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Mechanical Engineering Bachelor Focus in Microsystems and Nanoscale Engineering Mikrosysteme und Nanotechnologie April 28th, 2020 Focus-Coordinator: Prof. Christofer Hierold Micro and Nanosystems

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Page 1: Mechanical Engineering - ETH Z · Microsystems and Nanoscale Engineering – Curriculum Wählbare Fächer LE-Nr. ETCS HS 20 ETCS FS 21 Microrobotics 151-0604-00 4 Introduction to

Mechanical Engineering

Bachelor Focus in Microsystems and Nanoscale EngineeringMikrosysteme und NanotechnologieApril 28th, 2020

Focus-Coordinator:Prof. Christofer HieroldMicro and Nanosystems

Page 2: Mechanical Engineering - ETH Z · Microsystems and Nanoscale Engineering – Curriculum Wählbare Fächer LE-Nr. ETCS HS 20 ETCS FS 21 Microrobotics 151-0604-00 4 Introduction to

Introduction and Motivations

Page 3: Mechanical Engineering - ETH Z · Microsystems and Nanoscale Engineering – Curriculum Wählbare Fächer LE-Nr. ETCS HS 20 ETCS FS 21 Microrobotics 151-0604-00 4 Introduction to

[Source: www.apple.com]

http://idw-online.de/de/image?id=64000&display_lang=de_DEhttp://www.tms.org/pubs/journals/JOM/0311/Byko-0311.html

[Source: Sensimed]

http://www.memsindustrygroup.org/files/public/April2010.htm

Microsystems and Nanoscale Engineering everywhereIncrease of functionality, performance, and application fields

Page 4: Mechanical Engineering - ETH Z · Microsystems and Nanoscale Engineering – Curriculum Wählbare Fächer LE-Nr. ETCS HS 20 ETCS FS 21 Microrobotics 151-0604-00 4 Introduction to

Zurich Heart Project

LeftVentricle

VAD Pumpwww.heartware.comGregor Ochsner, 2014, Diss. ETH No. 22061

Objective:Haemocompatible integration of MEMS pressure sensors for Ventricular Assist Devices

Seamless integration for unperturbed flow

PressureSensor

Page 5: Mechanical Engineering - ETH Z · Microsystems and Nanoscale Engineering – Curriculum Wählbare Fächer LE-Nr. ETCS HS 20 ETCS FS 21 Microrobotics 151-0604-00 4 Introduction to

Courtesy of Dr. Franz LärmerRobert Bosch GmbH

Automotive Applications

Page 6: Mechanical Engineering - ETH Z · Microsystems and Nanoscale Engineering – Curriculum Wählbare Fächer LE-Nr. ETCS HS 20 ETCS FS 21 Microrobotics 151-0604-00 4 Introduction to

Coriolis Force

Micromachined resonant sensors exploiting theCoriolis force are mainly used for angular rate sensing (gyroscopes)

Fs = 2m v ×

Fs: Coriolis Force: Angular rate / yaw rate of the carm:seismic massv: movement of the seismic mass

Page 7: Mechanical Engineering - ETH Z · Microsystems and Nanoscale Engineering – Curriculum Wählbare Fächer LE-Nr. ETCS HS 20 ETCS FS 21 Microrobotics 151-0604-00 4 Introduction to

Technology for Safety: Sensors, Microsystems or MEMS

Page 8: Mechanical Engineering - ETH Z · Microsystems and Nanoscale Engineering – Curriculum Wählbare Fächer LE-Nr. ETCS HS 20 ETCS FS 21 Microrobotics 151-0604-00 4 Introduction to

Microsystems and Nanoscale Engineering - Myths

It’s all about chemistry!?

NO, it is not.

Except basics like Si + 2H2O SiO2 + 2H2

It is not mechanical engineering! YES, it is mechanical engineering!

Page 9: Mechanical Engineering - ETH Z · Microsystems and Nanoscale Engineering – Curriculum Wählbare Fächer LE-Nr. ETCS HS 20 ETCS FS 21 Microrobotics 151-0604-00 4 Introduction to

Microsystems and Nanoscale Engineering – Myths 2

I am limited in my options for continuing Master Programs?!

NO, you are not

You are still studying BSc ME, allowing to continue with ME consecutive and specialized Master Programs and respective programs at ETH Zurich or other universities

Page 10: Mechanical Engineering - ETH Z · Microsystems and Nanoscale Engineering – Curriculum Wählbare Fächer LE-Nr. ETCS HS 20 ETCS FS 21 Microrobotics 151-0604-00 4 Introduction to

Curriculum

Page 11: Mechanical Engineering - ETH Z · Microsystems and Nanoscale Engineering – Curriculum Wählbare Fächer LE-Nr. ETCS HS 20 ETCS FS 21 Microrobotics 151-0604-00 4 Introduction to

Microsystems and Nanoscale Engineering at D-MAVT

Professors

Jürg DualInge HerrmannChristofer HieroldDenis KochmannBrad NelsonDavid NorrisDimos PoulikakosSotiris PratsinisAndreas StemmerMark Tibbitt

