Resistivity Measurement Systems

Touch Screen

Insulation Resistance

www.dasoleng.com

Silicon Wafer

Solar Cell

Metal Resistivity

1

Auto Station Z

Line Resistance Meter

- Z-Axis Auto-Repeat Measurement - Many Silicon Wafer Measurement - Size : 220(W) X 440(L) X 260(H) - Infinite Repeat System

- Four Electrode Method- Resistivity Meter : RS8-1G (1mΩ/sq. ~ 1GΩ/sq.)- Conductivity Measurement

Powder Resistance Tester(PC)- Resistivity Meter : RS8-1G (1mΩ/sq. ~ 1GΩ/sq.)- Load Cell : Max. 2t- Height Gage : Mitutoyo products- PC Connection System

2

Powder Resistance Tester(Manual)

Electric Conductor Tester

- Resistivity Meter : RS8-1G (1mΩ/sq. ~ 1GΩ/sq.)- Load Cell : Max. 2t- Height Gage : Mitutoyo products

- Coating Sheet Check- Use the buzzer and the ramp- Measuring the buzzer rings- Use 9V battery

Metal Resistivity- Four Electrode Method- Resistivity Meter : RS8-1G (1mΩ/sq. ~ 1GΩ/sq.)- Resistivity & Conductivity Measurement

3

Portable Type

① Specification ◇ Measurement Method : Dual Configuration Method ◇ Model (Only Sheet Resistance) FPP-400 : 4 mΩ/sq. ~ 450 Ω/sq. FPP-2000 : 2 Ω/sq. ~ 2000 Ω/sq. FPP-2400 : 40 mΩ/sq. ~ 4000 Ω/sq. FPP-40k : 0.4 Ω/sq. ~ 40 kΩ/sq. ◇ Measurement Resolution : 3½ digits ◇ Measurement Accuracy : ±1.0% of reading ◇ Pin spacing : 1.00㎜ ~ 5.00㎜ ◇ Pin Radius : 100㎛ ~ 700㎛ ◇ Measurement Time : 1 sec ◇ Size : Main body(Width : 92㎜, Length : 165㎜, Thickness 30㎜)

② Environment ◇ Temperature : 23 ± 5℃ ◇ Humidity : 30 ~ 70%

③ Electric Power (Internally Charged Battery) ◇ Adapter Rated Input : AC 100V ~ 240V, 50 ~ 60㎐ ◇ Adapter Rated Output : DC 12V

Sample Size : 300㎜ × 300㎜

XYZ-axis manual moving system

Sample Size : Ø200㎜

Z-axis manual measurement

Option - Station

Station은 Probe를 본 Station에 간단하게 부착하여 사용하는 것으로 주로 연구 분석용으로재현성이 요구되거나 측정 시료가 작아서 측정이 곤란한 경우 사용하는 장치입니다.

Use : Touch Screen, Solar Cell

4

Resistivity Meter

Resistivity MeterModel - RS8(1G)① Features ◇ Single, Dual, Mono, Bulk Mode Measurement Selection. ◇ Direct Ω , S/㎝ , Ω/sq. , Ω·㎝ Conversion. ◇ Bulk mode for solar cell bulk type material. ◇ Very flexible and customized probe needle and measurement unit. (Probe tension, probe radius, probe interval)

② Specification ◇ Measurement Method : Single & Dual Configuration Method ◇ Model : 1 mΩ/sq. ~ 1 GΩ/sq. ◇ Measurement Resolution : 4½ digits ◇ Measurement Accuracy : ±1.0% of reading ◇ Pin spacing : 1.00㎜ ~ 5.00㎜ ◇ Pin Radius : 100㎛ ~ 700㎛ ◇ Measurement Time : 1 sec ◇ Source current Range : 10nA ~ 100mA

③ Environment ◇ Temperature : 23 ± 5℃ ◇ Humidity : 30 ~ 70%

④ Electric Power ◇ Rated Input : AC 100V ~ 240V, 50 ~ 60㎐

Model - HS8(40k, 1G)

