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1 Fan-Out Solutions: Today, Tomorrow … the Future Ron Huemoeller Corporate Vice President, WW RnD & Technology Strategy

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Page 1: Fan-Out Solutions Solutions: Today, Tomorrow ... RDL & Copper Pillar Bump (3D Only) Chip Attach ... •Time to reach the allowable max die temperature when a 9 watt duty cycle

1

Fan-Out Solutions:

Today, Tomorrow … the Future

Ron HuemoellerCorporate Vice President, WW RnD & Technology Strategy

Page 2: Fan-Out Solutions Solutions: Today, Tomorrow ... RDL & Copper Pillar Bump (3D Only) Chip Attach ... •Time to reach the allowable max die temperature when a 9 watt duty cycle

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In the Beginning eWLB

Page 3: Fan-Out Solutions Solutions: Today, Tomorrow ... RDL & Copper Pillar Bump (3D Only) Chip Attach ... •Time to reach the allowable max die temperature when a 9 watt duty cycle

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Fan Out Packaging Emerges

• Introduction of Fan Out (eWLB)

– Marketed as package replacement for fcCSP

– Limited in application and use at initial stages – 54M units shipped in ’09

– 284M units shipped in 2015… far short of earlier predictions at that time

Fan Out market struggled

Page 4: Fan-Out Solutions Solutions: Today, Tomorrow ... RDL & Copper Pillar Bump (3D Only) Chip Attach ... •Time to reach the allowable max die temperature when a 9 watt duty cycle

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Today (2016)

Page 5: Fan-Out Solutions Solutions: Today, Tomorrow ... RDL & Copper Pillar Bump (3D Only) Chip Attach ... •Time to reach the allowable max die temperature when a 9 watt duty cycle

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2016 Has Become the Year of Fan Out

• Expected ~ 2 billion packages to ship this year

– So what changed?

Page 6: Fan-Out Solutions Solutions: Today, Tomorrow ... RDL & Copper Pillar Bump (3D Only) Chip Attach ... •Time to reach the allowable max die temperature when a 9 watt duty cycle

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Mobile Market: Space & Performance

• The need for more space and performance are key triggers

• Traditional Fan Out

– More space for larger battery

• Thinner and smaller than fcCSP

– Convergence of WLCSP to Fan Out

• Same BGA pin out on advanced nodes

to address die shrink

• Advanced Fan Out

– InFO

– Performance!

• Electrical, power, thermal

Page 7: Fan-Out Solutions Solutions: Today, Tomorrow ... RDL & Copper Pillar Bump (3D Only) Chip Attach ... •Time to reach the allowable max die temperature when a 9 watt duty cycle

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WLFO Traditional Applications and Drivers

• Main applications

– Mobility

• CODEC

• RF Switch/Transceiver

• PMIC

– Automotive

• RF radar

• Connectivity

• Primary drivers

– Form factor reduction

– Fine feature size (advanced photo lithography)

– Multi-die and 3D capability

– Strong electrical performance (mmW capable)

CODEC

RF Transceiver

MCU

PMIC

NFC

Page 8: Fan-Out Solutions Solutions: Today, Tomorrow ... RDL & Copper Pillar Bump (3D Only) Chip Attach ... •Time to reach the allowable max die temperature when a 9 watt duty cycle

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Advanced Fan Out Value Proposition

• Reduced Z-height & form factor

• Enhanced signal integrity

• Superior impedance matching

• Optimized power distribution

• Improved thermal performance/junction temperature

• Ability to address multi-die heterogeneous integration (SiP)

Page 9: Fan-Out Solutions Solutions: Today, Tomorrow ... RDL & Copper Pillar Bump (3D Only) Chip Attach ... •Time to reach the allowable max die temperature when a 9 watt duty cycle

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Simplified Wafer Level Process FlowAdvanced Fan Out – Chips Last/RDL First

RDL & Copper Pillar

Bump (3D Only)

