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22 Bd Benoni Goullin 44200 NANTES - FRANCE +33 2 40 18 09 16 [email protected] www.systemplus.fr Guide Infrared’s 17μm Microbolometer Module Chinese’s first low-definition microbolometer for integration into consumer applications. SP20567 – MEMS REPORT by Sylvain HALLEREAU LABORATORY ANALYSIS by Youssef EL GMILI September 2020 – Sample REVERSE COSTING® – STRUCTURAL, PROCESS & COST REPORT

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Page 1: Guide Infrared’s 17µm Microbolometer Module · Ref: SP20567 ©2020 System Plus Consulting | SP20567 - Guide Infrared’s 17µm Microbolometer Module | Sample 4 Overview / Introduction

©2020 System Plus Consulting | SP20567 - Guide Infrared’s 17µm Microbolometer Module | Sample 1Ref: SP20567

22 Bd Benoni Goullin44200 NANTES - FRANCE +33 2 40 18 09 16 [email protected] www.systemplus.fr

Guide Infrared’s 17µm Microbolometer Module

Chinese’s first low-definition microbolometer for integration into consumer applications.SP20567 – MEMS REPORT by Sylvain HALLEREAU

LABORATORY ANALYSIS by Youssef EL GMILISeptember 2020 – Sample

REVERSE COSTING® – STRUCTURAL, PROCESS & COST REPORT

Page 2: Guide Infrared’s 17µm Microbolometer Module · Ref: SP20567 ©2020 System Plus Consulting | SP20567 - Guide Infrared’s 17µm Microbolometer Module | Sample 4 Overview / Introduction

©2020 System Plus Consulting | SP20567 - Guide Infrared’s 17µm Microbolometer Module | Sample 2Ref: SP20567

Table of Contents

Overview / Introduction 4

o Executive Summary

o Reverse Costing Methodology

Company Profile 8

Physical Analysis 15

o Summary of the Physical Analysis

o Guide Infrared Module

✓ Package Views

✓ Die Overview & Dimensions

✓ Die Process

✓ Die Cross-Section

✓ Die Process Characteristics

Manufacturing Process 79

o GST117W

o Global Overview

o ROIC Wafer

o Microbolometer Wafer

o Process Flow

Cost Analysis 92

o Yields Explanation & Hypotheses

o ROIC Front-End Cost

o Microbolometer Wafer & Die Cost

o Window Wafer Cost

o Package Cost

o Component Cost

Price Estimation 106

Comparison 108

Feedbacks 113

System Plus Consulting Services 115

Page 3: Guide Infrared’s 17µm Microbolometer Module · Ref: SP20567 ©2020 System Plus Consulting | SP20567 - Guide Infrared’s 17µm Microbolometer Module | Sample 4 Overview / Introduction

©2020 System Plus Consulting | SP20567 - Guide Infrared’s 17µm Microbolometer Module | Sample 3Ref: SP20567

Overview / Introductiono Executive Summaryo Reverse Costing

Methodologyo Glossary

Company Profile & Supply Chain

Physical Analysis

Manufacturing Process Flow

Cost Analysis

Selling Price Analysis

Technical & Cost Comparison

Feedbacks

Related Reports

About System Plus

Executive Summary

Founded in 1999, Guide Infrared is now a leader in infrared technology in China and in the world. After developingmicrobolometer dies, thermal imagers for military, industry and security, Guide Infrared and Global SensorTechnology have developed a tiny module with low pixel count for smartphones. The Guide Infrared module is adirect competitor to Flir’s Lepton3 thermal cameras and the Seek Thermal smartphone module.

Guide Infrared has a broad range of products from thermal camera plug-ins for smartphones to focal plane arraydetectors, cores and thermal cameras for military. All the products integrate their uncooled detector die. Today, the17µm and 12µm microbolometers are the most used sensors in Guide products.

This full reverse costing study has been conducted to provide insight into technology design, the manufacturingcost and selling price of microbolometer detector GST117W and the infrared module with the ceramic substrate,the plastic support and the infrared lens. Guide has selected O-Film, the leader in the camera module assembly, tomake the module.

The microbolometer use vanadium oxide technology and a 17µm pixel width.