① Features ◇ Single, Dual, Bulk Mode Measurement Selection. ◇ Direct Ω , Ω/sq. , Ω·㎝ Conversion. ◇ Bulk mode for solar cell bulk type material. ◇ Very flexible and customized probe needle and measurement unit. (Probe tension, probe radius, probe interval)

② Specification ◇ Measurement Method : Single & Dual Configuration Method ◇ Model HS8-40k : 10 mΩ/sq. ~ 40 kΩ/sq. HS8-1G : 1 kΩ/sq. ~ 1 GΩ/sq. ◇ Measurement Resolution : 3½ digits ◇ Measurement Accuracy : ±1.0% of reading ◇ Pin spacing : 1.00㎜ ~ 5.00㎜ ◇ Pin Radius : 100㎛ ~ 700㎛ ◇ Measurement Time : 1 sec ◇ Source current Range : 10nA ~ 100mA

③ Environment ◇ Temperature : 23 ± 5℃ ◇ Humidity : 30 ~ 70%

④ Electric Power ◇ Adapter Rated Input : AC 100V ~ 240V, 50 ~ 60㎐ ◇ Adapter Rated Output : DC 12V

5

Automatic Type

① Features

1) XYZ-Axis robot fully automatic moving system

2) Automatic resistance range selection

3) Measuring size(rectangle type)

: 600㎜ × 600㎜(user defined produce)

4) Perfect remote control by operation software

5) Data analysis uniformity, avg, max, min, 2D 3D-mapping, capture...

6) Specimen : thin film (ito, izo, lcd, touch panel, solar cell...)

7) Specimen vacuum holder & air blower unloading

② Specifications

1) Measuring method : contacted by 4-Point Probe

2) Configuration : single or dual (user chose)

3) Measuring Range sheet Resistance : 1mΩ/sq. ~ 1GΩ/sq.

4) Measurement accuracy ±0.5% (KRISS Standard wafer, when 23℃)

5) Measuring time : range search max. 6s search after actual 1s

6) 4-Point Probe pin spacing : 1.591㎜ increment(1.00, , 5.00)

7) Pin load 60g/pin ~ 200g/pin

8) Pin radius 50㎛ ~ 700㎛(order made/chose)

9) Tolerance : ±0.01㎜

10) Pin material : TH-tungsten or BC-beryllium copper

11) Serial communication : RS232C

③ Utility

1) Current source : 10㎁ ~ 100㎃

2) DVM 0.00V ~ 2.5V

3) Power requirements line voltage : AC 220V ±10%

4) Line frequency : 50㎐ ~ 60㎐

5) Temperature range : 23℃ ±5℃

6) Relative humidity : 30% ~ 70%

Use : Touch Screen, Solar Cell, Silicon Wafer Insulation Resistance

6

① Features

1) XY-Axis robot Z-Cylinder fully automatic moving system

2) Automatic resistance range selection

3) Measuring size(Circular type)

: Ø300㎜(user defined produce)

4) Perfect remote control by operation software

5) Data analysis

uniformity, avg, max, min, 2D 3D-mapping, capture...

6) Specimen : thin film

(ito, izo, lcd, solar cell...)

7) Specimen vacuum holder & air blower unloading

② Specifications

1) Measuring method : contacted by 4-Point Probe

2) Configuration : single or dual (user chose)

3) Measuring Range sheet Resistance : 1mΩ/sq. ~ 1GΩ/sq.

4) Measurement accuracy ±0.5% (KRISS Standard wafer, when 23℃)

5) Measuring time : range search max. 6s search after actual 1s

6) 4-Point Probe pin spacing : 1.591㎜ increment(1.00, , 5.00)

7) Pin load 60g/pin ~ 200g/pin

8) Pin radius 50㎛ ~ 700㎛(order made/chose)

9) Tolerance : ±0.01㎜

10) Pin material : TH-tungsten or BC-beryllium copper

11) Serial communication : RS232C

③ Utility

1) Current source : 10㎁ ~ 100㎃

2) DVM 0.00V ~ 2.5V

3) Power requirements line voltage : AC 220V ±10%

4) Line frequency : 50㎐ ~ 60㎐

5) Temperature range : 23℃ ±5℃

6) Relative humidity : 30% ~ 70%

Use : Solar Cell, Silicon Wafer, Touch Panel

7

Use : Cell Phone Glass, Touch Screen, Solar Cell

① Features1) XYY2Z-4Axis robot fully automatic moving system2) Automatic resistance range selection3) Measuring size(rectangle type) : user defined produce4) Perfect remote control by operation software5) Data analysis uniformity, avg, max, min, 2D-mapping, capture...6) Specimen : thin film (ito, izo, lcd, touch panel, solar cell...)7) Six-Head : Simultaneous Measurement System

