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Reliability enhancement of phase change memory for neuromorphic applications SangBum Kim, Ph.D. Research Staff Member Novel memory and cognitive applications IBM T.J. Watson Research Center [email protected]

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Page 1: Reliability enhancement of phase change memory for ... · 9/11/2017 · Reliability enhancement of phase change memory for neuromorphic applications SangBum Kim, Ph.D. Research Staff

Reliability enhancement of phase change memory for neuromorphic applications

SangBum Kim, Ph.D.

Research Staff Member

Novel memory and cognitive applications

IBM T.J. Watson Research Center [email protected]

Page 2: Reliability enhancement of phase change memory for ... · 9/11/2017 · Reliability enhancement of phase change memory for neuromorphic applications SangBum Kim, Ph.D. Research Staff

© 2017 IBM Corporation

End of Moore’s Law

Moore’s Law is ending : No more processor performance growth.

“More-than Moore” solution : Build a new processor which does a few tasks extremely well. Which task should we choose to accelerate?

2 9/11/2017

D. Patterson, NAE Regional Meeting, 2017.

Page 3: Reliability enhancement of phase change memory for ... · 9/11/2017 · Reliability enhancement of phase change memory for neuromorphic applications SangBum Kim, Ph.D. Research Staff

© 2017 IBM Corporation

Recent Breakthroughs in Artificial Intelligence

Artificial Intelligence became so important and companies are developing a dedicated processors for artificial intelligence. Google: TPU, Intel: Nervana Engine, Qualcomm, Apple

3 9/11/2017

Google CEO Sundar Pichai 2016 October

Wired Magazine, 2016

Page 4: Reliability enhancement of phase change memory for ... · 9/11/2017 · Reliability enhancement of phase change memory for neuromorphic applications SangBum Kim, Ph.D. Research Staff

© 2017 IBM Corporation

Processors dedicated for artificial intelligence

4 9/11/2017

CPU

GPU, ASIC, FPGA

Neuromorphic

Digital

GPU vs CPU performance comparison

Digital

Now-5 years

Analog

5-10 years

performance/watt for artificial intelligence

(neural network) computation

Von-Neumann Non Von-Neumann

Neuromorphic vs GPU

GPU

Neuromorphic 1

Von-Neumann memory bottleneck

G. Burr et al., IEDM, 2015.

converged logic+memory

Page 5: Reliability enhancement of phase change memory for ... · 9/11/2017 · Reliability enhancement of phase change memory for neuromorphic applications SangBum Kim, Ph.D. Research Staff

© 2017 IBM Corporation

Neuromorphic processor development in IBM

Artificial neural network (ANN) Spiking neural network (SNN) C

on

ven

tio

nal

d

igit

al m

em

ory

d

evic

e

An

alo

g n

on

-vo

lati

le m

em

ory

(N

VM

) d

evic

e

5 9/11/2017

P. Merolla et al., Science, 2014.

TrueNorth SRAM Off-chip

learning

G. Burr et al., IEDM, 2014.

NVM ML accelerator PCM On-chip

learning

S. Kim et al., IEDM, 2015.

NVM low-power ML PCM On-chip

learning

Page 6: Reliability enhancement of phase change memory for ... · 9/11/2017 · Reliability enhancement of phase change memory for neuromorphic applications SangBum Kim, Ph.D. Research Staff

© 2017 IBM Corporation

Neuromorphic processor development in IBM

Artificial neural network (ANN) Spiking neural network (SNN) C

on

ven

tio

nal

d

igit

al m

em

ory

d

evic

e

An

alo

g n

on

-vo

lati

le m

em

ory

(N

VM

) d

evic

e

6 9/11/2017

P. Merolla et al., Science, 2014.

TrueNorth SRAM Off-chip

learning

G. Burr et al., IEDM, 2014.

NVM ML accelerator PCM On-chip

learning

S. Kim et al., IEDM, 2015.

NVM low-power ML PCM On-chip

learning

Today’s main topic: NVM + SNN

Page 7: Reliability enhancement of phase change memory for ... · 9/11/2017 · Reliability enhancement of phase change memory for neuromorphic applications SangBum Kim, Ph.D. Research Staff

© 2017 IBM Corporation

Mismatch between algorithms and devices

All the scalable learning algorithms demonstrated so far requires near-perfect devices to match the state-of-the-art clarification accuracy and power & area efficiency.