The integration into a 680mm3 volume is allowed by the wafer level package technology developed by Guide. Witha definition of 120x90 pixels, the microbolometer is designed for consumer low definition markets, includingsmartphones, pocket thermal imagers and intelligent buildings.

Along with the complete technical analysis of the microbolometer components, this report includes a technical andcost comparison between Guide Infrared Module, Flir Lepton 3 and IRay RTD3172.

Page 4: Guide Infrared’s 17µm Microbolometer Module · Ref: SP20567 ©2020 System Plus Consulting | SP20567 - Guide Infrared’s 17µm Microbolometer Module | Sample 4 Overview / Introduction

©2020 System Plus Consulting | SP20567 - Guide Infrared’s 17µm Microbolometer Module | Sample 4Ref: SP20567

Overview / Introduction

Company Profile & Supply Chain

Physical Analysis o Fluke PTi120o Synthesiso Guide Infrared Module o Chalcogenide Lenso Substrateo GST117W detector

o Windowo Microbolometero Cross-Sectiono Process synthesis

Manufacturing Process Flow

Cost Analysis

Selling Price Analysis

Technical & Cost Comparison

Feedbacks

Related Reports

About System Plus

GST117W 17µm Microbolometer – Module

Infrared camera module, GST117W detector with a silicon lens and a ceramic substrate

©2020 by System Plus Consulting

GST117W infrared detector

Lens

The packaging is performed by the Chinese company O-FILM

Ceramic substrate

Page 5: Guide Infrared’s 17µm Microbolometer Module · Ref: SP20567 ©2020 System Plus Consulting | SP20567 - Guide Infrared’s 17µm Microbolometer Module | Sample 4 Overview / Introduction

©2020 System Plus Consulting | SP20567 - Guide Infrared’s 17µm Microbolometer Module | Sample 5Ref: SP20567

Overview / Introduction

Company Profile & Supply Chain

Physical Analysis o Fluke PTi120o Synthesiso Guide Infrared Module o Chalcogenide Lenso Substrateo GST117W detector

o Windowo Microbolometero Cross-Sectiono Process synthesis

Manufacturing Process Flow

Cost Analysis

Selling Price Analysis

Technical & Cost Comparison

Feedbacks

Related Reports

About System Plus

Module Microbolometer – Lens Module Cross-Section

Page 6: Guide Infrared’s 17µm Microbolometer Module · Ref: SP20567 ©2020 System Plus Consulting | SP20567 - Guide Infrared’s 17µm Microbolometer Module | Sample 4 Overview / Introduction

©2020 System Plus Consulting | SP20567 - Guide Infrared’s 17µm Microbolometer Module | Sample 6Ref: SP20567

Overview / Introduction

Company Profile & Supply Chain

Physical Analysis o Fluke PTi120o Synthesiso Guide Infrared Module o Chalcogenide Lenso Substrateo GST117W detector

o Windowo Microbolometero Cross-Sectiono Process synthesis

Manufacturing Process Flow

Cost Analysis

Selling Price Analysis

Technical & Cost Comparison

Feedbacks

Related Reports

About System Plus

GST117W 17µm Microbolometer – Die

5.25mm

5.8

mm

• Die area: 30.45mm² (5.8 x 5.25mm)

• Window area: xxmm² (xxmm)

• Window area = xx% of the die area

• Pad numbers: 64

• Wire bonding: 48

xxmm

xxmm

Microbolometer ©2020 by System Plus Consulting

Page 7: Guide Infrared’s 17µm Microbolometer Module · Ref: SP20567 ©2020 System Plus Consulting | SP20567 - Guide Infrared’s 17µm Microbolometer Module | Sample 4 Overview / Introduction

©2020 System Plus Consulting | SP20567 - Guide Infrared’s 17µm Microbolometer Module | Sample 7Ref: SP20567

Overview / Introduction

Company Profile & Supply Chain

Physical Analysis o Fluke PTi120o Synthesiso Guide Infrared Module o Chalcogenide Lenso Substrateo GST117W detector

o Windowo Microbolometero Cross-Sectiono Process synthesis

Manufacturing Process Flow

Cost Analysis

Selling Price Analysis

Technical & Cost Comparison

Feedbacks

Related Reports

About System Plus

GST117W 17µm Microbolometer – Window

GST117W cross-section ©2020 by System Plus Consulting

Page 8: Guide Infrared’s 17µm Microbolometer Module · Ref: SP20567 ©2020 System Plus Consulting | SP20567 - Guide Infrared’s 17µm Microbolometer Module | Sample 4 Overview / Introduction

