methods for minimizing slot die coating edge effects and
TRANSCRIPT
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MethodsforMinimizingSlotDieCoatingEdgeEffectsandPatternedCoating
MiguelFriedrich,GregGibsonnTact(FASHoldingsGroupLLC)10480MarkisonRoad,Dallas,TX
[email protected] 214.343.5387Keywords:SlotDieCoating,PatternedCoating,SelectiveCoating,PatchCoating,SelectiveRemoval,EdgeEffect,LeadingEdge,TrailingEdge,ActiveArea.Abstract:
Theslotdiecoatingmethodistypicallyusedforcoatingessentiallytheentireareaofthesubstrate.AnewmethodofslotdiecoatinghasbeendevelopedbynTactwhichallowsthe“macropatterning”ofaslotdiecoatedfilmtoproduceanarrayofrectangularshapes(activeareas)overtheareaofthesubstrate.Whencoatingonlargersubstrateswhichmaycontainvarioussmallerdevicestructures,thistechniqueisprovingtobeausefulwayofdepositingthematerialonlyintheactiveareawherethedevicesarelocated.Inaddition,withsomeofthestricteredgeexclusionrequirementsemergingfromnewdevicestructuresanddesigns,thehistorical10mmedgeexclusionusedintheLCDindustryisnolongeracceptableformanynewerapplications.Whilethelatestslotdiecoatingsoftwarecontrolsandhardwareallowforareduced5mmedgeexclusionformanymaterials,insomecasesthisisstillnotsufficient.Tomeettheseverysmalledgeexclusions,alowcost(bycomparison)thinfilmremovalmethodknownasSelectiveRemovalwasdeveloped,whichcanbeusedtoessentiallyeliminateleading(beginningofthecoating)andtrailing(endofthecoating)edgenon-uniformitiesandreducetheedgeexclusiontolessthan1mm.Background:
Historically,slotdiecoatinghasbeenregardedasaveryeffectivemethodfordepositingfilmsoverlargeareasoftheentiresubstratesurface,otherthanasmalluncoatedparameterofacoupleofmillimetersfromtheedges.Thosefamiliarwiththeartunderstandthemostchallengingaspectofsheet-to-sheet/discretepanelslotdiecoatingisminimizingtheedgeexclusion/edgeeffect,inparticularfortheleadingandtrailingedges.Theedgeexclusionreferstotheareaaroundtheedgesofacoatedsurfacethatisrequiredforthecoatingprocesstoachievesteadystatesthicknessandtargetuniformity,whichistypically±3%to±5%.Inthepast,forLCDmanufacturingprocesses,anedgeexclusionofupto10mmwasacceptable.Inotherwords,havinganon-uniformareaof10mm(orless)intheleading,trailingorsideedgesofthecoatedfilmwasacceptable.Butformanynewapplications,thisisnolongerallowable.Forexample,manynewdisplayapplicationsanddesigns(forOLEDandothers)nowhaveverythinoralmostnon-existentbezels,whichrequireamuchthinneredgeexclusionofoftenlessthan5mm.Systemdevelopersfrequentlyarethenfacedwiththedecisionwhethertouseasubsequent,oftenexpensiveremovalprocess,suchaslaserablation,ortoidentifyanalternatewaytodepositthesefilms.Thesealternativedepositionmethodsusuallyalsoinvolvemoreexpensiveprocessoptionssuchasinkjetprintingprocesses(significantlymorecomplexandexpensiveequipment,andstillatsomewhatdevelopmentalstage)orvacuumdeposition(expensiveequipmentandwithpoormaterialutilization)processes.Inaddition,inmostcases,asinglesubstrateisusedtomanufacturenumerousdevices.Sooperatorsendupprocessingseveral“activeareas”withinasinglelargerpane.Ideally,materialwouldbedepositedonlyonthoseactiveareas,butithasalwaysbeenchallengingtouseslotdiecoatingtodoanysortof
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patterneddepositiononthesubstrate,suchasacoatinganarrayofrectangularshapestocoveronlytheactiveareas.Theuseofmaskshasnotbeenaneffectivewaytodothisforsolutionbasedprocessing,andifthestarting(leadingedge)andstopping(trailingedge)controlisthemostchallengingpartoftheslotdiecoatingprocess,doingthisnumeroustimesthroughoutthecoatingprocessofasinglesubstratetodefinemultiplecoatedareasonthatsurfaceincreasesthedifficultyofachievinganacceptablecoatedfilm.Approach:
Toaddressthechallengeofcoatingonlyondesiredactiveareasofasubstrate,nTactdevelopedthetechniqueofSelectiveCoating,oftenreferredtoas“PatchCoating”,whichgivesoperatorstheabilitytocoatanarrayofrectangularshapesonadiscretesubstratesurfaceinasinglepass(seeFigure1andFigure2below).
