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March 3 - 6, 2019

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Wrap This Up? - Advanced Technology PackagingTestConX 2019Session 2A Presentation 1

March 3-6, 2019TestConX Workshop www.testconx.org

Discussions of Testing Challenges and Technologies of Probing

Bio-MEMS Sensors for Mass Production

Mesa, Arizona ● March 3 - 6, 2019

Wendy Chen, Chieh-Wen Lu, Lai-Po TingKuang-Hsiang Liu, Hsi-Hua Chou, Yu-Hao Ciou

KYEC



Contents Outlook on the Market of Bio-MEMS

Test Challenges and Technologies of Bio-MEMS

Wet Test Approach of Microfluidics Wafer Testing

– Experimental Study & Measurement Result

Summary

2Discussions of Testing Challenges and Technologies of Probing Bio-MEMS Sensor for Mass

Production



Outlook on the Market of Bio-MEMS

Discussions of Testing Challenges and Technologies of Probing Bio-MEMS Sensor for Mass Production 3



The Market Trend of Bio-MEMS Bio-MEMS have biomedical applications of MEMS The Microfluidic technologies have dominated growing applications


Yole 2016 report



Outlook on the Microfluidics Market


The Market value is aggressively growing The CAGR growth rate of Market value is more than the number of units The Average Sales Price (ASP) of silicon microfluidic chips is growing annually



The Innovative Applications of Microfluidic Chips Next generation DNA sequencing could examine over 22,000 genes at once.

– Shorten schedule from several weeks to few hours.– Find out the problems of genes quickly through technologies of Big Data.

Point-of-Care Testing(POCT) is a new method of medical diagnostic. – Patients could do medical test at home or bed-side by innovative biological devices.– Doctors could take appropriate actions in time by tracing information of healthcare from

network.




Test Challenges and Technologies of Bio-MEMS




Regulations and Certifications The first challenge – It takes a long time to prepare and pass the certifications

of the medical regulations such as ISO13485 “The Quality Management Standard of Medical devices” and build up suitable safety level of laboratory for failure analysis of testing devices.


Medical Consumer Gray Area

Organs on Chip Microfluidics

Neural Implants Micro-needles Arrays of electrodes

Retinal Implants Micro-needles Arrays of electrodes Image sensor MEMS antenna

Exoskeletons Accelerometer 3 axis Gyro 3 axis Electrode sensor

DNA sequencing Microfluidic sensor

MEMS base Hearing aids Microphone

Blood pressure monitor Pressure sensor

Point-of-care Temperature sensor Microfluidic sensor Image sensor Microphone

Pedometer Accelerometer 1 axis

Heart rate monitor

Contact lens with sensing capability Strain sensor MEMS antenna

Health-Patch Temperature sensor Accelerometer 3 axis Electrode sensors MEMS antenna

Small Pill Image sensor MEMS actuator MEMS antenna

Flow Sensor Thermopiles

Gas Sensor

Micro-dispenser Micro-pump Micro-needles

Applications of Bio-MEMS



Test Strategy and Test Cost The second test challenge -- How to provide a suitable test input to Bio-MEMS

devices with reasonable test methods and cost for mass production. The third test challenge -- Reliability for the applications of in vivo. The design

for reliability is important for the Bio-MEMS devices to be applied in vivo.


Bio-MEMS DevicesTest Status

Inertial Sensor

Pressure Sensor

SiliconMicrophone

Thermopile SiliconMicrofluidics

Micro-needles

Wafer Test / Chip Test

Package Test / Final Test

System Level Test

Complexity / ASP Mature / ↓ Mature / ↓ Mature / ↓ Array / ↓ Integration / ↑ Array / ≈

Yield Good Good Good Acceptable Bad Bad

Need EnhanceMature Portion Not ready Good Yield>90% Bad Yield< 50%Acceptable Yield>50%




ISFET Structure Extend-Gate ISFET

Floating Gate ISFET

The principle of biological microfluidic sensor is ion-sensitive field-effect transistor (ISFET). The various biological applications motivated the innovation of new structure of ISFET such as extend-gate and floating gate.

