surface texture and contour measuring...

Surface Texture and Contour Measuring Instruments

■ Head Office2968-2, Ishikawa-machi, Hachioji-city,Tokyo 192-8515, JapanTEL: 81(42)642-1701 　　FAX: 81(42)642-1821

■ International Sales and Marketing4, Higashi-Nakanuki-machi,Tsuchiura-city, Ibaraki 300-0006, JapanTEL: 81(29)831-1240 　　FAX: 81(29)831-1461

■Germany / Accretech (Europe) GmbH (Head Office)Landsberger Str. 396, D-81241 Munich, GermanyTEL: 49 (89) 546788-0 　　FAX: 49 (89) 546788-10

■China / Accretech (China) Co., Ltd. (Head Office / Shanghai)Room 2101C, No 1077, Zuchongzhi Road, Pudong New Area, Shanghai, China, 201203TEL: 86(21)3887-0801 　　FAX: 86(21)3887-0805

■ Korea / Accretech Korea Co., Ltd. (Head Office / Seongnam)3F, Fine Venture Bldg, 345-1 Yatap-dong, Bundang-gu, Seongnam-si, Gyeonggi-do, 463-828, KoreaTEL: 82(31)786-4000 　　FAX: 82(31)786-4090

(Korea / Ulsan Office)2015 2F Jinjang Deplex 285-3 Jinjang-dong, Buk-gu, Ulsan, KoreaTEL: 82(52)268-2136 　　FAX: 82(52)268-2137

■ Thailand / Tokyo Seimitsu (Thailand) Co., Ltd. (HQ & Metrology)2/3 Moo 14, Bangna Towers B 1st floor, Bangna-Trad Rd., K.M. 6.5, Bangkaew, Bangplee, Samutprakarn 10540 ThailandTEL: 66(2751)9573, 9574 　　FAX: 66(2751)9575

■ Vietnam / TOKYO SEIMITSU CO., LTD. (HANOI REPRESENTATIVE OFFICE)8F, Office Building, No.85 Nguyen Du Street, Nguyen Du Ward, Hai Ba Trung District, Hanoi, VietnamTEL: 84(43)941-3309 　　FAX: 84(43)941-3310

■ Indonesia / TOKYO SEIMITSU CO., LTD. (INDONESIA REPRESENTATIVE OFFICE)Ruko Thamrin Block F4, 3rd Floor Jl. M.H. Thamrin, Lippo Cikarang, Bekasi, 17550 Indonesia TEL: 62 (0)21 8990 2863 　　FAX: 62 (0)21 8990 2864

http://www.accretech.jp/

•We reserve the right to change the contents of this catalog, including product specifications, without notice when products are updated.

•ISO 9001 and ISO14001 awarded to the Hachioji and Tsuchiura Plants

B-83-638-E-1304

3

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INDEXSurface Texture and Contour Measuring Instruments Series…… 4

SURFCOM Linear Series……………………………………………………… 8

System Configuration… ………………………………………………………10

Expansion Map… ………………………………………………………………11

Surface Texture and Contour Integrated Measuring InstrumentsSURFCOM 5000DX/SD… ……………………………………………………12SURFCOM 2000DX3/SD3… …………………………………………………14

Surface Texture Measuring InstrumentsSURFCOM 1500DX3/SD3… …………………………………………………16

Contour Measuring InstrumentsCONTOURECORD 2700DX3/SD3… …………………………………………18CONTOURECORD 1700DX3/SD3… …………………………………………20

Surface Texture and Contour Combined Measuring InstrumentsSURFCOM 2900DX3/SD3… …………………………………………………22SURFCOM 1900DX3/SD3… …………………………………………………24

Contour Measuring InstrumentsCONTOURECORD 1710DX3/SD3… …………………………………………26

Surface Texture and Contour Combined Measuring InstrumentsSURFCOM 1910DX3/SD3………………………………………………………27

Surface Texture Measuring InstrumentsSURFCOM C5 Type-C/Type-S…………………………………………………28

Surface Texture and Contour Combined Measuring InstrumentsSURFCOM 2800G/SURFCOM 1800G…………………………………………30

Contour Measuring InstrumentsCONTOURECORD 2600G/CONTOURECORD 1600G… ……………………32

Surface Texture Measuring InstrumentsSURFCOM 1400G………………………………………………………………34SURFCOM 1400G-LCD/PDP… ………………………………………………36

Software…

ACCTee ………………………………………………………………………38SURFCOM Map ………………………………………………………………46TiMS …………………………………………………………………………48

Surface Texture Measuring InstrumentsSURFCOM 480B… ……………………………………………………………50SURFCOM 130A… ……………………………………………………………52

Portable Surface Texture Measuring Instruments

SURFCOM FLEX… ……………………………………………………………56HANDYSURF E-35B/40A/45A…………………………………………………60

SURFCOM・CONTOURECORD Option……………………………………63

Explanation of Surface Characteristics・Standards…………………83

4

Surface Texture – Contour Measuring Instruments

As a world leader in precision measuring systems, ACCRETECH offers a wide array of high-performance surface texture and contour measuring instruments designed to meet the requirements of a variety of applications.Choose the device that best fits your purpose.By precisely capturing minute changes (between a few nanometers and a few tenths of a micrometer) in the surface profile in 2D and 3D images and through quantitative measurement, ACCRETECH's measuring equipment helps correlate material, process, function, and performance as well as facilitating optimum management.

