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Characteristics and aging of PCB embedded power electronics Richard Randoll a, , Mahmud Asef a , Wolfgang Wondrak a , Lars Böttcher c , Andreas Schletz b a Daimler AG, Research and Development, Hanns Klemm Str. 45, 71034 Böblingen, Germany b Fraunhofer IISB, Abteilung Bauelemente und Zuverlässigkeit, Landgrabenstraße 94, 90443 Nürnberg, Germany c Fraunhofer Institut Zuverlaessigkeit und Mikrointegration IZM, Gustav-Meyer-Allee 25, 13355 Berlin, Germany abstract article info Article history: Received 24 May 2015 Accepted 11 June 2015 Available online xxxx Keywords: PCB embedded Power electronics Sinter Thermal impedance Partial discharge Aging The decrease of battery prices makes the electrication of the power train an irresistible development. Also the introduction of a 48 V on-board grid is decided to supply large auxiliaries. For such applications cost is always an important factor. PCB embedded power electronics offers improvements compared to power electronics bonded and soldered on Al 2 O 3 as dielectric material. These improvements are a reduction of height, lightweight construction, cost ef- ciency of the applied materials and a reduction of the parasitic inductance. Sinter layers offer an increase of the melting temperature from 220 to 935 °C, compared to solder, and the thermal resistance between semiconductor and cooling water is low due to a thin dielectric layer of 150 μm and the heat spreading inside the copper leadframe, together with PCB materials having a thermal conductivity of 1.5 W/mK. A thermal resistance of 0.5 K/W per IGBT can be achieved. This paper describes the challenges of the production process, the 5 μm copper metallization of the semiconductor and the sinter process. Production failures were detected by curve tracer measurements, lock-in thermography and cross sections. The application potential of the embedding technology is demonstrated by measurements of the thermal impedance and temperature dependent partial discharge mea- surements. The effect of aging of PCB material by thermal cycling on the partial discharge behavior could be dem- onstrated. First results of an ongoing power cycling measurement are described as well. Finally the aspect of new PCB material without glass-ber enforcement offering higher thermal conductivity and higher glass-transition- temperature is shown. © 2015 Published by Elsevier Ltd. 1. Introduction PCB embedded power electronics offers improvements compared to power electronics bonded and soldered on Al 2 O 3 as dielectric material [1,2]. These improvements are smaller size, lightweight construction, cost efciency of the applied materials and low parasitic inductances [3,7]. First products for application below 60 V are already in production [11]. The thermal resistance between semiconductor and cooling water can be lower due to a thin dielectric layer of 150 μm and the heat spreading inside the copper leadframe, together with new PCB materials having a thermal conductivity of up to 7 W/mK [4]. This paper describes the challenges of the production process, the copper metallization of the semiconductor, the sinter process and the impact of the embedding on the semiconductor. Device failures were detected by curve tracer measurements, lock-in thermography and cross sections. Final test samples are characterized by measurements of the thermal impedance and temperature dependent partial discharge measure- ments. The effect of aging of PCB material by thermal cycling on the Microelectronics Reliability xxx (2015) xxxxxx Corresponding author. E-mail addresses: [email protected] (R. Randoll), [email protected] (M. Asef), [email protected] (W. Wondrak), [email protected] (L. Böttcher), [email protected] (A. Schletz). MR-11623; No of Pages 6 Fig. 1. Construction in cross section: areas of interest are marked in red. (For interpretation of the references to color in this gure legend, the reader is referred to the web version of this article.) http://dx.doi.org/10.1016/j.microrel.2015.06.072 0026-2714/© 2015 Published by Elsevier Ltd. Contents lists available at ScienceDirect Microelectronics Reliability journal homepage: www.elsevier.com/locate/mr Please cite this article as: R. Randoll, et al., Characteristics and aging of PCB embedded power electronics, Microelectronics Reliability (2015), http://dx.doi.org/10.1016/j.microrel.2015.06.072

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Page 1: Characteristics and aging of PCB embedded power electronicshomepages.laas.fr/nolhier/ESREF2015/SESSION_C/PC_7.pdf · 2015-09-04 · Characteristics and aging of PCB embedded power

