Device Fabrication Facilities

NFF Jeol

JBX6300FS

Direct write on wafers, high throughput, mask writing, for nanoelectronics

– 25, 50, 100 kV accelerating voltage

– 2 nm minimum spot size

– 12 MHz scanning rate

– 150 x 190 mm write area

– 0.62 nm stage movement precision

– < 25 nm stitching & overlay accuracy

MCPF e_LiNE & ionLiNE e_LiNE is a ultra high resolution electron beam lithography system and nano-engineering workstation. Key applications: Lithography on 4 inch samples; Electron beam induced deposition and etching; In-situ electrical measurements and nano-manipulation, e.g. CNT or nanorods.

ionLiNE is dedicated to ion beam nanolithography, fabrication, and engineering. Key applications: Low dose ion events; Thin film engineering; Surface fictionalization; Localized defect injection.

1. Light sources: Ar+ laser, He-Cd laser, Xe-lamp, Ti-sapphire fs laser.

2. Photoluminescence (PL), excitation PL, photoconductivity facilities.

3. Modulated photo-reflectance facilities.

4. Hamamatsu Streak Camera C5680 for time-resolved PL.

5. OI Spectro-Mag 4000 system: magnetic field up to 7T; sample temperature range from 5K to 300K.

6. OI Spectro-Mag 2000 system: magnetic field up to 14T; sample temperature range from 0.3K to 80K.

7. Closed cycle (10 - 300K) system for variable temperature transport and optical measurements.

8. LHe cryostat (2 – 300K) for variable temperature magneto-transport measurements.

9. LN2 cryostat (77 – 450K) for variable temperature magneto-transport and optical measurements.

10.Various electronic equipments for transport measurements

Laboratory Equipment List

Quantum wire resonant tunneling diode fabrication by photolithography

Structure fabricated by e-beam lithography

2 3 4 5 60.0000

0.0002

0.0004

0.0006

T=1.6K

Cur

rent

(A

)

sweep down

sweep up

10T

12T

8T

4T

B=0T

Voltage(V)

Low temperature and high magnetic field transport measurements

Low temperature magneto-photoluminescence measurements

Variable temperature magneto-transport measurements

Transport measurement facilities

Oxford Spectro-Mag 2000 system (B: 014T; T: 0.3K80K)

LHe cryostat (2 – 300K, 0 – 800mT))

Oxford Spectro-Mag 4000 system (B: 07T; T: 5K300K)

Magneto-optical measurement facilities

Spex 1403 monochromator

Closed cycle (10 - 300K) system

Hamamatsu Streak Camera

2D image including spectra and temporal information

Time

Wavelength

Electronic equipments for transport measurements