Surface roughness measurement�●The surface texture of physical objects is often expressed as

"smooth" or "rough". However, even a "smooth" surface has tiny convex and concave irregularities. Surface roughness is the parameter used to express the degree of these minute irregularities.

●Product function and performance can be affected by a number of different factors. The purpose of surface roughness measurement is to facilitate product quality control and cost management.

Contour profile measurement�● The contour profile is the profile (sectional contour) generated

by tracing the ridge lines of the angles, radii, distances, and co-ordinates of an entire physical object.

�●Our contour profile measurement devices produce a multi-dimensional measurement by tracing the surface (marked by stylus)of an object and enlarging the profile. It is ideal for measuring items such as: the convex and concave irregularities which are difficult to measure or inspect with a projector; the inner profile of a hole; and objects so small that it is not possible for a stylus to be applied by a 3-D coordinate measuring machine.


SURFCOM 5000DX SURFCOM 2000DX3

SURFCOM 2900DX3

SURFCOM 1900DX3

SURFCOM 1910DX3

● Linear motor drive ● Sensor with integrated optical fiber

coupling laser interferometer attains a resolution of 0.3 nm

● Surface and contour evaluation, analysis, and printout with a single measurement

● Linear motor drive ● Integrated instrument with built-in

5 mm wide range detector ● Surface texture and contour

evaluation, analysis, and printout with a single measurement

● Linear motor drive ● Integrated texture measurement and

high accuracy contour measurement in a single measuring instrument

● Linear motor drive ● Texture pickup and contour detector

for two instruments in one

● Roughness and high-accuracy contour measuring instrument for global use.

SURFCOM 2800G

SURFCOM1800G

● High accuracy, advanced features and high operability

● Integrated texture measurement and high accuracy contour measurement in a single measuring instrument

● Integrated texture pickup and contour detector as standard

● High operability and integrated analysis of roughness and contour

Surface Texture and Contour Measuring Instruments Series

5

- Contour Measuring Instruments

- Surface Texture Measuring Instruments

CONTOURECORD 2700DX3



SURFCOM C5

SURFCOM 480B

SURFCOM 130A

SURFCOM FLEX-35B/40A/45A/50A

HANDYSURF E-35B/40A/45A

SURFCOM 1500DX3

● Linear motor drive ● High-accuracy contour sensor● High resolution over the full range

● Linear motor drive ● High-accuracy contour measuring

instrument● User-friendly functions

● High-accuracy contour measuring instrument for global use

● 5-axis control CNC Surface texture and shape measuring instrument

● Max. drive speed of 100 mm/s improves measurement efficiency

● Supports texture management at shop floors

● Color LCD touch panel with a wide field of view for smooth operation

● User-friendly guidance, customization, and other functions designed for the workplace

● LCD touch panel for smooth operation ● Guidance feature guides novices

through operation procedures

● Automatic connection check function recognizes a combination of tracing drivers

● Upgrades available from HANDYSURF

● Conforms to ISO, JIS, ASME, CNOMO, and other international standards, supports seven languages. Designed for use in workplaces just about anywhere in the world

● AI functions for easy operation

● Linear motor drive ● High-speed, low-vibration texture

measurement

CONTOURECORD 2600G

CONTOURECORD1600G

SURFCOM1400G

● High-accuracy dimension and profile analysis

● Built-in teaching and playback functions

● With advanced contour measurement and analysis software

● Multiple profile superimposed analysis function

● With advanced surface measurement and analysis software

● Free formatting of analysis results

6

Classification

Linear seriesMeasuring instrument

Measuring functions

Sensing typesof detector Style Main specifications

Export license

Ro

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Co

ntour

Ro

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Analo

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Co

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ur:

An

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Co

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ur:

Dig

ital

Integ

rated:

An

alog

All-in-o

ne

Sep

arate

Detector stroke

(Z)

Indication accuracyof contour detector

(Z)

Resolutionof detector

(Z)

Straightness accuracy of

tracing driver(X)

Model External view

Roughness

SURFCOM1500DX3 ● ─ ● ─ ─ ─ ● ─

1000 μm ─ 0.1 nm to20 nm (0.05 + L/1000) μm

Not required

SURFCOM1500SD3 ● ─ ● ─ ─ ─ ─ ● Not

required

Contour

CONTOURECORD 1700DX3 ─ ● ─ ● ─ ─ ● ─

50 mm

±(1.8 + l2Hl/100) μm

0.1 μm to1 μm

1 μm/100 mm(2 μm/200 mm)

