eurocomp elektronik gmbh - menlo micro · 2017. 11. 23. · 400v/2a rf relay. smart rf and power...
TRANSCRIPT
Menlo MicroIntroduction
October 2017
Menlo Micro Proprietary & Confidential
Company Background & Management Team
Overview of Menlo Micro’s Technology & Differentiation
Reliability & Test Highlights
Packaging (TGV)
Key Differentiation; The Menlo Micro Advantage!
Applications & Markets
Menlo Micro Product & Solution Highlights
MRI
Industrial & Military Radio
High-Power RF Switching
Power Relays
Q&A and the “Bottom Line”
1
Topics
Menlo Micro Proprietary & Confidential
Menlo Micro is a new startup based in Irvine, CA which is being spun out of General Electric’s Global Research Center
$40M in GE R&D since 2004, closed a $18.6M series A in Dec 2016
Focused on high performance RF and Power switching products, using GE’s proprietary Digital-Micro-Switch (DMS) technology
2
Company Background
+ =
Menlo Microsystems Proprietary
Management Team
Russ GarciaCEO
• 30+ yrs semiconductors, exec management, startup, M&A experience• EVP Microsemi, CEO Wispry, CEO uNav, TI, Silicon Systems, Hughes
Chris GiovannielloCo-Founder, SVP Product Development & Marketing
• 20+ yrs semi & semi equip exp. in Sales, Marketing, & Bus. Dev.• VP GE Ventures, Sales/Service/ Biz. Dev. Applications. Teradyne
Chris KeimelCo-Founder, CTO
• 12+ yrs material science and MEMS process development• Senior Research Scientist - GE Global Research
Jeff BalounSVP Manufacturing Operations
• 25+ yrs semi manufacturing & operations, front-end & back-end• GM Deca Technologies, CEO Imbera, GM Unisem, ASAT, LSI
3
Lew BooreSVP Sales & Business Development
• 30+ yrs semi product development, marketing & sales• VP Silanna, Cavendish Kinetics, WiSpry, HP/ Agilent, M/A-COM
Menlo Microsystems Proprietary
Ohmic contact switch with cantilever beam and electrostatic actuation
What is GE Digital-Micro-Switch Technology?A novel micro-mechanical switch architecture based on an ultra-reliable material set, incorporating new design and processing techniques
400V/2A RF Relay
Smart RF and Power relay systemsHigh-power, High-reliability
Over 10+ years of development, over 40 patent families and know-how covering materials & fabrication processes, as well
as system architecture, design, test
Gold
GE-0
GE-2
Beam lifetime comparison under accelerated test conditions
GE DMS technology can enable new, disruptive products:High-power, High-reliability SMART RELAY SYSTEMS
240V/10A AC/DC Relay
Beam
Substrate
Gate
Contact
Menlo Microsystems Proprietary
5
The GE Approach
• GE approached MEMS reliability issues not as a semiconductor company, but with decades of experience in high-performance alloys
• GE’s breakthrough innovations in materials and processing enable true Product Development Platform:
• High-Reliability: Shipping in production to a 3B cycles spec
• High-power capable: Opens up new markets, larger TAM
• Simple design, <12 mask layers: Can scale with volume to very low cost
• Simple design, wide design space: Shorter design cycles = more products
9mm x 9mm
1mm x 1.5mm
Menlo Microsystems Proprietary
How is Menlo Unique in the Contact Switch Industry?
Omron• Target market: Consumer and Industrial RF• Status: Stopped in mid-2014 - reliability/size/cost
ADI • Target market: Industrial RF• Status: Active – shipping to ATE market
DelfMEMS(Startup)
• Target market: Consumer RF• Status: Stopped operations in Jan 2016 – reliability/size/cost
Over $100M spent by industry in the past 6-7 years going after reliable, cost-effective MEMS ohmic switch technology
NXP-Epcos • Target market: Consumer RF and Power• Status: Stopped program in ~2012 - reliability
Radant(Startup)
• Target market: Aerospace/Defense and Industrial RF• Status: Stopped operations in May 2015 – reliability/manufac.