How to improve synaptic device characteristics?

Can we modify learning algorithms such that they can work with

imperfect synaptic devices?

7 9/11/2017

Page 8: Reliability enhancement of phase change memory for ... · 9/11/2017 · Reliability enhancement of phase change memory for neuromorphic applications SangBum Kim, Ph.D. Research Staff

© 2017 IBM Corporation

Phase change memory (PCM)

Memory states : Amorphous and poly-crystalline state

Program mechanism : Joule heating

Read mechanism : Resistance

8 9/11/2017

Crystalline Amorphous

High resistivity Low resistivity

Annealing (SET)

Melt-quenching (RESET)

BE Phase

change

material

TE

Programming

region

Te

mp

era

ture

Time

Tmelt

Tcrys

Read

SET pulse

RESET pulse

Troom

P. Wong et al., IEEE Proc., 2010

(7 at. % N-doped GST)

(Ge2Sb2Te5)

(Ag, In- doped Sb2Te1)

(Ge15Sb85)

Various phase change material Typical cell structure

Program and Read

Page 9: Reliability enhancement of phase change memory for ... · 9/11/2017 · Reliability enhancement of phase change memory for neuromorphic applications SangBum Kim, Ph.D. Research Staff

© 2017 IBM Corporation

Power efficient PCM cell for neuromorphic applications

PCM power consumption can be further optimized for neuromorphic applications.

9 9/11/2017

PCM with CNT

R (Ω

)

IRESET (µA)

0.9pJ 30µA 1MΩ

P. Wong et al., Nat. Nanotech., 2015

S. Kim et al., IEDM, 2015

At 90nm node (BE CD = ~40nm)

Neuromorphic computing

Storage class

memory

Neuromorphic computing - Large SET R is OK. - Programming energy can be

further scaled down.

We significantly lowered the RESET programming current by heavily doping GST to increase the resistivity.

Page 10: Reliability enhancement of phase change memory for ... · 9/11/2017 · Reliability enhancement of phase change memory for neuromorphic applications SangBum Kim, Ph.D. Research Staff

© 2017 IBM Corporation

PCM neuromorphic core

Synapse NVM PCM

Analog

Neuron / chip 256

Synapse / chip 64k

Technology node 90nm

Unit cell 2T-1R

Neural network type

Spiking

Learning

On-chip

Continuous

STDP mechanism

PCM neuromorphic core

World-first demonstration of sizable spiking neural network using NVM • PCM 2T-1R synaptic operation • On-chip spiking and learning neuron circuit • Fully asynchronous and parallel operation

9/11/2017 10

2T-1R synaptic unit cell

Invented 2T-1R synaptic unit cell to enable • massively parallel operation • asynchronous LIF and STDP operation

Area-efficient

• [2T-1R / 5-10 bits] vs [SRAM: 6T / 1 bit]

S. Kim et al., IEDM 2015

Page 11: Reliability enhancement of phase change memory for ... · 9/11/2017 · Reliability enhancement of phase change memory for neuromorphic applications SangBum Kim, Ph.D. Research Staff

© 2017 IBM Corporation

Fully asynchronous and parallel operation

Fully asynchronous and parallel operation enabled by Low programming power of PCM cell Separated path for LIF and STDP using 2T-1R

unit cell

11 9/11/2017

2T-1R Synaptic unit cell

array

Fu

lly a

syn

ch

ron

ou

s o

utp

ut

Fully asynchronous input

Separated path for LIF and STDP Asynchronous and parallel

array operation

In LIF mode

In STDP mode

Page 12: Reliability enhancement of phase change memory for ... · 9/11/2017 · Reliability enhancement of phase change memory for neuromorphic applications SangBum Kim, Ph.D. Research Staff

© 2017 IBM Corporation

NVM’s main role in neuromorphic processor

Heavily used computation in neural network Artificial neural network (Deep learning) : matrix-vector multiplication. Spiking neural network : multiply-and-accumulate.

