MEMSMEMSMicro-Electo-Mechanical SystemsMicro-Electo-Mechanical Systems

By: Kelly GrahmannBy: Kelly Grahmann

Meen 3344Meen 3344

What is MEMS?What is MEMS?

Micro-Electro-Mechanical SystemsMicro-Electro-Mechanical Systems is the integration of elements, sensors, actuators, and is the integration of elements, sensors, actuators, and

electronics on a common silicon substrate through micro-electronics on a common silicon substrate through micro-fabrication technology, a manufacturing technology for making fabrication technology, a manufacturing technology for making microscopic devicesmicroscopic devices

Other Materials used in MEMSOther Materials used in MEMS Gallium ArsinideGallium Arsinide Titanium NickelTitanium Nickel Piezoelectric MaterialsPiezoelectric Materials

How MEMS are made!How MEMS are made! There are three main building blocks in MEMSThere are three main building blocks in MEMS

Deposition processDeposition process The ability to deposit thin films of The ability to deposit thin films of

materialmaterial LithographyLithography

is typically the transfer of a pattern to a is typically the transfer of a pattern to a photosensitive material by selective photosensitive material by selective exposure to a radiation source such as exposure to a radiation source such as light light

Etching ProcessEtching Process Wet etching where the material is Wet etching where the material is

dissolved when immersed in a chemical dissolved when immersed in a chemical solution solution

Dry etching where the material is Dry etching where the material is sputtered or dissolved using reactive sputtered or dissolved using reactive ions or a vapor phase etchant ions or a vapor phase etchant

Pictures of MEMSPictures of MEMS

ExpectedExpectedCharacteristics of MEMSCharacteristics of MEMS

In the future, MEMS In the future, MEMS Technology compared to Technology compared to Conventional Technology Conventional Technology should have these should have these effects:effects: Cost reductionCost reduction Increase functionalityIncrease functionality Improve reliabilityImprove reliability Decrease sizeDecrease size Decrease massDecrease mass

ReferencesReferences http://www.pcmag.com/encyclopedia_term/0,2542,t=micrhttp://www.pcmag.com/encyclopedia_term/0,2542,t=micr

oelectromechanical+systems&i=46791,00.aspoelectromechanical+systems&i=46791,00.asp http://www.stormingmedia.us/96/9694/A969424.htmlhttp://www.stormingmedia.us/96/9694/A969424.html http://www.swri.edu/3pubs/brochure/D64/MEMS/http://www.swri.edu/3pubs/brochure/D64/MEMS/

home.htmhome.htm http://www.smalltimes.com/document_display.cfm?http://www.smalltimes.com/document_display.cfm?

document_id=1566document_id=1566 http://www.memsnet.org/mems/what-is.htmlhttp://www.memsnet.org/mems/what-is.html http://www.wikipedia.orghttp://www.wikipedia.org http://www.thinfilmmfg.com/subscribers/Subscriber02/http://www.thinfilmmfg.com/subscribers/Subscriber02/

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