Microelectronics Reliability xxx (2015) xxx–xxx

MR-11623; No of Pages 6

Contents lists available at ScienceDirect

Microelectronics Reliability

j ourna l homepage: www.e lsev ie r .com/ locate /mr

Characteristics and aging of PCB embedded power electronics

Richard Randoll a,⁎, Mahmud Asef a, Wolfgang Wondrak a, Lars Böttcher c, Andreas Schletz b

a Daimler AG, Research and Development, Hanns Klemm Str. 45, 71034 Böblingen, Germanyb Fraunhofer IISB, Abteilung Bauelemente und Zuverlässigkeit, Landgrabenstraße 94, 90443 Nürnberg, Germanyc Fraunhofer Institut Zuverlaessigkeit und Mikrointegration IZM, Gustav-Meyer-Allee 25, 13355 Berlin, Germany

⁎ Corresponding author.E-mail addresses: [email protected] (R. Ra

[email protected] (M. Asef), [email protected] (L. Böttcher), andre(A. Schletz).

http://dx.doi.org/10.1016/j.microrel.2015.06.0720026-2714/© 2015 Published by Elsevier Ltd.

Please cite this article as: R. Randoll, et al., Chttp://dx.doi.org/10.1016/j.microrel.2015.06

a b s t r a c t

a r t i c l e i n f o

Article history:Received 24 May 2015Accepted 11 June 2015Available online xxxx

Keywords:PCB embeddedPower electronicsSinterThermal impedancePartial dischargeAging

The decrease of battery prices makes the electrification of the power train an irresistible development. Also theintroduction of a 48 V on-board grid is decided to supply large auxiliaries. For such applications cost is alwaysan important factor.PCB embedded power electronics offers improvements compared to power electronics bonded and soldered onAl2O3 as dielectric material. These improvements are a reduction of height, lightweight construction, cost effi-ciency of the applied materials and a reduction of the parasitic inductance. Sinter layers offer an increase of themelting temperature from220 to 935 °C, compared to solder, and the thermal resistance between semiconductorand cooling water is low due to a thin dielectric layer of 150 μm and the heat spreading inside the copperleadframe, together with PCB materials having a thermal conductivity of 1.5 W/mK. A thermal resistance of0.5 K/Wper IGBT can be achieved. This paper describes the challenges of the production process, the 5 μmcoppermetallization of the semiconductor and the sinter process. Production failures were detected by curve tracermeasurements, lock-in thermography and cross sections. The application potential of the embedding technologyis demonstrated bymeasurements of the thermal impedance and temperature dependent partial dischargemea-surements. The effect of aging of PCBmaterial by thermal cycling on the partial discharge behavior could be dem-onstrated. First results of an ongoing power cyclingmeasurement are described aswell. Finally the aspect of newPCB material without glass-fiber enforcement offering higher thermal conductivity and higher glass-transition-temperature is shown.

© 2015 Published by Elsevier Ltd.

1. Introduction

PCB embedded power electronics offers improvements compared topower electronics bonded and soldered on Al2O3 as dielectric material[1,2]. These improvements are smaller size, lightweight construction,cost efficiency of the applied materials and low parasitic inductances[3,7]. First products for application below 60V are already in production[11]. The thermal resistance between semiconductor and cooling watercan be lower due to a thin dielectric layer of 150 μm and the heatspreading inside the copper leadframe, together with new PCBmaterials having a thermal conductivity of up to 7 W/mK [4]. Thispaper describes the challenges of the production process, the coppermetallization of the semiconductor, the sinter process and the impactof the embedding on the semiconductor. Device failures weredetected by curve tracer measurements, lock-in thermography andcross sections.

ndoll),[email protected] (W. Wondrak),[email protected]

haracteristics and aging of P.072

Final test samples are characterized by measurements of the thermalimpedance and temperature dependent partial discharge measure-ments. The effect of aging of PCB material by thermal cycling on the

Fig. 1. Construction in cross section: areas of interest aremarked in red. (For interpretationof the references to color in this figure legend, the reader is referred to the web version ofthis article.)

CB embedded power electronics, Microelectronics Reliability (2015),

Page 2: Characteristics and aging of PCB embedded power electronicshomepages.laas.fr/nolhier/ESREF2015/SESSION_C/PC_7.pdf · 2015-09-04 · Characteristics and aging of PCB embedded power

Fig. 2. Sputter copper layer on top of the IGBT before (left) and after (right) sintering.

Fig. 3. 2 μmcopperwas removed during the “brown-oxide”process, the aluminumsurfaceis partially removed.