Required

CONTOURECORD 1710DX3 ─ ● ─ ─ ● ─ ● ─ 0.1 μm Not

required

CONTOURECORD 1700SD3 ─ ● ─ ● ─ ─ ─ ● 0.1 μm to

1 μm Required

CONTOURECORD 1710SD3 ─ ● ─ ─ ● ─ ─ ● 0.1 μm Not

required

CONTOURECORD2700DX3 ─ ● ─ ─ ● ─ ● ─

±(0.8 + l2Hl/100) μm 0.025 μm

Not required

CONTOURECORD 2700SD3 ─ ● ─ ─ ● ─ ─ ● Not

required

Roughness/Contour

(Combined model)

SURFCOM 1900DX3

(S1500+C1700)● ● ● ● ─ ─ ● ─

Roughness:1000 μm Contour:50 mm

±(1.8 + l2Hl/100) μm

Roughness:0.1 nm to 20 nm

Contour:0.1 μm to 1 μm

Roughness:(0.05 + L/1000) μm

Contour:1 μm/100 mm

(2 μm/200 mm)

Required

SURFCOM 1910DX3

(S1500+C1710)● ● ● ─ ● ─ ● ─


Contour:0.1 μm

Not required

SURFCOM 1900SD3

(S1500+C1700)● ● ● ● ─ ─ ─ ●


Contour:0.1 μm to 1 μm

Required

SURFCOM 1910SD3

(S1500+C1710)● ● ● ─ ● ─ ─ ●


Contour:0.1 μm

Not required

SURFCOM2900DX3

(S1500+C2700)● ● ● ─ ● ─ ● ─

±(0.8 + l2Hl/100) μm

Roughness:0.1 nm to

20 nm

Contour:0.025 μm

Not required

SURFCOM2900SD3

(S1500+C2700)● ● ● ─ ● ─ ─ ● Not

required

Roughness/ Contour

(Integrated model)

SURFCOM 2000DX3 ● ● ─ ─ ─ ● ● ─

5 mm ±(2.5 + l2Hl/100) μm 0.8 nm to80 nm (0.05 + L/1000) μm

Required

SURFCOM 2000SD3 ● ● ─ ─ ─ ● ─ ● Required

SURFCOM 5000DX

Image DX type

● ● ● ─ ● ─ ● ─

13 mm ±(0.2 + lHl/1000) μm 0.31 nm (0.05 + 3L/10000) μm

Not required

SURFCOM 5000SD ● ● ● ─ ● ─ ─ ● Not

required

Lineup of SURFCOM and CONTOURECORD series

L : Measuring length (mm) H: Measuring height (mm) • Standard components. ※ Some of our products shall be controlled by the Foreign Exchange and Foreign Trade Act and required an export license by the Japanese Government. Regarding exporting this product and/or providing technologies with a non-resident, please consult Tokyo Seimitsu.

7

Classification

Standard G series Measuring instrument

Measuring functions

Sensing types of detector Main specifications

Export license

Ro

ughness

Co

ntour

Ro

ughness:

Analo

g

Co

nto

ur:

An

alog

Co

ntour:

Dig

ital Detector stroke(Z)

Indication accuracy of contour detector

(Z)

Resolutionof detector

(Z)

Straightness accuracy of

tracing driver(X)

Model External view

Roughness/Contour

(Combined model)

SURFCOM1800G

(S1400G+C1600G)● ● ● ● ─

Roughness:800 μm

Contour:50 mm

Contour:±0.25%

Full scale

Roughness:0.4 nm to

10 nm (0.1 nm)*

Contour:0.1 μm to

1 μm

Roughness:(0.05 + 1.5 L/1000) μm

Contour:1 μm/100 mm

(2 μm/200 mm)

Not required

SURFCOM2800G

(S1400G+C2600G)● ● ● ─ ● Contour:

±(0.8 + l4Hl/100) μm

Roughness:0.4 nm to

10 nm (0.1nm)*

Contour:0.025 μm

Not required

Contour

CONTOURECORD1600G ─ ● ─ ● ─

50 mm

±0.25%Full scale

0.1 μm to 1 μm

1 μm/100 mm (2 μm/200 mm)

Not required

CONTOURECORD2600G ─ ● ─ ─ ● ±(0.8 + l4Hl/100) μm 0.025 μm Not

required

SURFCOM 1400G ● ─ ● ─ ─ 800 μm ─0.4 nm to

10 nm(0.1 nm)*

(0.05 + 1.5 L/1000) μm Not required

SURFCOM 480B ● ─ ● ─ ─ 800 μm ─ 0.1 nm to 10 nm (0.05 + 1.5 L/1000) μm Not

required

Roughness SURFCOM 130A ● ─ ● ─ ─ 800 μm ─ 0.1 nm to 10 nm 0.3 μm/50 mm Not

required

SURFCOM FLEX　Series ● ─ ● ─ ─

800 μm (50A)

320 μm(35B,40A,45A)

─

0.16 nm to 16 nm (50A)

10 nm to 80 nm

(35B, 40A,45A)

0.3 μm/50 mm (50A)

─(35B,40A,45A)

Not required

HANDYSURF Series ● ─ ● ─ ─ 320 μm

(35B,40A,45A) ─10 nm to

80 nm (35B, 40A, 45A)

─(35B,40A,45A)

Not required

L : Measuring length (mm) H: Measuring height (mm) • Standard components. * When high-magnification pickup is used. ※ Some of our products shall be controlled by the Foreign Exchange and Foreign Trade Act and required an export license by the Japanese Government. Regarding exporting this product and/or providing technologies with a non-resident, please consult Tokyo Seimitsu.

