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AIAA JOURNAL Vol. 41, No. 4, April 2003 Full-Field Three-Dimensional Volume Vibrations for Piezoceramic Materials in Resonance Chien-Ching Ma ¤ National Taiwan University, Taipei 106, Taiwan, Republic of China Chi-Hung Huang Ching Yun Institute of Technology, Chung-Li 320, Taiwan, Republic of China Hsien-Yang Lin De Lin Institute of Technology, Tu-Cheng 236, Taiwan, Republic of China and Chan-Chiao Lin National Taiwan University, Taipei 106, Taiwan, Republic of China Three-dimensional volume vibrations for piezoceramics, which couple the out-of-plane and in-plane vibrations, are investigated by using an optical interferometry method called the amplitude- uctuation elec- tronic speckle pattern interferometry (AF-ESPI). The optical systems for AF-ESPI with out-of-plane and in-plane measurements are employed to analyze the volume vibration of piezoceramic material for a rectangular parallelepiped con guration. Because the clear fringe patterns measured by the AF-ESPI method will be shown only at resonant frequencies, both the resonant frequencies and the corresponding vibration mode shapes are successfully obtained at the same time. Two out-of-plane and two in-plane measurements are needed to construct the complete information of vibration mode shape. However, by tilting the specimen with an angle, the coupled out-of-plane and in-plane motions can be obtained from only one out-of-plane setup and measurement. The dom- inant motion of the volume vibration can be identi ed from the mode shape by tilting the specimen. Finally, the impedance analysis and nite element method with three-dimensional model are also utilized, and the results are compared with the measurements by AF-ESPI. Excellent agreements of the resonant frequencies and mode shapes are obtained from both results. Nomenclature A.t / = amplitude of out-of-planevibration A 0 .t / = amplitude of in-plane vibration I O = object light intensity I R = reference light intensity J n = Bessel function of the rst kind of order n J 0 = zeroth-order Bessel function of the rst kind t = time x 1 ; x 2 ; x 3 = Cartesian coordinate system μ = angle between object light and observation direction μ 0 = one-half of the angle between two object lights ¸ = wavelength of laser ¿ = charge-coupleddevice refreshing time Á = phase difference between reference and object light ! = angular frequency Introduction W HEN a coherent laser beam illuminates a rough surface, re ected coherent wavelets from each point of the rough surface will form a random pattern of laser speckles and ll the en- tire space. This is known as the speckle effect. The random speckle distributionis a functionof spatialcoordinatesand is an information carrier,whichcanbe usedin manyengineeringapplications(surface Received 19 April 2002; accepted for publication 19 September 2002. Copyright c ° 2002 by the American Institute of Aeronautics and Astronau- tics, Inc. All rights reserved. Copies of this paper may be made for personal or internal use, on condition that the copier pay the $10.00 per-copy fee to the Copyright Clearance Center, Inc., 222 Rosewood Drive, Danvers, MA 01923; include the code 0001-1452/03 $10.00 in correspondence with the CCC. ¤ Professor, Department of Mechanical Engineering; [email protected]. edu.tw. Associate Professor, Department of Mechanical Engineering. Graduate Student, Department of Mechanical Engineering. roughness measurement, deformation and displacement measure- ment,andvibrationanalysis,etc.). 1 Using a standardtelevisioncam- era to digitize the speckles and to record the fringe patterns would eliminate the use of photographic lm. This method is known as the electronicspeckle pattern interferometry(ESPI). ESPI is a tech- nique that uses a laser, a charge-coupleddevice (CCD) camera, and a digital processor to generate interferograms. The most common light source for ESPI is a continuouswave laser because of its lower price and optical power requirement. As a result of ESPI’s use of video recording,its real-time nature makes it practical for vibration measurement in experiments. The basic principles of ESPI were rst proposed by Butters and Leendertz 2 to investigate the transverse vibration of a disk. This technique (also called TV holography or electronic holography) is a full- eld, noncontact,and real-time method to measure the defor- mation for structures subjected to various kinds of loading. Since then many researchers have been steered toward the area of the de- formationanalysis,especiallyfor vibrationmeasurements.As com- pared with traditionalholographicinterferometry, 3 the cumbersome and time-consuming chemical development can be eliminated for ESPI, and the experimental process will be sped up. Because only 1/30 s is needed to record and update a frame of interferometricpat- tern, ESPI is faster in operation and more insensitive to enviroment than holography.The most widely used experimentalsetup to study dynamic responses by ESPI is the time-averaged vibration ESPI method. 4 When the laser light source is employed, time-averaged interferometric fringes are produced for the harmonically vibrat- ing object, which offers a good observation of the vibration mode shape. The disadvantage of this method is that the interferometry fringes represent only the amplitude but not the phase of the vibra- tion. To improve this shortcoming, the phase-modulation method using reference beam modulation technique was developed to de- termine the relative phase of the displacement. 5 In addition to the method already mentioned, a number of variations for the princi- ples based on the ESPI technique were proposed in many academic researches and engineering applications. Creath and Slettemoen 6 697

