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CYRANNUS®
by
www.cyrannus.com
PLASMA SOURCES PLASMA SYSTEMS PLASMA APPLICATIONS RESEARCH & DEVELOPMENT P L A S M A E A S Y T O A P P L Y !
CYRANNUS ®
by
Welcome at iplas.
See the latest developments!
CYRANNUS®
by
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PLASMA SOURCES PLASMA SYSTEMS PLASMA APPLICATIONS RESEARCH & DEVELOPMENT P L A S M A E A S Y T O A P P L Y !
High performance plasma
EH-tuner
magnetron
circulatorplasma source
CYlindrical Resonator with ANNUlar Slots
• from vacuum to atmosphere
• uniform plasma
• large plasma extension
• high power density
• easy and stable ignition
• from vacuum to atmosphere
• uniform plasma
• large plasma extension
• high power density
• easy and stable ignition
• from vacuum to atmosphere
• uniform plasma
• large plasma extension
• high power density
• easy and stable ignition
CYRANNUS®
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PLASMA SOURCES PLASMA SYSTEMS PLASMA APPLICATIONS RESEARCH & DEVELOPMENT P L A S M A E A S Y T O A P P L Y !
spatial homogeneous
stationary plasma
central excitation area
from vacuum to ambient pressure
arbitrary process gas
high gasflow possible
electrodeless plasma excitation
few maintenance required
Performance of CYRANNUS®I plasma source
CYRANNUS®I plasma source
CYRANNUS®
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PLASMA SOURCES PLASMA SYSTEMS PLASMA APPLICATIONS RESEARCH & DEVELOPMENT P L A S M A E A S Y T O A P P L Y !
Applications
Processes
iplas‘ plasma know-how
Diamond deposition is one application from a large
variety of plasma processes
Synergy effects from
various applications
• film growth
• surface modification
• material removal
• gas chemistry
• gas dynamics
• . . .
diamondactivation
glas
coating
polymeri-
sation etching
exhaust
cleaning
• film growth
• surface modification
• material removal
• gas chemistry
• gas dynamics
• . . .
Synergy effects from
various applications
• film growth
• surface modification
• material removal
• gas chemistry
• gas dynamics
• . . .
CYRANNUS®
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PLASMA SOURCES PLASMA SYSTEMS PLASMA APPLICATIONS RESEARCH & DEVELOPMENT P L A S M A E A S Y T O A P P L Y !
Plasm
a
Substrate
Process gas
+ precursor
Plasm
a
source
Process
gas
Substrat
e
Precursor
Activated
species
Plasma
Plasma
source
„ direct“ plasma treatment
Substrates are treated within the area of
plasma generation.
Typical application:
diamond deposition, exhaust cleaning
„down stream“ plasma treatment
Substrates are treated beside the area of
plasma generation, down stream, close to
plasma source.
Typical application:
activation of surfaces, deposition of SiOx
Use of plasma source in different
configuration
CYRANNUS®
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PLASMA SOURCES PLASMA SYSTEMS PLASMA APPLICATIONS RESEARCH & DEVELOPMENT P L A S M A E A S Y T O A P P L Y !
0.5mm
Examples: diamond growth
CYRANNUS® plasma is used for various types diamond
<100> and HOD on Silicon
5µm
5µm
50µm
homoepitaxial growthultra nano
crystalline diamond
CYRANNUS®
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PLASMA SOURCES PLASMA SYSTEMS PLASMA APPLICATIONS RESEARCH & DEVELOPMENT P L A S M A E A S Y T O A P P L Y !
CYRANNUS® processes
. . . a large spectrum
depositionvarious coatings (scratch and corrosion
resistance, optics, diffusion barrier)
growth rate of several µm/min
(SiOx/polymer) or 5-50 µm/h (diamond)
windows,
free standing
structures,
MEM
random <100>
highly oriented
<100>
functionalisationhydrophobic surface for water repellent
property on various materials
treatment time
< 10 sec
water on functionalized carbon
activationimproved wetting of varnish or dye,
increased adhesion
3D plastics activation, > 70 dyn/cm
treatment time 1-10 sec
local activation
of damaged
bumpers
plasma treated
bumper
untreated bumper
etching / ashingremoval of photo resist, stripping of coatings
ca. 5 µm desmearing of circuit boards
removal of oxides
from lead frames
within few
seconds
before plasma
treatment
after plasma treatment
cleaningultra cleaning, degreasing for adhesion
improvement
fast on-line cleaning
complete cracking of moleculesdestruction of molecules
abatement, exhaust cleaning,
waste destruction
reforming
pic
ture
: u
niv
eri
ty o
f D
ort
mu
nd
CYRANNUS®
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PLASMA SOURCES PLASMA SYSTEMS PLASMA APPLICATIONS RESEARCH & DEVELOPMENT P L A S M A E A S Y T O A P P L Y !
Supply spectrum
. . . for all technology needs
Systems
• lab units
• manual systems
• semi-automatic
systems
• production systems
Services
• feasibility
• R&D
• prototypes
Components
• CYRANNUS I -
plasma sources
• CYRANNUS II -
plasma sources
• EH-Tuner
CYRANNUS®
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PLASMA SOURCES PLASMA SYSTEMS PLASMA APPLICATIONS RESEARCH & DEVELOPMENT P L A S M A E A S Y T O A P P L Y !
