sputtering edited
TRANSCRIPT
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“Sputtering Technique”
AHMAD DEDI FADILLAH 1407120814
WIRIYAN JORDY 1407114165
MULTI HANDRIYANI 1407113512
Strontium-Substituted Hydroxyapatite CoatingsDeposited via a Co-deposition Sputter Technique
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Hydroxy!"#"$
%o&!o'$'
'$r( )"&!d ")('* d'*#*#
D#*)'+',$-*# -.'
#&!(' d'&$'doro'*
!$r")&-).'")('* -r)
M$(#+# r)&), /
Ca10(PO4)6(OH)
2
R$+,# y'* "$rd# /
10Ca(OH)2 + H3PO4 → Ca10(PO4)6(OH)2+ 18 H
2O
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T$+'#+ y'*
d#*)'+' !d.ydroxy!"#"$d(& !$(!#,'
(o*&
T$+'#+
(,&!ry
T$+'#+Sputtering
T$+'#+
D#!o"#'*
T$+'#+E($+"roor$
,#,
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Teknik Sputtering
!)""$r#'* d(."$+'#+ !$(!#,' d$'*'&$'**)'+' +r-o'")!)' $&,
%$)'**)(' !$(!#,'d$'*' &$'**)'+'"$+'#+ ,!)""$r#'* #+d#-'d#'*+' d$'*'"$+'#+ y'* (#' d(.-.' )# y'* +'
d#(!#,# "#d+ .r), ,&!#&$($($. ,$.#'** ,'*"-*), d#*)'+' !d-.' d$'*' "#"#+ d#d#.y'* "#'**#
T$+'#+ ,!)""$r#'*,$'d#r# &$(#+# -$-$r!&$"od$ '"r (#' d(.,!)""$r#'* D ,!)""$r#'*RF d' &*'$"o'
,!)""$r#'*
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J$'#, (" Sputtering y'* d#*)'+' !d r$$r$',# )r'(Strontium-Substituted Hydroxyapatite Coatings Deposited
via a Co-deposition Sputter Technique” y#") RF agnetronSputtering! D#&' (" #'# "$rd#r# ", 3 -). high vacuum y'* -$ro!$r,# d$'*' 1356 MH9 RF :$'$r"or d'#&!$d',# )&-$r ;
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Methods And Material
T$+'#+ !$(!#,'Hydroxiapatite
+$!$r&)+' (o*&d#(+)+' d$'*'
&$'**)'+' -.' ?-.' ,$!$r"# /
)r$ T#"'#)& ;T#=
- A,$"o'@ I,o!ro!#( A(+o.o(
d Hydroxiapatite
$! De-ioni"ed #ater
rHA ;$iphasic
O4=* :, Ar*o'
Strontium-Substituted Hydroxyapatite CoatingsDeposited via a Co-deposition Sputter Technique
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Substrate %reparation
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Target %reparation
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Sputtering %rocess
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%ARA%TERITI% YDROIAATITE OATIN: METHODUTTERIN:
1 A'(#, FTIR
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2 A'(#, RD
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3 A'(#,
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• ONLUION
M$'**)'+' d$!o,#,# @o?&$'**$r)") )'")+ &$'@#!"+' HA
;rHA= !$(!#, r "$r,)-,"#"),# dr# "#* ,)&-$r RF ,#,"$&
&*'$"ro' ,!)""$r#'* $@r +.),), !$'*r). +o'B*)r,#
"r*$" y'* -$r-$d !d ,#"?,#" &$'**$r)") d#,#&!'
!$(!#, r,)-,"#")"$d d#!rod)+,# !d d$-#" r$'d.
"#'*+" dy ;150 W= d#,$(#d#+# H,#( y'* d#,#+' d# ,#'#
&$')')++' -.C ,!)""$r#'* @o?d$!o,#,# d!" d#*)'+'
)'")+ &$'*.,#(+' (!#,' r,)-,"#")"$d HA H,#( !$'$(#"#'
)* &$')')++' -.C ,$&) y'* -$r-$d !$(!#, rHA
d#!rod)+,# &$'*'d)'* +dr r$'d. O3 2? d' HO4 2?
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TERIMA %AIH