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Page 1: Full-Field Three-Dimensional Volume Vibrations for ...ntur.lib.ntu.edu.tw/bitstream/246246/86314/1/109.pdf · Three-dimensional volume vibrations for piezoceramics, which couple the

AIAA JOURNAL

Vol. 41, No. 4, April 2003

Full-Field Three-Dimensional Volume Vibrationsfor Piezoceramic Materials in Resonance

Chien-Ching Ma¤

National Taiwan University, Taipei 106, Taiwan, Republic of ChinaChi-Hung Huang†

Ching Yun Institute of Technology, Chung-Li 320, Taiwan, Republic of ChinaHsien-Yang Lin†

De Lin Institute of Technology, Tu-Cheng 236, Taiwan, Republic of Chinaand

Chan-Chiao Lin‡

National Taiwan University, Taipei 106, Taiwan, Republic of China

Three-dimensional volume vibrations for piezoceramics, which couple the out-of-plane and in-planevibrations, are investigated by using an optical interferometry method called the amplitude-�uctuation elec-tronic speckle pattern interferometry (AF-ESPI). The optical systems for AF-ESPI with out-of-plane andin-plane measurements are employed to analyze the volume vibration of piezoceramic material for a rectangularparallelepiped con� guration. Because the clear fringe patterns measured by the AF-ESPI method will be shownonly at resonant frequencies, both the resonant frequencies and the corresponding vibration mode shapes aresuccessfully obtained at the same time. Two out-of-plane and two in-plane measurements are needed to constructthe complete information of vibration mode shape. However, by tilting the specimen with an angle, the coupledout-of-plane and in-plane motions can be obtained from only one out-of-plane setup and measurement. The dom-inant motion of the volume vibration can be identi� ed from the mode shape by tilting the specimen. Finally, theimpedance analysis and � nite element method with three-dimensional model are also utilized, and the results arecompared with the measurements by AF-ESPI. Excellent agreements of the resonant frequencies and mode shapesare obtained from both results.

NomenclatureA.t/ = amplitude of out-of-planevibrationA0.t/ = amplitude of in-plane vibrationIO = object light intensityIR = reference light intensityJn = Bessel function of the � rst kind of order nJ0 = zeroth-orderBessel function of the � rst kindt = timex1; x2; x3 = Cartesian coordinate systemµ = angle between object light and observation

directionµ 0 = one-half of the angle between two object lights¸ = wavelength of laser¿ = charge-coupleddevice refreshing timeÁ = phase difference between reference and object light! = angular frequency

Introduction

W HEN a coherent laser beam illuminates a rough surface,re� ected coherent wavelets from each point of the rough

surface will form a random pattern of laser speckles and � ll the en-tire space. This is known as the speckle effect. The random speckledistributionis a functionof spatial coordinatesand is an informationcarrier,which can be used in many engineeringapplications(surface

Received 19 April 2002; accepted for publication 19 September 2002.Copyright c° 2002 by the American Institute of Aeronautics and Astronau-tics, Inc. All rights reserved. Copies of this paper may be made for personalor internal use, on condition that the copier pay the $10.00 per-copy fee tothe Copyright Clearance Center, Inc., 222 Rosewood Drive, Danvers, MA01923; include the code 0001-1452/03 $10.00 in correspondence with theCCC.