Chip Attach & UF

Carrier

Wafer Mold

Carrier

Top Side Routing

For Memory Interface

Carrier Remove

Carrier

RDL for Memory Interface

40 µm Pitch

< 0.30 mm

Total Height

POP Pillars

200 µm Pitch

SWIFT™

Page 10: Fan-Out Solutions Solutions: Today, Tomorrow ... RDL & Copper Pillar Bump (3D Only) Chip Attach ... •Time to reach the allowable max die temperature when a 9 watt duty cycle

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Tomorrow

Page 11: Fan-Out Solutions Solutions: Today, Tomorrow ... RDL & Copper Pillar Bump (3D Only) Chip Attach ... •Time to reach the allowable max die temperature when a 9 watt duty cycle

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Fan-Out WLP Market Projections

284

2,001

3,481

5,113

5,8316,240

0

1,000

2,000

3,000

4,000

5,000

6,000

7,000

2015 2016 2017 2018 2019 2020

MillionsofPackages

©2016TechSearchInternational,Inc.

• Device types driving HVM

include RF transceiver

and switch, PMIC,

CODEC, automotive

radar, connectivity (IoT)

modules, Apple's

application processors

made by TSMC and

application processors

from other companies in

future

• Future memory for top

PoP

• Many multi-die products in

future

Page 12: Fan-Out Solutions Solutions: Today, Tomorrow ... RDL & Copper Pillar Bump (3D Only) Chip Attach ... •Time to reach the allowable max die temperature when a 9 watt duty cycle

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Fan Out Market 2017

• Traditional Fan Out gaining momentum

– Large activity in mobile market

– RFIC, PMIC, CODEC

Courtesy of TechSearch International, Inc.

Product Body Size Total Units (M)

RFIC 3 mm

See TechSearch

CODEC 4 mm

PMIC 6 mm

Other mixed

Totals .

Page 13: Fan-Out Solutions Solutions: Today, Tomorrow ... RDL & Copper Pillar Bump (3D Only) Chip Attach ... •Time to reach the allowable max die temperature when a 9 watt duty cycle

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Projected Wafer Demand for FO-WLP (300mm equivalents)

528

1,345

2,929

6,261

8,669

9,292

0

1,000

2,000

3,000

4,000

5,000

6,000

7,000

8,000

9,000

10,000

2015 2016 2017 2018 2019 2020

Thousandsof300mm-Equivalent

ReconstitutedW

afers

©2016TechSearchInternational,Inc.

• Device types driving HVM

include RF transceiver

and switch, PMIC,

CODEC, automotive

radar, connectivity (IoT)

modules, application

processors

• Assumes 80 µm die street

• Assumes high-yield

process of 99%

Page 14: Fan-Out Solutions Solutions: Today, Tomorrow ... RDL & Copper Pillar Bump (3D Only) Chip Attach ... •Time to reach the allowable max die temperature when a 9 watt duty cycle

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Process

Emergence of Advanced Fan OutSWIFTTM

Cycle time & yield

Flexibility &

scalability

Performance

RDL first

Chip attach last

Package variants –

3D, SiP etc.

Multi-die, passives

Flexible thickness

Shorter cycle time

RDL wafer pre-build

Known good RDL wafer

Thermal

Electrical

Reliable

Page 15: Fan-Out Solutions Solutions: Today, Tomorrow ... RDL & Copper Pillar Bump (3D Only) Chip Attach ... •Time to reach the allowable max die temperature when a 9 watt duty cycle

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Advanced Fan Out Comparison

Key AttributesFan Out

SWIFT™

fcCSP

Exp Die PoP

fcCSP

Fan-in PoPSWIFT™ Benefits

Package

Thickness0.453 mm 0.47 mm 0.660 mm

4% reduction

31% reduction

Layer Count 3 or 4 3 5

Construction

3 layers on bottom +

1 layer on top

(if fan in)

