desorption dynamics of - cnr
TRANSCRIPT
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Desorption dynamics ofLocal Anodic Oxidation-oxide nanostructures
S. HEUN,1,2 G. MORI,1,3 D. ERCOLANI,1,4 M. LAZZARINO,1 A. LOCATELLI,2
and L. SORBA1,4
1 Laboratorio Nazionale TASC-INFM, I-34012 Trieste, Italy2 Sincrotrone Trieste S.c.p.a., I-34012 Trieste, Italy
3 Università degli Studi di Trieste, I-34100 Trieste, Italy4 Università degli Studi di Modena e Reggio Emilia, I-41100 Modena, Italy
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Outline
A brief introduction to spectromicroscopyThe SPELEEM at Elettra
SPELEEM = spectroscopic photoemission and low energy electron microscope
Application example:Local Anodic Oxidation (LAO) by AFM: GaAs oxides
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MotivationWhy XPS?
chemical state informationsurface sensitiveease of quantification(in general) nondestructive
Why spectromicroscopy ?(semicond.) nanostructures: self-organization, lithographydevicesdiffusion, segregationalloying (silicide formation)catalysis, chemical wavessurface magnetism (XMCD)
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Location of TASC and Elettra
Elettra
TASC-INFM
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Elettra Beamlines
exit beamline source
1.1L TWINMIC short id
1.2L Nanospectroscopy id
1.2R FEL (Free-Electron Laser) -
2.2L ESCA Microscopy id
2.2R SuperESCA id
3.2L Spectro Microscopy id
3.2R VUV Photoemission id
4.2 Circularly Polarised Light id
5.2L SAXS (Small Angle X-Ray Scattering) id
5.2R XRD1 (X-ray Diffraction) id
6.1L Material science bm
6.1R SYRMEP (SYnchrotron Radiation for MEdical Physics) bm
6.2R Gas Phase id
7.1 MCX (Powder Diffraction Beamline) bm
7.2 ALOISA (Advanced Line for Overlayer, Interface and Surface Analysis) id
8.1L BEAR (Bending magnet for Emission Absorption and Reflectivity) bm
8.1R LILIT (Lab of Interdisciplinary LIThography) bm
8.2 BACH (Beamline for Advanced DiCHroism) id
9.1 IRSR (Infrared Synchrotron Radiaton Microscopy) bm
9.2 APE (Advanced Photoelectric-effect Experiments) id
10.1L X-ray microfluorescence bm
10.1R DXRL (Deep-etch Lithography) bm
10.2L IUVS (Inelastic Ultra Violet Scattering) id
10.2R BAD Elph id
11.1 XAFS (X-ray Absorption Fine Structure) bm
11.2 XRD2 (X-ray Diffraction) id
1
23
4
5
6
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Scanning vs. direct imaging type
Photon optics is demagnifying the beam:Scanning Instrument
Whole power of XPS in a small spot modeFlexibility for adding different detectorsRough surfaces can be measuredLimited use for fast dynamic processesLower lateral resolution than imaging instruments
Electron optics to magnify irradiated area:Imaging Instrument
High lateral resolution (20 nm)Multi-method instrument (XPEEM/PED)Excellent for monitoring dynamic processesPoorer spectroscopic abilitySensitive to rough surfaces
Monochromaticlight
Sample(scanned)
Photo-emissiondetector
Detector hv
Object plane
Object lensBackfocal planeStigmator
Intermediate imageIntermediatelens
Projectivelens
Image planeMCPScreen CCD camera
Sample
Intermediate image
e-
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Outline
A brief introduction to spectromicroscopyThe SPELEEM at Elettra
SPELEEM = spectroscopic photoemission and low energy electron microscope
Application example:Local Anodic Oxidation (LAO) by AFM: GaAs oxides
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The SPELEEM at ElettraSpectroscopic photoemission and low energy electron microscope
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The SPELEEM at ELETTRA
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The energy filter
R = 100 mmPass Energy = 900 V
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XPEEM: Spectroscopic Microscopy
Images from a Field Effect Transistor (FET) at different binding energies.Photon energy 131.3 eV.
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XPEEM: Core Level Spectroscopy
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Imaging of Dispersive Plane
W{110} clean surfaceW 4f core level hv = 98 eVResolution 210 meV
(1) Riffe et al., PRL 63 (1989) 1976.(2) Webelements
SCLS (eV)
W7/2-W5/2 BE diff. (eV)
Gauss. Broad. (eV)
Alpha S
Gamma S (eV)
Alpha B
Gamma B (eV)
parameter
0.3040.321
2.142.2 (2)
0.210.04
Fixed0.063
Fixed0.084
Fixed0.035
Fixed0.06
Our fitRef. (1)
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Imaging of Dispersive Plane
W{110} clean surfaceW 4f core level hv = 98 eVResolution 210 meV
(1) Riffe et al., PRL 63 (1989) 1976.(2) Webelements
SCLS (eV)
W7/2-W5/2 BE diff. (eV)
Gauss. Broad. (eV)
Alpha S
Gamma S (eV)
Alpha B
Gamma B (eV)
parameter
0.3040.321
2.142.2 (2)
0.210.04
Fixed0.063
Fixed0.084
Fixed0.035
Fixed0.06
Our fitRef. (1)
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Lateral resolution
C 1s image (hv= 350 eV, KE = 62 eV)
Lateral resolution: 32 nm
inte
nsity
(a.u
.)100806040200
distance (pixel)
lateral resolution:0.7 * (4 pixel /435 pixel ) * 5000 (nm)= 32 nm acquisition time: 1min
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Outline
A brief introduction to spectromicroscopyThe SPELEEM at Elettra
SPELEEM = spectroscopic photoemission and low energy electron microscope
Application example:Local Anodic Oxidation (LAO) by AFM: GaAs oxides
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Motivation
Lithography for fabrication of state-of-the-art semiconductor nanostructuresBasic research and quantum device applicationsApproaches:
Traditional lithographyProximal probes (STM or AFM)
H.C. Manoharan, C.P. Lutz, D.M. Eigler: Nature 403 (2000) 512
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Local Anodic Oxidation (LAO)
Water electrolysis H2O → H+ + OH-.OH- groups migrate towards the sample.Oxide penetration induced by the intense local electric field.