¤Professor, Department of Mechanical Engineering; [email protected].

†Associate Professor, Department of Mechanical Engineering.‡Graduate Student, Department of Mechanical Engineering.

roughness measurement, deformation and displacement measure-ment, and vibrationanalysis,etc.).1 Using a standardtelevisioncam-era to digitize the speckles and to record the fringe patterns wouldeliminate the use of photographic � lm. This method is known asthe electronicspecklepattern interferometry(ESPI). ESPI is a tech-nique that uses a laser, a charge-coupleddevice (CCD) camera, anda digital processor to generate interferograms. The most commonlight source for ESPI is a continuouswave laser becauseof its lowerprice and optical power requirement. As a result of ESPI’s use ofvideo recording, its real-time nature makes it practical for vibrationmeasurement in experiments.

The basic principles of ESPI were � rst proposed by Butters andLeendertz2 to investigate the transverse vibration of a disk. Thistechnique (also called TV holography or electronic holography) isa full-� eld, noncontact,and real-time method to measure the defor-mation for structures subjected to various kinds of loading. Sincethen many researchers have been steered toward the area of the de-formation analysis, especiallyfor vibrationmeasurements.As com-pared with traditionalholographicinterferometry,3 the cumbersomeand time-consuming chemical development can be eliminated forESPI, and the experimental process will be sped up. Because only1/30 s is needed to record and update a frame of interferometricpat-tern, ESPI is faster in operation and more insensitive to enviromentthan holography.The most widely used experimentalsetup to studydynamic responses by ESPI is the time-averaged vibration ESPImethod.4 When the laser light source is employed, time-averagedinterferometric fringes are produced for the harmonically vibrat-ing object, which offers a good observation of the vibration modeshape. The disadvantage of this method is that the interferometryfringes represent only the amplitude but not the phase of the vibra-tion. To improve this shortcoming, the phase-modulation methodusing reference beam modulation technique was developed to de-termine the relative phase of the displacement.5 In addition to themethod already mentioned, a number of variations for the princi-ples based on the ESPI techniquewere proposed in many academicresearches and engineering applications. Creath and Slettemoen6

697

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698 MA ET AL.

developed the subtraction method to reduce the noise coming fromthe environment. The subtraction method differs from the time-averaged method in its reference frame that is � rst recorded beforevibration and continuously subtracted from the incoming framesafter vibration. In 1985, LÁkberg7 indicated that in-plane vibrationmodes could be obtained by using an out-of-plane setup and tiltingthe specimen with an angle. Tilting angles between 60 and 70 degwouldbe anacceptablecompromisebetweendistortionandsensitiv-ity. Shellabear and Tyrer8 extended the time-averagedESPI to makethree-dimensional vibration measurements. Doval et al.9 proposedthe additive stroboscopicTV holographyfor out-of-planevibrationanalysis, which exhibited an enhanced contrast with constant visi-bility fringes and dynamic phase shifting. To increase the visibilityof the fringepattern,an amplitude-�uctuationmethodwas proposedby Wang et al.10 for out-of-planevibrationmeasurement: The refer-ence frame in the amplitude-�uctuation method is taken in a vibrat-ing state, and both the visibility and resolution of the fringe patternare better than those obtained by other time-averaged methods.

