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Beeby, Steve. MEMS Mechanical Sensors.: Artech House, . p 1http://site.ebrary.com/id/10081990?ppg=1Copyright © Artech House. . All rights reserved.
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Beeby, Steve. MEMS Mechanical Sensors.: Artech House, . p 4http://site.ebrary.com/id/10081990?ppg=4Copyright © Artech House. . All rights reserved.
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Beeby, Steve. MEMS Mechanical Sensors.: Artech House, . p 5http://site.ebrary.com/id/10081990?ppg=5Copyright © Artech House. . All rights reserved.
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Beeby, Steve. MEMS Mechanical Sensors.: Artech House, . p 6http://site.ebrary.com/id/10081990?ppg=6Copyright © Artech House. . All rights reserved.
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Beeby, Steve. MEMS Mechanical Sensors.: Artech House, . p 7http://site.ebrary.com/id/10081990?ppg=7Copyright © Artech House. . All rights reserved.
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Beeby, Steve. MEMS Mechanical Sensors.: Artech House, . p 8http://site.ebrary.com/id/10081990?ppg=8Copyright © Artech House. . All rights reserved.
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Beeby, Steve. MEMS Mechanical Sensors.: Artech House, . p 9http://site.ebrary.com/id/10081990?ppg=9Copyright © Artech House. . All rights reserved.
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Beeby, Steve. MEMS Mechanical Sensors.: Artech House, . p 11http://site.ebrary.com/id/10081990?ppg=11Copyright © Artech House. . All rights reserved.
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Beeby, Steve. MEMS Mechanical Sensors.: Artech House, . p 14http://site.ebrary.com/id/10081990?ppg=14Copyright © Artech House. . All rights reserved.
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Beeby, Steve. MEMS Mechanical Sensors.: Artech House, . p 16http://site.ebrary.com/id/10081990?ppg=16Copyright © Artech House. . All rights reserved.
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