Semiconductor Metrology ApplicationsContourGT-X Platform Capabilities and Automation for Semiconductor Applications

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Outline

• Introduction

• Brief BNS – SOM General Overview

• Semiconductor Applications

• Automation Cassette/Wafer Loading

• Summary and Questions

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Bruker Stylus and Optical MetrologySOM - World Leading Surface Metrology

• History of QA/QC solutions for industry Semiconductor

100+ Installed base multi-chip module inspection at board level

Data Storage 500+ Installed base disk drive slider metrology

Electronics and Industrial1000+ Installed base

Worldwide10,000+ Installed base

• Manufacturing Excellence Lean, six sigma-based process

100+ systems/quarter capacity

Rapid production ramp capability

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New Facility - Tucson, Arizona, USA Opened December 2011

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3D Microscope Surface MetrologyGeneral Benefits of Core Technology

• Fast, accurate, GR&R capable metrology

• Non-contact, non-destructive

• 1000+ analysis parameters

• Stable and operator independent data

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Bruker Stylus and Optical MetrologyOur Products Broad Overview

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DektakXTContourGT-K

ContourGT-IM

ContourGT-XNPFLEX

NPFLEX-LA

SP9900+

ContourGT Auto-Ready

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Bruker DektakXT Stylus ProfilersIndustrial Standard for Films and Steps

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• Dektak Reputation: Field proven performance, ease of use and reliability• Dektak Experience: 44+ year history in stylus profiler technology with over

10,000 installed systems world wide• Dektak Service & Support: Regional call centers world wide for prompt, local

support network

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ContourGT-X Platform DetailStable, Accurate, Automation Ready

• Optical Metrology Module (OMM) with self-calibration on X8

• Programmable 8” or 12” Stage

• Automated Tip-Tilt in the head (+/- 6 degrees)

• Automated Z-Axis Focus

• Single Objective Adapter up to 5 -Position Automated Turret

• Dell Multi-Core PC Running Windows 7, 64 Bit Platform

• Vision64 Operation Software – advanced

• Single 23” Monitor with 1920x1080 resolution

• Operator Assist Sample Lamp

• Small Footprint Option with Automation Ready Package

• Integrated Isolation Table

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Focus

WLI measures the intensity at each pixel as the objective is moving vertically and analyzes the intensity while moving through focus to determine the height of the surface at each pixel

3D Optical MicroscopesWLI – Accurate, Fast, GR&R Ready!

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Apply Benefits to Industry ProblemsSemiconductor Applications

• Broad range of applications including

Laser probe mark depth

Sensor dimensions and frequency performance (MEMS, DMEMS)

Cu wire bonding (bond force optimization, near line inspection)

Multichip Module HDI production inspection

Others (see next slides)

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Range of Semiconductor Applications

January 30, 2013 Slide 10Bruker ConfidentialStylus and Optical Metrology Unit

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Probe Mark SolutionAuto Detect Deepest Point

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Auto filter removes higher level from the reference area

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Probe Mark Solution Auto Detect Highest Peak

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Auto filter removes lower level from the reference

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Wafer Roughness 3D Areal Measurement – Large Area, FAST!

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Sa: 3.258 nm

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Deposition, Etch, Probe MarksFast, accurate dimensions – non-contact!

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Lead Frame SurfacesRoughness and 3D Areal Parameters

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Roughness and Sdr Uniformity:Lead vs. Die Area – Roughness alone not enough to tell the story

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Die B – Sdrdifferent even though Sa is the same

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Die AttachHeight and Tilt Referenced to Lead Frame

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Laser Mark and Bump HeightsAuto detect troughs and peaks

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Software auto detects features

of interest –every time!

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Vision64 Production Software ModuleOperator interface enables simplified use

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Cu Wire Bonding Near Line MonitorCavity Depth and Ball Height Metrology

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Wire Bond Near Line Monitor3D Optical Microscope >5x Faster than industry standard methodology

40

10

15

0.25

0 10 20 30 40 50 60

SEM

Bruker OpticalProfiler

Sample Preparation (minutes) Measurement / Analysis (minutes)

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Al Pad Metal SplashAuto Detection and Analysis

Splash Analysis

Area of interest is identified by software

Highest peak and volume of Splash

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Al Pad Cavity DepthAuto Detection and Analysis

Max Depth Analysis

Max depth below pad surface

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Bruker 3D Optical MicroscopesQuality Characteristics

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FAST ACCURATE REPEATABLE

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Vision64 Stage AutomationFast and simple operator setup

• XY Scatter and XY Grid functionality

• Wafer overlays clarify die positions and setup

• Grids are numbered and sub-grid (measure) locations are easily marked

• Variety of traversal patterns offered to customize motion

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Programmable Staging Wafer Grid and Within-Die Variable Points

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Cassette Loading Wafer AutomationContourGT-X Automation Ready Solution

• TCP/IP interface

• Partner with CHAD Industries

• CHAD 200mm, 300mm systems provide front end interface

• SECS standard communication

• Bruker X8 data is transmitted to CHAD system

• Factory MES or SPC system seamlessly interacts with CHAD interface

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Bruker BNS – SOM BUWorldwide Presence - World Class Support

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Bruker Corporation

Headquarters

BNS Mfg.Santa

Barbara

BNS Mfg.

Tucson

BNSSingapore

BNSHsinchuBNS

Bangkok

BNSPenang

BNSShanghai

BNSBeijing

BNSPalaiseau

BNSCambridg

e

BNSKarlsruh

e

BNSMalvern

BNS Mfg.Campbell

BNSIndia BNS

Brasil

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2012 2013-2014 2015

System

Functionality

• Broad applications in Semi packaging/MCM

• Partner for auto ready solution

• MEMS/sensor metrology Color camera/defect inspect

• ISO Class 6 compatibility

• ISO Class 2 solution• 450 mm auto loading• Integrated defect

inspection

Throughput• Baseline • 2x improvement via

hardware/computational• 5x over baseline

System S/W and Interface

• Vision64, 64 bit OS• TCP/IP control via

automation client or remote operation

• Streamlined software/GUIintegration

• Enhanced Vision64 functionality

• SECS/GEM with wafer handling

• Simplest, fastest Operator control

• SECS/GEM interfacing via full wafer handling or stand alone systems

Overview of Two Year RoadmapSemiconductor solutions

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SUMMARY

• Overview of product solutions

• Bruker serves a range of customers in the electronics and semiconductor spaces today

• ContourGT-X platform addresses with and without cassette loading several 3D metrology needs

• Automation solution is currently available and Bruker looks forward to serving your growing metrology needs

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THANK YOU!!!QUESTIONS?

Bruker Nano Surfaces

productinfo@bruker-nano.comMatt.novak@bruker-nano.com

www.bruker.com

www.bruker.com

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