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21 rue la Noue Bras de Fer 44200 NANTES - FRANCE +33 2 40 18 09 16 [email protected] www.systemplus.fr mCube MC3672 WLCSP Accelerometer MEMS report by Audrey LAHRACH March 2017

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Page 1: mCube MC3672: the smallest WLCSP MEMS accelerometer for ... · MARKET AND TECHNOLOGY REPORTS - YOLE DÉVELOPPEMENT MEMS & SENSORS • 3DIC and 2.5D TSV Interconnect for Advanced Packaging:

©2017 by System Plus Consulting | mCube MC3672 Accelerometer 1

21 rue la Noue Bras de Fer44200 NANTES - FRANCE +33 2 40 18 09 16 [email protected] www.systemplus.fr

mCube MC3672WLCSP AccelerometerMEMS report by Audrey LAHRACHMarch 2017

Page 2: mCube MC3672: the smallest WLCSP MEMS accelerometer for ... · MARKET AND TECHNOLOGY REPORTS - YOLE DÉVELOPPEMENT MEMS & SENSORS • 3DIC and 2.5D TSV Interconnect for Advanced Packaging:

©2017 by System Plus Consulting | mCube MC3672 Accelerometer 2

Table of Contents

Overview / Introduction 3

o Executive Summary

o Reverse Costing Methodology

Company Profile 8

o mCube

o MC3672 Characteristics

Physical Analysis 14

o Synthesis of the Physical Analysis

o Physical Analysis Methodology

o Package 17

Package Views & Dimensions

Package Pin Out

Package Overview

Package Cross-Section

Package Bottom view and Overview

Package Opening

o MEMS Cap 30

o MEMS Sensing Area

View, Dimensions & Marking

Main Blocks Identification

o ASIC Die 44

View, Dimensions & Marking

Delayering

Main Blocks Identification

Process Characteristics

o Cross-Section 50

o MEMS Structure 70

Physical Comparison 73

o mCube Accelerometers Evolutions

o Comparison with competitors

o Package Comparison with Bosch BMA355

Manufacturing Process Flow 86

o Global Overview

o IC Front-End Process

o IC Wafer Fabrication Unit

o MEMS Process Flow

o MEMS Wafer Fabrication Unit

o Packaging Process Flow

o Package Assembly Unit

Cost Analysis 103

o Synthesis of the cost analysis

o Yields Explanation & Hypotheses

o ASIC Front-End Cost

o MEMS Front-End Cost

o MEMS Front-End Cost per process steps

o Total Front-End Cost

o WLCSP Package Cost

o WLCSP Package per process steps

o Component Wafer & Die

o Component Cost

Estimated Price Analysis 120

Company services 125

Page 3: mCube MC3672: the smallest WLCSP MEMS accelerometer for ... · MARKET AND TECHNOLOGY REPORTS - YOLE DÉVELOPPEMENT MEMS & SENSORS • 3DIC and 2.5D TSV Interconnect for Advanced Packaging:

©2017 by System Plus Consulting | mCube MC3672 Accelerometer 3

Overview / Introductiono Executive Summaryo Reverse Costing

Methodologyo Glossary

Company Profile & Supply Chain

Physical Analysis

Manufacturing Process Flow

Cost Analysis

Selling Price Analysis

About System Plus

Executive Summary

With the MC3672, mCube has released the industry’s smallest WLCSP ultra-low power accelerometer for wearables,enabling significantly extended battery life and very small form factors.

This new component should increase the company’s market share. One target is earbud applications, like Apple’sAirPods, where power consumption is a major parameter and the space is very limited.

Unlike its main competitors, Bosch Sensortec and STMicroelectronics, mCube provides monolithic sensor integrationfor consumer electronics in a WLCSP package. This uses only wafer level steps to assemble the ASIC, MEMS sensor,MEMS cap and package. Mainly produced by TSMC, which made great efforts to provide complete platforms forMEMS manufacturing, the component is elegantly designed and better integrated than most of its competitors.

After Bosch Sensortec released a WLCSP 3-axis accelerometer, mCube chose a different approach, although it stilluses a Via-Middle TSV process for the package integration. Two TSV processes are used in this component, includingfor connecting the MEMS sensor to the IC electronics.

The final size is smaller compared than Bosch’s device, at 1.1mmx1.3mmx0.74mm. This is a 45% footprint and 21%thickness reduction compared to the previous 1.6mmx1.6mmx0.94mm mCube MC3635 LGA package and a 64%footprint reduction compared to the present 2mmx2mm LGA package.

The report includes a complete overview of the evolution of mCube’s MEMS accelerometers since the secondgeneration. It also features a detailed technology and cost comparison with leading edge accelerometers from BoschSensortec and STMicroelectronics and a process comparison with Bosch’s WLCSP accelerometer.

