hybrid am / mems micromirror assembly

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Post on 18-Dec-2014

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Single material construction of controllable micromirrors for directing light forces a choice between either high performance and limited movement transmission geometries, or lower performance and wider range of shapes. We eliminate constraints by using separate MEMS and AM parts, allowing customization of mirror speed and range for different applications. 1mm hexagonal mirrors are single crystal silicon, while polymer transmission structures are 3D printed onto the mirror underside using projection microstereolithography. An electronic comb driven paddle on a PCB will form the base. We built and tested a way to handle and place components.

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  • 1. Scott Merry, North Seattle College This work was performed in part under the auspices of the U.S. Department of Energy by Lawrence Livermore National Laboratory under Contract DE-AC52-07NA27344. LLNL-POST-658097. This work was supported in part by the U.S. Department of Energy, Office of Science, Office of Workforce Development for Teachers and Scientists (WDTS) under the Community College Internships Program (CCI). Attempt assembly of prototype hybrid fab MEMS microelectromechanical systems AM additive manufacturing 1.Purpose Summary Single material construction of controllable micromirrors for directing light forces a choice between either high performance and limited movement transmission geometries, or lower performance and wider range of shapes. We eliminate constraints by using separate MEMS and AM parts, allowing customization of mirror speed and range for different applications. 1mm hexagonal mirrors are single crystal silicon, while polymer transmission structures are 3D printed onto the mirror underside using projection microstereolithography. An electronic comb driven paddle on a PCB will form the base. We built and tested a way to handle and place components. Hybrid AM/MEMS assembly is feasible Single material limits performance to either speed or range Hybrid enables both 2.Results Proof of concept for further research Next step: array of 7 assemblies Applications: optical tweezers additive manufacturing, communications, defense 3.Impact Vacuum chuck holds assembly for precise placement onto base. Note flexure of transmission structures under load, demonstrated by applying a downward force to the assembly. Specially fabricated steel vacuum chuck (above) mounted on moveable xyz stage lifts entire assembly from inverted syringe. 1mm The next challenge will be aligning an array of 7 micromirror assemblies. Optical tweezers based 3D printing enables arrangement of multiple material particles in 3-space Hexagonal mirror material is silicon crafted using MEMS methods. Polymer transmission structures are 3D printed using AM. Plastic tube on end of syringe needle is lowered over inverted mirror. Vacuum is applied to lift mirror and hold it in the tube. Syringe is then inverted and vacuum chuck lifts mirror from top (see illustration below). Robert Panas, Chris Harvey, Will Smith, Julie Jackson, LLNL Jonathan Hopkins, UCLA