RFMD• Target market: Consumer RF• Status: Stopped program in ~2011 - reliability
Menlo Microsystems Proprietary
Extensive Reliability Experience and Testing at GE
Continuous reliability testing for accelerated life evaluation:
• Multiple parallel automated testers capable of 20 die evaluation
• 3 ovens in operation at 3 different acceleration temperatures
• >10,000 die evaluated
Very stable resistance <0.4Ω for over 12 Billion cycles
(MM3100)
Menlo Microsystems Proprietary
Extensive reliability experience and testing at GE
Weibull data shows zero early life failures and confidence to 3B operations, with hot-switching at 0dBm
ReliaSoft Weibull++ 7 - www.ReliaSoft.com
Probability - Weibull
Cycles
Un
reli
ab
ilit
y,
F(
t)
100.000 1.000E+111000.000 10000.000 100000.000 1000000.000 1.000E+7 1.000E+8 1.000E+9 1.000E+100.100
0.500
1.000
5.000
10.000
50.000
90.000
99.000
0.100
Probability-Weibull
Data 1Weibull-3PMLE SRM MED FMF=15/S=43
Unadj PointsUnadjusted L ine
Marco AimiGE4/11/201310:56:45 AM
3 Billion cycles
20 Billion cycles
(MM7100)
Menlo Microsystems Proprietary
Key Differentiation
Core Metallurgy and Process Know-how and IP
Power Performance: Very High Power Handling
Quality & ReliabilityRF Performance:
Linearity & Insertion Loss
• Mature & already shipping in high-value GE systems
• Billions of switch events• Simple Manufacturing…Cost!
• 50W+ designs• Metal on glass processing
superior RF specs
• DC and AC, 200V+• Superior thermal performance
• Auto Charging, Home control, Industrial Automation
Horizontal Product Applications
• Wireless Infrastructure: RRH, Small Cell, Wireless Backhaul
• Military/First Responder Radio and Radio Networks
Menlo Microsystems Proprietary
10
Digital-Micro-Switch ApplicationsStep function improvements in power handling and reliability
1W 10W 100W 1kW 10kW 100kW 10MW 100MW
Other ohmic MEMS
Mobile Communications
Relays
Residential/Comm/Indus. Breakers
Base Station Comm.
Test Equipment
DC Bus Arch. / DC Protection
Power Supply Protection
PIN Diode & GaAs Apps.• Smaller size, higher power, higher
frequency for RF switching
• Fast-switching, arc-free protection for Power switching
1MW
Benefits of micromechanical contact switch brought to many more applications
3.5kW
Digital-Micro-Switch(single die)
Menlo Microsystems Proprietary
11
Horizontal Market Breadth
Power IoT:Home Auto, EV Charging,
UPS, Solar, Auto…
AC&DC Power Switch
GE, Tesla, Nest, Honeywell….
$10B+ TAM(2019)
Vertical:
Target Customers:
Product:
Medical
Reed Relay
GE internal & Med Equip Suppliers
$525M TAM(2019)
Present
Revenue
• GE Qualified• Expansion to
other MR coil manufacturers
Mil Radio& Wireless
Infrastructure
RF Switch & Filter ProductsNetwork Equip
Mil Radio Suppliers
$1.4B TAM(2019)
Initial Products
Focus
• RRH Filters• Small Cell Filters• Mil Radio Filters
Mobile, IoT
Process
Mobile RFSuppliers
$1B TAM(2019)
License
Model
• Initial partners validated and in discussions
Strong Early Base:
Revenue and Customer Traction
Future
Power RF Switch
RF Switch
ATE,Cable, Telecom, Defense
Initial Products
Focus
• General Purpose RF Switch products
$750M TAM(2019)
Menlo Microsystems Proprietary
Menlo Product Portfolio – 2017/2018
MM7100 MM7110 MM3100
MM5120 Smart Power Relay Prototype
• Target Markets: A/D, Industrial• Target Applications: Tunable UHF/VHF/HF radios,
general purpose EM relay replacement, WPT
• 6mm x 6mm LGA • 6 channels, 25W/channel• DC to 3GHz• Embedded controller
• 9mm x 9mm LCC• WL bonded• 500V/1A <128MHz
• 6mm x 14mm SIP• 1000V/1A <128MHz
• Integrated driver, passives