Page 12: Mechanical Engineering - ETH Z · Microsystems and Nanoscale Engineering – Curriculum Wählbare Fächer LE-Nr. ETCS HS 20 ETCS FS 21 Microrobotics 151-0604-00 4 Introduction to

Microsystems and Nanoscale Engineering – Curriculum

Wählbare Fächer LE-Nr. ETCS HS 20

ETCS FS 21

Microrobotics 151-0604-00 4Introduction to Plasmonics 151-0911-00 4

Studies on Micro and Nano Systems 151-0643-00 5 5

Microsystems I: Process Technology and Integration 151-0619-00 6Thermodynamics and Transport Phenomena in Nanotechnology 151-0060-00 4Microsystesm II: Devices and Applications 151-0172-00 6Nicht-glatte Dynamik 151-0516-00 5Experimentelle Mechanik 151-0540-00 4Measuring on the Nanometer Scale 151-0622-00 2Nanorobotics 151-0630-00 4Micro- and Nanoparticle Technology 151-0902-00 6Introduction to Quantum Mechanics for Engineers 151-0966-00 4

Page 13: Mechanical Engineering - ETH Z · Microsystems and Nanoscale Engineering – Curriculum Wählbare Fächer LE-Nr. ETCS HS 20 ETCS FS 21 Microrobotics 151-0604-00 4 Introduction to

Aufbau des Studiums

Page 14: Mechanical Engineering - ETH Z · Microsystems and Nanoscale Engineering – Curriculum Wählbare Fächer LE-Nr. ETCS HS 20 ETCS FS 21 Microrobotics 151-0604-00 4 Introduction to

Projects

Page 15: Mechanical Engineering - ETH Z · Microsystems and Nanoscale Engineering – Curriculum Wählbare Fächer LE-Nr. ETCS HS 20 ETCS FS 21 Microrobotics 151-0604-00 4 Introduction to

1 μm

electrical contacts

Particles ( beads, cells, … ) are moved or rotated by nonlinear acoustics in fluid cavities in microsystems ( see Lab on Chip Tutorial Series 2011-2012 ) e.g. for biomedical applications

Ultrasonic Manipulation ofCopolymer Beads (74m) withmicrogripperCollab. with Nelson group, ETHZ1 mm channel, 6x slower

Ultrasonic Manipulation of MCF10A Cells: Line Formation Collab. with University Hospital ZurichField of view: 0.67 0.56 mm , Real time

Ultrasonic Rotation of Particle Clumps17 m Copolymer particlesReal time, 3 mm x 3 mm square chamber

Ultrasonic Particle ManipulationProf. Jürg Dual, Center of Mechanics

Page 16: Mechanical Engineering - ETH Z · Microsystems and Nanoscale Engineering – Curriculum Wählbare Fächer LE-Nr. ETCS HS 20 ETCS FS 21 Microrobotics 151-0604-00 4 Introduction to

Nanophotonics

www.omel.mavt.ethz.ch

Main Research Interests:- Photonic and plasmonic structures - Semiconductor nanomaterials- Combine to explore new phenomena and devices

David J. Norris, Optical Materials Engineering Lab

fluorescent nanoplatelets spasers and lasers diffractive optical elements

Page 17: Mechanical Engineering - ETH Z · Microsystems and Nanoscale Engineering – Curriculum Wählbare Fächer LE-Nr. ETCS HS 20 ETCS FS 21 Microrobotics 151-0604-00 4 Introduction to

We synthesize, assemble, and characterize functional nanoscalematerials and components to explore their potential for next-generation electronic devices.

Molecular electronic devicesassembled from nanoparticlesand characterized by scanning probe microscopy.

Sub-5-nm channel length organic field effect transistor fabricated from a pair of gold nanorods.

Voltage dropalong a nanowire.

Assembly and Characterization ofNanoscale ElectronicsProf. Andreas Stemmer, Nanotechnology Group

Page 18: Mechanical Engineering - ETH Z · Microsystems and Nanoscale Engineering – Curriculum Wählbare Fächer LE-Nr. ETCS HS 20 ETCS FS 21 Microrobotics 151-0604-00 4 Introduction to

Nanoparticle Systems Engineering LaboratoryProf. Inge K. Herrmann

www.nse.ethz.ch

Page 19: Mechanical Engineering - ETH Z · Microsystems and Nanoscale Engineering – Curriculum Wählbare Fächer LE-Nr. ETCS HS 20 ETCS FS 21 Microrobotics 151-0604-00 4 Introduction to

AQUASAR, OneBATProf. Dimos Poulikakos, Institute of Energy Technology / LTNT

Main Research Interests:- Energy conversion, transport and fluidics- Biothermofluidics- Energy and the environment

Page 20: Mechanical Engineering - ETH Z · Microsystems and Nanoscale Engineering – Curriculum Wählbare Fächer LE-Nr. ETCS HS 20 ETCS FS 21 Microrobotics 151-0604-00 4 Introduction to

Mechanics & Materials: Design andFabrication of New Materials SystemsProf. Dennis Kochmann, Mechanics & Materials Laboratory

www.mm.ethz.ch

CAD design

experiment

computationalmodel

Truss lattices with controllable stiffness,strength, energy absorption, wave guiding, etc.