8

　　 Linear Drive for Amazingly Low Vibration (Patent Pending)

　　　　Effectiveness of the Non-Contact DriveA linear motor is ideal even for reciprocating motion, and enables accurate positioning and high-speed measuring. Conventional control

uses a ball screw drive control system that combines a motor, encoder, and linear scale, which limits the reciprocating motion control

response especially when determining accurate positioning during 3D surface evaluation. Linear drive, on the other hand, enables simplified

control consisting basically of a linear motor and scale, for high response, high accuracy positioning.

Continually increasing the resolution of a detector is a simple task.

However, unless you also improve factors like the structure that

drives the detector, unnecessarily raising the resolution of the

detector is merely window-dressing the specifications.

ACCRETECH is the first company in the world to use a high-

accuracy linear motor as the drive motor (patent pending) in a

revolutionary new structure that dramatically pushes the envelope

in terms of high accuracy. The result is a dynamic solution that

improves actual values to unmatched levels.

Approach distance is effective when you do not want to waste measuring distance or

when you can only measure short distances. With conventional measuring instruments,

approach distance is always required before data sampling, while taking backlash and

motor startup characteristics into consideration. ACCRETECH linear motor models are

designed for high response and zero backlash, which eliminates the need for approach

distance.

The measuring time for 3D roughness measuring is: [1/10 Conventional Measuring Time] x

[Number of Measuring Lines], resulting in greatly reduced measuring times. This reduces

the risk of measurements being affected by temperature change and other measuring error

factors, leading to more reliable measured results.

The linear motor and minimal lost motion provided by the 1/100-second link control

combine with outstanding start response to deliver dramatic overall reductions in total

measuring time.

　　 Approach Distance

　　 World’s Fastest High-Speed Measurement

Gear Feed Screw

Carriage

Reference BaseDC

Motor

Linear Motor

Carriage

Reference Base

Resolution

NoBacklash

Response

Speed

Measurement result of level difference master

Optical flat measurementLinear seriesStandard seriesCalibration certificate of level

difference master

Example of 3D roughness measurementwith linear series and ACCTee

Response startup speed graph

Surfcom Texture - Contour Measuring Instruments

SURFCOM Linear Series

ApproachDistance

（λ/3−λ）Front end

reserve length

（λ/3−λ）Rear end

reserve lengthEvaluation length

(Reference length:λx5)

（λ/3−λ）Front end

reserve length

（λ/3−λ）Rear end

reserve lengthEvaluation length

(Reference length:λx5)

Actual measured length

Actual measured length

Response Startup Speed Graph

Conv

entio

nal in

strum

ent

Lin

ear

Ser

ies

9

　 Mature Technology, Master Ball Calibration (Patented)

■Circle Correction CalculationSince the probe moves in a circular motion

vertically around the support on the contour

measuring instrument's probe arm, X-axis data

also has errors because the probe tip position

also moves in the X-axis direction. These error

elements must be corrected in order to achieve

high measuring accuracy. The ACCRETECH

contour measuring system performs calibration

using a master ball calibration unit which

enables simple circle error correction as well

as tip R error calibration (see next section).

■Tip R-correctionAlthough the contour measuring instrument's

probe tip is R-shaped, tip R-correction is

an indispensable factor for high measuring

accuracy.

Measurements are taken from the center of

probe tip R and correction is performed by

offsetting in the normal direction at 11 dividing

points on the tip (Figure a). Though there is

no problem with fixed quantity correction

when probe tip R is near maximal generalized

roundness zero, large errors can occur in the

correction amount due to tip R processing

tolerance error or wear after long term use

(Figure b).

Calibration

Master ball calibration unit and 40 mm probe gage Master ball correction screen

Figure a Tip R-correction

Figure a

Figure b

DX type SD type

　　The Perfect Combination of Operation and Cost PerformanceC.O.A.P. (Comfortable Operation and All-in-one Package) Design Plan

The DX Type is designed for much more than simply saving space. Keeping in mind the idea of "Important Functions

for Realization of Comfortable Measurement and Analysis," a COAP concept design derived from ergonomics has

been introduced to minimize frequent operator movements during measurement and analysis of multiple workpieces.

The DX Type also comes complete with essential options, making it an all-in-one package. The Windows computer

is stored in the space under the vibration isolation stand, to provide a high level of environmental resistance. Dead

space on the right side of the column is also put to use by providing a storage box that can be used for system accessories and peripherals.

All of this means that the area required by the DX Type is approximately 25% less than the standard installation area of previous models (SD

specifications require the same area as previous models).

Operation

* The master ball correction unit is included as standard with the contour measuring instrument.

In order to make it possible to quickly detect errors, ACCRETECH calculates tip R for every 10 degrees and generates correction values. Rather than just simple R-correction, this system uses an original algorithm to monitor the status of the probe tip. The operator is alerted by an error indicator whenever the correction value is outside preset limits.