• Target Markets: MRI, general purpose HV switch
• Target Market: Industrial, Test & Measurement
• 3” x 2” proto board• 200V/10A DC power relay• Integrated current sense• No heat sink
• Target Market: A/D, Test & Measurement, Wireless Infra.• Target Applications: Switched filters, switch matrix, high
power RF switching, EM replacement
• 5mm x 5mm QFN• SPDT, 25W/channel• DC-12GHz• Embedded controller with Vboost• Bare-die option to 18GHz+
HV Switch Products RF Tuning Products
Power Relay ProductsRF Switching Products
Samples: availableProduction: Q3 2017
Samples: availableProduction: Q3 2018
Samples: availableProduction: Q3 2018
Proto Samples: Q3 2017First Product: 2019
Samples: Q4 2017Production: Q4 2018
12
High Voltage Switch Products
Menlo Microsystems Proprietary
GE Healthcare MRI
Menlo Microsystems Proprietary
The MRI Problem Statement
Menlo Microsystems Proprietary
DMS Products for MRI – MM7100“Replacing the PIN diode”
Key SpecsGE
MEMS
Blocking Impedance
(Real)~100KΩ
Blocking Impedance
(Reactive)~300fF
Standoff Voltage400V DC
Resistance<0.3 Ω
Peak Current >2A
Cycle 3B+
Switching Time <4 uS (on)
<1uS (off)
SPST 400V/2A AC/DC Relay
High Voltage RF Relay
2014-2015 2016-2017MM7100
Hermetic LCC9x9mm ceramic package
WL Glass Capin 9x9mm package
Menlo Microsystems Proprietary
Signa Pioneer 3.0TEngineering Execution
Digital coils, no manual tuning of PIN-diode networksFaster, cheaper NPI
Patient/Customer BenefitsLighter, thinner and silent coilsFrom 40W to 0.4W per coil: heat free
Higher reliability, lower down time
Enabling TechnologyPath to “wireless coils”Completely new system architectures
Cost ReductionOver $10K reduction in COGS per system
Digital MRI Coils – Already in production!
2600 MEMS switches per system
HV/MR Components:MR SPST MM7100 MM7110 (SIP)
2016 2018+ Aux coils2017
RF Tuning Products
Menlo Microsystems Proprietary
DMS Products for Tuning/Filtering – MM3100Replacing PIN diodes & EM Relays for impedance matching
Six individually controlled, reconfigurable “loss-less” contact switches in a low-profile SMT package
2016/2017MM7100
WL Glass Capin 9x9mm package
WL Glass Capin 6x6mm BGA
2017/2018MM3100
© 2017 Menlo Microsystems, Inc. – All Rights Reserved – www.menlomicro.com Page 1 Doc.Rev MM3100.1.1 21-Jun-2017
MM3100 – 6 Channel SPST Digital-Micro-Switch Preliminary Product Overview Features:
DC to > 3 GHz Frequency Range 25 Watt (CW), 200W (Pulsed) Max Power Handling Low On-State Insertion Loss < 0.3 dB @ 3 GHz Low On-State Resistance < 0.75 Ω 25dB Isolation @ 3 GHz Maximum voltage (AC or DC): +200 Volts on RF Input < 10us On/Off Switching Time High Reliability > 3 Billion Switching Operations Integrated SPI Bus Gate Control Hermetic 6mm x 6mm x 1.3mm LGA Package
Applications: Functional Diagram:
High-Power Tunable Resonators and Filters Broadband Power Amplifier Impedance Matching Electronically Steerable Antennas and Phase Shifters Automated Test and Measurement Systems
Markets:
Defense and Aerospace Scientific and Medical Wireless Infrastructure
Description:
The MM3100 device is a high power 6-channel SPST micro-mechanical switch offered by Menlo Micro, which has developed a new Digital-Micro-Switch (DMS) fabrication process, and applied it to DC and wideband RF/microwave switch applications. This innovative DMS technology enables robust and highly reliable switches capable of > 25 watts. Each switch provides ultra low on-state insertion loss and high off-state isolation from DC to > 3 GHz with greater than 3 billion switching cycles at elevated +85ºC temperatures. Each switch is individually controlled by a standard Serial Peripheral Interface (SPI) synchronous bus. An external +5 VDC logic supply and high voltage +77 VDC bias source is required for operation of the internal switch driver. 6-bit, high-voltage tuning