2 R. Randoll et al. / Microelectronics Reliability xxx (2015) xxx–xxx

partial discharge behavior could be demonstrated. First results of anongoing power cycling measurement are described as well. Finally theaspect of new PCB material of higher thermal conductivity and higherglass-transition-temperature and without glass-fiber-enforcement isshown.

2. Composition

A 650 V IGBT with an area of 1 cm2 is sintered onto a 6 to 10 timesthicker copper leadframe, seen in Fig. 1. The semiconductor has a 5 to10 μm thick copper layer on top. The top side connections like gateand emitter are contacted by copper vias through the PCB material.

As dielectric material, a 150 μm PCB layer is used between collectorand cooler. The whole PCB board can be sintered onto the cooler. Theload current is contacted by press-fit connectors.

3. Top side copper layer

To achieve a good connection between copper via and IGBT, an8 μm thick copper layer was created on the top side of the IGBT.First, the copper was sputtered onto the IGBT. In cross sections ofthe copper layer it can be seen, that the layer is reproducing the

Fig. 4. Galvanic copper layer before (left) an

Please cite this article as: R. Randoll, et al., Characteristics and aging of Phttp://dx.doi.org/10.1016/j.microrel.2015.06.072

topology on top of the IGBT, see Fig. 2. Also grain boundaries are cre-ated during sputtering.

One PCB fabrication process step called “brown-oxide” etching isused to roughen the copper surfaces for a better connection betweencopper and epoxy resin.

During this process, acid liquids are flowing between grain bound-aries and remove about 2 μm copper off the surface. As a result of thisprocess, the copper and the aluminum metallization on top of theIGBT are partially removed, see Fig. 3.

In an improved process, a 5 μm copper layer was galvanic deposited.Fig. 4 shows a plane copper layer after processing, and a 3 μm thick, butalso plane remaining copper layer after the “brown-oxide” process.

4. Sinter process

In a first run, semiconductors were sintered onto a copperleadframe. As top metallization of the leadframe, a 600 nm thick chem-ical silver layer was chosen. First the sinter-paste was placed onto theleadframe, then the semiconductor was placed onto the sinter-paste.This process showed difficulties in the positioning of sinter-paste andsemiconductor. It became apparent that where sinter-pastes were notexactly positioned, vertical cracks occurred in the semiconductorsbecause the substructure was uneven during sintering.

In an improved experiment, semiconductorswere sintered using theso called “pick and place” process, where semiconductors picked theirown sinter-paste from a foil. The sinter-paste was sticked at the bottomside of the semiconductor before positioning at the leadframe. Novertical cracks could be observed at parts where this process was used.

5. Investigation of failed parts

From the data sheet of the IGBT, a differential on-resistance of 2.82mΩ can be derived. After processing, some failed parts with increased re-sistances could be observed. As seen in Fig. 5, part 167 showed a forwardresistance of 4.11 mΩ and part 54 showed 27.87 mΩ.

d after (right) “brown-oxide” process.

CB embedded power electronics, Microelectronics Reliability (2015),

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Fig. 5. Output characteristic of failed parts: part 54 (left), 167 (right).

Fig. 6. Lock in thermography: amplitude picture (left), phasepicture (right) of part 54. (For interpretation of the references to color in thisfigure, the reader is referred to theweb version ofthis article.)

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To visualize the thermal behavior and to locate areas of higherthermal resistance, lock-in-thermography has been made at part 54,seen in Fig. 6 [10].

The lock-in-frequencywas 165Hz. In the ampli-tude picture areas ofhigher thermal resistance (white) can be seen, while in the phase pic-ture, the velocity of the thermal answer is displayed (red). The coppervias of gate and emitter contact are responsible for the limited resolu-tion of Fig. 6, because the thermal conductivity of copper ismuch higherthan that of PCB material.

The lock-in-thermography was able to localize horizontal cracks in-side the semiconductor, seen in figure 7.

Fig. 7. Vertical cracks are detected as well, which origin from a mis-match between the position of the IGBT and the position of the sinterpaste.

Fig. 7. Horizontal and vertical cracked IGBT.

Please cite this article as: R. Randoll, et al., Characteristics and aging of Phttp://dx.doi.org/10.1016/j.microrel.2015.06.072

Horizontal cracks are responsible for a lower current carrying capa-bility, however there must be more investigation on understanding theformation of horizontal cracks during production.

However it can be noted, that obviously horizontal cracks do not ap-pear during sintering only, and they do notappear during embeddingonly. Therefore it is assumed to be the result of both processes together.

