Cu
20nm Au/20 nm Ti
65μmCu
Si
Cu Cu
NiZnCu ferrite
140nm Cu/40 nm Ti
20nm Au/20 nm Ti
20nm Au/20 nm Ti
65μm
3CONFIDENTIAL
Slide 4
Slide 5
Slide 6 Fig 32-1, p.1004
Slide 7 Fig 32-2, p.1005
Slide 8 Fig 32-3, p.1007
Slide 9 Fig 32-17, p.1017
Slide 10 Fig 32-4, p.1008
Slide 11 Fig 32-5, p.1008
Slide 12 Fig 32-6, p.1008
Slide 13 Fig 32-7, p.1009
Slide 14 Fig 32-8, p.1009
Slide 15 Fig 32-9, p.1009
Slide 16 Fig 32-10, p.1010
Slide 17 Fig 32-11, p.1010
Slide 18 Fig 32-11a, p.1010
Slide 19 Fig 32-11b, p.1010
Slide 20 Fig 32-12, p.1010
Slide 21 Fig 32-13, p.1013
Slide 22 Fig 32-14, p.1013
Slide 23 Fig 32-15a, p.1015
Slide 24 Fig 32-15b, p.1015
Slide 25 Fig 32-16, p.1015
Slide 26 Fig 32-17a, p.1017
Slide 27 Fig 32-17b, p.1017
Slide 28 Fig 32-17c, p.1017
Slide 29 Fig 32-17d, p.1017
Slide 30 Fig 32-17e, p.1017
Slide 31 Fig 32-18, p.1018
Slide 32 Fig 32-19, p.1019
Slide 33 Fig 32-20, p.1019
Slide 34 Fig 32-21, p.1020
Slide 35 Fig 32-22, p.1020
Slide 36 Table 32-1, p.1021
Slide 37 Fig 32-23a, p.1022
Slide 38 Fig 32-23b, p.1022
Slide 39 Fig 32-24, p.1022
Slide 40 Fig Q32-5, p.1024
Slide 41 Fig Q32-7, p.1024
Slide 42 Fig P32-12, p.1025
Slide 43 Fig P32-17, p.1026
Slide 44 Fig P32-23, p.1026
Slide 45 Fig P32-25, p.1026
Slide 46 Fig P32-26, p.1026
Slide 47 Fig P32-27, p.1026
Slide 48 Fig P32-45, p.1027
Slide 49 Fig P32-48, p.1028
Slide 50 Fig P32-52, p.1028
Slide 51 Fig P32-64, p.1029
Slide 52 Fig P32-68, p.1029
Slide 53 Fig P32-69, p.1029
Slide 54 Fig P32-71, p.1030
Slide 55 Fig P32-72, p.1030
Slide 56 Fig P32-73, p.1030
Slide 57 Fig P32-75, p.1030
Slide 58 Fig P32-78, p.1031
Slide 59 Fig P32-79, p.1031
Slide 60 Fig P32-79a, p.1031
Slide 61 Fig P32-79b, p.1031
Slide 62 Fig P32-79c, p.1031
Slide 63 Fig 32-2a, p.1005
Slide 64 Fig 32-2b, p.1005
Slide 65 Fig 32-2c, p.1005