capability in small SMT package
Menlo Microsystems Proprietary
Applications: Mil-Radio & Commercial Infrastructure
Electronic phase shifter
• High cost ($500+ for phase shifters & filters)
• Weight: wind load for smaller towers
• Space: for multi-band support
• Reliability: due to mechanical components
• Lack of flexibility: for future wireless bands
Objective:• Replace bulky, heavy mechanical fixtures with
lightweight, electronic, tunable versions based on high-power MEMS components
Tunable filter
Pain Points:
Macro & Small Cell
RF Tuning/Switching:
MM3100SIP
• TGV shrink, mmWave• SP4T, SPxT, embedded passives• RF Subsystem-on-a-chip
Future Directions:MM5120SIP, die
“Rethink” the architecture w/low cost, reliable, high-power RF microsystemsImprove on key RF specs & miniaturize critical subsystems for Infrastructure
Broadband PA Impedance matching
2017 2018 2018+
20
Menlo Microsystems Proprietary
(48) high reliability cantilever switches in a 3.6mm x 4mm die
Six channels each capable of carrying 25W RF or > 1A/channel DC
Scalable Design Platform
MM3100
w/integrated controller and 6mm x 6mm package
21
Menlo Microsystems Proprietary
RF Tunable Filter – Reduce Size, Weight & Power for RF MM3100 Replacing PIN Diodes in Tunable Radios
Potential to enable high power handling (5W-20W) in a 2W form factor
UHF interstage (2W) UHF interstage (20W)
Benefits:
Max input: <2W 20W+ •10x increase in power handling
Size: 200+ components (2-sided board) 50% area for complex pin-diode switch biasing
~25 componentsNo pin-diodes, single-sided board, simple bias scheme
•80%+ reduction in components•75% reduction in board size•Reduced need for thermal management, smaller box
Insertion Loss: > 3dB @ 500MHz < 2dB @ 500MHz •33% reduction in RF losses, less heat, longer battery life
Power Consumption:
1.2W <100mW •90% reduction in DC losses, less heat, longer battery life
Linearity: IP3: ~40dBm IP3: ~85dBm •Reduced distortion, higher data rates
Ex. Mil Radio
Key metrics:• Fast frequency tuning• Lightweight• Long battery life• Reliability
With PIN Diode With DMS Technology
Menlo Microsystems Proprietary
23
MM3100 – High Power Handling
Robust materials, simple design and fab, scalable architecture enable a high power RF MEMS switch
• A MEMS switch capable of handling 25W RF (CW) @ 3GHz
• Stable insertion loss across entire power range
• Peak (10% duty cycle) RF power capable to 200W/channel
• Power handling increases as frequency decreases, > 70W CW
0
20
40
60
80
100
120
140
0 20 40 60 80 100
QFN
Pa
ckag
eT
em
pera
ture
(⁰C
)
AverageInputPower(Watts)
CWInputPowervsQFNTemperature
2.45GHz
1.90GHz
900MHz
300MHz
100MHz
20MHz
Menlo Microsystems Proprietary
Stable Insertion Loss with Hot-Switching
• MM3100 device hot-switched at +15dBm
for >1B cycles and still functional
• Insertion loss change of +/-0.010dB
measured over ALL hot switch cycles before test stopped
• Hot switch stability and operations are a result of Ruthenium contact material and hermetic package
• Insertion loss at 1 GHz <0.3dB
Cold Switched
(<0dBm)
Hot Switched
(+15dBm)
Typical
Mechanical relay
1-10M operations <<1-10M operations
Typical
Menlo DMS relay
3-10B operations1000x to 3000x
improvement
>1B operations5000x to 10,000x
improvement!
