msc. microsystems engineering - introduction to the programme

Albert-Ludwigs-Universität Freiburg

Msc. Microsystems Engineering -

Introduction to the programmeProf. Dr. Jürgen Wilde

11 October 2021

12.10.2021 Präsentationstitel 2

The technology

A macrosystem

The Airbus A380- Approximately 1 Million single parts!

• One Wing: 32,000 parts- Costs: $ 275 Millions

• Average per single part $ 275 - High effort for

single part fabrication


Can you imagine such a system with2 Million parts?

A microsystem

The DMD- Digital Micro-mirror Device- 1.6 cm x 1.6 cm- 508,800 mirrors 17 µm x 24 µm- ~ 2.2 million parts- Price: ~ € 2 000- Price / part: < 0.1 Cent- Mass fabrications

Microsystems- Many functions- Small volume


Microsystems are small


Small

A hair, on the

same scale.

Diameter:

~ 50 µm

TinySmaller

A huge variety in microsystems


Microsystems are everywhere

Medicine- Minimally-invasive surgery- Diagnostics

Communications- Fiber optics- Mobile phones

Consumer- Autonomous networks- Sensors

Industry- Process management - Instrumentation

Automobile- Gyroscope- Airbags


The career


Studies: technical skills

Educational goal:- To graduate students who

can go from idea to product The required skills:

- Problem definition- Solutions & evaluation

Design & development- Fabrication- Characterization & optimization- Packaging- System testing & qualification- Transfer to production- Marketing12.10.2021 Präsentationstitel 9

The challengestarts now

Studies: Non-technical skills

Technical excellence is a given...

... but graduates also need:- Ability to work in a team- Social competence- Creativity- Openness to new ideas- Self-confidence- Communication skills- Entrepreneurial thinking- Ability to motivate, oneself and others- Leadership capabilities


Where can I go with my degree?

Microsystems engineers become:- Entrepreneurs, technicians, engineers, group leaders,

managers, CEOs, astronauts,… Potential employers:

- Large & small companies of all types- Startups and spin-offs

What do employers want?- Potential for development- Ability to learn- Communications ability

(in English and German!)- Experience, experience, experience- Particular skills? Not so much…


The department


Faculty of Engineering

Faculty in operation since 1995 Department of Computer Science (IIF)

19 professors / ~ 840 students Department of Microsystems Engineering (IMTEK)

22 professors / ~ 830 students Department of Sustainable Systems Engineering (INATECH)

7 professors / ~ 250 students


IMTEK-Professors


IMTEK Laboratories


MEMS ApplicationsProf. Dr. Roland Zengerle

Assembly and Packaging TechnologyProf. Dr. Jürgen Wilde

Bio- and Nano-PhotonicsProf. Dr. Alexander Rohrbach

Biomedical MicrotechnologyProf. Dr. Thomas Stieglitz

BiomicrotechnologyProf. Dr. Ulrich Egert

Chemistry and Physics of InterfacesProf. Dr. Jürgen Rühe

Design of MicrosystemsProf. Dr. Peter Woias

Electr. Instrumentation & Embedded Sys.Prof. Dr. Stefan Rupitsch

Gas SensorsProf. Dr. Juergen Woellenstein

Materials Process TechnologyProf. Dr. Thomas Hanemann

Micro- and Material MechanicsProf. Dr. Christoph Eberl

MicroactuatorsProf. Dr. Ulrike Wallrabe

MicroelectronicsDeputy: Dr. Matthias Keller

Micro-opticsProf. Dr. Hans Zappe

Microsystems MaterialsProf. Dr. Oliver Paul

NanotechnologyProf. Dr. Margit Zacharias

Optical SystemsProf. Dr. Carsten Buse

SensorsProf. Dr. Gerald Urban

SimulationProf. Dr. Lars Pastewka

Smart Systems IntegrationProf. Dr. Alfons Dehé

Systems TheoryProf. Dr. Moritz Diehl

Process TechnologyProf. Dr. Bastian E. Rapp

The curriculum


Structural principles

• MSc. Program = 120 ECTS • ~ 30 ECTS per semester• 1 ECTS = 30 hours work load• Mandatory courses are offered

every other semester.• Exams are offered every semester.• The exam regulations stipulate which courses are to be

completed to get the degree, but you can decide when you want to take the respective course and exam.

• It is allowed to study more than 4 semesters.


Modules in the study program

• All programs are organized in modules.

• A module consists of one or several courses and course work.