A delamination between IGBT and sinter-layer could be observed atpart 167,which explains the higher on-resistance, seen in figure 5 (right).

Fig. 8. Measured thermal impedances.

CB embedded power electronics, Microelectronics Reliability (2015),

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Fig. 9. Partial discharge extinction voltage (PDEV) as function of the temperature mea-sured at two samples. Fig. 10. PDEV versus temperature.

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6. Thermal impedance

A thermal impedance measurement was done at three differentpackaging samples of the same IGBTs, see Fig. 8. The construction ofthe PCB Integrated IGBT is shown in chapter 2. The Al2O3 and the AlNsamples are IGBTs soldered and bonded on a ceramic substrate as instandard packaging of integrated circuits.

As seen in Fig. 8, the thermal resistance of the PCB integrated IGBT isequal to the standard Al2O3 packaging with 0.5 K/W. This low thermalresistance is not only due to the thermal conductivity of the PCBmaterial, but there must be also a substantial heat spreading insidethe copper leadframe.

Fig. 11. Color change of a cycled demonstrator.

7. Partial discharge investigations

A method to characterize a dielectric material is a partial dischargemeasurement [5,6].

In application, the partial discharge strength is required to be 3 kV atworst case, especially in the temperature range between −40 °C and+125 °C.

A known characteristic of epoxy resin is its decreasing partialdischarge (PD) strength at exceeding the glass transition temperature.

Partial discharge measurements have been made at test sampleswith 150 μm FR4 material as dielectric. The measurements were madewith a 10 kV test equipment. The DUT was immersed in inert liquid tosuppress the electrical field. Measurements were made at 1 MHz, witha background noise of 0.5 pC. The AC voltage was ramped up with0.3 kV/s, until the partial discharge inception voltage set in, then thevoltage was ramped further 10% higher, then the voltage was held for5 s, afterwards the voltagewas ramped down at 0.2 kV/s, and the partialdischarge extinction voltage was measured as function of thetemperature..

The measurement results can be seen in Fig. 9. Applied voltageswent up to 6 kV, flowing charges were in the range between 0 and500 pC.

The measurement (Fig. 9) shows the material capability of 27 kV/mm (=4 kV/150 μm) as a constant function of the temperature in therange between 25 and 140 °C. Exceeding the glass transition tempera-ture of 150 °C, the FR4 material softens, and the partial dischargestrength decreases. Since the requirement for the dielectric is 3 kV atworst case, the maximum operating temperature allowed is given bythe glass transition temperature minus 25 K margin.

It can be assumed that the PD extinction voltage in the range be-tween 150 °C and the decomposition temperature is constant [5]. Themeasurement shows that the PCB sample is of good quality, andshows the material properties as expected.

Please cite this article as: R. Randoll, et al., Characteristics and aging of Phttp://dx.doi.org/10.1016/j.microrel.2015.06.072

In Fig. 10, the samemeasurements on different samples were made.Part 3 is a sample of 150 μmof the samematerial as in Fig. 9, while part 4is a sample of 180 μm of a material with a thermal conductivity of 3 W/mK and a glass transition temperature of 210 °C. Therefore the partialdischarge extinction voltage stays almost constant up to 170 °C, whichwas the maximum temperature of our test setup.

An increase of the partial discharge extinction voltage to 8 kV atsamples with a thickness of 225 μm could be verified, however withthe increase of thickness the thermal resistance increases as well.Measurements dependent on the frequency from 400 kHz to 2.5 MHzshowed a constant behavior in this frequency range.

8. Active Power Cycling

One classical lifetimemeasurement of a power electronic package ispower cycling [8,9]. With 17 single IGBT demonstrators, 72000 activepower cycling measurements have been made until now without fail-ure. The temperature range was 80 Kelvin, the maximum Temperaturewas 120°C, and the minimum temperature was 40°C, the current- ontime was 15 seconds as well as the current- off time. No increase ofthe collector- emitter- voltage could be detected as well as there wasno increase of the thermal resistance yet. The change in color of one cy-cled demonstrator is shown in Fig. 11.

9. Aging of PCB material

PCBmaterial is made of epoxy resin, glass reinforcement and ceram-ic fillers. In case of the tested samples, the fillers are made of Al2O3 andMgO, leading to a thermal conductivity of 1.5 W/mK.