Figure1:IllustrationofSelectiveCoatingProcess
Figure2:ExampleofSelectivelyCoatedPanel
TheSelectiveCoatingmethodusesaspeciallydesignedslotdiewithmultipleopeningstodefinecoatedanduncoatedareas(stripes)acrossthewidthofthesubstrate.Thestripesaretypicallyofuniformwidthandspacing,althoughasymmetricalarrangementsarealsopossible.Thestripearrayisgenerallydesignedtocoatthedesiredwidthonthefinaldevice,plusasmallamountofextrawidthoneachside.Thisextrawidth,or“sideedgeexclusion”,isneededtocompensateforthicknessnon-uniformitiesattheedgeofthecoatingandforpotentialoverlayinaccuracieswheremultiplelayersmustbealigned.Thestripecoatingiscombinedwithpreciseandproprietarysoftwarecontrolsgivingthesystemtheabilitytopreciselystartandstopthecoatingmultipletimesdownthelengthofthesubstrate,therebyenablingthedepositionofanarrayofrectangularshapes.Thestart/stopoperationinvolvesthecarefulcontrolofnumerouscoatingparameters,includingtheflowofmaterialthroughthedieandthepositionofthediewithrespecttothesubstrate.Thepositionofthecoatingstartandstoplocationscanbe
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preciselycontrolledandthelocationsaretypicallyprogrammedtocorrespondtothedesiredcoatedareas,alongwithasmallamountofadditionalcoatinglengthtocompensateforedgethicknessnon-uniformitiesandoverlayinaccuracies.ThecombinationofthisspecificallydesignedslotdieandnTact’soptimizedproprietarysoftwareandcontrolsschemegivestheoperatornotonlytheabilitytoselectivelycoatapatternedarrayofrectangularshapesonasubstratesurface,butalsotypicallyachieveabetterthan5mmedgeexclusionforthedepositionofmostfilms.
However,althoughachievableforsomeprocesses,limitingtheedgeeffectbelowthat5mmthresholdisstillquitechallenging.Today’ssmallbezeldisplaydesignsandotherapplicationrequirementsoftencallforanedgeexclusionoflessthan2mm,whichisquitedifficulttoattainwithmaterialsthroughtheuseofslotdiecoating.Toachievethis,theoperatoristypicallyforcedtouseasubsequentremovalstep/process.nTactdevelopedalowcost(bycomparison)materialremovalmethodcalledSelectiveRemoval,whichallowsdeveloperstolimittheedgeexclusiontolessthan1mminmostcases.TheSelectiveRemovaltechniqueimplementsaproprietarymechanismtoremoveportionsofthecoatingmaterial,suchastheleadingandtrailingedge,afterdeposition.Theremovalmechanismisajetspraynozzlethatusesasolventthatiscompatiblewiththecoatingfluidtodissolvethecoatedlayer,whilesimultaneouslyremovingthesolutionfromthesurfaceofthesubstrate.Thenozzledoesnottouchthesubstrate,thez-axiscontrollingtheheightabovethesurface,alongwiththex-axisandy-axismotionofthedevice,iscontrolledtoensureprocessreliabilityandrepeatability.Asthenozzleismovedalongaprogrammedpath,thecoatingmaterialisremoved,leavingacoatedareaofpreciseshapeanddimensions.Thenozzlemechanismisdesignedsothatthedissolvedsolutioniscompletelycontainedandremovedfromthesubstratewithnoyieldimpactonthecoatedpanel.ThroughtheuseofSelectiveRemoval,theoperatorisabletoeliminatetheunwanted,non-uniformedgeeffectattheleading,trailingand/orsideedges,leavingnearlytheentirecoatedareawithintargetuniformity.Thetechniquecouldalsobeusedtocreatecomplex,non-rectilinearshapesofcoatedmaterials.Theremovalmechanismcanbeconfiguredtoremoveanarrowbandofmaterial(lessthan1mmasshowninFigure3),oramuchwiderband(20mmormore),providingfurtherflexibilityinthewaythatthefinalcoatedpatterncanbegenerated.