Computational multiscale design of cellular solids with high strength and extreme shape recoverability.

Multiscale modeling: from atoms to devices

Page 21: Mechanical Engineering - ETH Z · Microsystems and Nanoscale Engineering – Curriculum Wählbare Fächer LE-Nr. ETCS HS 20 ETCS FS 21 Microrobotics 151-0604-00 4 Introduction to

Multi-scale Robotics Lab: Fabrication andmanipulation of micro and nano robots

Prof. Brad Nelson, Institute of Robotics and Intelligent Systems

Magnetic manipulation systems allow the precise 3D control of various magnetic agents for biological andbiomedical applications. Micro and nanorobots with different shapes and functionalities are fabricated toperfom targeted therapies with minimal invasiveness.

Page 22: Mechanical Engineering - ETH Z · Microsystems and Nanoscale Engineering – Curriculum Wählbare Fächer LE-Nr. ETCS HS 20 ETCS FS 21 Microrobotics 151-0604-00 4 Introduction to

Particle Technology LabProf. Sotiris Pratsinis, Institute Process Enineering

Devices: BreathSensors

Carbon black manufacture

Continuum

Multiscale Process Design

Page 23: Mechanical Engineering - ETH Z · Microsystems and Nanoscale Engineering – Curriculum Wählbare Fächer LE-Nr. ETCS HS 20 ETCS FS 21 Microrobotics 151-0604-00 4 Introduction to

Macromolecular Engineering LabPolymer engineering of advanced materialsProf. Mark Tibbitt, Institute of Process Engineering

www.macro.ethz.ch

MaterialsDesign

BiologicalInterfaces

Soft materials design with a focuson biomedical applications

Advanced manufacturing of multicomponent biomaterials

Injectable drug delivery systems

Page 24: Mechanical Engineering - ETH Z · Microsystems and Nanoscale Engineering – Curriculum Wählbare Fächer LE-Nr. ETCS HS 20 ETCS FS 21 Microrobotics 151-0604-00 4 Introduction to

Ultra Low Power Sensor SystemsProf. Christofer Hierold, Chair of Micro- and Nanosystems

www.micro.mavt.ethz.chIntegrated SWNT by Sebastian Eberle

Ultra low power CNT gas sensorsand fabrication technology

www.heartware.com

LeftVentricle

VAD Pump

Implants forcardiovasculardiseases andinfectioncontrol

Artificialrobotic skin

Thermoelectric

Memristive

Ag

Bi2Se3

Au -

+Zero power sensors

Page 25: Mechanical Engineering - ETH Z · Microsystems and Nanoscale Engineering – Curriculum Wählbare Fächer LE-Nr. ETCS HS 20 ETCS FS 21 Microrobotics 151-0604-00 4 Introduction to

Microsystems and Nanotechnology @ D-MAVTFollows an interdisciplinary engineering approach

Mechanical Engineering

materials and surfaces

computational methods optics

electronics

process development

thermodynamics and energy conversion

mechanics material and system integration

systems control

Page 26: Mechanical Engineering - ETH Z · Microsystems and Nanoscale Engineering – Curriculum Wählbare Fächer LE-Nr. ETCS HS 20 ETCS FS 21 Microrobotics 151-0604-00 4 Introduction to

Why is an inter-disciplinary education in micro and nanosystems for engineers of great relevance?

… was Sie als Mikrosystemtechniker für uns interessant macht ist die Fähigkeit, auf Systemebene Probleme zu lösen. Dabei müssen vielfach mechanische, elektrotechnische, materialspezifische und viele andere physikalische Effekte berücksichtigt werden.

sinngemäss nach ….Hr. Christoph Tietz, Leiter Platform Engineering, Bombardier Transportation AG, Schweiz, anlässlich eines Vorstellungsgesprächs

Page 27: Mechanical Engineering - ETH Z · Microsystems and Nanoscale Engineering – Curriculum Wählbare Fächer LE-Nr. ETCS HS 20 ETCS FS 21 Microrobotics 151-0604-00 4 Introduction to

Mechanical Engineering

Bachelor Focus in Microsystems and Nanoscale EngineeringMikrosysteme und Nanotechnologie

Questions?

Please contact:Prof. Christofer Hierold, Micro and [email protected]

© ETH Zurich

Page 28: Mechanical Engineering - ETH Z · Microsystems and Nanoscale Engineering – Curriculum Wählbare Fächer LE-Nr. ETCS HS 20 ETCS FS 21 Microrobotics 151-0604-00 4 Introduction to

ETH Zentrum Opening Hours during the semester: LEE K 208 Monday: 13:00 - 16:00Leonhardstrasse 21 Tuesday: 09:00 - 13:008092 Zürich Wednesday: 09:00 - 12:00

Thursday: 13:00 - 16:[email protected] Friday: 09:00 - 12:00

D-MAVT Studienadministration

Lorena LuziDr. Maddalena Velonà