Change in insertion loss over 1B hot-switch cycles
dB
RF Switching Products
Menlo Microsystems Proprietary
Ron*Coff comparison of DMS Technology
Peregrine
• Menlo DMS requires only stack of 1 for 200V voltage handling• MM3100 RonCoff = 40fs, <10fs with TGV for 2018
• Glass is ultimate substrate platform for high RF linearity, >90dBm IP3
~10fs
Most of SOI switch industry
• For SOI, RonCoff is measured for single transistor
• Actual switch product uses transistor stacks (up to 20!) for up to 80V
Menlo Microsystems Proprietary
Next Generation High-Power RF SwitchingMM5120 SPDT in QFN package w/integrated driver (3D simulations)
-35
-30
-25
-20
-15
-10
-5
0
0 2 4 6 8 10 12 14
retu
rnlo
ss(
dB
)
Frequency(GHz)
RETURNLOSS
-1
-0.9
-0.8
-0.7
-0.6
-0.5
-0.4
-0.3
-0.2
-0.1
0
0 2 4 6 8 10 12 14
inse
rtio
nl
oss
(dB
)
Frequency(GHz)
INSERTIONLOSS
-45
-40
-35
-30
-25
-20
-15
-10
-5
0
0 2 4 6 8 10 12 14
isol
atio
n(
dB)
Frequency(GHz)
ISOLATION
MM5120 to be offered in:• 5x5 QFN (w/integrated 70V Vboost)• Hermetic, WL capped bare-die
Functional Block Diagram
CTRL
RFC
RF2RF1
5mm
5m
m
(QFN) (QFN)
(QFN)
Menlo Microsystems Proprietary
Menlo DMS Technology vs. RF Electromechanical
MM5120SPDT
EM (SMT) SPDT
EM (coax)SPDT DMS Benefits
Power Handling 25W (CW)>150W (pulsed) 50W 50W-100W
Hot Switch <0dBm No No Hot-switch capable
Isolation >25dB @ 6GHz 25dB 70dB
Linearity (IP3) >85dBm 62dBm
DC Capable Yes Yes Yes
Max Frequency 12GHz 6GHz 18GHz
Insertion Loss 0.35dB @ 6GHz 0.8dB @ 6GHz 0.2dB @ 6GHz
Power Consumption <25pA 140mW 420mA @ 12V > 1,000,000x lower power
Reliability >3B operations 10M 1-5M 1000x to 3000x more reliable
Switching speed <10us 3-5ms 10-20ms 1000x faster
Size/Ch. Density 25mm3
5 x 5 x 1 mm QFN1280mm3
16 x 8 x 10 mm SMT30,000mm3
50 x 50 x 12 mm COAX >95% reduction in VOLUME
Offering the power handling and RF/electrical performance of an RF EM relay with the size, weight, reliability, and speed of solid-state
Menlo Microsystems Proprietary
MM5120 Applications
Test & Measurement
• General purpose RF muxing• Digital step attenuator• Replacing mechanical relays which
are big, slow, and short lifetime
Mil Radio
• General purpose RF muxing• Switched filter banks• Replacing mechanical relays which
are big, slow, and short lifetime
Set-Top-Box
• Docsis3.1• High-performance RF switch• Ultra-high linearity• Replacing SOI devices
Satellite/Cable Matrix
• Huge (2048x2048) switch matrix• Replacing low density mechanical
relays which take up racks of board space
29
Menlo Microsystems Proprietary
MM5120 Applications
Menlo Microsystems Proprietary
MM5120 Applications
Menlo Microsystems Proprietary
From DC to mmWave
Initial simulations of DMS unit cell show mmWave performance is achievable
3D simulation of Menlo DMS unit cell switch
WL Glass Cap w/TGV CSP
MM3100 WL Glass Cap
in 6x6mm QFN
Advances in packaging will enable DMS products to achieve much higher BW
Everything gets better from RF view:• Lower parasitics• Lower bulk resistance/IL• Improved thermals, better power
handling
Menlo Microsystems Proprietary
Advanced Materials Low-Cost Packaging Supply Chain
1Business Name.