Microfluidic Sensors



Discussions of Testing Challenges and Technologies of Probing Bio-MEMS Sensor for Mass Production

The Ion-Sensitive Field-Effect Transistor (ISFET) is used to measure ion concentrations (such as H+) in solutions.

The threshold voltage of ISFET depends on the pH of the substance in contact with its ion sensitive barrier of ISFET.

Discussions of Test Technologies

Standard ISFET Biological ISFET



Wet Test Approach of Microfluidics Wafer Testing

- Experimental Study & Measurement Results




Inject Buffer Solutions on the Test Target There are two major methods to inject buffer solutions to test Bio-Sensor. The first method is dropped liquids on surface of sensors by micro-pipet. The second method is bumped and filled liquids on surface of sensors by

cover.


Drop Liquids Fill Liquids



Test Bio-Chips by Dispensing Method The module of auto-dispensing micro-pipet could be integrated into prober. Several major parameters need to be considered in the beginning.

– What percentage of sensor area have to contact with liquids? – What conditions are needed for test requirements of contact angle? – How long the test time will be?


Example : Condition=> RH 50 % ,Temp. 26 o C ,Droplet 1.4 μl

Contact AngleContact Angle



The high humidity of testing environment could slow down the speed of evaporation and is good for long test time case.

The surface with micro-well structure could increase the scale of contact angle. Monitoring the variant of contact angle could detect the quality of micro-well process of sequencing sensors.


Hydrophobic surface

Details of Test Methods

Roughness surface & Contact Angle

ᶿ1 ᶿ2

ᶿ1 > ᶿ2



Test Bio-Chips by Filling Liquid into Cover The module of fluidics system could be integrated into probe card to achieve

inject different kinds of liquids on sensor area and do wafer probing test at the same time.

The fluidics system included micro-pumps, micro-pipes, micro-valves and PDMS cover with reference electrode.




Test result is sensitive to the residuum of previous process which could induce high deviation of measurement result.

The optimum structure of PDMS cover could improve the percentage of residuum to less than 1%.


PDMS Cover Design

Rectangle structure Elliptical structure

Optimum structure of PDMS cover

0%5%

10%15%20%25%30%35%40%45%50%

10% 30% 50%

Dev

iatio

n of

Tes

t dat

a %

The Percentage of Residuum

The Residue Effect Test Deviation

pH10pH7pH4



Discussions of Test Procedure


Removebuffer solutions

Start Inject buffer solutions pH7

Inject DD WaterRemove DD Wafer

Inject buffer solutions pH4

Remove buffer solutions

Inject buffer solutions pH9Remove buffer solutions














Typical Test Process Improvement Test Process Optimum Test Process Inject same liquids twice

Test

Test

Test


Test End


Test End


Test End


Fail

Pass

Fail

Fail

Pass

Pass

Test

Test

Test

Test

Test

Test

Fail

Fail

Fail

Fail

Fail

Fail

Pass

Pass

Pass

Pass

Pass

Pass



Experimental Result


Residuum < 10%

The deviation of test data could be reduced by additional cleaning procedure of DD wafer injection as Improvement Test Process.

The Optimum Test Process is injection twice same buffer solutions instead of DD wafer which could simplify test process and also have low test deviation.



Summary The biochemical microfluidic chips dominated the growing rate of Bio-MEMS

market -- Microfluidic sensors could be fabricated by micro scale structure of MEMS process and integrated with CMOS process to perform multi-functions.

The principle of biological microfluidic sensor is ion-sensitive field-effect transistor (ISFET). The wet test of wafer probing methods are good to detect the performance of ISFET and enhance production yield of wafer process .

The residuum of previous process could effect the test stability and accuracy of wet test methods. It is important subjects to narrow down this effects when wet test be applied to wafer probing process.




Thanks for Contributors


KYEC: Wendy Chen, Kuang-Hsiang Liu, Chieh-Wen Lu, Hsi-Hua Chou, Lai-Po Ting, Yu-Hao Ciou

NTHU (National Tsing Hua University): Prof. Fan-Gang Tseng, Dr. Waye Lee TMU (Taipei Medical University) : Prof. Jc Lui

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