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FAB Automation Migration
How to Move from Legacy to New Solutions
Abstract
• Europe’s Semiconductor FABs are subject to continuous improvement to keep track with
newest production technology and to raise productivity and yield.
• Legacy IT systems are often a stumbling block for innovation. Removing this block can unleash
improvements that have been postponed for the long times.
• Replacing legacy ITsystems in a 7X24 production is a big challenge. You have to find not only a
solution that covers your past and future requirements, you also must plan the migration to the
new systems very carefully to avoid any interruption of your FAB operations.
• The systems in scope for such replacement projects include MES, process and equipment
engineering systems, planning systems and equipment integration. But the benefit is worth the
efforts. New Systems can tremendously increase your efficiency and yields.
• This presentation shows up proven ways to run such migration projects to move from legacy
systems to comprehensive and flexible IT solutions.
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© znt GmbH 2012 Semi&Solar M05.00 / Page 3
Totally integrated solutions for your production
ERP Integration
Control level (EQ-Integration)
On-Site
Support
Consulting
Analyse Design Customising
Development
Installation
Integration
Semiconductor & Solar Automotive Chemistry Medical
Totally integrated solutions for your production
head quarter:
Grünwald / Munich
Villach / Austria
Dresden
Burghausen
Singapore
Penang / Malaysia
San Francisco / USA
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© znt GmbH 2012 / Page 4
Expectation
Yield enhancement
Quality Improvement
Throughput
Maintainability
Lower TOC
Process Redesign ?
Migration Project Key Parameters
Cost
Software License Cost
Maintenance Cost
Migration Cost
Process Redesign Cost
Impact on production
production interruption
Process stability
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© znt GmbH 2012 / Page 5
make it happen: ROI Calculation
Jan 1
2
Mrz
12
Mai 12
Jul 12
Sep 1
2
Nov 1
2
Jan 1
3
Mrz
13
Mai 13
Jul 13
Sep 1
3
Nov 1
3
Jan 1
4
Mrz
14
Mai 14
Jul 14
Sep 1
4
Loss of Innovation (delta-Max)
Loss of Innovation(minimum)
SW Maintenance
Operations
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© znt GmbH 2012 / Page 6
Project Model
Done
Failed
Start
Define
Requirements
Vendor1
Project
Proposal
run project
RFP
Vendor1 Vendor-1
Start
Requirements
System / Project
Proposal
RFP
Vendor1 Vendor1 Vendor-1
Done
Requirements
Done Done
Done
run project
Iterations
evaluate
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© znt GmbH 2012 / Seite 7
Structure project into manageable steps
Start with training of Kernel Team and simple Implementation
Adjust requirements with each iteration
short release cycles
the user shall get involved strongly and can share a strong sense of identity with the
project
Agile implementation process
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© znt GmbH 2012 / Page 8
Big Bang
Parallel
Step by Step
Migration Strategy
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© znt GmbH 2012 / Page 9
Migration Concepts
Step by Step
functional steps
product by product steps
by System
by …xy…
Bridge Technology Examples
SAP PI
TIBCO
BizTalk
Individual programming
Move over scenario
Analyse (monitoring only)
run in parallel (passive mode)
switch of old system
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© znt GmbH 2012 / Page 10
MES Migration
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© znt GmbH 2012 / Page 11
Mapping Levels of the Migration Bridge
Message Mapping
1:1
n:m
Sequence Mapping / Flows
Field Mapping
Format, Type, Length, Optional, Variants
Content Mapping
Formats, Error Codes, Enumerations
Mapping
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© znt GmbH 2012 / Page 12
EES Migration Concepts
Standards:
E4 (SECS-I)
HSMS, E5 (SECS-II)
Interface A
E54 Sensor / actor Interface (Modbus
and ProfiNet)
Interface Types
SEMI Standard
File
SQL
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Equipment
zip – znt integration platform for Data Collection
Sensors
Z..... linx
Features
Split SECS Interface to Host and EES
consumer with SECS interface (Y-
TAP)
Split SECS Interface to Host and EES
consumer with Interface A (Interface A
emulation)
Merge Sensor data (SEMI E54, OPC)
into SECS Interface to Host and EES
(inverse Y-TAP)
Merge Sensor data into SECS
Interface to Host and split to EES
consumer with Interface A (X-TAP)
Spool Data collection
Customer specific EES consumer
interfaces
Configurations:
Hardware box configuration
Pure software configuration to run on
(virtual) server
Pure Java, run on Windows, Linux, ….
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SECS
Equipment
SECS
Data Collection solution
zlinx
Sensors
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BISTEL EES Suite, integrated by zlinx
PeakPerformance™ Framework
Central EE DB
Central control and analysis Modules
eRMS eMPA ePMM
eFDC eSPC eR2R
PCS
eVMS
BISTEL EES Suite
Z..... linx
Equipment Sensors
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© znt GmbH 2012 / Page 16
znt Products in FAB Environment
Equipment Integration
ERP
Production Planning
MP ManufacturingPlanner
Scheduling
EES
& Yield
MES
Your contact at znt:
znt Zentren für Neue Technologien
GmbH, Mautnerstr. 268,
D-84489 Burghausen
Bernhard Marsoner, CEO
Office: +49 89 641808-0
E-Mail: [email protected]
Hans Mayer, COO
Office: +49 8677 9880-44
Mobil: +49 170 922 56 19
E-Mail: [email protected]
Gerald Rampf
Application & Sales
Mobil: +49 170 922 56 05
E-Mail: [email protected]
Web: www.znt-Richter.com
Thank you for your
Attention!
End: ? hMa+Ajo en
Hall 2, Booth 2050 (Silicon Saxony)