Piezoelectricmaterials are widely used in electromechanicalsen-sors, actuators,11 and nondestructive testing, as well as electroop-tic modulator, etc. Researches and development activities in thesematerials are now intense and widespread. The piezoelectric effectwas discovered in 1880 by Pierre and Jacques Curie and has beenaddressed in later literature (Berlincourt et al.12 and Zelenka13).Piezoelectriceffect is applied to many modern engineeringapplica-tions becauseof the couplingbetween the electrical and mechanical� elds. Although the vibration characteristics of piezoelectric ma-terials can be determined by three-dimensional equations of thelinear elasticity, the Maxwell equation, and piezoelectric constitu-tive equations,14 it is dif� cult to obtain analytical solutions evenfor a simple geometry. On account of the complication just men-tioned, the variational approximation method and � nite elementanalysis are usually employed to study the vibrating problem ofpiezoelectricmaterials.Kharouf and Heyliger15 used the Rayleigh–Ritz method to solve the static and axisymmetricvibrationproblemsfor piezoelectric disks, hollow cylinders, and composite cylinders.Heyliger16 used the discrete-layer model, accounting for the dis-continuity in slope across interfaces, to investigate free vibration oflayered elastic-piezoelectricparallelepipeds.The variation methodis a powerful and accurate technique for simple geometries, andthe � nite element method is an alternative method to the analy-sis of piezoelectricmaterial in various complicated con� gurations.Adelmanand Stavsky17 derivedtheelectroelasticequationsfor solv-ing the axisymmetric vibrations of radially polarized piezoelectrichomogeneous ceramics tubes. In� uences coming from boundaryconditions and the ratio of inner/outer radii are discussed in details.Then they extendedthe method to study the problemsof radiallypo-larized composite piezoelectriccylinders and disks.18 Heyliger andRamirez19 introduced a numerical model for the study of comput-ing natural frequenciesof layeredelastic and piezoelectriccylinderslayeredin the thicknessdirection.The methodcombinesapproxima-tions of one-dimensional � nite elements in the thickness directionand analytic functions in the plane. Migliori and Sarrao20 providedmany successful applications of the vibrational resonances in engi-neering systems.

In addition to variational and numerical methods, experimentaltechnique has been employed for investigation of vibration modesand natural frequencies of piezoelectric material. Shaw21 used anoptical interference technique in which a stroboscopically illumi-nated multiple beam was applied to measure the surface motion ofthick barium titanate disks. However, only normal modes havingsymmetry with respect to the axis and to the central plane wereobserved. Koyuncu22 used ESPI with reference beam modulationto observe the vibration amplitudes and vibration modes of PZT-4transducers in air and water. Ma and Huang23 and Huang and Ma24

used the amplitude-�uctuation-ESPIAF-ESPI methodto investigatethe three-dimensional vibration of piezoelectric rectangular paral-lelepipedscylinders,respectively;both the resonantfrequenciesandmode shapes were presented.

To obtain the reliable dynamic response of piezoceramic materi-als, it is necessary to visibly examine the vibration response from anexperimental point of view so that the characteristicsof the materi-

als can be elucidatedthoroughly.The experimentalmeasurementofthe resonant frequencies for the piezoceramic material is generallyperformed by impedance analysis. However, a prominent featureof utilizing piezoceramic materials lies in the capability of beinginvestigated for their full-� eld and real-time vibration behavior. Inthis paper a full-� eld experimental method based on the AF-ESPIis used to study the three-dimensional vibration of a rectangularparallelepiped piezoceramic. Both in-plane and out-of-plane mo-tions in each face of the rectangularparallelepipedare obtainedanddiscussed: By tilting the specimen with a properangle, the vibrationmodes that couple out-of-planeand in-planemotions are also inves-tigated. It is easy to see the complete three-dimensional volumevibration modes and the dominant motion from the tilted speci-men. The numerical � nite element method with three-dimensionalmodel and experimental impedance analysis are also used to studythe problem, and the results are compared with those obtained byAF-ESPI. Excellent agreements of the resonant frequencies andmode shapes are obtained for experimental measurements andnumerical results.

AF-ESPI for Out-of-Plane and In-PlaneVibration Measurements

The most familiar way of ESPI used for vibration analysis isthe time-averaged method with an image sensor (most commonlyused is a CCD array) integrating the speckle interferogram � eldpixel by pixel. The name “time-averaged”denotes that the vibrationmeasurement includes many periods of object motions during thecamera frame period. Two different optical setups are used for thevibration measurement in this study.

