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Smart Metrology Metrology for
Smart Industry - Industry 4.0
Marijn van Veghel
Successful R&I in Europe 2017
Düsseldorf, 2 March 2017
The need for smart metrology
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Succesful R&I in Europe, 2017-03-02
Data
Information
Decisions
Sensor imperfections
Temperature
Noise
Vibrations
Contamination
Unreliable
Unreliable
Dubious
Zero-defect
products ?
Reliable
Reliable
Correct
!
Smart
metrology
Smart metrology challenges
- Product flow: measurement time,
accesibility of features, motion, handling,
product relaxation…
- Environment: temperature, humidity,
vibrations, contamination…
- Diversity: multiple features per product,
variation between products
- Data handling: task-specific uncertainty,
numerical accuracy, data integrety, data
fusion from multiple sensors…
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Succesful R&I in Europe, 2017-03-02
VSL: experts in reliable metrology
- National Metrology Institute of
the Netherlands
- Appointed by the Dutch
government to maintain and
develop the national measurement
standards
- Represents the Netherlands in the
international metrology
infrastructure
- Research institute in the field of
metrology
- Provides metrology services to
customers
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Succesful R&I in Europe, 2017-03-02
Smart metrology track record
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Succesful R&I in Europe, 2017-03-02
Multi-stage manufacturing process
Step 1 Step 2 Step N
PLC
capture interactions in metamodels
in-depth process
knowledge
process control &
actuators
measurement
systems
Example: virtual standard
- Standard for calibration of inline AFM
- Based on synchonized movement
- No delicate physical structure
- AFM sees virtual topography
- Lateral version available as well
- Robust against damage and
contamination
- Topography can be fully
customized
- Sub-nm uncertainty
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Succesful R&I in Europe, 2017-03-02
Nanometer
displacement
generator
Arbitrary
waveform
generator
Topography
library
‘flat’
surface
AFM probe
Take-home message
- Smart industry needs smart metrology:
intelligent, reliable and flexible
- VSL has successfully developed smart
metrology solutions that are flexible, robust
and highly accurate
- We seek opportunities and partners to further
develop smart metrology: other type of
sensors, other applications etc.
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Succesful R&I in Europe, 2017-03-02
VSL
PO Box 654
2600 AR Delft
The Netherlands
T
F
E
I
+31 15 269 15 00
+31 15 261 29 71
www.vsl.nl