©2020 System Plus Consulting | SP20567 - Guide Infrared’s 17µm Microbolometer Module | Sample 8Ref: SP20567

Overview / Introduction

Company Profile & Supply Chain

Physical Analysis o Fluke PTi120o Synthesiso Guide Infrared Module o Chalcogenide Lenso Substrateo GST117W detector

o Windowo Microbolometero Cross-Sectiono Process synthesis

Manufacturing Process Flow

Cost Analysis

Selling Price Analysis

Technical & Cost Comparison

Feedbacks

Related Reports

About System Plus

GST117W 17µm Microbolometer – Microbolometer Die

• Die area: 30.45mm² (5.8 x 5.25mm)

• Pixel area: xxmm² (xx mm)

• The pixel area represents xx% of the die area.

• Pixel pitch: 17µm

• Pixel matrix: xx x xx

• Definition of the microbolometer: 120 x 90

Microbolometer without the wndow ©2020 by System Plus Consulting

Page 9: Guide Infrared’s 17µm Microbolometer Module · Ref: SP20567 ©2020 System Plus Consulting | SP20567 - Guide Infrared’s 17µm Microbolometer Module | Sample 4 Overview / Introduction

©2020 System Plus Consulting | SP20567 - Guide Infrared’s 17µm Microbolometer Module | Sample 9Ref: SP20567

Overview / Introduction

Company Profile & Supply Chain

Physical Analysis o Fluke PTi120o Synthesiso Guide Infrared Module o Chalcogenide Lenso Substrateo GST117W detector

o Windowo Microbolometero Cross-Sectiono Process synthesis

Manufacturing Process Flow

Cost Analysis

Selling Price Analysis

Technical & Cost Comparison

Feedbacks

Related Reports

About System Plus

GST117W 17µm Microbolometer – Pixel

Pixel – SEM view©2020 by System Plus Consulting

Page 10: Guide Infrared’s 17µm Microbolometer Module · Ref: SP20567 ©2020 System Plus Consulting | SP20567 - Guide Infrared’s 17µm Microbolometer Module | Sample 4 Overview / Introduction

©2020 System Plus Consulting | SP20567 - Guide Infrared’s 17µm Microbolometer Module | Sample 10Ref: SP20567

Overview / Introduction

Company Profile & Supply Chain

Physical Analysis o Fluke PTi120o Synthesiso Guide Infrared Module o Chalcogenide Lenso Substrateo GST117W detector

o Windowo Microbolometero Cross-Sectiono Process synthesis

Manufacturing Process Flow

Cost Analysis

Selling Price Analysis

Technical & Cost Comparison

Feedbacks

Related Reports

About System Plus

GST117W 17µm Microbolometer – Cross-Section

Page 11: Guide Infrared’s 17µm Microbolometer Module · Ref: SP20567 ©2020 System Plus Consulting | SP20567 - Guide Infrared’s 17µm Microbolometer Module | Sample 4 Overview / Introduction

©2020 System Plus Consulting | SP20567 - Guide Infrared’s 17µm Microbolometer Module | Sample 11Ref: SP20567

Overview / Introduction

Company Profile & Supply Chain

Physical Analysis

Manufacturing Process Flow

Cost Analysiso Supply Chain - Yieldso ROIC Wafer & Die Costo Microbolometer Wafero Window Wafer Costo Microbolometer Die Costo Package Costo Component Cost

Selling Price Analysis

Technical & Cost Comparison

Feedbacks

Related Reports

About System Plus

GST117W 17µm - Microbolometer Front-End Cost

Page 12: Guide Infrared’s 17µm Microbolometer Module · Ref: SP20567 ©2020 System Plus Consulting | SP20567 - Guide Infrared’s 17µm Microbolometer Module | Sample 4 Overview / Introduction

©2020 System Plus Consulting | SP20567 - Guide Infrared’s 17µm Microbolometer Module | Sample 12Ref: SP20567