Out-of-Plane VibrationThe optical setupof ESPI for out-of-planemeasurement is shown

in Fig. 1. At a given instant time t, the light intensity in the imageplane detected by a CCD camera can be expressed as25

I .t/ D IR C IO C 2p

IR IO cos[Á C .2¼=¸/.1 C cosµ/A.t/] (1)

In the time-averaged method the light intensity is averaged overthe CCD refreshing time ¿ to obtain

I¿ D IR C IO C 2p

IR IO

¿

Z¿

0

cos

µÁ C 2¼

¸.1 C cos µ/A.t/

¶dt (2)

In the vibration measurement the intensity average I¿ isevaluated for sinusoidal vibration, that is, A.t/ D A cos !t . Let

Fig. 1 Schematic diagram of AF-ESPI setup for the out-of-planemeasurement.

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MA ET AL. 699

0 D .2¼=¸/.1 C cos µ/ and ¿ D 2m¼=!, where m is an integer.Then Eq. (2) can be written as

I¿ D IR C IO C2p

IR IO

¿

Z¿

0

cos.Á C 0 A cos !t/ dt

D IR C IO C2p

IR IO

¿Re

(eiÁ

Z¿

0

exp.i0 A cos !t/ dt

)

where Re stands for the real part. Because

eiz sin ® D1X

n D ¡1

Jn.z/ei n®

we have

I¿ D IR C IO C 2p

IR IO

¿Re

(eiÁ

1X

n D ¡1

Jn.0 A/

Z ¿

0

ein.¼=2 ¡ !t/ dt

)

However, all of the terms will be zero except n D 0; � nally, Eq. (2)can be expressed as

I¿ D IR C IO C 2p

IR IO .cosÁ/J0.0 A/ (3)

After image processing and rectifying, the intensity of the � rst im-age, named the reference image, can be expressed as

I¿ D IR C IO C 2p

IR IO j.cosÁ/J0.0 A/j (4)

As the vibration of the specimen continues, we assume that thevibrationamplitudechanges from A to A C 1A becauseof the elec-tronic noise or instability of the apparatus.The light intensity of thesecond image I 0

¿ can be represented as

I 0¿ D IR C IO C 2

pIR IO

¿

Z¿

0

cos[Á C 0.A C 1A/ cos !t ] dt (5)

When thevibrationamplitudevariation1A is rathersmall,Eq. (5)can be expandedin Taylor series.By keeping the � rst two terms andneglecting the higher-order terms, we rewrite Eq. (5) as follows:

I 0¿

D IR C IO C 2p

IR IO .cos Á/£1 ¡ 1

402.1A/2

¤J0.0 A/ (6)

By image processingand rectifying, I 0¿ can be similarlyexpressed

as

I 0¿ D IR C IO C 2

pIR IO

­­.cos Á/£1 ¡ 1

402.1A/2

¤J0.0 A/

­­(7)

When these two images (the reference and second images) aresubtracted by the image processing system, that is, Eq. (4) is sub-tracted from Eq. (7), and are recti� ed, the resulting image intensitycan be expressed as

I D I 0¿ ¡ I¿ D

¡pIR IO =2

¢­­.cosÁ/02.1A/2 J0.0 A/­­ (8)

In-Plane VibrationThe optical setup of the AF-ESPI system for in-plane vibration

measurementis shownin Fig. 2. Similar to theout-of-planevibrationmeasurement, the referenceand second image intensities, that is, I¿

and I 0¿ , for in-plane vibration are expressed as

I¿ D 2IO C 2IO j.cos Á/J0.00 A0/j (9)

I 0¿ D 2IO C 2IO

­­.cosÁ/£1 ¡ 1

40 02.1A0/2

¤J0.0 0 A0/

­­(10)

where 00 D .2¼=¸/.2 sin µ 0/. Subtracting Eq. (10) from Eq. (9) andrectifyingby the image processingsystem, we can obtain the result-ing image intensity as

I D I 0¿ ¡ I¿ D .IO =2/

­­.cos Á/002.1A0/2 J0.00 A0/

­­ (11)

