excel precision laser metrology system 121511 (1)
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EXCEL PRECISION
LASER METROLOGY SYSTEM
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Excel Precision Corporation Excel Precision is a privately owned and independent Company
dedicated to the design and manufacture of dual-frequency laser
interferometer system for precision stage motion control, CNC
machine calibration, and laboratory frequency (wavelength)
standard. As we speak, more than 1,000 laser interferometer
systems are being used daily for various applications.
The full technology s backed by specialized research and
development and many years of real time, on site experience of
product installations. Excel Precision currently has 20+ issued
and pending patents in the US and PCT.
The Excel ethos is to achieve a pre-eminent position within its
chosen market places by producing cost-effective products, highly
reliable products, and superior customer service to the highest
possible standards.
Company Email: [email protected]
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Excel’s laser interferometer system is one of the most
accurate position measurement device. It is widely used in
semiconductor manufacturing, LCD flat panel
manufacturing, computer hard disc drive manufacturing, and
machine tool calibration applications.
The 1000A laser interferometer system uses heterodyne
(frequency modulation) technique to process the measured
signal. This technique filters out low frequency noise, such
as mechanical micro-vibrations, which results in better
accuracy when the XY-stage zeroes in to the target position.
Each year, hundreds of new users are performing metrology
measurement with Excel’s laser interferometers.
Laser metrology expert:
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Stage motion control Factory that manufactures and needs to calibrate
glass scale / encoder Laboratory that conducts spectroscopy study Laboratory that uses wavemeter Laboratory that requires frequency standard Shops uses CMM’s and CNC’s. Gages / Tools / Parts certification organization. Quality control department. Stage producer Tables that require flat top surface
WHO IS USING LASER INTERFEROMETER ?
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Zeeman effect causes Neon to radiate two frequencys, depending on the electronic spin state of a particular atom. The difference of these two frequencies is used as the carrier for heterodyne signal detection.
Neon natural atomic radition frequency
Original Zeeman split frequencyWhen stage moves towards the interferometer, the measuring frequency will increase because of Doppler effect.
Original Zeeman split frequency
When stage moves away from the interferometer, the measuring frequency will decrease because of Doppler effect.
Achieving the best accuracy
by using heterodyne signal
processing with Zeeman laser
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Laser Head:
To facilitate the heterodyne technique
signal processing, the laser beam is
equipped with a carrier frequency (the
natural frequency of neon radiation at
633nm) and a modulated frequency
(produced by Zeeman effect to the
laser head).
Frequencies radiated from a Zeeman
laser are symmetric with respect to the
neon atomic line center. They are
accurately measured to a few parts of a
billion.
Depending on laser head model and
option, as many as 8 axes can be
measured with a single laser head.
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Optics:
With special assembly process,
Excel’s optical products can be
used in both air and vacuum
environments. Thousands of
Excel’s interferometer optics
are used in vacuum chamber
for stage motion control each
day.
Excel also assist the user to
specify and select the best
stage mirrors to achieve
maximum measurement
accuracy.
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Electronics:
Excel offers broad variety of electronics products for user
to select the interface and data format for his measurement
needs:
Interface: PCI, Binary, USB
Data format: Up/Down Pulse, A-Quad-B, 36-bit parallel
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Receiver:
High sensitivity detection level can detect signal as low
as 10 micro-watts which allows as many as 6 axes of
measurement simultaneously.
Optional fiber optic link capability provides great
flexibility of stage design.
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System Integration:
In addition to standard
products, Excel also provides
services for integrating
complete stage assembly.
Excel has extensive
experience for assembling
and testing complete stages in
vacuum chamber for e-beam
lithography.
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Optical Lithography
e-beam Direct Write Lithography
SEM
LCD Flat Panel Display
Photomask Making
Laser Photomask Writer
Semiconductor
segments that Excel
Precision serves:
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Computer Hard Disc Drive (HDD) Manufacturing
Measure accuracy of
placement of tracks (R)
from center. R must be the
same value all the way
around.
Accuracy desired = 10 nm
60 mm
R
Industries that Excel Precision serves:
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6 Degrees of Freedom measurement for CNC machines
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CONTACT:
EXCEL PRECISION 3255-1 Scott Blvd., #101Santa Clara, CA 95054Telephone: 408-727-4260Fax: [email protected]
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