integrated flow control module for slurries and chemicals ... · lfc-000 3 integrated flow control...

Corporate Headquarters1060 S Rogers CircleBoca Roton, FL 33487

P: (561) 995-0595 F: (561) 995-0622

West Coast Headquarters2225 Martin Avenue Suite I

Santa Clara, CA 95050P: (408) 970-3419 F: (408) 970-3426

Asia Headquarters29 Woodlands Industrial Park E1 Northtech Unit # 02-06

Singapore 757716P: (65) 6482-3533 F: (65) 6484-4231

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Integrated Flow Control Module for Slurries and Chemicals

LFC-7000

Operating Instructionsand

Quick-Start Guide

INTEGRATED FLOW CONTROL MODULE


P: (561) 995-0595 F: (561) 995-0622


Santa Clara, CA 95050P: (408) 970-3419 F: (408) 970-3426


Singapore 757716P: (65) 6482-3533 F: (65) 6484-4231

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TABLE OF CONTENTS

Introduction 3Storage and Handling 3Installation Instructions 4 Operating Principle and Block Diagram 5Operation 6Specifications 8Power & Signal Connection 9Dimensional Drawings 10Ordering Information 11Warranty 12Service and Repair 12


P: (561) 995-0595 F: (561) 995-0622


Santa Clara, CA 95050P: (408) 970-3419 F: (408) 970-3426


Singapore 757716P: (65) 6482-3533 F: (65) 6484-4231

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INTEGRATED FLOW CONTROL MODULE Introduction

TheLFC-7000Seriesisalineofhigh-performanceclosed-loopflowcontrollersdesignedforusein a wide variety of high-purity liquids including DI water, harsh chemicals, and CMP polishing slurries.

A typical module for high-accuracy control of ultrapure chemicals combines Malema ultrasonic flowmeter,withaccuracyratedat+/-1%reading,withMalemacontrolvalve.TheultrasonicflowmeterhasanallPFAconstructionwithnomovingpartsorseals.Itsetsastandardforflowmeasurementintermsofaccuracy,repeatability,turndown,andpurity.Itsdigitalsignalprocessing technology ensures reliable performance even with a certain degree of bubbles presentintheprocessfluids.Thehighspeed/precisionmotoractuatedpinchvalve(forslurries)ordiaphragmvalve(forchemicals)helpsprovideafast,preciseresponsewithminimal“overshoot”. Its all PTFE construction and minimal dead volume ensure maximum process purity and reliability.

Inoperation,theuserinputsaflowrate“setpoint”viaananalogsignal.Theflowcontrolelectronicmodulescontinuouslycomparesthissetpointvaluewiththeflowratereportedbytheflowmeterandprovidesacontinuoussignaltomodulatethecontrolvalvetomaintainthedesiredsetpoint.Stateoftheartcontrolalgorithmtogetherwithahighspeed/precisionflowmeter and valve achieves fast, accurate, and repeatable control.

Storage and Handling

Storage conditionsStore the product under packed condition in an anti-static bag. The storage place shall be free from moisture, mechanical shock and vibration. The ambient temperature shall be between 0°C and60°Candthehumiditybetween5%and80%R.H.withoutcondensation.

Unpacking and Product InspectionOndelivery,checktheproductfordamage.Confirmthatthemodelcodeonthelabelmatchesthespecificationinthepurchaseorder.



P: (561) 995-0595 F: (561) 995-0622


Santa Clara, CA 95050P: (408) 970-3419 F: (408) 970-3426


Singapore 757716P: (65) 6482-3533 F: (65) 6484-4231

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Installation Instructions

LFC7000seriesliquidflowcontrolmodulesareequippedwithinlet/outletportswithFlareorS300Pillarconnectionsof1/4”,3/8”or1/2”size.Themodulesareavailableformountingineithertheverticalorhorizontaldirections.Themoduledesignedforverticalmountingisnotrecommendedtobemountedinthehorizontaldirectionandvice-versa.

Itisimportanttonotethatthemountingdirectionisdefinedbasedontheorientationoftheflowmeterinsidethemodule.Followingthespecifiedorientationensuresnotrappedairpocketsduring usage. The module for liquid chemicals, without abrasive particles, is assembled with a diaphragm type control valve and the module for liquid slurries is assembled with a pinch type controlvalve.Theenvelopedimensionsareinfluencedbythetypeofflowcontrolvalveandalsothe desired mounting direction. Refer to the drawings on page 10 for envelope dimensions.