Module Components

- Lectures – German: Vorlesung (V)

- Exercises – German: Übung (Ü)

- Laboratories – German: Praktikum

(Pr) oder Praktische Übung (PrÜ)

- Seminars – German: Seminar (S)


Course work

Non-graded course work (“Studienleistungen”, SL)- Exercises, reports, mid-term exams…- Are not part of your final grade, but may be part of a

module (for example weekly exercise sheets)- May be graded, or judged only as “pass” or “fail”- Unlimited number of attempts

Graded course work (“Prüfungsleistungen”, PL)- Written or oral exams, reports, presentations,…- Are always graded and count into your final grade- Limited number of attempts, normally only 2


Mandatory modules in MSc MSE


Le = Lecture, E = Exercise, La = Lab course

Module Type Exam ECTS SemMicroelectronics Le+E Written exam 6 1Micro-mechanics Le+E Written exam 6 1

MST Design Laboratory I forMicrosystems Engineering

La Studien-leistung 6 1

MST Technologies and Processes

Le+E Studien-leistung

Written exam

6 1

Signal Processing Le+La Written exam 6 2Master‘s Module ( 6 months) Thesis

+

Presentation

27+3

4

Compulsory Electives: Advanced Microsystems

Choose 5 of 8


Le = Lecture, E = Exercise, La = Lab course

Module Type Exam ECTS Sem.

Assembly and Packaging

Technology

Le+E Written exam 6 1, 2 or

3

Micro-optics Le+E Written exam 6 1 or 3

Modelling and System

Identification

Le+E Written exam 6 1 or 3

Probability and Statistics Le+E Written exam 6 1 or 3

Sensors Le+E Written exam 6 1 or 3

Biomedical Microsystems Le+E Written exam 6 2

Micro-actuators Le+E Written Exam 6 2

Micro-fluidics Le+E Written Exam 6 2

Total to be selected 30

Concentration Areas + Customized Courses


Concentration areas (21-30 ECTS) ECTS

Circuits and SystemsStudents have to

choose one concentration area

Materials and FabricationBiomedical EngineeringPhotonicsTotal 21-30

Customized Course Selection ECTS

Courses from other faculties at the University of Freiburg, also courses on German language, scientific writing, project management

Students can chose

Courses from the MSc MSE programTotal 9

Elective modules in concentrations

Angewandte Sensorschaltungstechnik Bayesian Methods for Sensing CMOS MEMS Wireless Sensor Systems Energy harvesting Analog CMOS Circuit Design Mixed-Signal CMOS Circuit Design Flight Control Laboratory Advanced Assembly and Packaging Technology Advanced Microcontroller Lab Power Electronics for E-Mobility Micro Acoustical Transducers Microcontroller Techniques - Praktikum Model Predictive Control and Reinforcement Learning MST Design Lab II for Microsystems Engineering

Numerical Optimal Control in Engineering - Project Numerical Optimization Numerical Optimization Project Race Car Control Laboratory RF- and Microwave Devices and Circuits RF- and Microwave Circuits and Systems RF- and Microwave Systems- Design Course Sensors and actuators circuit technology State Space Control Systems Thermoelektrik und thermische Messtechnik Wind Energy Systems Reliability Engineering

Computational physics: material science Disposable sensors Electrochemical energy applications: fuel cells and electrolysis Electrochemical Methods for Engineers Energy storage and conversion using fuel cells Fortgeschrittene Siliziumtechnologie / Advanced Silicon Technology Functional Safety, Security and Sustainability: Active Resilience Hardware Design with the Finite-Element-Method Ceramic Materials for microsystems Contact, Adhesion, Friction Continuum mechanics I with exercises Continuum mechanics II with exercises Physics of Failure Lithography Materials for Electronic Systems Mechanical Properties and Degradation Mechanisms Methods of Material Analysis Microstructured Polymer Components Nanomaterials Nanotechnology Nano - Laboratory Surface Analysis Surface Analysis Laboratory Optimierung Advanced engineering Polymer Processing and Microsystems Engineering Quantum Mechanics for Engineers Clean Room Laboratory for Engineers Quantification of Resilience Solar Energy Techniken zur Oberflächenmodifizierung / Surface coating Techniques Compound semiconductor devices From Microsystems to the Nanoworld Dynamics of Materials: Material Characterization


Circuits and Systems Materials and Fabrication

Elective modules in concentrations

Analyse von Life Science Hochdurchsatzdaten mit Galaxy

Selected Problems in Biosignal Processing

Biofunctional Materials - for medical microsystems and healthcare

Biomedical Instrumentation I

Biomedical Instrumentation II

Biomedical Instrumentation - Laboratory

BioMEMS

Bionic Sensors

Biophysics of cardiac function and signals

Biophysik - Grundlagen und Konzepte

Biotechnologie für Ingenieure I: Einführung, Molekular- Biotechnology for Engineers I: Introduction, Molecular- and Microbiology

Biotechnology for Engineers II

Ethical Aspects of Neurotechnology

Fundamentals of electrical stimulation

Introduction to data driven life sciences

Introduction to physiological control systems

Machine Learning

Microfluidics II: Miniaturize, automate and parallelize biochemicalanalysis: From idea to product launch

Microsystems technology in Medicine

Nanobiotechnology

Neurophysiology - Laboratory

Neuroprosthetics

Neuroscience for Engineers

Signal processing and analysis in brain signals

Silicon-based Neural Technology

Implant Manufacturing Technologies

Implant Manufacturing Technologies - Laboratory

Biointerfaces I - Basics for Bioanalytical Systems

Advanced Topics in Micro-Optics Lasers Basic Optics Lab Basic and Advanced Optics Lab Optical Materials Optical Properties of Micro and Nano Structures Optical Trapping and Particle Tracking Optical MEMS Optical Measurement Techniques Optical Micro-Sensors Optoelectronics Photonic Microscopy Photovoltaic Energy Conversion for engineers Photovoltaic Energy Conversion for engineers II Spektroskopische Methoden Wave Optics