Figure3:592µmlineremovedfrom9µmthickFluoropolymerfilm.Edgeeffectof235µm
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Implementation:
SelectiveCoatingandSelectiveRemovalprovideprocessflexibilitythatallowsanoptimizedapproachtocreatingthedesiredshapeandedgeprofileofacoatedarea.SelectiveCoatingaloneallowsthedepositionofadefinedarray,thoughwithsomeedgeeffectsaroundtheperimeterofeachcoatedarea.SelectiveRemovalcanbeusedwithSelectiveCoatingtomorepreciselydefineboththecoatedareaandthecoatingedgeprofile.SelectiveRemovalcanalsobeusedtocreateanarrayofshapesfromasinglecoatedarea,independentofSelectiveCoating.SelectiveCoatingcanbeimplementedasanadditionalfeatureandcapabilityoftheslotdiecoatersystem.Itisacombinationofaspecificallydesignedcoatingdieanddiecomponentswhichgiveyoutheabilitytocoatstripesinthecoatingdirection(x-axis)andsoftwarecontrolswhichprovidetheoperatortheparameterinputsandcapabilitytostartandstopthecoatingprocessinthey-axisdirection.Thecombinationofthesetwofeaturesandfunctionscangenerateafilmwithanarrayofrectangularshapes.TheimplementationofSelectiveRemovalcanbedoneeitherin-situ,directlyonthecoater,orasaseparateprocessstation.Formanyresearchanddevelopmentapplications,asinglemechanismsysteminstalledonthecoatersystemprovidesadequatethroughput.Inthiscase,theSelectiveRemovalmechanismisinstalledonthecrossbarandtakesadvantageofthealreadyexistinglinearmotorsofthecoatertomovethenozzleinthe“X”direction.AdditionalmotorsandcontrolsareaddedtogivetheSelectiveRemovalnozzletheabilitytointheY-axismovealongthecoatercrossbaraswellasZ-axismotion.Forproductionapplications,multiplemechanismsaswellastheimplementationofaseparateSelectiveRemovalstation(s)ormodule(s)canbeusedtoincreasesystemthroughput.Results:
SelectiveCoatinghasbeentestedandsuccessfullyimplementedwithavarietyofmaterialsrangingfromverylowviscositytomuchmoreviscousmaterials.Table1showsuniformitydateofaselectivelycoatedPEDOT:PSSfilm,atypicalOLEDHoleInjectionmaterial,coatedat70nm.Thematerialwasdepositedusingacoatvelocityof45mm/sectogenerate18segmentsonaGen2(370x470mm)borosilicatedisplayglasssubstrate.Anoveralluniformityofbetterthan±4%wasachieved,andtargetuniformity/steadystatewasreachedwithanedgeexclusionontheleadingandtrailingedgesoflessthan5mmandbetterthan2mmontheside
STRIPES73.48 73.74 74.19 72.56 73.04 71.8172.45 73.78 74.18 73.06 72.85 72.23
69.99 73.09 75.70 73.29 72.92 72.8472.53 73.45 72.33 73.91 72.65 72.42
72.60 73.11 74.40 73.78 72.85 73.2073.90 73.17 72.49 73.79 72.73 72.07
370mm71.50 71.19 71.33 72.97 72.11 72.7673.28 72.35 70.99 71.84 72.71 72.19
71.80 72.05 71.57 72.88 72.49 72.8971.38 72.51 72.65 71.74 72.77 73.25
72.05 72.62 73.00 72.19 72.46 71.8772.57 72.33 72.12 71.37 71.92 71.56
TrailingEdge 5mm 5mm LeadingEdge
Max Min Range Avg Unif. (+/-)75.70 69.99 5.71 72.64 3.92%
Lateralmeasurementstaken3mmfromedges
2
1
470mm
unit:nm
6
5
4
3
Table1:SelectiveCoatingofPEDOT:PSS
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edges.ThisprovedtobeadequatefortheOLEDLightingapplicationforwhichthisprocesswasoptimized.SelectiveRemovalprovidesfortheeliminationofthecoatingmaterialasthemechanismtravelsalongadefinedpath.Thedurationoftheremovalprocessdependsonthepathlengthandthevelocityofthemechanism,thelatterofwhichisheavilyinfluencedbythecoatingmaterialandremovalsolvent.Somematerialsaremucheasiertodissolvewithagivensolventandthereforequickertoremove,whileothermaterialswilldissolveataslowerpacetakinglongertoeliminate.Figure4:~46µmEdgeEffect Figure5:~108µmEdgeEffect
nTacttestedtheremovalprocessundervariousconditions,includingremovalofawetfilm(immediatelyaftercoating)asemidryfilm(aftersoftbakeorvacuumdryprocess)oradryfilmafteramorethoroughthermalcuringprocess.Resultshavevariedandbeenverymaterialspecific,withsomematerialsperformingbetterwhenremovedwetimmediatelyaftercoating,andothersbenefitingfromsomesolventevaporationprocess,suchavacuumdry,toimproveperformance.However,SelectiveRemovalonamostlydryfilmgenerallyprovedtobetheleasteffective.Whileitworkedinsomecases,theremovalprocessprovedtobesignificantlyslowerthanunderwetfilmorasemi-dryfilmconditions.
