news from cms process quality control
DESCRIPTION
News from CMS Process Quality Control. Thomas Bergauer HEPHY Vienna. CMS TK Week, 29.1.2003, CERN. Centers. Three Process Qualification Centers:. Florence Anna Macchiolo Carlo Civinini Mirko Brianzi. Strasbourg Jean-Charles Fontaine Jean-Marie Helleboid Jean-Laurent Agram. Vienna - PowerPoint PPT PresentationTRANSCRIPT
News from CMS Process Quality Control
Thomas BergauerHEPHY Vienna
CMS TK Week, 29.1.2003, CERN
Thomas Bergauer, HEPHY Vienna 2
Centers Three Process Qualification Centers:
FlorenceAnna Macchiolo
Carlo Civinini
Mirko Brianzi
StrasbourgJean-Charles Fontaine
Jean-Marie Helleboid
Jean-Laurent Agram
ViennaThomas Bergauer
Margit Oberegger
Characterization by QTC
Process stability on test structures with 9 different measurements
Thomas Bergauer, HEPHY Vienna 5
CVmos at different temperatures
• Just a test (Vienna coolingbox was available)
•CVmos at 5 different temperatures
•CVmos chosen because it is the simplest measurement
No temperature dependence of Vfb
-25 -20 -15 -10 -5 0 5 10 15Voltage (V)
Capacitance (F)
0
1E-10
2E-10
3E-10
4E-10
5E-10
6E-10
+20°C +10°C 0°C -10°C -20°C -30°C
Thomas Bergauer, HEPHY Vienna 6
Thicker Aluminium
Rho_Alu Histogram
0
2
4
6
8
10
12
14
16
0-5 5-10 10-15 15-20 20-25 25-30 30-35
39 Teststructures from PQC Florence•Perugia 12 (prod.week 34/02)•Perugia 13 (03/02)•Perugia 14 (06/02 and 23/02)
Average data:• before Week 20/02: 26,09mOhms/sq. • After week 20/02: 14,34mOhms/sq.
Before week 20/02after
•Pisa 59 (08/02)•Pisa 60 (24/02)
Influence to rho_Alu
Also: slightly lower C_ac value:•17,01pF (before week 20/02) -> •16,65pF (after)
Thomas Bergauer, HEPHY Vienna 7
Mask Problem W7B
Cac R (Al, p+, poly) Ivgcd Cint IVbaby Rint CVdiode CVMOS& IV diel
•Misalignment of 3 structures at the standard half moon•Not able to contact with probecard in one cycle•W7B: 1440 pcs.
Thomas Bergauer, HEPHY Vienna 8
Mask Problem W7B
3 structures on the standard half moon affected
Sensor mask is OK
Options: new probecard
design OR new wafer mask
design
GCD C_int
Thomas Bergauer, HEPHY Vienna 9
Inter-calibration
Circulation of 5 Teststructures Vienna -> Strasbourg Strasbourg -> Florence Florence -> Vienna
-> Florence-> Vienna-> Strasbourg(Exchange of TS during this Tracker Week)
Results: (up to now)
• Good agreement in all measurements• Higher Leakage current of Vienna Probecard causes lower R_int and higher IV_dielectric and GCD problems (fit)• small differences in capacitances values caused by stray capacitances. (<1pF)
Thomas Bergauer, HEPHY Vienna 10
Software New Software allows re-read of local files
Up to now: Stand-alone program Re-analyze Re-write XML file
Acquisition Analysis DB Interface
Future: Fully integrated into acquisition software
Local files
Acquisition Analysis DB Interface
Local files
Analysis DB Interface
Thomas Bergauer, HEPHY Vienna 11
Database
322 teststructures successfully loaded into db 61 faulty (status: 28.1.03)