mems presentation
TRANSCRIPT
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MEMS (Micro Electro Mechanical Systems)
BY,S.MICHAEL JOSHUA
III Year Mechatronics,
PSG Polytechnic College, Coimbatore
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Introduction
MEMS (Micro Electro Mechanical
Systems) is a technology that in its
most general form can be defined
as miniaturized mechanical and
electro mechanical elements (i.e.,
devices and structures) that are
made using the techniques of
microfabrication.
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Why MEMS
MEMS can miniaturize electronics
MEMS makes it cost-effective
MEMS makes it reliable
MEMS opens up new opportunities
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History and Development of MEMS
The first MEMS device is invented by
an American Electrical Engineer
Harvey C. Nathanson in 1965 and he
invented a Tuner for Micro Electronic
Radios
In later the MEMS was developed in
step by step process in First
generation, Second generation and
Third generation
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Flow Chart of MEMS Process
Design Fabrication Testing Packaging
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Bulk Micromachining Surface Micromachining LIGA Process
Micro Machining Technology in MEMS
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Materials for MEMS
Silicon
Germanium
Gallium Arsenide
Quartz
Plastics and Polymers
Ceramics
Metals
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Applications
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Applications
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Applications
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Future MEMS
In future, the each and every product based on electronics is
manufactured under the MEMS technology
The industry challenges is to: Access to Foundries
Design, Simulation and Modelling
Packaging and Testing
Standardization
Education and Training
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References
MEMS Journal (www.memsjournal.com)
www.memsnet.org
wikipedia
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Thank You!!!