Corning Restricted ..
Precision Glass Solutions 1.
Corning Restricted ..
Through Glass Via Solutions
1
Precision glass with precision holes for semiconductor packaging
Product Applications
End Market Applications
Corning Value Proposition
Why Glass
• RFFE (Radio Frequency Front End)
• Ohmic MEMS Switch
• Interposer
• Consumer Electronics
• Ability to deliver glass at desired thickness level – from 100μm to 700μm - enables shorter line length
and smaller packaging
• Low insertion loss material- savings in battery power / cost
• Pristine surface quality- enables fine line spacing
• Glass Strength - reliability maintained after
downstream processing
• Capability- available in wafer or panel
format
- design according to customer pattern
• Industry partnerships
.
© 2017 Corning Incorporated ..
2Business Name.
Corning Restricted ..
Precision Glass Solutions 2.
Corning Restricted ..
TGV formation and metallization
Corning and the industry have made significant progress
Glass size:Wafers: 100mm=>300mmPanels: à508mm*508mm
Thickness: 100-700µmPositional Accuracy: <+/-5µmPitch: Minimum 2x hole dia.Hole Diameter: 100µmà10µm
Throughput:Improved 10x in 2 yearsHigh-volume (10X) by 2018
Supply chain:Several global companies investing in glass cutting, handling and metallization equipment
SUPERIORHOLEQUALITYPrecision Holes
.
© 2017 Corning Incorporated ..
WL Glass Cap w/TGV
1x1mm CSP
MM7100
MEMS in hermetic9x9mm package
WL Glass Capin 6x6mm QFN
MM3100
2018/2019
WL Glass Cap w/TGVer)
4x4mm SIP
2016 2017
Corning + Menlo partnership on TGV packaging enables the scale-up of a low cost supply chain
Power IoT Products
Menlo Microsystems Proprietary
Digital-Micro-Switch Advantages for Switching & Protection
Fast, Reliable, Small & Arc-free switching
•Technology scalable from relays to protection•Voltage and current scalable, 1000V+ and 50A+•>100M operations (without zero crossing)•Arc free switching on demand, < 10us switching•Relays <1cm3 / Breakers <10cm3
•AC & DC equivalent architecture•Passively cooled, no heat sink required• Integrated current sensing & over-current protection•1st Type 3 protection technology (resettable)
Disruptive protection and relay technology in chip scale format
35
Menlo Microsystems Proprietary
10X more industrial internet machines than people in the world, waiting to be connected
3
Smart Power Relays with DMS technology can enable the Industrial IoT vision
Industrial
IoT
Brilliant Power
Brilliant Factory
Logistics Optimization
Factory Optimization
Smart Grid
ConnectedMachines
Hospital Optimization
Real-timeNetworkPlanning
Brilliant Hospital
Brilliant RailYard
Shipment Visibility
© GeneralElectricCompany,2014. AllRightsReserved.