② Specifications1) Measuring method : contacted by 4-Point Probe2) Configuration : single or dual (user chose)3) Measuring Range sheet Resistance : 1mΩ/sq. ~ 1GΩ/sq.4) Measurement accuracy ±0.5% (KRISS Standard wafer, when 23℃)5) Measuring time : range search max. 6s search after actual 1s6) 4-Point Probe pin spacing : 1.591㎜ increment(1.00, , 5.00)7) Pin load 60g/pin ~ 200g/pin8) Pin radius 50㎛ ~ 700㎛(order made/chose)9) Tolerance : ±0.01㎜10) Pin material : TH-tungsten or BC-beryllium copper11) Serial communication : RS232C

③ Utility1) Current source : 10㎁ ~ 100㎃2) DVM 0.00V ~ 2.5V3) Power requirements line voltage : AC 220V ±10%4) Line frequency : 50㎐ ~ 60㎐5) Temperature range : 23℃ ±5℃6) Relative humidity : 30% ~ 70%

③ Utility1) Current source : 10㎁ ~ 100㎃2) DVM 0.00V ~ 2.5V3) Power requirements line voltage : AC 220V ±10%4) Line frequency : 50㎐ ~ 60㎐5) Temperature range : 23℃ ±5℃6) Relative humidity : 30% ~ 70%

① Features1) XYZ-Axis robot fully automatic moving system2) Automatic resistance range selection3) Measuring size(rectangle type) : 1300㎜ × 1300㎜(user defined produce)4) Perfect remote control by operation software5) Data analysis uniformity, avg, max, min, 2D 3D-mapping, capture...6) Specimen : thin film (ito, izo, lcd, touch panel, solar cell...)7) Specimen vacuum holder & air blower unloading

② Specifications1) Measuring method : contacted by 2-Point Probe2) Configuration : single3) Measuring Range Resistance : 1mΩ ~ 60MΩ4) Measurement accuracy ±0.5% (KRISS Standard wafer, when 23℃)5) Measuring time : range search max. 6s search after actual 1s6) 4-Point Probe pin spacing : 1.591㎜ increment(1.00, , 5.00)7) Pin load 60g/pin ~ 200g/pin8) Pin radius 50㎛ ~ 700㎛(order made/chose)9) Tolerance : ±0.01㎜10) Pin material : TH-tungsten or BC-beryllium copper11) Serial communication : RS232C

Use : Insulation Resistance, Solar Cell

8

③ Utility1) Current source : 10㎁ ~ 100㎃2) DVM 0.00V ~ 2.5V3) Power requirements line voltage : AC 220V ±10%4) Line frequency : 50㎐ ~ 60㎐5) Temperature range : 23℃ ±5℃6) Relative humidity : 30% ~ 70%

③ Utility1) Current source : 10㎁ ~ 100㎃2) DVM 0.00V ~ 2.5V3) Power requirements line voltage : AC 220V ±10%4) Line frequency : 50㎐ ~ 60㎐5) Temperature range : 23℃ ±5℃6) Relative humidity : 30% ~ 70%

Intuitive Software

[2D Graph] [3D Graph]

Auto Meter Measurement Screen

9

Measurement Principal

① Single Configuration Method. (Config. A)

【 】

F2(D) : Sample size correction factor for the probe spacing

F(t/S) : Sample thickness and probe calibration factor for the interval

Fsp : Correction factor for the probe spacing

② Dual Configuration Method.(Config. A & B)

Rs Equation of Single & Dual configuration method

10

Uniformity & Edge effects

<Box Type> <Cylinder Type> <Custom & Pen Type>

Comparison : Single & dual Configuration

Various 4 Point Probe