Combining the out-of-plane with the in-plane optical setupsby the AF-ESPI method, we can construct completely the three-dimensional volume vibration characteristics of the piezoceramic

Table 1 Material propertiesof the PZT-4 piezoceramics

Quantity PZT-4

cE11 (1010 N/m2) 13.9

cE33 11.54

cE12 7.784

cE13 7.428

cE44 2.564

cE66 D .cE

11 ¡ cE12/=2 3.058

e31 (N/Vm) ¡5.2e33 15.08e15 12.72"S

11="0 762"S

33="0 663½, kg/m3 7500"0 , F/m 8:85 £ 10¡12

Fig. 2 Schematic diagram of AF-ESPI setup for the in-planemeasurement.

material, including resonant frequencies and mode shapes at thesame time. This is different from the conventional impedance anal-ysis, which has been used widely in determining only the resonantfrequencyfor piezoceramicmaterial.There are also very few exper-imental techniques with the ability to obtain the three-dimensionalmode shapes.

Experimental and Numerical ResultsA rectangularparallelepipedpiezoceramic,made of PZT-4, is se-

lected for experimental and numerical investigationsof the volumevibration characteristics in resonance. The material properties andthe geometric con� gurations of the specimen are shown in Table 1(Ref. 26) and Fig. 3, respectively.The polarization axis is in the x3

direction, and two opposite faces (x1–x2 plane) of the specimen arecompletely coated with silver electrodes. The piezoceramic blockis excited by the application of an ac voltage across electrodes onthe surfaces and has completely stress-free boundary conditions.

The schematic layout of self-arranged time-averaged AF-ESPIoptical systems, as shown in Figs. 1 and 2, are employed to performthe out-of-plane and in-plane experimentalmeasurements for reso-nant frequencies and corresponding mode shapes. An He-Ne laserwith 30 mW and wavelength ¸ D 632:8 nm is used as the coherentlight source. As shown in Fig. 1 for the out-of-planemeasurement,the laser beam is split into two parts, the object and referencebeam,by a beamsplitter.We use a CCD camera (Pulnix Co.) and a P360F(Dipix Technologies, Inc.) frame grabber with a digital signal pro-cessor onboard to record and process the images. The object beamtravels to the piezoceramic specimen and then re� ects to the CCD

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700 MA ET AL.

Fig. 3 Geometric dimensions of the rectangular parallelepipedpiezoceramics.

camera. The reference beam goes directly to the CCD camera viaa mirror and a reference plate. The object and reference beams arecombined into the CCD sensor array through a zoom lens. The op-tical path length and the light intensities of these two beams shouldremain identical in the experimental setup for better contrast of theinterferometric fringes. For the in-plane measurement system asshown in Fig. 2, two laser beams with the same optical path andlight intensity are symmetrically incident to the specimen, and thenre� ect to the CCD camera.Once the specimenis vibrating,the inter-ferogram recorded by the CCD camera is stored in an image bufferas a reference image, and then the next frame is grabbed and sub-tracted by the image processing system. The CCD camera convertsthe intensity distribution of the interference pattern of the objectinto a correspondingvideo signal at 30 frames/s, which is in conse-quence processedelectronicallyand � nally converted into an imageon the video monitor. The interpretationof the fringe image is simi-lar to the readingof a displacementcontour.To achieve a sinusoidaloutput, a digitally controlled function generator (Hewlett–PackardHP33120A) connected to a power ampli� er (NF Electronic Instru-ments Type 4005) is employed as an input source, which generatesa periodical exciting force to the specimen. The size of the speci-men that can be used in the experimentalmeasurement is dependenton the optical system, the power of laser and the zoom lens. Forthe experimental setup as mentioned, the suitable dimension of thespecimen is ranged from 1 to 100 cm2 and is able to obtain goodquality of fringe patterns.