3 layer substrate

on bottom

3 layer substrate

on bottom +

2 layer substrate

on top

Same as exposed die

Fewer layers

Electrical

Reduced signal width

allows flexibility in

routing/impedance

control

Predetermined

location at edge of

package

Fixed signal widths

and difficulty in

impedance control

Flexibility, reduced

trace length, reduced

DC resistance & AC

loss

Interposer

Interconnect to

Package Edge

50 µm 200 µm 200 µm 75% Reduction

Page 16: Fan-Out Solutions Solutions: Today, Tomorrow ... RDL & Copper Pillar Bump (3D Only) Chip Attach ... •Time to reach the allowable max die temperature when a 9 watt duty cycle

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DDR4: Signal Integrity Comparison

Key AttributesFan Out

SWIFT™

fcCSP

Exp Die PoPSWIFT™ Benefits

Eye Diagram

DDR4 @ 6 Gbps

Eye Amplitude 548 mV 451 mV 3.0x Improvement

Eye Height 481 mV 339 mV 1.4x Improvement

Eye Width 164 ps 158 ps 4.0x Improvement

Pk-Pk Jitter 3.7 ps 9.8 ps 2.2x Improvement

Rise/Fall Time 64 ps 75 ps 1.2x Improvement

Page 17: Fan-Out Solutions Solutions: Today, Tomorrow ... RDL & Copper Pillar Bump (3D Only) Chip Attach ... •Time to reach the allowable max die temperature when a 9 watt duty cycle

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DDR4: Signal Integrity Comparison

Key AttributesFan Out

SWIFT™

fcCSP

Fan-In PoPSWIFT™ Benefits

Eye Diagram

DDR4 @ 6 Gbps

Eye Amplitude 638 mV 444 mV 5.0x Improvement

Eye Height 551 mV 318 mV 5.0x Improvement

Eye Width 159 ps 145 ps 3.0x Improvement

Pk-Pk Jitter 7.9 ps 14.1 ps 1.8x Improvement

Rise/Fall Time 63 ps 75 ps 1.2x Improvement

Page 18: Fan-Out Solutions Solutions: Today, Tomorrow ... RDL & Copper Pillar Bump (3D Only) Chip Attach ... •Time to reach the allowable max die temperature when a 9 watt duty cycle

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SerDes: Signal Integrity Comparison

Key Attributes SWIFT™ fcCSP

Exposed Die PoPSWIFT™ Benefits

Eye Diagram

PCIe3 @ 8 Gbps

Eye Amplitude 998 mV 995 mV 4.0x Improvement

Eye Height 954 mV 882 mV 3.0x Improvement

Eye Width 125 ps 124.5 ps 0.5x Improvement

Pk-Pk Jitter .01 ps .07 ps 6.0x Improvement

Rise/Fall Time 29 ps 32 ps 1.4x Improvement

Page 19: Fan-Out Solutions Solutions: Today, Tomorrow ... RDL & Copper Pillar Bump (3D Only) Chip Attach ... •Time to reach the allowable max die temperature when a 9 watt duty cycle

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SerDes: Signal Integrity Comparison

Key Attributes SWIFT™ fcCSP

Exposed Die PoPSWIFT™ Benefits

Eye Diagram

PCIe3 @ 16

Gbps

Eye Amplitude 995mV 993 mV 2.0x Improvement

Eye Height 826 mV 604 mV 2.3x Improvement

Eye Width 55 ps 50 ps 5.0x Improvement

Pk-Pk Jitter 2.9 ps 4.8 ps 1.8x Improvement

Rise/Fall Time 19 ps 31 ps 1.5x Improvement

Page 20: Fan-Out Solutions Solutions: Today, Tomorrow ... RDL & Copper Pillar Bump (3D Only) Chip Attach ... •Time to reach the allowable max die temperature when a 9 watt duty cycle

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SerDes: Signal Integrity Comparison