Scaling of plasma
CYRANNUS® plasma can vary in diameter and volume
915M Hz 2 .45GHz 9 .55GHz
1 . 230mm 85mm 22mm
2. 380mm 140mm 36mm
3. 530mm 190mm 50mm
4. 675mm 220mm 63mm
5. 800mm 290mm 75mm
Plasma size increases
with
• excitation frequency
• order of antennas
• excitation frequency
• order of antennas
Plasma size increases
with
• excitation frequency
• order of antennas
CYRANNUS®
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PLASMA SOURCES PLASMA SYSTEMS PLASMA APPLICATIONS RESEARCH & DEVELOPMENT P L A S M A E A S Y T O A P P L Y !
iplas
~ develops and produced leading microwave plasma
technology basing on CYRANNUS® principle
~ covers several application fields of plasma technology
as core competence with focus on reliable technology
which is easy to handle
~ co-operates with partners who in general are global
players with a good market position in their specific
field
~ is independent and privately owned
CYRANNUS®
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PLASMA SOURCES PLASMA SYSTEMS PLASMA APPLICATIONS RESEARCH & DEVELOPMENT P L A S M A E A S Y T O A P P L Y !
CYRANNUS®I plasma sources
comparison of equipment at 2.45GHz and 915MHz
CYRANNUS® I - 6“plasma source (2.45 GHz)
CYRANNUS® I - 16“plasma source (915 MHz)
CYRANNUS®
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PLASMA SOURCES PLASMA SYSTEMS PLASMA APPLICATIONS RESEARCH & DEVELOPMENT P L A S M A E A S Y T O A P P L Y !
Equipment scaling from 2.45GHz
to 915MHz
relation of plasma source
sizes
[2.45GH 915MHz; similar
coupling structure]
plasma source
tunercirculator
magnetron
CYRANNUS®
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PLASMA SOURCES PLASMA SYSTEMS PLASMA APPLICATIONS RESEARCH & DEVELOPMENT P L A S M A E A S Y T O A P P L Y !
scalabitity of plasma sources for
larger diameter
2.45 GHz,
at 259 hPa
CYRANNUS®I -16” plasma source
CYRANNUS®
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PLASMA SOURCES PLASMA SYSTEMS PLASMA APPLICATIONS RESEARCH & DEVELOPMENT P L A S M A E A S Y T O A P P L Y !
CYRANNUS® Diamond CVD unit
Flexibility in technique and budget
• semi-automated
operation
• compact set-up
• high performance from
proofen production
design
CYRANNUS®
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PLASMA SOURCES PLASMA SYSTEMS PLASMA APPLICATIONS RESEARCH & DEVELOPMENT P L A S M A E A S Y T O A P P L Y !
Gas Flow Dominated Reactions in
Atmospheric Plasma
Plasma
generates
radicals . . .
• Gas flow in plasma afterglow
• High mass transport
• Intensive gas phase interaction /
low wall interaction
... and interacts
with surface
• Lamiar flow ?
• Turbulent flow !
CYRANNUS®
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PLASMA SOURCES PLASMA SYSTEMS PLASMA APPLICATIONS RESEARCH & DEVELOPMENT P L A S M A E A S Y T O A P P L Y !
Reactions of ions, radicals and
electrons in plasma
Plasma
generates
radicals . . .... excitation and
cracking in gas phase
... interaction with
surface
CYRANNUS®
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PLASMA SOURCES PLASMA SYSTEMS PLASMA APPLICATIONS RESEARCH & DEVELOPMENT P L A S M A E A S Y T O A P P L Y !
Plasma chemistry reactor
Washer
Plasma-
cracking
waste gas
cracked gas
neutralised gas
• plasma catalytic reactions
• high cracking energy from
excited electrons
• contact free excitation
• wast gas cleaning
• nano particle synthesis
• Hydrogen synthesis
CYRANNUS®
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PLASMA SOURCES PLASMA SYSTEMS PLASMA APPLICATIONS RESEARCH & DEVELOPMENT P L A S M A E A S Y T O A P P L Y !
Nano Particle Synthesis
Synthesis of nano particles in CYRANNUS systems enables new
qualities and very high productivity
microwave excitation allows non-equilibrium chemical reactions (clean
compound, no reactive chemicals (burner) required
high pressure operation of plasma (up to several bar) allows high gas
flow rates and very high production quantities (several pounds per hour)
precise process control via plasma parameters and gas flow (generation
of particle size with very small variation)
CYRANNUS®
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PLASMA SOURCES PLASMA SYSTEMS PLASMA APPLICATIONS RESEARCH & DEVELOPMENT P L A S M A E A S Y T O A P P L Y !
Nano Particle Synthesis - Example
Ultra clean Silicon
synthesis von large quantities of clean (purified) Silicon by decomposition
of Silan
purification via chemical reaction (Silan synthesis)
recovering by cracking reaction (Silicon particle synthesis)
CYRANNUS®
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PLASMA SOURCES PLASMA SYSTEMS PLASMA APPLICATIONS RESEARCH & DEVELOPMENT P L A S M A E A S Y T O A P P L Y !
Bio Agredable Nano Surface
Ultra clean Silicon
synthesis von large quantities of clean (purified) Silicon by decomposition
of Silan
purification via chemical reaction (Silan synthesis)
recovering by cracking reaction (Silicon particle synthesis)
CYRANNUS®
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PLASMA SOURCES PLASMA SYSTEMS PLASMA APPLICATIONS RESEARCH & DEVELOPMENT P L A S M A E A S Y T O A P P L Y !
Plasma treatment of surfaces
- a modular and compact system-
easy connection to customer„s PLC
simple and fast maintenance or repair
by exchange of complete modules
very fast supply time through
standardisation of modules
Individual systems, made of
standardised modules
CYRANNUS®I plasma systems
for development and production
CYRANNUS®
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PLASMA SOURCES PLASMA SYSTEMS PLASMA APPLICATIONS RESEARCH & DEVELOPMENT P L A S M A E A S Y T O A P P L Y !
www.cyrannus.com
Phone +49(0)2241 93268-0
Fax +49(0)2241 93268-15
Fragen ?
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