Intelligent Medical Devices
Menlo Microsystems Proprietary
Key Technologies:Electromechanical, SS
Market Segments:Industrial
Markets - Power Relay
Key Technologies:SSR, Electromagnetic,
Reed
Market Segments:Industrial, Telecom, Automotive,
Home Automation
AC/DC Printed Circuit Board
Relays
Key Technologies:Electromechanical, SS
Market Segments:UPS, PV, Wind, EV Charging
AC/DC Low Voltage
Contactors
Key Technologies:Electromechanical, SS
Market Segments:Residential, Industrial
Mini-Circuit-Breaker & RSD
(<100A)
AC/DC Electronic Control Relays
Menlo Microsystems Proprietary
Power Relay – Size, Weight & Power for Industrial IoT“Smart Power Relay” Replacing SSR and EM Relay
Menlo DMS Technology SS DC
RelayEM Relay
Benefits:Size: < 6mm x 40mm x 25mm
6,000 mm3 / channel
(no heat sink)
45mm x 57mm x 22mm
56,430 mm3 / channel(w/o heat sink)
44mm x 35mm x 35mm
53,900 mm3 / channel
•85% reduction in volume
•90% reduction in weight
•No heavy heat sink
•Higher density possible
Turn on time: <20us <100us 30ms •5x faster than SSR
•>1000x faster than EMR
Power Consumption:
10mW <60mW 1.5W •80% reduction from SSR
•150x reduction from EMR
Lifetime: 10B operations, decades of life
>10B operations, decades of life
100k operations •Lifetime similar to SS
technology
Features: Current Sense and over-current protection
•Extra features for
monitoring & protection
Ratings: 200V/10A DC 200V/10A DC 240V/10A AC •Scalable to higher V/I
3” x 5”
40mm x 25mm SMT
Low losses & power handling of EMR with speed, size, cost, and reliability of SS
Home, Auto, Battery, Industrial, UPS, Solar,
38
Menlo Microsystems Proprietary
DMS Power Relay Prototype (Rev0)
MEMS
Driver
Q1MEMS
Switch
IS IQ1
ILOAD
Q1 Gate
Control
P1
P2
Vg1
C1
C2
On-Off
Signal
Power
Circuits
MEMS Relay
I sense
Isolation
Power
On-Off
Parallel Voltage Limiting Circuit
Voltage and current: 200V / 10A
On resistance: < 30mΩ
Over current protection: 15A
Operating frequency: Min 10KHz
Isolation voltage: 2,500Vac (higher if needed)
Control voltage and current: 5V / 1mA
Package: SMT LGA:40mm x 25mm x 3mm
Key Features:• Much lower on resistance (~30mΩ vs. ~200mΩ for SSR)
• Isolation voltage of 2,500Vac (higher if needed)
• Over current protection (for higher reliability)
• 10x lower control current (~1mA versus ~10mA)
• 10x higher operating frequency (>10KHz versus 1KHz)
• Current sensing information available at control side
• Surface mount component, no heat sink needed
• No de-rating up to 85C
Target specs
39
*Over 20 granted patents & applications around system-level, MEMS-based industrial relay & breaker designs
Menlo Microsystems Proprietary
Temperature vs. Current load
5A 7.5A 10A 11A
MEMS#14 37.9 51.8 71.9 79.9
MEMS#15 35.1 45.6 61 67.4
MEMS#16 39.9 56.2 79.5 89.3
0
10
20
30
40
50
60
70
80
90
100
Tem
per
atu
re (
deg
ree)
Temperature of each MEMS
High current handling capable, and scalable, no heat sink needed
40
Menlo Microsystems Proprietary
40mm
25mm
Multi-Chip-Module surface mount SIP• 2-4 DMS switches• 3-4 active ICs• <10 passives
• Ability to shrink form factor significantly with advanced packaging
DMS Power Relay – Integration Strategy
With advanced packaging (TGV) and simple integration, DMS technology can create disruptive industrial relay and controls products
2017 2018-2019
41
DMS Power Relay Proto EVK
Menlo Micro Proprietary & Confidential
Menlo provides proactive support at all stages of design
Data Sheets & Application Notes
Evaluation Kits (EVKs) provide the Customer with first-level product validation and working metrics
Menlo Models provide a direct link between the device design and systems design
ADS/ S-parameters
Corporate device & systems design engineering support
Schematic capture & layout analysis
Design review
42
Menlo Micro Technical Support
Menlo Micro is focused on supporting each stage of Customer design & manufacturing
Menlo Micro Proprietary & Confidential
Menlo Micro’s “roots run deep” as a Legacy of GE Innovation & Reliability
Menlo’s Management Team has the experience & history of success to support & grow our targeted Customers
Menlo’s PROVEN key differentiation enables small size & high performance within our targeted markets & applications
• Medical
• Power RF Switch for Mil Radio, Space & Industrial Applications
• Power IoT
Menlo is SHIPPING in VOLUME !
We are focused on a select-few (Strategic) Customers
How can we support YOU?
43
The “Bottom Line”
THANK YOU!
www.menlomicro.com