Key Attributes SWIFT™ fcCSP

Fan-In PoP (MEP)SWIFT™ Benefits

Eye Diagram

PCIe3 @ 8 Gbps

Eye Amplitude 1098 mV 1001 mV 5.0x Improvement

Eye Height 934 mV 906 mV 3.3x Improvement

Eye Width 122 ps 118 ps 4.0x Improvement

Pk-Pk Jitter 2.5 ps 6.25 ps 2.5x Improvement

Rise/Fall Time 36 ps 42 ps 1.4x Improvement

Page 21: Fan-Out Solutions Solutions: Today, Tomorrow ... RDL & Copper Pillar Bump (3D Only) Chip Attach ... •Time to reach the allowable max die temperature when a 9 watt duty cycle

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SerDes: Signal Integrity Comparison

Key Attributes SWIFT™ fcCSP

Fan-In PoP (MEP)SWIFT™ Benefits

Eye Diagram

PCIe4 @ 16

Gbps

Eye Amplitude 1009 mV 1007 mV 0.1x Improvement

Eye Height 799 mV 361 mV 9.0x Improvement

Eye Width 55 ps 53.9 ps 1.0x Improvement

Pk-Pk Jitter 7.8 ps 7.8 ps equivalent

Rise/Fall Time 26 ps 41 ps 1.4x Improvement

Page 22: Fan-Out Solutions Solutions: Today, Tomorrow ... RDL & Copper Pillar Bump (3D Only) Chip Attach ... •Time to reach the allowable max die temperature when a 9 watt duty cycle

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Power Integrity: Lower PDN Impedance

• PDN Impedance: Improved by 11% vs FC PoP (at 250 MHz)

– SWIFT™: Substrate eliminated resulting in reduced pad-BGA wiring length

– Low PDN Impedance → High power integrity

FC PoP

PCB PCB

SWIFT™FC PoP

SWIFT™

89%

Impedance

Reduction

250.0

MH

z

Page 23: Fan-Out Solutions Solutions: Today, Tomorrow ... RDL & Copper Pillar Bump (3D Only) Chip Attach ... •Time to reach the allowable max die temperature when a 9 watt duty cycle

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Noise: Signal Integrity Comparison

Insertion Loss

SWIFT’s controlled impedance has a

wideband low pass filter effect –

essential for PCIe and Ethernet

applications

Cross-talk

Improved by

6 dB @ 2 GHz

Return Loss

Improved by

6 dB @ 2 GHz

Page 24: Fan-Out Solutions Solutions: Today, Tomorrow ... RDL & Copper Pillar Bump (3D Only) Chip Attach ... •Time to reach the allowable max die temperature when a 9 watt duty cycle

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SWIFT™ vs FC PoP Thermal SimulationSteady State Analysis

79.6

100.6

76.4

95.6

60

70

80

90

100

110

JEDEC Mobile phone

Max die temperature (3W dissipation)

FI-PoP SWIFT

15.6

21.6

14.7

20.2

10

15

20

25

JEDEC Mobile phone

℃/W

Theta JA

FI-PoP SWIFT

Max Temp C

(3W)FC PoP SWIFT Delta

Delta

%

JEDEC 79.6 76.4 -3.2 -4%

Mobile Phone 100.6 95.6 -5.0 -5%

Theta JA

C/WFC PoP SWIFT Delta

Delta

%

JEDEC 15.6 14.7 -0.9 -6%

Mobile Phone 21.6 20.2 -1.4 -6%

Page 25: Fan-Out Solutions Solutions: Today, Tomorrow ... RDL & Copper Pillar Bump (3D Only) Chip Attach ... •Time to reach the allowable max die temperature when a 9 watt duty cycle

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20

40

60

80

100

120

140

0 10 20 30 40 50 60

Te

mpera

ture

, ℃

Time, sec

JEDEC

FI-PoP SWIFT

20

40

60

80

100

120

140

0 10 20 30 40 50 60

Te

mpera

ture

, ℃

Time, sec

Mobile Phone

FI-PoP SWIFT

• Time to reach the allowable max die temperature when a 9 watt duty cycle is applied