Detailed experimental procedures of the AF-ESPI technique forboth the in-plane and the out-of-plane vibrations are performed asfollows. First, a reference image is takenafter the specimen vibrateswith the second image taken subsequently; the reference image issubtracted by the image processing system. If the vibrating fre-quency is not the resonant frequency, only randomly distributedspeckles are displayed, and no fringe patterns will be shown. Incase the vibrating frequency falls in the neighborhood of the reso-nant frequency, distinct stationary fringe patterns will be observedin the monitor. Then, the function generator is carefully and gradu-ally turned; the number of fringes will increase, and fringe patternwill become clearer as the resonant frequency is approached. Fromthe aforementioned experimental procedure the resonant frequen-cies and the correspondent mode shapes can be determined at thesame time by using the AF-ESPI optical system.

When the rectangularparallelepipedvibratesat resonantfrequen-cies, out-of-planeand in-planemotions are coupledand are inducedin each face. From the out-of-plane and in-plane AF-ESPI opticalsystems used in this study, the out-of-planeand in-planemotion canbe decoupled. Figures 4–10 show the experimental and numericalresults of the � rst seven volume vibration mode shapes of the spec-imen, with both the out-of-plane and in-plane motions displayed ineach face. The displacement in the x3 direction of the rectangularparallelepipedas shown in Fig. 3 will be denotedas the out-of-planemotion in face A and the in-plane motion in face B. Similarly, the

Fig. 4 First mode shape of the specimen obtained by AF-ESPI andFEM (47.57 kHz).

Fig. 5 Second mode shape of the specimen obtained by AF-ESPI andFEM (71.84 kHz).

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MA ET AL. 701

Fig. 6 Third mode shape of the specimen obtained by AF-ESPI andFEM (104.56 kHz).

Fig. 7 Fourth mode shape of the specimen obtained by AF-ESPI andFEM (109.63 kHz).

Fig. 8 Fifth mode shape of the specimen obtained by AF-ESPI andFEM (116.2 kHz).

Fig. 9 Sixth mode shape of the specimen obtained by AF-ESPI andFEM (126.24 kHz).

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702 MA ET AL.

Fig. 10 Seventh mode shape of the specimen obtained by AF-ESPI andFEM (138.8 kHz).

displacement in the x1 direction will be denotedas the in-planemo-tion and the out-of-planemotion in face A and face B, respectively.In addition, in light of the results presented in this work numeri-cal calculation is also investigated by the commercially availablesoftware ABAQUS � nite element package27 in which a 20-nodethree-dimensionalbrick element (C3D20E) and 1734 elements areselected to analyze the problem. As shown in � nite element resultspresented in Figs. 4–10, mode shapes of face A for out-of-planemotion match with those of face B for in-plane motion on the edgebetween faces A and B. We can see that experimental results arein good agreement with numerical calculations by � nite elementmethod. We indicate the phase of displacement in � nite elementresults as solid or dashed lines; the solid lines are in the oppositedi-rection to the dashed lines. The transition from solid lines to dashedlines corresponds to a zero displacement line or a nodal line. Thezero-order fringe, which is the brightest fringes on experimental re-sults, represents the nodal lines of the vibrating piezoceramics atresonant frequencies. It is noted that four measurements, that is,two out-of-planeand two in-plane motions, are needed to constructa complete vibration mode shape.

To obtainthe three-dimensionalvibrationmodeshape in onemea-surement, we rotate the specimen clockwise about the x2 axis withan angle ´ D 60 deg and measure the mode shapes by using theout-of-plane setup. The experimental fringe patterns of the tiltedspecimen are also presented in the bottom of Figs. 4–10; the whitedashed line is plotted in the specimen to indicate the edge betweenface A and B. Figure 11 shows the specimen arrangement and themeasurementdirection (out-of-planeor in-plane) in this study; eachcon� guration corresponds to the experimental results presented inFigs. 4–10. After the specimen is tilted with an angle, the displace-ment in the x3 direction (or the observation direction) can be ex-pressed as u D u1 sin ´ C u3 cos ´, and the observed mode shapesare coupled with in-plane and out-of-plane motions. Although themode shape in three-dimensional con� guration is coupled without-of-plane and in-plane motions, some modes are dominated by