CB embedded power electronics, Microelectronics Reliability (2015),

Page 5: Characteristics and aging of PCB embedded power electronicshomepages.laas.fr/nolhier/ESREF2015/SESSION_C/PC_7.pdf · 2015-09-04 · Characteristics and aging of PCB embedded power

Fig. 12. Optic of test samples before (left) and after (right) temperature.

5R. Randoll et al. / Microelectronics Reliability xxx (2015) xxx–xxx

After stressing 10 samples by 2500 to 3000 temperature shocks from−40 to 125 °C in 30/30 min intervals, all samples showed the samechange in color, as shown in Fig. 12.

These aged samples were subjected to partial discharge investi-gations as well. Hereby, the test voltage started with 2000 V andwas increased by 1000 V steps.

In Fig. 13, PD measurements after 2500 temperature shocks can beseen. For 2 samples, after measurement step 7, the dielectric had lostits dielectric behavior.

The interpretation of these measurements is, that the PCB materialages because of the different coefficients of thermal expansion betweenglass fiber reinforcement and epoxy resin and ceramic fillers. Thethermo-mechanical stress is the root cause of losing the PD strength.

In Fig. 14, it can be seen that the temperature shocked and PDstressed PCB material shows delaminations between glass fibers andepoxy resin. At these material interfaces, the thermomechanical stressreaches its maximum.

However it is not yet clear, if this will be the failure mechanism con-sidering the application loads, since the imposed operation voltages arebelow 500 V.

10. New PCB material

For improving the thermal properties of the construction, newmaterials are under development. Figs. 15 to 16 show cross sections ofsuch advanced materials. The better thermal conductivity is obtainedby increasing the fraction of Al2O3 filler in the epoxy.

The interesting thing of this new material is the missing glass fiberenforcement, which will influence the failure mechanism “conductiveanodic filament”.

Fig. 13. PD measurements after temperature shocks.

Please cite this article as: R. Randoll, et al., Characteristics and aging of Phttp://dx.doi.org/10.1016/j.microrel.2015.06.072

11. Summary

In this paper the construction of PCB embedded power electronicswas described and the challenge of the manufacturing was discussed.The measurement of the thermal impedance shows the substantialheat spreading inside the leadframe and the low thermal resistance ofthe construction. Partial discharge measurements reflect the PCBmaterial's dependency on the glass transition temperature (Tg) anddemonstrate that application requirements can be reached. Verticalcracks inside the semiconductor have been observed originating froma mismatch between sinter-paste and semiconductor, and can beavoided by the so called “pick and place” sinter process.

The analysis of the galvanic copper layer on top of the semiconductorshows the planarity of the layer and the good resistance during the socalled “brown-oxide” etching process during PCB production. An ongo-ing power cycling measurement has not shown any failure until now.Delaminations between glass fibers and epoxy resin during aging ofPCB material by thermal cycling have been demonstrated.

The partial discharge and aging results of this paper show the princi-ple applicability of the PCB embedded technology in power electronicdevices.

12. Outlook

The current research work will be continued with leadframe thick-nesses of 1 to 1.5 mm, which will increase the effect of the heat spread-ing. A new PCB material with a thermal conductivity of 7 W/mK and athigher glass transition temperature Tg of 200 °C is in sample production.

These new PCB materials do not have a glass fiber reinforcement,which will influence the failure mechanism “conductive anodic fila-ment” in a positive way.

There is currently research work on a galvanic copper layer withmore than 5 μm thickness. Power cyclingmeasurements at test samplesare currently running on a test equipment.

The influence of humidity on embedded power electronics will beinvestigated at Conductive Anodic Filament (CAF) test boards whichare already in fabrication.

Fig. 14. Optic of sample with dielectric break down.

CB embedded power electronics, Microelectronics Reliability (2015),

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Fig. 15. Standard PCB material with 1.5 W/mK (left), PCB material with 3 W/mK (right).

Fig. 16. PCB material with 5 W/mK.

6 R. Randoll et al. / Microelectronics Reliability xxx (2015) xxx–xxx

Acknowledgment

This work has been supported by the German BMBF under contract# 16N11654 (Hi-Level) and #01MY12001 (Sphinx)

Lock-in thermograhy measurements have been acquired on ELITEsystem from DCG systems, with support of Sector Technologies.

Please cite this article as: R. Randoll, et al., Characteristics and aging of Phttp://dx.doi.org/10.1016/j.microrel.2015.06.072

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CB embedded power electronics, Microelectronics Reliability (2015),