Fluid ConnectionsThepipeendsshouldbeflaredwiththecorrectlysizedtoolandthein/outportsareconnected.Choosetheappropriatefittings&flaretoolfortherequiredpipesize.Makesuretheinletandoutletpipesareflaredandassembledperfectlysotheyareleakproof.Thisfacilitatessafetywhile in use with corrosive chemicals. Provide a shut off valve or bypass valve to facilitate the zeroreset,inspection,andmaintenanceaswellasforpositiveshut-off.Avoidpipingstressesand torque on the module ports. Over-tightening the nuts at the inlet and outlet may loosen the bulkheadfittings.

It is always recommended that the inlet port should be at a lower level than the outlet port. This eliminatesairentrapmentduringflowmeasurement.

Operating EnvironmentChoosealocationwithambienttemperature10-40ºCandrelativehumidityvalue<80%RHwithout direct sunlight. Avoid environments with high electromagnetic noise or vibration. Make sure that the module is protected from corrosive liquid or water splashes. For Best performanceavoidtheseenvironments(corrosiveliquidsand/orvapor)sincetheymaydegradethe performance of the electronics after a period of time. Easy access for maintenance and inspection is always recommended.


P: (561) 995-0595 F: (561) 995-0622


Santa Clara, CA 95050P: (408) 970-3419 F: (408) 970-3426


Singapore 757716P: (65) 6482-3533 F: (65) 6484-4231

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INTEGRATED FLOW CONTROL MODULE Operating Principle & Block Diagram

Theuserinputsa“setpoint”usingeitherananalogsignaloraPCGUIcommand.Theflowcon-trolmodule’selectronicscontinuouslycomparesthesetpointvaluewiththemeasuredflowrateand provides a continuous feedback signal to modulate the control valve in order to maintain the desiredflowrate.Customdesignedanduserselectablecontrolparametersinsurefastresponsetime and accuracy.

PC

EXTERNALI/O

SET POINT

CONTROLLER ELEC.

FLOW METERFLOW OUT FLOW IN

CONTROL SIGNAL

FLOW READING

FLOW READING

SERIAL COMMUNICATIONFOR PC CONTROL(FORDIAGNOSTICS)



P: (561) 995-0595 F: (561) 995-0622


Santa Clara, CA 95050P: (408) 970-3419 F: (408) 970-3426


Singapore 757716P: (65) 6482-3533 F: (65) 6484-4231

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Operation

Safety:Theinlet/outletportsshouldbeproperlyconnected.

Parameter SettingTheparametersarepresetatthefactorypriortoshipmentasperthecustomer’sspecifications

Before Power-OnConfirm:a)Cablesareproperlyconnectedtotheterminalsasperpinconfigurationofconnectors.b)SuppliedVoltagemustbeinaccordancewithspecifications.c)Mountingorientationmatchesspecifications.

After Power-OnWait5minutesforthemoduletowarmuppriortoachievingthespecifiedperformance.

Zero AdjustmentUltrasonicflowmeterswillshowasignalerrorwhentheflowpathisempty,orfilledwithlargeairpockets.Theusershouldmakesurethattheflowpathofthemoduleisfilledwithprocessfluidbeforeadjustingthezero.Thefluidneedstobeatrest,inordertocompleteanaccuratezeroadjust.Malemarecommendsusingashutoffvalvetobringthefluidtorest.

TheZeroAdjustmentisperformedbymomentarysuppling24Vdctopin#11.(Malemarecommendsusingamomentarypushbutton).Pleasemakesurethatthepowersupplytopin#11ismomentaryandnotcontinuous.Ittakeslessthan5secondsforzeroadjustment.Ifthiswiringsetupisnotadopted,thezeroadjustmentcanbedoneusingtheMalemaPCcommunication software. Please refer to the manual for the Malema UFM PC communication software.

It is not necessary to do a Zero Adjustment whenever the power is turned on, only when there is achangeintheprocessfluidproperties.

Confirmation of Flow Through the ModuleThisprocedureensurestheproperfunctioningoftheflowcontroller.Ifasetpointvalueof2Vdcisgiventothemodulewith0-10Vdcinput,whichisequalto20%ofthefullscaleflow,thecontrolleracceptsthesetpointvalueandadjuststhecontrolvalvetodeliver20%ofthefullscaleflow.After10seconds,observetheanalogoutputfromthemodule.Thisshouldbeequalto20%ofthefullscaleflow(forexample:incaseof4-20mA,20%analogsignalwillbe7.2mA).Anunstableflowvalueorazeromayindicatethatthereareairbubblespresentintheflowpaththat need to be eliminated.


P: (561) 995-0595 F: (561) 995-0622


Santa Clara, CA 95050P: (408) 970-3419 F: (408) 970-3426


Singapore 757716P: (65) 6482-3533 F: (65) 6484-4231

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INTEGRATED FLOW CONTROL MODULE Flow Controller ConfigurationTheLFC-7000seriesflowcontrollerisconfiguredatthefactoryandcalibratedwithDIwater.Theparametersshouldbemodifiedbyanauthorizedservicetechnicianonly.

