ken gilleo phd et-trends llc
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MEMS MOEMS Nano. Workshop. “What are the possibilities of small but movable machines?” - R. Feynman 1959 Feynman described MEMS and “Nano”. 1 Introduction & Overview. Ken Gilleo PhD ET-Trends LLC. Sections. MEMS/MOEMS Introduction/overview Nanotechnology Overview MEMS Fabrication - PowerPoint PPT PresentationTRANSCRIPT
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•Ken Gilleo PhD•ET-Trends LLC
1 Introduction & Overview
“What are the possibilities of small but movable machines?” - R. Feynman 1959
Feynman described MEMS and “Nano”
“What are the possibilities of small but movable machines?” - R. Feynman 1959
Feynman described MEMS and “Nano”
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SectionsSections1. MEMS/MOEMS Introduction/overview
2. Nanotechnology Overview
3. MEMS Fabrication
4. MEMS Mechanisms & Operation
5. Introduction to Packaging
6. MEMS Special Packaging Requirements
7. Nano Packaging
8. MEMS Packaging
9. Commercial Packages for MEMS
10. Summary & Future
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OutlineOutline
• What’s MEMS?
• MEMS/MOEMS Fundamentals
• Features & Attributes
• Mechanics & Motion
• Applications
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MEMSMEMS•Micro: small scale; similar to IC feature size*
•Electro: electrical power & electronics
•Mechanical: adds mechanical motion
•System: integrated; can be a System-on-Chip
Retains electronic features while adding mechanical structures
Retains electronic features while adding mechanical structures
Mechanical MOTION must be involved
Mechanical MOTION must be involved
* Micro – not yet Nano -- NEMS
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MEMS; Electro vs. Electronic
MEMS; Electro vs. Electronic
• All MEMS must have “electro” feature
• Electro: power, control, sense and compute
• MEMS devices can have on-chip electronics
• Electronic circuitry for MEMS Control, amplification, conditioning, etc.
• Electronics Locations
1. Integrated CMOS; iMEMS;
2. Wafer-level connected
3. Separate chips
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The Center of ConvergenceThe Center of Convergence
MEMSEle
ctro
nics
Optics
Mechanics
OE OM
Biotech
Chemistry
Physics
Medicine
MOEMS
Nano-technology
Telecom
Where all Sciences & Technologies will Converge
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• Convergence of electronics, mechanics, & (optics)
• Leverages semiconductor industry
• Mass-production in existing fabs
• Extreme “density”, highly scalability
• Extraordinary versatility and richness sensors energy devices logic functions motion control micro-manufacturing systems
Key AttributesKey Attributes
HearTalk FeelMove WalkGrabThinkSeeSense beyondControlEnergizeExtract energyManufactureCut-pierce-etc.More…
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•Hear
•Talk
•Feel
•Move
•Fly
•Walk
•Grab
•Think
•Sense
•See
•Control
•Pump
•Synthesize
•Align
•Cut
•More
MEMS Can:MEMS Can:
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Best MEMS FeaturesBest MEMS Features• Massively parallel manufacturing
• Can use Semi fabs; even older, smaller fabs
• Highly scalable; smaller = faster (less mass)
• Integrate everything; or bond wafers together
• Extraordinary functionality
• Ideal size for: optical, biological, chemical and
human interaction
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MEMS AdvantagesMEMS Advantages
• Taps the “mega” semiconductors infrastructure
• Merges motion & electronics & energy
• Can combine MEMS + CMOS logic on one chip
• Multifunctional; separate or combinations Sense; movement, energy, molecules, microbes
Compute; electronic logic, memory
Move; motion to solids, liquids, gases, and MEMS devices
Control; energy, signals, matter, motion
Produce; reagents, drugs, life forms
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Major ProductsMajor Products• Sensors (largest class; ~ 70%)
Motion detection; vehicles, machines, life forms
Position; gyroscopes, accelerometers Force/pressure: gases, fluids, solids Molecules; chemical, biological (emerging) Energy; heat, light, mechanical
• Control Energy; light, electrical, RF, sound, mechanical Fluids; pumps for machines, biomedical, other
Gases; even MEMS rockets have been built
Reactions; for synthesis & analysis (incl. pharma)
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MEMS Motion (actuation)
MEMS Motion (actuation)
• Deformable; cantilevers, beams - “no wear out”
• Sliding; linear
• Rotating; partial, full, multi-plane
• Rotating Inter-contact; gears, wheels
• Hinges
• Ejectors; fluids, gas, solids
• CombinationsMore on
ACTUATIONLater
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MEMS SensorsMEMS Sensors
Motion Dongle
Motion sensor - Moto
2-axis sensor - ADIEarthquake – warn, power, fuel shutoff
Earthquake – warn, power, fuel shutoff
Precise pedometers
Precise pedometers
SecuritySecurity
Air Bag sensor - ADI
Game and computer input
Game and computer input
JPL Micro-gyro
Military – US Gov’t.
Vehicle; crash, roll-over, ride, mechanical wellness
Vehicle; crash, roll-over, ride, mechanical wellnessRobots;
movement
Robots; movement
Military; vehicle, ordnance monitor
Military; vehicle, ordnance monitor
MEMS enabled iPhone
Motion-interactive
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MEMS DemoMEMS DemoSandia National Laboratories presents…
Sandia Sequel
Can the Government solve the overload problem?
BUG still wins!
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