Workpieceheight

X-direction deviation Probe arm support

Probe

Probe R center locus


Probe R-correction only in normal direction Post-correction data

Profile when new

Profile after wear

10

S1500, C1700, C1710, C2700, S1900, S1910, S2900, S2000 SeriesS1400G, C1600G, C2600G, S1800G, S2800G Series

SURFCOM○○○○△△ - □□

SURFCOM○○○○ DX3-12,-13,-22,-23

SURFCOM○○○○ SD3-12,-13,-22,-23SURFCOM○○○○ G-11,-12,-13,-21,-22,-23

SURFCOM○○○○ DX3-14,-15,-24,-25

SURFCOM○○○○ SD3-14,-15,-24,-25SURFCOM○○○○ G-14,-24

DX3 Model

Motorized600×320 mm250 mmApprox. 40 kg

Manual600×317 mm250 mm50 kg

ColumnBase dimensionsMeasuring heightPermissibleloading weight*



Motorized1000×450 mm 650 mm Approx. 90 kg

- □ 2- □ 1 - □ 3 - □ 4 - □ 5

OptionDesktop anti-vibration table: E-VS-S57B; Ordinary stand for desktop anti-vibration table: E-VS-S13ASystem Rack: E-DK-S24A

OptionAnti-vibration table: E-VS-S21BSystem Rack: E-DK-S24A

* Mass changes depending on permissible loading weight of an anti-vibration table in case of combination with it.- 1 is only for G series.

Tracing driverLinear series G series

Measuring stand

- 1 □

- 2 □

Pickup movementE-RM-S205A

Pickup movementE-RM-S72B,S138B

Max. travel distance 100 mm Max. travel distance 100 mm

Max. travel distance 200 mm Max. travel distance 200 mm

E-RM-S183E E-RM-S178A ,S182A


System Configuration

Measuring stand column

Op

tion

Monitor

Printer

Driver unit

ComputerConfigured system

Pickup movement tracing driver

Measuringstand base

* The optional printer can be an A3/A4 printer, laser printer or color printer.

Tracing driverMeasuring stand

Type (DX3/SD3)

Measuring stand column

Pickup movement tracing driver

Anti-vibration table (built-in)

Measuring stand base

Monitor

Printer (standard)

SD3 Model/G Model1162(-15,-25)

962(-14,-24)

560

530

455

11

Holders (P.75)

Expanded system configurations and a wide selection of options make it possible to configure a system that can meet just about any need imaginable.

.

Tracing driver tilting device.

These are used to shore up a column for measuring a large-sized workpiece.

These tracing drivers are used for measuring the roughness on a circle’s circumference. Two types are

available, depending on the application.

These pickups and detectors are used in combination with a SURFCOM or CONTOURECORD

Series instrument.

These fixed-pitch Y-axis tracing drivers are for 3D roughness measuring.

These tables enable automatic setup when used in combination with SURFCOM or CONTOURECORD

Series instruments.

Tilting device

E-CA-S85A (For 100 mm)

E-CA-S92A (For 200 mm)

Column rotation spacer

E-CS-S76A

Height=100 mm

Rotation angle=360°

Column spacer

E-CS-S77A

Height=200 mm

Round surface roughness

tracing driver

E-RM-S84A

PickupE-DT-SS01A*E-DT-S03A

High magnification pickupE-DT-SH01A

Non-contact pickupE-DT-SL12B

Contour detectorE-DT-CE03C*E-DT-CE02A**

High accuracy contour detectorE-DT-CH10B*E-DT-CH08A*E-DT-CH07A**Wide-range hybrid detectorE-DT-CR06A*

<Roughness>

<Contour>

<Roughness and Contour>

Outer periphery

roughness tracing driver

E-RM-S85B

50 mm

E-YM-S06A

100 mm

E-YM-S12A

Y-axis 200 mm

E-AT-S106A

θ -axis horizontalE-AT-S107A

θ -axis verticalE-AT-S108A

Y-axis 100 mm

E-AT-S105A

150 mm

E-YM-S07A

200 mm

E-YM-S08A

Equipped as standard for G series contour measuring system

13 mm

E-DH-S173A


Expansion Map

Tracing Driver Tilting Device (P. 74)

Y-Axis Tracing Drivers (P. 47)

Column Spacer (P. 74)

Tracing Drivers (P. 76)

Pickups and Detectors (P. 63 - P. 73)

CNC Tables (P.37) * : For linear series only

** : For G series onlyNo symbols : For both series

12

World Highest Resolution of 0.3 nm●��A highly stable optical path He-Ne laser interferometer is

used in the sensor.

●�Achieves high resolution over a wide range.

Linear Motor Drive●�A linear motor drive ensures high accuracy and high-speed

movement.

●�Low vibration ensures more stable measurement at high magnifications.

Roughness and Contour Analyzed in a Single Measurement●��Measurement efficiency is improved, while maintaining high

accuracy.