MostfilmsalsobenefittedfromasecondpassorsubsequentadditionalSelectiveRemoval,significantlyminimizingtheedgeexclusion.FollowingyouwillfindtheremovalofpositivephotoresistmaterialwithasinglepassandadoublepassofSelectiveRemoval.
CoatedArea
SubstrateAreaSubstrateArea
CoatedArea
Figure6:Removalaftersoftbake,70umEdgeExclusion Figure7:RemovalOnWetFilm,30µmEdgeExclusion
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Figure8:SinglePassRemoval Figure9:DoublePassRemoval
Withadoublepassremoval,animpressiveedgeexclusionofapproximately15µmwasachieved.However,whiledoublepassremovalimprovedtheedgeexclusionbyafactoroffive(5),a70-75µmedgeexclusionisacceptableformanyapplications,andasinglepassremovalsignificantlyimprovesthroughput.Forcertainhardtoeliminatematerials,however,morethanonepassmaybenecessarytoachievethedesiredremovalperformance.Ingeneral,manyofthesametypesofparameterswhichaffecttheoutcomeofaslotdiecoatingprocessneedtobeadjustedforSelectiveRemoval.Nozzlevelocity,removalgap(meaningthespacebetweenthenozzleandthetopsurfaceofthefilm/substrate)andsolventdispenseratecanallhaveanimpactandinfluenceSelectiveRemovalresults.Andjustaswithslotdiecoating,eachparameterneedstobeoptimizeddependingonthematerial/chemistrybeingremoved.
Figures10and11showtheresultsofSelectiveRemovalatdifferentremovalspeeds/nozzlevelocities.RemovalofaFluoropolymerfilmat10mmpersecondyieldedanedgeexclusion108µmcomparedtoathicker470µmedgeexclusionusingafasternozzlevelocityof20mmpersecond.Theslowernozzleandremovalspeedrepresentsanedgeexclusionimprovementwhichisalmostfive(5)timesthinner.However,anedgeexclusionoflessthan500µmmaystillbeadequateformanyapplications.Inthiscase,theoverallprocessmaybenefitfromasignificantlyfasternozzlespeed,resultinginanoverallimprovedthroughputorTACT.
AZ1518–singlepassremovalAcetoneat10mm/sec.~70µmedgeexclusion
Figure10:SelectiveRemovalat10mm/sec100µmgap
Figure11:SelectiveRemovalat20mm/sec
AZ1518–doublepassremovalAcetoneat10mm/sec.~15µmedgeexclusion.
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Conclusion/Summary:
Thesepatentpendingmethodspresentprocessimprovementsandpotentialsolutionstothechallengesinslotdiecoating.TheSelectiveCoatingmethodimprovesuponthewell-establishedandwidelyadopteduseofslotdiecoatingmethodtoformthinfilmlayersofpolymers,addressingahistoricallimitationoftraditionalslotdiecoatingtechniques.Mostmicroelectronicdevicesproducedtodayrequireoneormoreselectivelyformedcoatedlayersduringthemanufacturingprocess.Increasingly,thosefilmsareappliedaspatternsonlargersubstratessothatmanufacturingefficiencies,economiesofscaleandoverallcostreductionscanberealized.WithSelectiveCoatingoperatorscannowimplementbasicpatterningbydepositinganarrayofrectangularshapesinasinglepass,eachrepresentingadeviceonalargersubstrate.SelectiveRemovalcancomplementandenhanceSelectiveCoatingasitaddressesoneofslotdiecoating’sbiggestchallenges,minimizingthefilmedgeexclusion,throughthesubsequentremovalofnon-uniformitiestypicallyfoundintheleadingandtrailingedgesofaslotdiecoatedpanel.Thesetechniquescanbeappliedtoamultitudeofapplicationsincludingflatpaneldisplay,SolidStateLighting,SmartGlass,andotherorganicandprintedelectronicsapplications.
WhilethereisstillongoingresearchbynTacttocontinuetoimproveandfurtherdevelopbothofthesetechniques/methods,SelectiveAreCoatinghasalreadybeensuccessfullyimplementedonseveralpilotproductionlineswithplanstomoveintofullproductioninthenearfuture.Bothtechniquesshowrealpromiseasacosteffectivewaytoexpandthecapabilityofusingslotdiecoatingprocessfornumerousprocesses.
References:
[1] UnitedStatesPatentnumber7,169,229,“MovingHead,CoatingApparatus”
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[3] T.J.Faircloth,J.G.Innocenzo,C.Lang,“43.3:SlotDieCoatingforOLEDDisplays”,SIDSymposiumDigest39645(2008)
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[5] J.Gabel,I.deVries,R.Mandamparambil,A.Langen,R.Andriessen,“ProgressinpatterningtechnologiesforR2RslotdiecoatingforOLEDandOPVapplication”,EuropeanCoatingSymposium(2011)