Scanning electron microscopy

Katedra experimentálnej fyziky

FMFI UK

B r a t i s l a v a

History

• 1897 - Discovery of the electron ( J. J. Thompson)• 1924 - Particle and wave theory (L. deBroglie)• 1926 - Electromagnetic lens (H. Busch)• 1927 - Demonstration of electron diffraction (C. J.

Davisson and L. H. Germer)• 1929 - Theoretical description of SEM (H. Stintzing)• 1932 - Construction of first electron microscope

(transmission) (M. Knoll and E. Ruska)• 1935 - Demonstration of scanning electron

microscope theory (M. Knoll)• 1938 - First SEM constructed (M. von Ardenne)• 1939 - First commercial transmission electron

microscope (B. von Borries and E. Ruska)

History

• 1942 - Production of electrostatic lens SEM (V. K. Zworykin, J. Hillier and R. L. Synder)

• 1956 - Production of electromagnetic lens SEM (K. C. A. Smith)

• 1956 - X-ray microanalyzer with a scanning probe (V. E. Cosslett and P. Duncomb)

• 1960 - Improved secondary electron detector (T. E. Everhart and R. F. M. Thornley)

• 1960's - First commercial SEM (Cambridge Instrument Co., Ltd.)

• 1971 - Construction of a STEM with a field emission source (A. V. Crewe and J. Wall)

Physics

• Electron interaction with sample

• Electron energy spectrum

• Electron – core electron interaction

Electron interaction with sample

Electron energy spectrum

Electron – core electron interaction

Technics

• Vacuum chamber

• Electron optics

• Image formation

• Electronics

Tubus VEGA

Electron gun

Cathode

Electromagnetic lens

Detectors

Image formation

Image modes

Image modes

Image modes

SEM – VEGA TS5136MM

Image Gallery

• Poppy seed

Image Gallery

• Leaf of nettle with beetle

Image Gallery

• Fly head

Image Gallery

• Ant head

Image Gallery

• Ant feeler