Page 4: mCube MC3672: the smallest WLCSP MEMS accelerometer for ... · MARKET AND TECHNOLOGY REPORTS - YOLE DÉVELOPPEMENT MEMS & SENSORS • 3DIC and 2.5D TSV Interconnect for Advanced Packaging:

©2017 by System Plus Consulting | mCube MC3672 Accelerometer 4

Overview / Introduction

Company Profile & Supply Chain

Physical Analysis o Synthesiso Packageo MEMS Dieo IC Dieo Cross-Sectiono Structureo Comparison

Manufacturing Process Flow

Cost Analysis

Selling Price Analysis

About System Plus

1.0

9 m

m

Package View & Dimensions: MC3672

Package Top View Package Bottom View

Package Side View

1.29 mm

0.7

4 m

m

• Package: WLCSP

• Dimensions: 1.09 x 1.29 x 0.74mm

• Pin Pitch: 0.35-0.45mm

• Marking:

GM6 or Y4T

.YE .WE

Page 5: mCube MC3672: the smallest WLCSP MEMS accelerometer for ... · MARKET AND TECHNOLOGY REPORTS - YOLE DÉVELOPPEMENT MEMS & SENSORS • 3DIC and 2.5D TSV Interconnect for Advanced Packaging:

©2017 by System Plus Consulting | mCube MC3672 Accelerometer 5

Overview / Introduction

Company Profile & Supply Chain

Physical Analysis o Synthesiso Packageo MEMS Dieo IC Dieo Cross-Sectiono Structureo Comparison

Manufacturing Process Flow

Cost Analysis

Selling Price Analysis

About System Plus

Package Cross-Section

Package Cross-Section – SEM View

Package Bottom View

Page 6: mCube MC3672: the smallest WLCSP MEMS accelerometer for ... · MARKET AND TECHNOLOGY REPORTS - YOLE DÉVELOPPEMENT MEMS & SENSORS • 3DIC and 2.5D TSV Interconnect for Advanced Packaging:

©2017 by System Plus Consulting | mCube MC3672 Accelerometer 6

Overview / Introduction

Company Profile & Supply Chain

Physical Analysis o Synthesiso Packageo MEMS Dieo IC Dieo Cross-Sectiono Structureo Comparison

Manufacturing Process Flow

Cost Analysis

Selling Price Analysis

About System Plus

MEMS Sensing Area

MEMS Sensing Area – SEM View

Page 7: mCube MC3672: the smallest WLCSP MEMS accelerometer for ... · MARKET AND TECHNOLOGY REPORTS - YOLE DÉVELOPPEMENT MEMS & SENSORS • 3DIC and 2.5D TSV Interconnect for Advanced Packaging:

©2017 by System Plus Consulting | mCube MC3672 Accelerometer 7

Overview / Introduction

Company Profile & Supply Chain

Physical Analysis

Manufacturing Process Flow

Cost Analysiso Synthesiso Supply Chaino Yieldso IC Wafer Costo MEMS Wafer Costo Packaging Costo Back-End Costo Component Cost

Selling Price Analysis

About System Plus

ASIC Front-End Cost

Page 8: mCube MC3672: the smallest WLCSP MEMS accelerometer for ... · MARKET AND TECHNOLOGY REPORTS - YOLE DÉVELOPPEMENT MEMS & SENSORS • 3DIC and 2.5D TSV Interconnect for Advanced Packaging:

©2017 by System Plus Consulting | mCube MC3672 Accelerometer 8

Overview / Introduction

Company Profile & Supply Chain

Physical Analysis

Manufacturing Process Flow

Cost Analysiso Synthesiso Supply Chaino Yieldso IC Wafer Costo MEMS Wafer Costo Packaging Costo Back-End Costo Component Cost

Selling Price Analysis

About System Plus

MEMS Front-End Cost

Page 9: mCube MC3672: the smallest WLCSP MEMS accelerometer for ... · MARKET AND TECHNOLOGY REPORTS - YOLE DÉVELOPPEMENT MEMS & SENSORS • 3DIC and 2.5D TSV Interconnect for Advanced Packaging:

©2017 by System Plus Consulting | mCube MC3672 Accelerometer 9

Overview / Introduction

Company Profile & Supply Chain

Physical Analysis

Manufacturing Process Flow

Cost Analysiso Synthesiso Supply Chaino Yieldso IC Wafer Costo MEMS Wafer Costo Packaging Costo Back-End Costo Component Cost

Selling Price Analysis

About System Plus

WLCSP Packaging Cost

Page 10: mCube MC3672: the smallest WLCSP MEMS accelerometer for ... · MARKET AND TECHNOLOGY REPORTS - YOLE DÉVELOPPEMENT MEMS & SENSORS • 3DIC and 2.5D TSV Interconnect for Advanced Packaging:

©2017 by System Plus Consulting | mCube MC3672 Accelerometer 10

Overview / Introduction

Company Profile & Supply Chain

Physical Analysis

Manufacturing Process Flow

Cost Analysiso Synthesiso Supply Chaino Yieldso IC Wafer Costo MEMS Wafer Costo Packaging Costo Back-End Costo Component Cost

Selling Price Analysis

About System Plus

Component Wafer & Die Cost

Page 11: mCube MC3672: the smallest WLCSP MEMS accelerometer for ... · MARKET AND TECHNOLOGY REPORTS - YOLE DÉVELOPPEMENT MEMS & SENSORS • 3DIC and 2.5D TSV Interconnect for Advanced Packaging:

©2017 by System Plus Consulting | mCube MC3672 Accelerometer 11

Overview / Introduction

Company Profile & Supply Chain

Physical Analysis

Manufacturing Process Flow

Cost Analysis

Selling Price Analysiso Manufacturer Price

About System Plus

mCube MC3672 Estimated Manufacturer Price

Page 12: mCube MC3672: the smallest WLCSP MEMS accelerometer for ... · MARKET AND TECHNOLOGY REPORTS - YOLE DÉVELOPPEMENT MEMS & SENSORS • 3DIC and 2.5D TSV Interconnect for Advanced Packaging:

©2017 by System Plus Consulting | mCube MC3672 Accelerometer 12

Overview / Introduction

Company Profile & Supply Chain

Physical Analysis

Manufacturing Process Flow

Cost Analysis

Selling Price Analysis

About System Pluso Company serviceso Feedbackso Contacto Legal

MARKET AND TECHNOLOGY REPORTS - YOLE DÉVELOPPEMENT

MEMS & SENSORS• 3DIC and 2.5D TSV Interconnect for Advanced Packaging: 2016

Business Update• Sensors for Cellphones and Tablets 2016• Sensors for Wearable Electronics & Mobile Healthcare

REVERSE COSTING ANALYSES - SYSTEM PLUS CONSULTING

MEMS ACCELEROMETER• Safran Colibrys VS1000 Series• mCube MC3635 – 3-Axis Accelerometer• Bosch Sensortec BMA250E – 3-Axis Accelerometer• mCube MC3413 – 3-Axis Accelerometer• Bosch Sensortec BMA355 – 3-Axis Accelerometer

MEMS IMU• 6-Axis OIS IMUs: STMicroelectronics & InvenSense• InvenSense ICM-30630 – 6-Axis Sensor Hub• BOSCH Sensortec BMF055 – 6-Axis Sensor Hub

Related Reports

Page 13: mCube MC3672: the smallest WLCSP MEMS accelerometer for ... · MARKET AND TECHNOLOGY REPORTS - YOLE DÉVELOPPEMENT MEMS & SENSORS • 3DIC and 2.5D TSV Interconnect for Advanced Packaging:

©2017 by System Plus Consulting | mCube MC3672 Accelerometer 13

COMPANYSERVICES

Page 14: mCube MC3672: the smallest WLCSP MEMS accelerometer for ... · MARKET AND TECHNOLOGY REPORTS - YOLE DÉVELOPPEMENT MEMS & SENSORS • 3DIC and 2.5D TSV Interconnect for Advanced Packaging:

©2017 by System Plus Consulting | mCube MC3672 Accelerometer 14

Overview / Introduction

Company Profile & Supply Chain

Physical Analysis

Manufacturing Process Flow

Cost Analysis

Selling Price Analysis

About System Pluso Company serviceso Feedbackso Contacto Legal

Business Models Fields of Expertise

Custom Analyses(>130 analyses per year)

Reports(>40 reports per year)

Costing Tools

Trainings

Page 15: mCube MC3672: the smallest WLCSP MEMS accelerometer for ... · MARKET AND TECHNOLOGY REPORTS - YOLE DÉVELOPPEMENT MEMS & SENSORS • 3DIC and 2.5D TSV Interconnect for Advanced Packaging:

©2017 by System Plus Consulting | mCube MC3672 Accelerometer 15

Overview / Introduction

Company Profile & Supply Chain

Physical Analysis

Manufacturing Process Flow

Cost Analysis

Selling Price Analysis

About System Pluso Company serviceso Feedbackso Contacto Legal

Contact

Headquarters21 rue La Noue Bras de Fer44200 NantesFRANCE+33 2 40 18 09 [email protected]

Europe Sales OfficeLizzie LEVENEZFrankfurt am MainGERMANY+49 151 23 54 41 [email protected]

America Sales OfficeSteve [email protected]

www.systemplus.fr

Asia Sales OfficeTakashi [email protected]

Mavis WANGGREATER [email protected]

NANTESHeadquarter

FRANKFURT/MAINEuropa Sales Office

LYONYOLE HQ

TOKYOYOLE KK

GREATER CHINAYOLE

PHOENIXYOLE Inc.