metrology by pupil imaging mike adel, march 2014
DESCRIPTION
Metrology by pupil imaging Mike Adel, March 2014. Outline. The pupil Animal kingdom Optics Pupil imaging Optical architecture The Fourier domain Overlay metrology by pupil imaging What is overlay? Target architecture Quantification. Evolution has generated diversity in pupil structure. - PowerPoint PPT PresentationTRANSCRIPT
Metrology by pupil imaging
Mike Adel, March 2014
Outline
The pupil Animal kingdom Optics
Pupil imaging Optical architecture The Fourier domain
Overlay metrology by pupil imaging What is overlay? Target architecture Quantification
Evolution has generated diversity in pupil structure.
The pupil means many things
Exposure vs Depth of field
What happens when we put the image sensor in the pupil?
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Field imaging architecture
IlluminationFieldStop
Fiber from source
Image Sensor
Objective
Target
BS
Mirror
pupil
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Pupil imaging architecture
IFS
Fiber from source
CFS
Pupil image Sensor
Objective
Target
BS
Apodizer (spatial filter)
Mirror
Apodizer (spatial filter)
What is overlay metrology and why is it important?
Very Tight (Ångstrom level) Position Control
Scan
ner w
avel
engt
h [n
m]
9
Overlay metrology is enabled by quantification of symmetry breaking.
Field imaging Pupil imaging
Pupil image
-F0 F0
Rotational Symmetry Translational Symmetry
It’s all about diffraction
θd
dSinθ = mλ
For zero offset, first orders are symmetric.
I+
I_I0
Ax1 = I_- I+
X1X2 Y2Y1
With 4 cells, overlay can be measured in x & y
𝑂𝑉𝐿𝑥≃𝐹 0𝐴𝑥 1−𝐴𝑥 2
𝐴𝑥 1+ 𝐴𝑥 2
X1X2 Y2Y1
Summary
The pupil has many meanings and uses in optics.
The pupil is also a location in the optical path which enables the image to be viewed in the Fourier domain.
Overlay metrology is enabled by pupil imaging of overlaid periodic structures.
Translational offsets between periodic structures are required in order to quantify symmetry breaking in the pupil image.
-F0 F0I+I_I0
Thank YouAcknowledgements: Thanks to Mark Ghinovker for DFTs…
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Wavelength (nm)
Rela
tive
Inte
nsity
EUV
Shorter wavelength = higher resolutionEvolution of lithography light sources
Tungsten filamentlight source & power
supply ~$500Circa 1965
I-Line
H-Line
G-Line
Mercurylamp & power supply ~$5kCirca 1985
UPExcimer Laser & beamline ~$500kCirca 2005
ArFKrF
13.5
EUV light source~ 5m$?Circa 2015?
What happens in
the meantime?