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News from CMS Process Quality Control
Thomas BergauerHEPHY Vienna
CMS TK Week, 29.1.2003, CERN
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Thomas Bergauer, HEPHY Vienna 2
Centers Three Process Qualification Centers:
FlorenceAnna Macchiolo
Carlo Civinini
Mirko Brianzi
StrasbourgJean-Charles Fontaine
Jean-Marie Helleboid
Jean-Laurent Agram
ViennaThomas Bergauer
Margit Oberegger
Characterization by QTC
Process stability on test structures with 9 different measurements
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Thomas Bergauer, HEPHY Vienna 5
CVmos at different temperatures
• Just a test (Vienna coolingbox was available)
•CVmos at 5 different temperatures
•CVmos chosen because it is the simplest measurement
No temperature dependence of Vfb
-25 -20 -15 -10 -5 0 5 10 15Voltage (V)
Capacitance (F)
0
1E-10
2E-10
3E-10
4E-10
5E-10
6E-10
+20°C +10°C 0°C -10°C -20°C -30°C
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Thomas Bergauer, HEPHY Vienna 6
Thicker Aluminium
Rho_Alu Histogram
0
2
4
6
8
10
12
14
16
0-5 5-10 10-15 15-20 20-25 25-30 30-35
39 Teststructures from PQC Florence•Perugia 12 (prod.week 34/02)•Perugia 13 (03/02)•Perugia 14 (06/02 and 23/02)
Average data:• before Week 20/02: 26,09mOhms/sq. • After week 20/02: 14,34mOhms/sq.
Before week 20/02after
•Pisa 59 (08/02)•Pisa 60 (24/02)
Influence to rho_Alu
Also: slightly lower C_ac value:•17,01pF (before week 20/02) -> •16,65pF (after)
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Thomas Bergauer, HEPHY Vienna 7
Mask Problem W7B
Cac R (Al, p+, poly) Ivgcd Cint IVbaby Rint CVdiode CVMOS& IV diel
•Misalignment of 3 structures at the standard half moon•Not able to contact with probecard in one cycle•W7B: 1440 pcs.
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Thomas Bergauer, HEPHY Vienna 8
Mask Problem W7B
3 structures on the standard half moon affected
Sensor mask is OK
Options: new probecard
design OR new wafer mask
design
GCD C_int
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Thomas Bergauer, HEPHY Vienna 9
Inter-calibration
Circulation of 5 Teststructures Vienna -> Strasbourg Strasbourg -> Florence Florence -> Vienna
-> Florence-> Vienna-> Strasbourg(Exchange of TS during this Tracker Week)
Results: (up to now)
• Good agreement in all measurements• Higher Leakage current of Vienna Probecard causes lower R_int and higher IV_dielectric and GCD problems (fit)• small differences in capacitances values caused by stray capacitances. (<1pF)
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Thomas Bergauer, HEPHY Vienna 10
Software New Software allows re-read of local files
Up to now: Stand-alone program Re-analyze Re-write XML file
Acquisition Analysis DB Interface
Future: Fully integrated into acquisition software
Local files
Acquisition Analysis DB Interface
Local files
Analysis DB Interface
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Thomas Bergauer, HEPHY Vienna 11
Database
322 teststructures successfully loaded into db 61 faulty (status: 28.1.03)