Resistor network can perform matrix-vector multiplication and multiply-and-accumulate computation much faster in a massively parallel fashion. Conductances should be reliably stored in the resistive memory.

12 9/11/2017

G11

G21

G31

G12

G22

G32

G13

G23

G33

V1

V2

V3

I1 I2 I3

𝑰𝟏𝑰𝟐𝑰𝟑

=

𝑮𝟏𝟏𝑽𝟏 + 𝑮𝟐𝟏𝑽𝟐 + 𝑮𝟑𝟏𝑽𝟑𝑮𝟏𝟐𝑽𝟏 + 𝑮𝟐𝟐𝑽𝟐 + 𝑮𝟑𝟐𝑽𝟑𝑮𝟏𝟑𝑽𝟏 + 𝑮𝟐𝟑𝑽𝟐 + 𝑮𝟑𝟑𝑽𝟑

Matrix-vector multiplication using Kirchhoff’s law

Resistor network

Multiply-and-accumulate

𝑰𝒌𝒅𝒕 = (𝑮𝟏𝒌𝑽𝟏(𝒕) + 𝑮𝟐𝒌𝑽𝒌(𝒕) + 𝑮𝟑𝒌𝑽𝒌(𝒕))𝒅𝒕

Page 13: Reliability enhancement of phase change memory for ... · 9/11/2017 · Reliability enhancement of phase change memory for neuromorphic applications SangBum Kim, Ph.D. Research Staff

© 2017 IBM Corporation

PCM reliability issues for neuromorphic applications

Resistance drift PCM cell conductance

representing synaptic weight changes over time.

1/f noise PCM cell is a dominant noise

source in the memory cell.

13 9/11/2017

No

rmalized

R

esis

tan

ce

10-6

Time (s)

10-3 100 103 106

)/()( 00 ttRtR

Drift model

𝜸: drift coefficient

RESET

SET

𝜸 = 𝟎. 𝟏 (typical drift coef.)

Factor of 2 increase every 3 decades in time

The signal-to-noise (𝑰 /𝝈) is estimated to be 19 at 22nm

node.

G. Close et al., IEDM 2010

G. Beneventi et al., IEEE EDL 2012

Page 14: Reliability enhancement of phase change memory for ... · 9/11/2017 · Reliability enhancement of phase change memory for neuromorphic applications SangBum Kim, Ph.D. Research Staff

© 2017 IBM Corporation

PCM cell with metallic liner

Confined cell with metallic liner Enables reliability enhancement : Drift mitigation and noise reduction Cost effective integration

14 9/11/2017

GST

BE

Metallic

liner

Metallic liner

S. Kim et al., IEDM, 2013

M. BrightSky et al., IEDM, 2015

SangBum Kim et al., IEEE TED, 2016

W. Kim et al., IEDM, 2016

W. Koelmans et al., Nat. Comm., 2015

S. Kim et al., US Patent 9,059,404

S. Kim et al., US Patent 9,257,336

GST : Ge-Sb-Te

Page 15: Reliability enhancement of phase change memory for ... · 9/11/2017 · Reliability enhancement of phase change memory for neuromorphic applications SangBum Kim, Ph.D. Research Staff

© 2017 IBM Corporation

Electrical conduction path with metallic liner

The metallic liner provides an alternative conductive path to the amorphous region.

The effective metallic liner resistance is modulated by the amorphous region thickness.