Overview / Introduction

Company Profile & Supply Chain

Physical Analysis

Manufacturing Process Flow

Cost Analysiso Supply Chain - Yieldso ROIC Wafer & Die Costo Microbolometer Wafero Window Wafer Costo Microbolometer Die Costo Package Costo Component Cost

Selling Price Analysis

Technical & Cost Comparison

Feedbacks

Related Reports

About System Plus

GST117W 17µm - Module Cost

Page 13: Guide Infrared’s 17µm Microbolometer Module · Ref: SP20567 ©2020 System Plus Consulting | SP20567 - Guide Infrared’s 17µm Microbolometer Module | Sample 4 Overview / Introduction

©2020 System Plus Consulting | SP20567 - Guide Infrared’s 17µm Microbolometer Module | Sample 13Ref: SP20567

Overview / Introduction

Company Profile & Supply Chain

Physical Analysis

Manufacturing Process Flow

Cost Analysis

Selling Price Analysis

Technical & Cost Comparison

Feedbacks

Related Reports

About System Plus

Related Reports

MARKET AND TECHNOLOGY REPORTS - YOLE DÉVELOPPEMENT

IMAGING, SENSING• Thermal Imagers and Detectors 2020 – COVID-19 Outbreak

Impact – Preliminary Report

REVERSE COSTING ANALYSES - SYSTEM PLUS CONSULTING

IMAGING, MEMS• SP20560 - MEMS - iRay Microbolometer 12µm and 17µm• SP17349 - FLIR Boson – a small, innovative, low power,

smart thermal camera core• SP16264 - Thermal Expert Infrared Camera for

Smartphones

Page 14: Guide Infrared’s 17µm Microbolometer Module · Ref: SP20567 ©2020 System Plus Consulting | SP20567 - Guide Infrared’s 17µm Microbolometer Module | Sample 4 Overview / Introduction

©2020 System Plus Consulting | SP20567 - Guide Infrared’s 17µm Microbolometer Module | Sample 14Ref: SP20567

COMPANYSERVICES

Page 15: Guide Infrared’s 17µm Microbolometer Module · Ref: SP20567 ©2020 System Plus Consulting | SP20567 - Guide Infrared’s 17µm Microbolometer Module | Sample 4 Overview / Introduction

©2020 System Plus Consulting | SP20567 - Guide Infrared’s 17µm Microbolometer Module | Sample 15Ref: SP20567

Overview / Introduction

Company Profile & Supply Chain

Physical Analysis

Manufacturing Process Flow

Cost Analysis

Selling Price Analysis

Technical & Cost Comparison

Feedbacks

Related Reports

About System Pluso Company Serviceso Contacts

Business Models a Fields of Expertise

Custom Analyses(>130 analyses per year)

Reports(>60 reports per year)

Costing Tools

Trainings

Page 16: Guide Infrared’s 17µm Microbolometer Module · Ref: SP20567 ©2020 System Plus Consulting | SP20567 - Guide Infrared’s 17µm Microbolometer Module | Sample 4 Overview / Introduction

©2020 System Plus Consulting | SP20567 - Guide Infrared’s 17µm Microbolometer Module | Sample 16Ref: SP20567

Overview / Introduction

Company Profile & Supply Chain

Physical Analysis

Manufacturing Process Flow

Cost Analysis

Selling Price Analysis

Technical & Cost Comparison

Feedbacks

Related Reports

About System Pluso Company Serviceso Contacts

Contact

Headquarters22 bd Benoni Goullin44200 NantesFRANCE+33 2 40 18 09 [email protected]

Europe Sales OfficeLizzie LEVENEZFrankfurt am MainGERMANY+49 151 23 54 41 [email protected]

www.systemplus.fr

NANTESHeadquarters

FRANKFURT/MAINEurope Sales Office

LYONYOLE HQ

TOKYOYOLE KK

GREATER CHINAYOLE

KOREAYOLE

CORNELIUSYOLE Inc.

Asia Sales OfficeTakashi ONOZAWATokyoJAPANT : +81 804 371 [email protected]

Mavis WANGTAIWANT :+886 979 336 809CN: [email protected]

America Sales OfficeSteve LAFERRIEREWESTERN UST : +1 310 600 [email protected]

Chris YOUMANEASTERN US & CANADAT : +1 919 607 9839 [email protected]