ischia, 21-23 giugno 2006riunione annuale ge 2006 r. c. zaccuri, m. iodice, g. coppola, i. rendina....
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Ischia, 21-23 giugno 2006Riunione Annuale GE 2006
R. C. Zaccuri, M. Iodice, G. Coppola, I. Rendina.
Istituto per la Microelettronica e Microsistemi, Sezione di NapoliConsiglio Nazionale delle Ricerche
Via P. Castellino 111, 80123, Napoli, Italia
Thermo-electrical analysis of an Thermo-electrical analysis of an optoelectronic modulator integrated in a optoelectronic modulator integrated in a SOI rib waveguide operating in the Gb/s SOI rib waveguide operating in the Gb/s
regimeregime
Ischia, 21-23 giugno 2006Riunione Annuale GE 2006
Silicon PhotonicsSilicon Photonics
Advantages:Advantages:
Integration with electronic devices
Simple fabrication
Low cost
Reliability
EM Interferences immunity
New perspectives
Optoelectronic building blocks:Optoelectronic building blocks:
Ischia, 21-23 giugno 2006Riunione Annuale GE 2006
Silicon Optoelectronic DevicesSilicon Optoelectronic Devices
Sensing Microsystems
Optical sensors interrogation
Low cost optical interconnections
Fiber-to-the-Home and Fiber-in-the-Loop
Local Area Network (LAN)
…
Application fields:Application fields:
Input portOutput port
P-Si mirrors
Air beam splitter
Ischia, 21-23 giugno 2006Riunione Annuale GE 2006
P-i-N diode like electrical structure Free-carriers injection is transversal to
the optical beam propagation direction Planar structure compatible with
standard microelectronic processes Bipolar mode injection which is more
efficient respect to unipolar devices
Modulator Basic Structure Modulator Basic Structure
Main properties:Main properties:
Ischia, 21-23 giugno 2006Riunione Annuale GE 2006
Design MethodologyDesign Methodology
ATHENAATHENA Microelectronic fabrication processes simulator
ATLASATLASElectronic devices behavior simulator
with thermal module
2D optical mode solver and
3D optical Beam Propagation Method (BPM)
OPTIMIZED OPTIMIZED DEVICEDEVICE
IS THE DEVICE ELECTRICALLY
ANDTHERMALLY OPTIMIZED ?
IS THE STRUCURE A SINGLE-MODE
WAVEGUIDE AND ABLE TO EFFECTIVELY MODULATE THE OPTICAL BEAM?
YES
NO
NO
SOFTWARE SOFTWARE INTERFACE LAYERINTERFACE LAYER
MatlabMatlabYES
BeamPROPBeamPROP
Ischia, 21-23 giugno 2006Riunione Annuale GE 2006
Microelectronics Technology LabsMicroelectronics Technology Labs
Depositions
Photolitography
Wet & Dry Etching
Oxidations
FacilitiesFacilities