Theconfigurationoftheflowcontrollerisdonebyusingcustomcommunicationsoftware.Thissoftware is installed on a PC. Connect the PC to the unit using a special 6 pin communication cable(PN#:CABLE-LFC-PROG-001).The6pincommunicationportontheunitislocatedjustbelow the 12 pin main electrical connector. A detailed software operations manual is available with all Malema service personnel.

Alarm Outputa)Alarm1-“PIDControlErrorAlarm”Controller is supposed to meet the control accuracy within 3 seconds in normal use.Incasetheflowratedoesnotmeetthesetpoint,thecontrolvalveactionwithmaximumtorque can last for a long time, and may put unnecessary strain on the control valve. When thisconditionlastsforlongerthanthesettime(configurable,defaultvalueis15seconds),the controller considers this situation abnormal, activates the alarm signal, and then stops controlling.

b)Alarm2-“SensorSignalStrengthAlarm”Thisalarmsignalisgivenwhenflowsensorisin“EmptySensor”state.“EmptySensor”meansthattheflowsensordoesnothaveaqualifiedsoundsignal,e.g.,thesensorisnotfullyfilledupwithfluid,namely,bubble(s)orforeignmatterareintheflowsensor,orwhenthesensorcableisdisconnected.

InspectionMalemaadvisestheusertoinspecttheflowcontrollerperiodicallytoensurethattherearenovisiblesignsofleakageandelectricalconnections/cablesaresecureanddamagefree.The following is a checklist to ensure all inspection points are covered.

a)Noexcessiveheatgenerationinsideapparatusb)Noexcessivepipingstressbybendingc)Novibrationonpipingsystemd)Noliquidleakage,nopenetration,nocondensatione)Noairbubbles,nocontaminationinpipingf)Firmwiringonallterminalsg)Nodamageonelectricwiringinapparatus

NOTE:RefertothePCcommunicationsoftwaremanualofMalemaUFM/LFCformoredetailson device operation



P: (561) 995-0595 F: (561) 995-0622


Santa Clara, CA 95050P: (408) 970-3419 F: (408) 970-3426


Singapore 757716P: (65) 6482-3533 F: (65) 6484-4231

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Specifications

Performance Specifications

Standard Full Scale Range

50mL/min100mL/min250mL/min500mL/min1000mL/min1500mL/min2500mL/min*4000mL/min*8000mL/min*12000mL/min*

Accuracy**(forroomtemperatureDIW)

±1%ofsetpointor±3mL/min(whicheverislarger)

Repeatibility** ±1%ofsetpointor±1mL/min(whicheverislarger)

Control Repeatibility ±0.5%ofsetpointor±0.5mL/min(whicheverislarger)

Flow Control Time < 3 secFluid Temperature 10-60ºC***

Ambient:Temperature/Humidity 0-40ºC/30-80%RH,withoutDewMaximum Expected Operating Pressure 50 psig

Maximum Safe Internal Pressure 70 psigDifferential Pressure Range 7 to 30 psid

* Theenclosurefootprintmaybelargerfortheseflowrangestomeetthepressuredropspecifica-tion. The minimum differential pressure requirements can be higher for these ranges. ** PleaseconsultwithMalemafortighteraccuracy/repeatabilityneeds.*** ConsultthefactoryforhighertemperatureapplicationElectrical Specifications

Electrical Input 24Vdc±10%Consumption Max 500 mAAlarm Signals Max30Vdc,200mANPNopencollector

ControlSignalIn* 0to10Vdcor4to20mAFlowSignalout* 0to10Vdcor4to20mA**

* Otheroptionsavailable** BothActiveandPassiveoptionsavailable

Material Specifications

Wetted parts for Modules of Slurry Application PFA,PTFE,PtcuredSilicone*Non wetted parts, enclosure PPS,PEEK,Acrylic,Vinyl,PVC**

* OnlyusedintheSlurryModule**Flameretardant(FMET4325)


P: (561) 995-0595 F: (561) 995-0622


Santa Clara, CA 95050P: (408) 970-3419 F: (408) 970-3426


Singapore 757716P: (65) 6482-3533 F: (65) 6484-4231

LFC-7000

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INTEGRATED FLOW CONTROL MODULE Physical Specifications

Mounting Orientation HorizontalorVerticalFluid Connections Inlet/Outlet:1/4”,3/8”,or1/2”;FlareorPillar

FlowRestrictions(orifice) > 2 mmIngress Rating IP64

Power and Signal Connections

Itisalwaysrecommendedtouseadedicatedpowersupplywith24Vdc(±10%),500mA.Theconfigurationofthe12pin-connectoranditsmatingcableisgiveninthetablebelow.Acommunication cable with a 6 pin connector can be ordered seperately to interface with the PC GUI program.

