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Mega II: System Diagram

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Page 1: Mega II: System Diagram. Low Level Float Closed Fluid Reservoir P1 S4 S2 S3 S4 S5 Fill Wash Rinse Drain Dry Process Chamber IAC IONIC ABSORPTION CHAMBER

Mega II: System Diagram

Page 2: Mega II: System Diagram. Low Level Float Closed Fluid Reservoir P1 S4 S2 S3 S4 S5 Fill Wash Rinse Drain Dry Process Chamber IAC IONIC ABSORPTION CHAMBER

Low Level FloatClosed Fluid

Reservoir

P1

S4S4

S2S2

S2S2

S3S3

S4S4

S5S5

Fill

Wash

Rinse

Drain

Dry

Process Chamber

IACIAC

IONIC ABSORPTION

CHAMBER( )

RES. SENSO

R

S1S1

S1S1

S3S3

S5S5HEAT(option)

NitrogenDryer

High LevelFloat

S1S1

Page 3: Mega II: System Diagram. Low Level Float Closed Fluid Reservoir P1 S4 S2 S3 S4 S5 Fill Wash Rinse Drain Dry Process Chamber IAC IONIC ABSORPTION CHAMBER

低液位浮标封闭的溶剂槽

P1

S4S4

S2S2

S2S2

S3S3

S4S4

S5S5

注入清洗

漂洗

排泄

干燥

清洗腔室

IACIAC

离子吸附腔室 ( )

电阻率探头

S1S1

S1S1

S3S3

S5S5加热选件氮气干燥

高液位浮标

S1S1

Page 4: Mega II: System Diagram. Low Level Float Closed Fluid Reservoir P1 S4 S2 S3 S4 S5 Fill Wash Rinse Drain Dry Process Chamber IAC IONIC ABSORPTION CHAMBER

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