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Physics Procedia 83 (2016) 1233 – 1243 Available online at www.sciencedirect.com 1875-3892 © 2016 The Authors. Published by Elsevier B.V. This is an open access article under the CC BY-NC-ND license (http://creativecommons.org/licenses/by-nc-nd/4.0/). Peer-review under responsibility of the Bayerisches Laserzentrum GmbH doi:10.1016/j.phpro.2016.08.130 ScienceDirect a Institute of Photonic Technologies (LPT), Friedrich-Alexander-Universität Erlangen-Nürnberg, Konrad-Zuse-Str. 3-5, 91052 Erlangen, Germany b Erlangen Graduate School in Advanced Optical Technologies (SAOT), Paul Gordan Straße 6, 91052 Erlangen, Germany c Faculty of Engineering, Bar-Ilan University, Ramat Gan, 52900, Israel d Bayerisches Laserzentrum GmbH (blz), Konrad-Zuse-Straße 2-6, 91052 Erlangen, Germany Abstract Keywords: 1. Introduction E-mail address: © 2016 The Authors. Published by Elsevier B.V. This is an open access article under the CC BY-NC-ND license (http://creativecommons.org/licenses/by-nc-nd/4.0/). Peer-review under responsibility of the Bayerisches Laserzentrum GmbH

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Physics Procedia 83 ( 2016 ) 1233 – 1243

Available online at www.sciencedirect.com

1875-3892 © 2016 The Authors. Published by Elsevier B.V. This is an open access article under the CC BY-NC-ND license (http://creativecommons.org/licenses/by-nc-nd/4.0/).Peer-review under responsibility of the Bayerisches Laserzentrum GmbHdoi: 10.1016/j.phpro.2016.08.130

ScienceDirect

aInstitute of Photonic Technologies (LPT), Friedrich-Alexander-Universität Erlangen-Nürnberg, Konrad-Zuse-Str. 3-5, 91052 Erlangen, Germany

bErlangen Graduate School in Advanced Optical Technologies (SAOT), Paul Gordan Straße 6, 91052 Erlangen, Germany cFaculty of Engineering, Bar-Ilan University, Ramat Gan, 52900, Israel

dBayerisches Laserzentrum GmbH (blz), Konrad-Zuse-Straße 2-6, 91052 Erlangen, Germany

Abstract

Keywords:

1. Introduction

E-mail address:

© 2016 The Authors. Published by Elsevier B.V. This is an open access article under the CC BY-NC-ND license (http://creativecommons.org/licenses/by-nc-nd/4.0/).Peer-review under responsibility of the Bayerisches Laserzentrum GmbH

1234 Felix Tenner et al. / Physics Procedia 83 ( 2016 ) 1233 – 1243

2. Measurement Principle

Felix Tenner et al. / Physics Procedia 83 ( 2016 ) 1233 – 1243 1235

DOE-QD635-0.4-6(10x22)-ADJ picotronic

Basler pi640-210gmTokina ATX 2.8/100 Pro

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LDF 4000-40 Laserline

ALO-3 Scansonic TransPuls Synergic 4000 Fronius

3. Results

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3.1. Process behavior

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3.2. Post-process measurements

v I

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3.3. In-process measurements

I v

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1242 Felix Tenner et al. / Physics Procedia 83 ( 2016 ) 1233 – 1243

4. Conclusion and Outlook

Felix Tenner et al. / Physics Procedia 83 ( 2016 ) 1233 – 1243 1243

Acknowledgements

References