sputtering cathodes

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Sputtering Cathodes lsoflux Inc. In-Line Coating Systems Rush, N.Y Leybold Technologies Inc. Enfield, Conn. Isoflux cylindrical sputtering cathodes surround sub- strates and deposit material on all sides at once. The result is a uniform, high-rate coating on three-dimen- sional objects. Typical applications include hard coat- ings on mechanical parts and tooling, decorative and functional coatings on stamped or molded parts, and inorganic coatings of all types on fibers, wires, and ribbons. Material that does not deposit on the substrate is recaptured and used again, significantly reducing waste. Because there is very little buildup on shields and fix- tures, much less system maintenance is required. Leybold’s DynaMet, a fast-cycling, in-line vacuum coat- ing system, is the multiprocess, flexible, full-automation alternative to conventional, labor-intensive batch coaters. DynaMet reduces work-in-process, tooling costs, labor content, floor space, and changeover times and increases quality, uptime, throughput, and flexibility. Circle 136 on reader information card Vacuum Coating Systems Dyna Vat Hingham, Mass. Circle 136 on reader information card Sputtering Process Engelhard-CLAL Carteret, N.J. DynaVac offers a complete line of vacuum coating systems for a wide range of applications. Included are systems for physical vapor deposition of thin films, batch and inline sputtering, and metallizing. Emphasis is put on industrial-grade designs for production and/or continuous use. All systems are offered with control system architecture ranging from basic logic to ad- vanced supervisory control. ,Engelhard-CLAL has developed an enhanced SCX vacuum sputter coating process for wire, ribbon, and select discrete parts using a wide range of precious and nonprecious metal coatings. The unique coating technol- ogy enables codeposition of alloys or compounds that cannot be mechanically worked or alloyed by other techniques. In addition, it is possible to engineer coat- ings consisting of metallic compounds such as hydrides, nitrides, and oxides. Typical deposition coating thick- nesses range from Y2 micron to over 6 microns. Circle 137 on reader information card Circle 139 on reader information card 30 METAL FINISHING . APRIL 1997

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Page 1: Sputtering cathodes

Sputtering Cathodes lsoflux Inc.

In-Line Coating Systems

Rush, N.Y Leybold Technologies Inc. Enfield, Conn.

Isoflux cylindrical sputtering cathodes surround sub- strates and deposit material on all sides at once. The result is a uniform, high-rate coating on three-dimen- sional objects. Typical applications include hard coat- ings on mechanical parts and tooling, decorative and functional coatings on stamped or molded parts, and inorganic coatings of all types on fibers, wires, and ribbons. Material that does not deposit on the substrate is recaptured and used again, significantly reducing waste. Because there is very little buildup on shields and fix- tures, much less system maintenance is required.

Leybold’s DynaMet, a fast-cycling, in-line vacuum coat- ing system, is the multiprocess, flexible, full-automation alternative to conventional, labor-intensive batch coaters. DynaMet reduces work-in-process, tooling costs, labor content, floor space, and changeover times and increases quality, uptime, throughput, and flexibility.

Circle 136 on reader information card

Vacuum Coating Systems Dyna Vat Hingham, Mass.

Circle 136 on reader information card

Sputtering Process Engelhard-CLAL Carteret, N. J.

DynaVac offers a complete line of vacuum coating systems for a wide range of applications. Included are systems for physical vapor deposition of thin films, batch and inline sputtering, and metallizing. Emphasis is put on industrial-grade designs for production and/or continuous use. All systems are offered with control system architecture ranging from basic logic to ad- vanced supervisory control.

,Engelhard-CLAL has developed an enhanced SCX vacuum sputter coating process for wire, ribbon, and select discrete parts using a wide range of precious and nonprecious metal coatings. The unique coating technol- ogy enables codeposition of alloys or compounds that cannot be mechanically worked or alloyed by other techniques. In addition, it is possible to engineer coat- ings consisting of metallic compounds such as hydrides, nitrides, and oxides. Typical deposition coating thick- nesses range from Y2 micron to over 6 microns.

Circle 137 on reader information card Circle 139 on reader information card

30 METAL FINISHING . APRIL 1997