15 9/11/2017

metallic liner

With

metallic

liner

No

metallic

liner

SangBum Kim et al., IEDM, 2013

Fin

ite e

lem

en

t m

eth

od

sim

ula

tio

n

[Electrical resistance]

Crystalline GST < metallic liner < Amorphous GST

Page 16: Reliability enhancement of phase change memory for ... · 9/11/2017 · Reliability enhancement of phase change memory for neuromorphic applications SangBum Kim, Ph.D. Research Staff

© 2017 IBM Corporation

Cost-effective integration scheme

16 9/11/2017

Cost-effective integration scheme No additional mask Small cell size (Metallic liner 2-8nm)

ALD metallic liner and GST deposition ALD deposition tool : ULVAC EntronTM-EX W300

1. Pore formation

2. Metallic liner +

GST deposition

3. Field GST removal

4. GST cap + anneal

5. GST cap removal

6. Top electrode formation

Void-free filling capability of ALD metallic liner and GST

(GexSbyTez)

S. Kim et al., IEDM, 2013 W. Kim et al., IEDM, 2016

Page 17: Reliability enhancement of phase change memory for ... · 9/11/2017 · Reliability enhancement of phase change memory for neuromorphic applications SangBum Kim, Ph.D. Research Staff

© 2017 IBM Corporation

Requirement for metallic liner

Finding the right metallic liner is the most important. Material property requirement for metallic liner

1. Electrical resistivity (Semi-metallic) 2. Low noise and drift (Thermal stability) 3. Wetting capability with the phase change material (Low interface energy) 4. Conformal deposition (ALD deposition)

17 9/11/2017

ML :

log(

R)

log(t)

Resistance margin

log(

R)

log(t)

Metallic liner resistivity Too High

Too Low

Page 18: Reliability enhancement of phase change memory for ... · 9/11/2017 · Reliability enhancement of phase change memory for neuromorphic applications SangBum Kim, Ph.D. Research Staff

© 2017 IBM Corporation

Drift mitigation with metallic liner

Drift is successfully mitigated with the metallic liner. 0.06 vs 0.01: 6 times smaller resistance drift coefficient is achieved. 0.01 : 7% increase over 3 decades in time Almost negligible

18 9/11/2017

No metallic liner With metallic liner

R4

R3

R2

R1

γ4=0.06

γ3=0.06

γ2=0.07

γ1=0.05

γ4=0.01

γ3=0.01

γ2=-0.01

γ1=0.01

R4

R3

R2

R1

)/()( 00 ttRtR

Drift model

Drift model

S. Kim et al., IEDM, 2013

Page 19: Reliability enhancement of phase change memory for ... · 9/11/2017 · Reliability enhancement of phase change memory for neuromorphic applications SangBum Kim, Ph.D. Research Staff

© 2017 IBM Corporation

Noise reduction with metallic liner

Noise is successfully reduced with metallic liner. The PCM+ML(8nm) cell shows 4x smaller noise PSD than PCM without ML. But the noise is still much higher than a discrete resistor.

19 9/11/2017

f/1

dfIfSIf

fPSD

222 /)(/2

1

Signal to noise ratio can be

calculated from the

normalized PSD

No

rma

lize

d P

SD

(Po

we

r sp

ectr

al d

en

sity)

S. Kim et al., IEEE TED, 2015

Page 20: Reliability enhancement of phase change memory for ... · 9/11/2017 · Reliability enhancement of phase change memory for neuromorphic applications SangBum Kim, Ph.D. Research Staff

© 2017 IBM Corporation

Conclusion

NVM neuromorphic chip with on-chip LIF and STDP Neuromorphic core for spike-based machine learning Non-volatile PCM as a synapse Brain-inspired : LIF, STDP, spiking neural network 64k (256-by-256) 2T-1R PCM synaptic cells Verified LIF and STDP operation at the array level

Resistance stabilizer for neuromorphic NVM Resistance needs to be stabilized to reliably store synaptic weights The confined PCM cell with metallic liner mitigates

• Resistance drift • Noise

20 9/11/2017

Page 21: Reliability enhancement of phase change memory for ... · 9/11/2017 · Reliability enhancement of phase change memory for neuromorphic applications SangBum Kim, Ph.D. Research Staff

© 2017 IBM Corporation

Backup

21 9/11/2017