www.adnano-tek.com

MOLECULAR BEAM EPITAXY

MBE-10

UHV Deposition System

FBBEAR system control software is a multifunctional

software to control the whole MBE system, i.e. Manipula-

tor rotation speed, heating program, multi effusion cell

temperature program, etc.

FBBEAR’s Deposition wizard make it hassle free to save

your experimental recipe, and fully automatize the depo-

sition processes. In addition, it also allow data logging in

order to review past deposition parameters. FBBear also

allows data processing and analysis.

Established in USA since 2007, AdNaNoTek Corporation is the rising leader in ultrahigh vacuum

(UHV) technologies and solutions provider. We specialize in the design and manufacture of state-of

-the-art and fully customizable UHV systems.

Our UHV deposition systems are guaranteed to deposit extremely high quality thin films in terms of

uniformity and purity. With our vast experience in UHV deposition technology, and consistent in-

teraction with our customers: we are sure that we will continue to improve and optimize our prod-

ucts, and be the leading UHV deposition systems provider around the globe.

ABOUT COMPANY

Contact us

TEL: 886-2-22982594

FAX: 886-2-22984812

CHINA MOBILE:+8618362958206

EMAIL: kevin@dualsignal.com.tw

alvin@dualsignal.com.tw

Website: http://www.adnano-tek.com/

3422 Old Capitol Trail,

Wilmington,

DE 19808, USA

We excel in manufacturing fully

customizable UHV systems, such as:

Pulsed Laser Deposition System (PLD)

Magnetron Sputter Deposition

Atomic Layer Deposition (ALD)

E-Beam Evaporator

Ion Beam Deposition (IBD)

Integrated UHV Systems

Laser Heating System

FBBEAR SYSTEM CONTROL SOFWARE

M B E - 1 0 S P E C I F I C A T I O N

M O L E C U L A R B E A M E P I T A X Y ( M B E )

● Clean substrate surfaces, and oxide-free layer

● In-situ deposition of metal seeds, semiconductor materials, and dopants

● Precisely controllable thermal evaporation

● Layer by layer (epitaxial) deposition

● Excellent uniformity and purity of deposited thin film

● In-situ coating monitoring by RHEED system

● Ultrasharp XRD profile for deposited thin-films

F E A T U R E O F M B E

Molecular Beam Epitaxy (MBE) is an ultrahigh vacuum (UHV) deposition technique used for

producing high quality epitaxial (layer-by-layer) thin film with precise control on thickness, com-

position and morphology. Despite the conceptual simplicity, a great technological effort is re-

quired to produce a system that yield desired thin-layer film qualities. The chamber design, care-

ful control of vacuum environment, the quality of the source materials, etc. allow MBE technique

to produce much higher thin layer quality compared to non-UHV-based techniques.

● 18-inch cylindrical SUS316L chamber

● UHV pressure: 5x10E-11 torr

● 3-in sample

● 4-axis manipulator with SIC/PBN heating element

● Heating temperature up to 1000°C with ± 1°C

● 2-10 effusion cells

● Beam flux monitor

● Fully covered Cryopanel

● Cryopump, or Turbopump, or Ion pump

● Full range vacuum gauge

● Standard RHEED System

● Computer with full system control software

● Load-lock with vacuum pumps and gauges

● Large space and additional ports for versatile extensions

S t a n d a r d R H E E D

S U S 3 1 6 L C H A M B E R

L I Q U I D N I T R O G E N C R Y O P A N E L

O P T I O N A L U N I T S

Due to the chamber design and available multiports, MBE-10 can be easily extended with many different kind of equipment. ● O2/N2 plasma source (for Oxide-, or

Nitride-MBE) ● Pre-annealing system in load lock ● Preparation chamber ● Titanium sublimation pump (TSP) ● Residue gas analyzer ● E-beam evaporator source ● Thickness monitor Any specific parts that you need in your ex-periment can also be integrated to MBE-10.

AdNaNotek’s liquid nitrogen cryopanel can provide ex-

tremely large pumping speed by condensing gases, particu-

larly water and heavy hydrocarbons, unto the surface of the

cryopanel. Furthermore, it can thermally isolate each effu-

sion cells, and maintain the heat localized in each one of

them.

The fully covered cryopanel provide very large capacity for

liquid nitrogen (more than 20000 mL).

C R Y O P U M P

C E L L S , S H I E L D I N G ,

C R Y O P A N E L

SYSTEM

INTRODUCTION