Large Size Maintains Accuracy

CNC Table can be Added for Full Automatic Operation

Tracing Driver Tilting Device●��Workpiece angle is detected after workpiece tracing, and the

tracing driver's auto leveling feature returns the workpiece and tracing driver to level.

※Equipped as standard on SURFCOM 5000DX-T and SD-T

Highest Accuracy, Highest Speed and Highest Resolution in the world

Thoroughly pursuing the limits of surface characteristics analysis

Linear series

Highly Stable Optical Path Laser Interferometer (Patented)●�This measuring machine adopts an optical fiber-based

laser interferometer, one of Tokyo Seimitsu's constituent technologies, and incorporates a newly developed, highly stable optical path laser interferometer having a resolution of 0.3 nm.

●�This system features a dynamic range to resolution ratio of 43 333 000:1, which means that contour shapes over a wide range and minute hidden surface shapes can be evaluated by a single trace.

Automatic Measurement Over a Wide Range●�Wide measuring range of

200 mm (horizontal direction)and 13 mm (vertical direction)

●�Motorized tilting unit capable of tilting to 45° also available※

●�Teaching/playback function allows processes from measurement through printing automatically

※Tracing driver tilting device is included as standard on SURFCOM5000DX-T and SD-T

SURFCOM 5000DX


Surface Texture and ContourIntegrated Measuring Instruments

<Sensor Structure>

X-axis scale counterX-axis scale counter

Laser interferometer counterLaser interferometer counter

ControllerController

He-Ne laser

Bearing

Stylus PhotocellMeasurement light

Reference lightInterference

light

Optical fiber

Workpiece

He-Ne laser

ACCRETECHINTEGRATEDMEASURINGSYSTEM

13

SpecificationsModel SURFCOM 5000DX/SD

Measuring rangeZ-axis (vertical) 13 mm/50 mm arm, 26 mm/100 mm arm

X-axis (horizontal) 200 mm

Accuracy

Z-axis indication accuracy (vertical) ±(0.2+ |H|/1000) μm (H: Measuring height mm)

Resolution 0.31 nm/50 mm arm

X-axis indication accuracy (horizontal) ±(0.2 + L/1000) μm (L: Measuring length mm)

Resolution 0.54 nm

Straightness accuracy 0.05 + 3L/10000 μm (L: Measuring length mm)

Sensing methodZ-axis (vertical) Highly stable optical path type laser interferometer

X-axis (horizontal) Optical diffraction scale

Speed

Column up/down speed (Z-axis) Up to 200 mm/s

Measuring speed (X-axis)0.03 mm/s to 3 mm/s (during texture measurement),

0.03 mm/s to 20 mm/s (during contour measurement)

Moving speed (X-axis) 0.02 mm/s to 60 mm/s

Tracing driver tilt ±45° (option)

Detector

Stylus Replaceable

Measuring force 0.75 mN

Stylus radius 2 μmR standard accessory (50 mm arm)

Stylus material Diamond

Functions Retract function

Other

Power supply, frequency, consumption Single-phase AC 100 V (grounding required), 50 Hz/60 Hz, 663 VA

Air supplySupply pressure: 0.4 MPa or more, Working pressure: 0.4 MPa,

Air consumption volume: 8 ℓ/mm (max.)

Installation dimensions ★ (W × D × H) 1500 mm × 1000 mm × 2000 mm

Weight ★ 700 kg

External View

★Dimensions and weight are for DX type. Refer to page 68 for styli.

SURFCOM 5000DX SURFCOM 5000SD

Anti-vibration table, system rack and printer are options for the SD Type.DX Type can be configured with a front windproof cover and an external monitor.

500

200

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High-Performance Surface Texture and Contour Integrated Measuring Instrument

High Accuracy, Wide-Range (Hybrid) Detector Built-in●�Measuring range Z-axis direction: 5 mm range

(Resolution: 80 nm) to 0.05 mm range (Resolution: 0.8 nm)

●�Indication Accuracy Z-axis direction ±(2.5 + |2H|/100) μm H = Measuring height (mm)

The wide range detector enables simple, automatic evaluation, analysis and printing of surface texture and contour with a single measurement.

New Linear Motor Drive (Patent Pending)●�The new linear motor enables the fastest measurement

speeds in the world, while keeping vibration to a minimum for stable, high-magnification measurement. A simple configuration and non-contact driver also maintains stability over long term operation.

●�High-speed measurement for dramatically improved productivity.

Texture Measurement: 3 mm/s max. Contour Measurement: 20 mm/s max. Moving Speed: 60 mm/s max. Measurement Efficiency: 10 times better (compared with

previous models)

Multifunction Detector●�S2000 system enables roughness and contour measurements

with a single detector.

●�Optional detectors for roughness and contour meet the needs of a wide range of applications.

Detectors Measuring range: 5 mm max. Electric stylus retract function

Texture and contour evaluation, analysis, and printout can be performed with a single measurement.Data can be printed on a single page.