Table 2 Relative maximum displacementsfor out-of-plane and in-plane motions

AF-ESPI, Impedance FEM,Mode kHz analysis, kHz kHz

1 47.57 47.7 49.102 71.84 71.7 71.373 104.56 104.7 105.674 109.63 109.8 110.215 116.2 116.1 117.336 126.24 126.3 126.717 138.8 139.2 140.76

Fig. 11 Experimental con� guration for the specimen arrangementsand measurement directions.

out-of-plane or in-plane motions. Table 2 shows the relative dis-placements for out-of-plane and in-plane motions. We can see thatmodes 1, 2, and 7 are dominated by in-plane motions. It is also ev-ident in Figs. 4–10 that the mode shapes of the tilted specimen formodes 1, 2, and 7 are similar to the pure in-plane motions. It canbe concluded that if the in-plane motion is dominated, the in-planemode shape can be obtained from the out-of-plane setup and bytilting the specimen.

Because the electrical impedance of the piezoceramic materialdrops to a local minimum when piezoceramics vibrates at a reso-nant frequency, the resonant frequency can also be determined bythe impedance analysis.Herein, it is carried out by using HP4194Aimpedance/gain-phase analyzer (Hewlett Packard), and the experi-mental setup is shown in Fig. 12. Table 3 shows the resonant fre-quenciesof rectangularparallelepipedpiezoceramicsobtainedfromAF-ESPI, impedance analysis, and � nite element method (FEM).The differences between the experimental data and FEM might re-sult from the measurement of material properties and the faults ofspecimens that are generated by manufacturing process.

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MA ET AL. 703

Table 3 Results of resonant frequencies obtainedfrom AF-ESPI, impedance analysis, and FEM for

the rectangular parallelepiped piezoceramics

Max. normalized amplitude (A=Amax )

Mode x1 x2 x3

1 1 1 0.64752 1 1 0.32133 0.4656 0.4656 14 0.5474 0.5474 15 0.8615 0.8615 16 0.3838 0.3838 17 1 1 0.8639

Fig. 12 Experimental setup for the impedance analyzer.

ConclusionsOptical techniques have been shown to have certain advantages

for vibration analysis, and ESPI has been applied to many vibra-tion problems. The advantages of the optical ESPI method includenoncontact and full-� eld measurement, real-time observation, sub-micrometer sensitivity,and digital image processing,among others.As compared with the � lm recording and optical reconstructionprocedures used for holographic interferometry, the interferomet-ric fringes of AF-ESPI are produced instantly by a video recordingsystem.

Vibration characteristicsof piezoelectricmaterials are importantin many engineering applications. Most of the works for vibrationanalysis of piezoelectric plates published in the literature are ana-lytical and numerical results for two-dimensional problems. Thereare only fewexperimentalresultsavailablefor the three-dimensionalfull-� eld con� gurationofmodeshapes forvolumevibrations.In thisstudy two self-arranged amplitude-�uctuation ESPI optical setupshave been established to obtain the resonant frequencies and thecorresponding mode shapes of vibrating piezoceramic material fora rectangular parallelepiped con� guration. Both the in-plane andout-of-plane vibration mode shapes on each face of the specimenare obtained, and the results are well compared with numerical � -nite element calculations. The coupled out-of-plane and in-planemotions are obtained from the out-of-planesetup by tilting the spec-imen with an angle. The dominant motion of the volume vibrationis identi� ed and discussed in detail. The resonant frequencies ofthe piezoelectric materials are usually determined experimentallyby the impedance analysis, which is also performed in this study.The resonant frequenciesobtained by AF-ESPI method are in goodagreement with the impedance analysis. Excellent agreements be-tween theexperimentaldataandnumericalresultsrevealthat thepre-sented methodologies are capable of measuring vibration responseof piezoceramic materials with satisfactory accuracy.

AcknowledgmentThe authors gratefully acknowledge the � nancial support of this

researchby the NationalScienceCouncil (Republicof China) underGrant NSC 90-2212-E-002-163.

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A. BermanAssociate Editor