Custompinconfigurationsandconnectorsareavailableuponrequest.

12 Pin Connector ConfigurationPin No. Wire Color Description Specification Remarks

1 Red Power(+)24Vdc24Vdc±10%

2 Black Power(-)0Vdc3 Pink SetPoint(+)

4-20mAor0-10Vdc4 Gray SetPoint(-)5 Blue FlowOut(+) 4-20mA(Max.load900ohm)or

0-10Vdc6 White FlowOut(-)7 Red/Black ValveAlarm(+)

Max.rating30Vdc,200mA Open Collector Output8 White/Black ValveAlarm(-)(0V)9 Yellow SensorAlarm(+)

Max.rating30Vdc,200mA Open Collector Output10 Brown SensorAlarm(-)(0V)

11 Green ZeroAdjust* 0Vdc:Normaloperation24Vdc:ZeroAdjust

Pull up to power supply voltagetostartzero

adjustment12 Violet No Connection

* Makesuretheflowiscompletelystoppedbeforezeroadjust.



P: (561) 995-0595 F: (561) 995-0622


Santa Clara, CA 95050P: (408) 970-3419 F: (408) 970-3426


Singapore 757716P: (65) 6482-3533 F: (65) 6484-4231

LFC-7000

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Dimensional Drawings (Horizontal Modules)

Chemial Version

Slurry Version


P: (561) 995-0595 F: (561) 995-0622


Santa Clara, CA 95050P: (408) 970-3419 F: (408) 970-3426


Singapore 757716P: (65) 6482-3533 F: (65) 6484-4231

LFC-7000

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INTEGRATED FLOW CONTROL MODULE Order Information

Model CodeDescription

LFC-700 * - * * * * * - * * * - ***

Alarms and

Display

0 No Alarms or Display1 Alarms and Display on Top Panel2 Alarms and Display on Front Panel

-

TubeSize2 1/4”3 3/8”4 1/2”

Connection Type1 Flare Ends2 Super Pillar 300

Standard Full Scale Range

0 50mL/min1 100mL/min2 250mL/min3 500mL/min4 1000mL/min5 1500mL/min6 2500mL/min7 4000mL/min8 8000mL/min9 12000mL/min

Sensor/Converter1 M-2111(6mm)/DSP2 M-2111(4mm)/DSP3 M-2111(10mm)/DSP

Input/Output

1 0to10Vdc/0to10Vdc2 4to20mA/4to20mA3 0to10Vdc/4to20mA4 Others

-

ValveType1 DiaphragmValve2 PinchValve

Mounting Orientation1 Horizontal2 Vertical

Accessories1 without plug connector2 with plug connector and cable

- xxx UniquePNidentifier



P: (561) 995-0595 F: (561) 995-0622


Santa Clara, CA 95050P: (408) 970-3419 F: (408) 970-3426


Singapore 757716P: (65) 6482-3533 F: (65) 6484-4231

LFC-7000

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Warranty

Malema Sensors warrants to the buyer that its products are free from defects in materials and workmanship at the time of shipment and during the WARRANTY PERIOD. Malema Sensors obligationunderthiswarrantyislimitedtothereplacementoftheproduct(s)bysameproduct(s)manufacturedbyMalemaSensorsorrepairoftheproduct(s)attheMalemaSensorsfacility.Malema Sensors products are sold with the understanding that the buyer has determined the applicabilityoftheproduct(s)toitsintendeduse.Itistheresponsibilityofthebuyertoverifyacceptability of performance to the actual conditions of use. Performance may vary depending upon these actual conditions. Warranty PeriodThiswarrantyisineffectfortwelve(12)monthsfromthedateofshipmentfromMalema Sensors place of business.

Warranty ClaimIf Malema Sensors products are found to be defective in materials or workmanship within twelve (12)monthsofthedateofshipment,theywillberepairedorreplacedwithsameproductatthediscretion of Malema Sensors at its place of business at no charge to the buyer.

Service and Repair

To return the products, please obtain an RMA number for the product by contacting Malema Sensors(CorporateOffice),BocaRatonat(800)637-6418or(561)995-0595.

All returns of equipment must go to the following address: Malema Sensors, 1060 S Rogers CircleBocaRaton,FL33487,USA

NOTE: Specifications are subject to change without notice. LFC7000_IM_414140A

integrated flow control module for slurries and chemicals ... · lfc-000 3 integrated flow control...

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