SURFCOM 2000DX3

SURFCOM 2000SD3

Printer is optional


Surface Texture and ContourIntegrated Measuring Instruments

Linear series


15

Roughness pickup for large magnification (Option) Wide-range pickup for contour (Option)

Hybrid detector automatically performs evaluation, analysis and printing of roughness and contour measurements with a single measurement. Since detectors specialized in roughness and contour measurements can be added, measuring ranges can be expanded in a single measuring instrument.

A detector exclusively designed for roughness measurement can be added to the SURFCOM 2000DX3/SD3. It achieved the measuring range of 1000 μm for roughness and enables max. measuring magnification of 500,000x. It is also useful for minute contour measurement.

A detector specifically designed for contour measurement can be added to the SURFCOM 2000DX3/SD3. This detector applies the measuring range of 50 mm and enables versatile step profile analysis on contour measurements.

φ 14

Specifications

ModelSURFCOM 2000DX3/SD3

-12 -13 -14 -15 -22 -23 -24 -25

Measuring rangeZ-axis (vertical) 5 mm/Standard arm, 10 mm/2 X arm

X-axis (horizontal) 100 mm 200 mm

Accuracy

Z-axis indication accuracy (vertical) ±(2.5 + |2H|/100) μm (H: Measuring height mm)

Resolution0.8 nm/0.05 mm range, 3.2 nm/0.2 mm range, 8 nm/0.5 mm range,

16 nm/1mm range, 32 nm/2 mm range, 80 nm/5 mm range


Resolution 0.016 μm

Straightness accuracy (0.05 + L/1000) μm (L: Measuring length mm)

Sensing methodZ-axis (vertical) Differential inductance

X-axis (horizontal) Linear scale

Speed

Column up/down speed (Z-axis) 3 mm/s to 10 mm/s

Measuring speed (X-axis) 0.03 mm/s to 20 mm/s

Moving speed 60 mm/s max.

DetectorStylus Replaceable with retract function

Stylus radius (stylus material) Measuring force2 μmR (60° conical diamond) 0.75 mN, 25 μmR (24° conical carbide) 5 mN

Each stylus equipped as standard

Operation rangeTracing driver stroke 100 mm 200 mmColumn up/down stroke 250 mm 450 mm 650 mm 250 mm 450 mm 650 mm

Granite tableDimensions 600 × 320 mm 1000 × 450 mm 600 × 320 mm 1000 × 450 mmPermissible loading weight ★ 37 kg 28 kg 93 kg 84 kg 31 kg 22 kg 87 kg 78 kg

Other

Installationdimensions ★

Width 1250 mm 1650 mm 1250 mm 1650 mmDepth 800 mm 900 mm 800 mm 900 mmHeight 1480 mm 1680 mm 1880 mm 1480 mm 1680 mm 1880 mm

Weight ★ 225 kg 235 kg 420 kg 430 kg 230 kg 240 kg 425 kg 435 kgPower supply, frequency, consumption Single phase AC 100 V ±10% (grounding required), 50 Hz/60 Hz, 670 VA

★Dimensions and weight are for the DX type. This product shall be controlled by the Foreign Exchange and Foreign Trade Act and required an export license by the Japanese Government. Regarding exporting this product and/or providing technologies with a non-resident, please consult Tokyo Seimitsu.

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Quick Response!Linear Motor Drive Achieves Low Vibration Texture Measurement

First Roughness Measurement Instrument with Linear Motor (Patent Pending)●�The new linear motor enables the world's fastest

measurement speeds, while maintaining low vibration for stable, high-magnification measurement.

●�A linear, non-contact tracing driver and simple configuration (no feed screw or gear box) ensures stable, vibration-free, long-term operation.

High-Speed Measuring for Dramatically Improved Productivity●��Very high speeds of 3 mm/s maximum for roughness

measurement, 20 mm/s maximum for wave measurement, and a moving speed of 60 mm/s delivers measuring efficiency that is five to ten times better than existing models.

New, High-Performance Compact Pickup●�A new compact built-in pickup allows high-magnification,

wide area measurement.

●�The measuring range is 1000 μm with an outside diameter of 14 mm, and a measuring magnification of 500000 times.

Smaller Footprint ●��A new, modern design reduces the system footprint by about

25% (when compared with existing models). This means lower expenses when the system is installed in a temperature controlled room.

A Leader in Expandability ●��You can easily upgrade from 2D to 3D roughness

measurement or support both roughness (2D/3D)measurement and contour measurement on a single instrument just by adding on units.

※Note: Upgrading to a multi-purpose system by adding a contour detector is performed at the factory.

Patented AI Function Simplifies Measuring●�The measuring instrument selects suitable roughness settings

and analysis conditions, even when measuring condition settings are not pre-configured.

●�A lesson mode is also provided to teach users measuring instrument operations. Just one more example of ACCRETECH's commitment to build measuring instruments that can be used by anyone.

World Wide Machine●�This model complies with the latest ISO, JIS, DIN, ASME,

CNOMO and other standards.

●�It has cleared the European safety standard requirements for CE marking.

●�It supports operation using Japanese, Chinese, Korean, English, German, French, Italian and Spanish.

