beam – specimen interactions

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Beam – Specimen Interactions. Electron optical system controls: beam voltage (1-40 kV) beam current (pA – μ A) beam diameter (5nm – 1 μ m) divergence angle Small beam diameter is the first requirement for high spatial resolution Ideal:Diameter of area sampled = beam diameter - PowerPoint PPT Presentation

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Page 1: Beam – Specimen Interactions