integrated molecular beam epitaxy system with …integrated molecular beam epitaxy system with...
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Integrated Molecular Beam Epitaxy Systemwith Liquid Phase Epitaxy and Electrochemical Cell
Model: IMBE300-LPE-EC
TECHNIQUES: OPTIONS:
FEATURES:
200 Stronach Cres., London, Ontario, Canada N5V 3A1Tel. (519) 457-0878, Fax (519) 457-0836
E-mail: [email protected], Web: www.ocivm.com
• No need to transfer to another chamber for analysis after film growth
• Short switching time between deposition and surface science analysis
• Load-lock with transfer arm and sample storage
• Sample transfer compatibility with other systems: SPM and SEM
• X-Ray Photoelectron Spectroscopy (XPS)
• Reflection High Energy Electron Diffraction (RHEED)
• Thermal Desorption Mass Spectroscopy (TDS)
• Low Energy Electron Diffraction (LEED)
• Auger Electron Spectroscopy (AES)
• 7 Deposition Sources
• Liquid Phase Epitaxy (LPE)
• Cyclic Voltammetry
• Surface Preparation
with Thermal Annealing and Ion
Bombardment
X-RaySource
IONPump
X-Y-Z-RManipulator
Deposition Sources
VerticalTransfer
Load-Lock
Sample Transfer
Hemispherical Analyser
LPEReactor
Viewport
LEED-AES Spectrometer
ION Sputter Gun
Electrochemical Cell
Wobble StickRHEEDScreen