• The assumed allowable max die temperature is 105C

• SWIFT extends the time to reach 105C by approximately 9 and 16 seconds as compared to

conventional substrate FC PoP

JEDECMobile

Phone

fcPoP 19.5 sec 20.5 sec

SWIFT 28.2 sec 36.8 sec

Gain

8.7 sec 16.3 sec

45% 80%

9 seconds 16 seconds

Time for die temp to reach 105C

(9W power dissipation)

SWIFT™ vs FC PoP Thermal SimulationTransient Analysis

Page 26: Fan-Out Solutions Solutions: Today, Tomorrow ... RDL & Copper Pillar Bump (3D Only) Chip Attach ... •Time to reach the allowable max die temperature when a 9 watt duty cycle

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Advanced Fan Out

• SWIFTTM and InFO

– Mobility

• Apps-Processor

• Baseband (Logic + Memory)

• Power Management

• Display Driver (SiP)

• Drives Performance

– Reduced form factor

– Enhanced signal integrity

– Superior impedance matching

– Optimized power distribution

– Improved thermal performance

Page 27: Fan-Out Solutions Solutions: Today, Tomorrow ... RDL & Copper Pillar Bump (3D Only) Chip Attach ... •Time to reach the allowable max die temperature when a 9 watt duty cycle

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The Future

Page 28: Fan-Out Solutions Solutions: Today, Tomorrow ... RDL & Copper Pillar Bump (3D Only) Chip Attach ... •Time to reach the allowable max die temperature when a 9 watt duty cycle

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Future: Traditional Fan Out … which direction?Relative Cost Comparison

fcCSP

Fan Out [1ML]

Higher $

Lower $WLCSP

Die Size+

0.00 mm

(WLCSP)

Die Size+

0.50 mm

fcCSP

Fan Out [1ML]

Die Size+

0.25 mm

Die Size+

1.00 mm

Die Size+

1.50 mm

Die Size+

3.00 mm

As package to die ratio

increases, there is more

disparity between Fan Out and

low cost fcCSP

Die Size+

2.00 mm

Die Size+

2.50 mm

Approximate

price parity

Page 29: Fan-Out Solutions Solutions: Today, Tomorrow ... RDL & Copper Pillar Bump (3D Only) Chip Attach ... •Time to reach the allowable max die temperature when a 9 watt duty cycle

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Future: Advanced Fan Out Package RoadmapAll About Performance

Available 2016 2017 2018

Single Die PoP• 3D tall Cu interconnect

• Land side cap

Multi-Die PoP• 3D tall Cu

interconnect

• Land side cap

• Fan-in RDL

Wafer Level SiP• Active and passive

components

• Sputtered EMI shield

SWIFT™ on Substrate• Split logic

• 3D Interconnect

• Land-side cap

Page 30: Fan-Out Solutions Solutions: Today, Tomorrow ... RDL & Copper Pillar Bump (3D Only) Chip Attach ... •Time to reach the allowable max die temperature when a 9 watt duty cycle

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Summary

• Fan out packaging addresses needs from very small, low I/O devices

all the way up to large die, high end processors

• Fan out enables the most complex SiP solutions, such as mobile RF

front-end or MEMS technologies, with package form factor reduction

• Traditional fan-out will continue to be pressured by lower cost

substrate technologies

• Advanced fan out is uniquely suited:

– to improve product performance

– to handle multiple die from different functional blocks

(analog, mixed-signal, digital)

– to enable very small form factors

Page 31: Fan-Out Solutions Solutions: Today, Tomorrow ... RDL & Copper Pillar Bump (3D Only) Chip Attach ... •Time to reach the allowable max die temperature when a 9 watt duty cycle

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Thank [email protected]