Biomedical Engineering Photonics

Corona Information I & 3G procedure

WS 21/22: All courses (except for lab courses) can be taken online

Some lecturers will offer on-campus sessions in addition to the online offer

Online lectures: Either live-stream or recorded lectures Online exercises: Students will send or upload the

exercises they solved. Lecturer will give individual feedback and/or offer Q&A sessions or online forums

More detailed information will be provided by each lecturer for his/her course by email or via ILIAS

Written exams can only be taken on-campus


Corona Information II

Faculty of Engineering:https://www.tf.uni-freiburg.de/en/coronaUniversity:https://www.studium.uni-freiburg.de/en?set_language=enStudent Services (SWFR):https://www.swfr.de/en/corona-faqs/


https://www.tf.uni-freiburg.de/en/corona

https://www.studium.uni-freiburg.de/en?set_language=en

https://www.swfr.de/en/corona-faqs/

MSE courses, first semester


Mon Tue Wed Thu Fri8-10Probability & Stat.LectureSR 01-009/13 building 101

8-10Probability & Stat.ExcercisesSR 01-009/13 building 101

8-10Micro-electronicsExercisesHS 00 026 µ -lecture hall (building 101)

10-12MicromechanicsLectureHS 00 026 µ -lecture hall (building 101)

10-12Micro-opticsLectureSR 00-010/14 building 101

10-12Micro-electronicsLectureHS 00 026 µ -lecture hall (building 101)

12-13Sensors LectureSR 01-009/13Building 101

10-12MicromechanicsExercises101 00 010/14

13-14MST Technologies & ProcessesExercisesSR 01-009/13 building 101

12-14Micro-opticsExercisesSR 01-016/18Building 101

12-14MST Design Lab ILab courseonline

14-16Sensors LectureSR 01-009/13Building 101

14-16MST Technologies & Processes, lectureSR 00-010/14 building 101

14-16Micro-opticsExercisesSR 00-006Building 051

16-18MST Design Lab ILectureHS 00-006, building 082

16-18Sensors Lab00 035Building 078



Exams: The most important rules

In addition to registering for a module, you need to register for every exam you want to take:

https://www.tf.uni-freiburg.de/en/studies-and-teaching/a-to-z-study-faq/de-registration-of-exams

If failed, you can repeat every exam once. Two exams can be repeated twice.

If you fail an exam, you will automatically be registered for the retake in the following semester.

You can only withdraw from an exam, if you are ill or if there is an emergency in your family.https://www.tf.uni-freiburg.de/en/studies-and-teaching/a-to-z-study-faq/withdrawl-from-exams

For more details, make sure to read the exam regulations.


https://www.tf.uni-freiburg.de/en/studies-and-teaching/teaching/course-booking?set_language=en

https://www.tf.uni-freiburg.de/en/studies-and-teaching/a-to-z-study-faq/de-registration-of-exams

https://www.tf.uni-freiburg.de/en/studies-and-teaching/a-to-z-study-faq/withdrawl-from-exams

https://www.tf.uni-freiburg.de/en/studies-and-teaching/documents/exam-regulations-mse-2018-english

Plagiarism

Plagiarism is:- Using someone else’s texts, pictures, reports, data,

solutions, whatever….- ... without giving the source

Sources include:- Books, the internet, colleagues, …

To make it clear:- Plagiarism is illegal

The simple „if...then“ loops:- If you plagiarize...(once)- … then you fail- If you plagiarize repeatedly (=twice)- … then your academic career is over.


Mentoring

Every student has a faculty mentor- A professor as a contact person- Assigned by the Dean of Studies

Student’s contact for:

- Problems, questions, clarifications, job searches, recommendations, or just general advising


After graduation


Apply for a job

In Industry- Find out what you like during your MSc program- Use job portals and company websites to monitor

the market- Visit career workshops to gather tips how to apply- Go to recruiting fairs


Phd. as research assistant

At the university- Perform a research project (on your own)- Look for an open position- Apply- Get paid for the PhD project- Overtake responsibility as project assistant- Support your professor with respect to

educational tasks- Duration: 3-5 years


Contact persons I

Dean of studies: Prof. Jürgen Wilde• [email protected]

0761-203 7291

Program coordination: Svenja Andresen

• [email protected] 97940

• Student advisors: • [email protected]

- Dr. Jochen Kieninger0761-203 7265

- Dr. Oswald Prucker0761-203 7164


mailto:[email protected]



Contact persons II

Examination office

- Anne-Julchen Müller• [email protected]• 203 8083

- Susanne Storck• [email protected]• 203 8083


Thank you very much for your attention !


msc. microsystems engineering - introduction to the programme

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