four point probe and hall measurement adviser : kuen-hsien wu student : wei-ming lin 1
TRANSCRIPT
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Four Point Probe and Hall measurement
Adviser: Kuen-Hsien WuStudent:Wei-Ming Lin
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Outline
1. Introduction
2. Principle
3. Operation
4. Conclusions
5. References
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IntroductionFour-point probe measurement instrument mainly used for measuring the resistance of semiconductor thin films, that sheet resistance.
Sheet resistance is one of the important characteristics of a conductive material, particularly a conductive film.
Sheet resistance will be the film thickness、 grain size Inch and the impurity concentration and other factors.
Therefore, in the course of the process, often carefully monitor sheet resistance .
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Principle
V
I
S S S
d
W
sample
ρ = V/I.W . CF
Rs = V/I . CF
As d/s> 20 → CF~4.54
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Operation
四點探針機台
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Operation
上機台輸入固定電流
下機台量測出電壓
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Operation
sample
橫桿下拉
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Operation
0.154767mV / 1 μ A × 4.54 =701Ω
Rs = 4.54 V/I
藍點要恆亮
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Conclusions
1 Sample size and shape does not affect the measurement results, therefore, the sample does not have to make special specifications .
2 Four-point probe measurements silicon wafer with a metal film sheet resistance the most common method.
3 Simple and fast, but more troublesome problem is to calculation results .
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Introduction
In 1978, Edwin H.Hall input current in the conductor applied magnetic field.
Conductor and the current direction the ends of the vertical , can measure the induced voltage .
Can determine the polarity and concentration of carriers , Known as the Hall effect .
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Principle
+ -
Wεx
X
Z
y
Bz
Vxεy
+
-VH
F = qVxBz
q εy = qVxBz
εy = VxBz
VH =
εyW
正 P-type
負 n-type
ρ = RH / μp
p-type
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Operation
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Operation
將 sample 固定在量測基板上
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Operation
將量測基板插入量測架上
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Operation
在量測座上放磁石並進行量測
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Operation
開啟量測軟體
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Operation
出現霍爾量測系統畫面
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Operation
輸入膜厚
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Operation
得到 data
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Hall measurements VS. Four-point probe
Hall measurements Four-point probe
Special specifications specimen Do not have to make special specifications
★ resistivity ★ mobility ★ carrier concentration
★ sheet resistance
★ sheet resistance × film thickness
= resistivity
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Conclusions
1Hall effect is mainly for detecting a semiconductor material,film samples can be measured resistivity, carrier concentration, carrier polarity, and mobility.
2Rapid measurement , Simple operation, simple to operate a computer, you can complete the measurement step , the film is detected with a great help.
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References
http://ezphysics.nchu.edu.tw/prophys/basicexp/expnote/hall/hall_97Feb.pdf物理實驗 - 霍爾效應
http://140.116.176.21/www/technique/SOP/SOP%204-Point%20Probe.pdf四點探針儀器介紹
http://mast-tech.com.tw/Resistivity%20Measurement.pdf 科豐國際有限公司
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Thank You