Versatile tool at relatively low costHigh lateral resolution but small area
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Z
Z
Z
Z
GaAs AlGaAs GaAs
LAO on GaAs/AlGaAsBefore oxidation:
After oxidation:
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Quantum Point Contact
x
Y
Electronflow
Vgate
-1 0 1 2 30
1
2
3
30 K1.4 K
Cond
ucta
nce
(2e2 /h
)
IPG voltage(V)
G. Mori et al, JVST B 22 (2004) 570.
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Setup for Lithography on GaAs
Thermomicroscope Microcope CP-Resource
Plexiglass hood
N2 +H2O
water bottle
AFM
voltage sourceAFM
camera Hygrometer
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Why Spectroscopic Microscopy?
Lack of information on the oxidation process and on the chemical nature of the oxides.Lack of reliable microscopic techniques able to perform chemical analysis on such small structures.
Understand the composition of the AFM-grown oxides (electrical and chemical properties, effect of oxidation parameters).Improve the fabrication of devices with LAO.
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GaAs Oxide: Photon Exposure
AFM after: height 13nm
AFM before: height 18nm
Images taken with secondary electronsPhoton energy: 125 eVKinetic energy: 4 eVField of view: 10 µmOne image every 2 sec
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GaAs Oxide: Desorption
Writing speed 0.5 µm/sHumidity 50 %
Photon energy 130 eVPhoton flux 1017 ph cm-2sec-1
Before photon exposure After hours of exposure
12V
1μm12V14V
16V
14V10V
hv
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Height reduction vs. exposure time
We observe a linear relation between exposure time and height reduction.A dependence on other oxidation parameters (bias, writing speed) could not be detected.
hv = 130 eV = 9.5 nm
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Spectra From AFM GaAs Oxide
Sample S03BHole (3,2)Writing voltage 15 VStructure height 3 nmImage taken with secondary electrons:
Photon energy: 130 eVKinetic energy: 0.3 eVField of view: 10 µm
Time resolved spectroscopy with SPELEEM using Dispersive Plane (hv = 130 eV)
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Spectra From AFM GaAs Oxide
Time resolved spectroscopy with SPELEEM using Dispersive Plane (hv = 130 eV)
2500
2000
1500
1000
Inte
nsity
(a.
u.)
12 10 8 6 4 2Relative Binding Energy (eV)
Exposure Time 3 min 5 min 7 min 13 min 20 min 28 min 43 min 63 min
As 3dhv = 130 eV
1000
800
600
400
200
Inte
nsity
(a.
u.)
12 10 8 6 4 2Relative Binding Energy (eV)
Exposure Time 4 min 6 min 10 min 17 min 25 min 54 min 74 min
Ga 3dhv = 130 eV
As oxide GaAsO 2s
Ga oxides+ GaAs
The As-oxide signal disappeares with time.The Ga-oxide signal remains unchanged (early stage of exposure).
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Spectra From AFM GaAs Oxide
The AFM-oxide is mainly composed of Ga2O. After 3 hours exposure, only traces of As-oxides observed in As 3d.Absolute ratio As : Ga = 1 : 5
4000
3500
3000
2500
2000
Inte
nsity
(a.
u.)
888684828078Kinetic energy (eV)
As 3dhv = 130 eV
GaAs
AsO
20x103
15
10
5
0
Inte
nsity
(a.
u.)
110108106104102100Kinetic Energy (eV)
Ga 3dhv = 130 eV
GaAs
Ga2O
Ga2O3
O 2s
after160 min.
after115 min.
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A possible model for the desorptionOur Observations:
The AFM-grown oxide exposed to 130 eV photons desorbs linearly with exposure time.The AFM-oxide is mainly composed of Ga2O with traces of As-oxide.The shape of the Ga peak does not change with exposure time (early stage of desorption).The As-oxides desorb completely after 3 hours of exposure.Not even traces of As-oxides detected in scanning Auger microscopy.
GaAs
Ga2O
Ga2O + As-oxides
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Thermal stabilityRT 300C 400C 450C
500C 550C 600C
Each annealing step:10 minutes
in N2 atmosphere
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The Knotek-Feibelman mechanism
The valence electrons are mainly localized at O atoms.This Auger decay leads to a final state with two vacancies in valence band weakening the bond between Ga and O.
Valence electrons
E
3d
GaInitial state
Valence electrons
E
3d
Ga
Valence electrons
E
3d
Ga
Valence electrons
E
3d
GaFinal state
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Summary
The AFM-oxide is mainly composed of Ga2O with traces of As-oxide at the surface.Photon assisted partial desorption of the AFM-grown oxide was observed.All As oxides and the oxygen-rich Ga oxides are desorbed.We proposed a simple model for the dynamics of the desorption.