E-DT-SS01A Pickup for roughness measurement φ 14

SURFCOM 1500DX3

Printer is optional

SURFCOM 1500SD3


Surface TextureMeasuring Instruments

Linear series


17

Full Automation for Improved Measurement Efficiency●�The teaching function fully automates the entire process,

from multiple location measurements to creation of the final inspection report by pasting data into it.

●�A moving speed of 60 mm/s dramatically improves measuring efficiency when performing full automatic measurement.

Freedom to Re-Analyze●��Re-analysis can be performed easily after changing the

measurement standard (linear, first half, latter half, round surface, both end), configuring the evaluation range, and removing defective data from a notch.

Enhanced Profile Evaluation Functions●��To meet user demand, support for film thickness measurement

(level difference, surface area), wear volume calculation (superimposed profile area), LCD glass substrates (special waviness) and other standards has been provided.

Flexible Input and Output Functions●��Import and export functions make it possible to paste

image data into measurement results, and to paste measured waveform data into a standard word processor or spreadsheet file.

Horizontal Trace measurement ●��Measurements can be performed with roughness pickup

rotated 90 degrees.Example measurement with detector facing upwards (with Auto Stop Function)

(using optional pickup holder coupling)

SpecificationsModel

SURFCOM 1500DX3/SD3

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Measuring rangeZ-axis (vertical) 1000 μm


AccuracyDetector resolution 0.02 μm/1000 μm range to 0.0001 μm/6.4 μm range

X-axis resolution 0.04 μm or 32000 points (300000 data uptake points)

Straightness accuracy (0.05 + L/1000) μm　(L: Measuring length mm)

Sensing methodZ-axis (vertical) Differential inductance


Speed



Moving speed (X-axis) 60 mm/s max.

DetectorStylus, measuring force Replaceable, 0.75 mN

Stylus radius (stylus material) 2 μmR (60° conical diamond) One piece equipped as standard



Other




★Dimensions and weight are for the DX type.

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High-Accuracy Contour Detector Using Laser Optical Diffraction Scale 0.025 μm Resolution

New High-Accuracy Contour Detector that Weighs 40% Less Than Previous Models●�Laser optical diffraction scale ensures high resolution over the

entire range.

●�Contours can be measured and analyzed with high accuracy and high resolution.

Optical Diffraction Scale●��The laser wavelength of the light source is highly stable, and

is not affected by air fluctuation or pressure change. This scale has high repeatability and no backlash errors occur.

Linear Motor Drive●�Low vibration, high accuracy, high-speed movement.


　

A Choice of Linear Series DX Type or SD Type to Suit Specific Needs●��Available as an all-in-one space-saving DX Type or

conventional separate style SD Type.

Outstanding Expandability●�Roughness detector and CNC table can be added.

●�Flexible design ready to meet future requirements.

Flexible Arm and Probe Combination●�This model uses a master ball calibration to correct the arc

distortion (X-direction error) characteristic of a contour detector and has the ability to combine a flexible arm and a probe.

●�Various contour measuring styli for a wide variety of workpieces from small holes to deep grooves.

In the case of a long workpiece like a ball screw, measuring with a conventional arm and probe position relationship resulted in interference with the detector, making it impossible to achieve a large measuring range in the X-direction. Master ball calibration creates a combination in which the arm and probe are downwardly offset, as shown in the photograph below, which allows unimpeded measuring, even in the case of long workpieces. See page 44 for details about arc correction using master ball calibration.

Printer is optional

/


CONTOURECORD 2700SD3


Contour Measuring Instruments

Linear series


19

System Expandability (Option)●��In case roughness measurement capability is required

following installation, the system can be upgraded to a multi-functional contour and roughness measurement system simply by adding a roughness detector and roughness analysis program.

Specifications

ModelCONTOURECORD 2700DX3/SD3

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Measuring rangeZ-axis (vertical) 50 mm


Accuracy

DetectorZ-axis indication accuracy (vertical) ±(0.8 + |2H|/100) μm　(H: Measuring Height mm)

Resolution 0.025 μm/Full range

Tracing driver

X-axis Indication accuracy (horizontal) ±(1.0 + L/100) μm (L: Measuring length mm)


Straightness accuracy 1 μm/100 mm 2 μm/200 mm

Sensing methodZ-axis (vertical) Laser optical diffraction scale


Speed




Detector

Stylus, measuring force Replaceable, 30 mN or less with retract function

Stylus radius (stylus material) 25 μmR (24° conical carbide), two pieces equipped as standard

Measuring direction, position Pull/push and Up/down directions, Max. following angle: 77°

Operation rangeTracing driver stroke 100 mm 200 mm

Column up/down stroke 226 mm 426 mm 626 mm 226 mm 426 mm 626 mm

Granite tableDimensions 600 × 320 mm 1000 × 450 mm 600 × 320 mm 1000 × 450 mm

Permissible loading weight ★ 37 kg 28 kg 93 kg 84 kg 31 kg 22 kg 87 kg 78 kg

Other

Installation

dimensions ★

Width 1250 mm 1650 mm 1250 mm 1650 mm

Depth 800 mm 900 mm 800 mm 900 mm

Height 1480 mm 1680 mm 1880 mm 1480 mm 1680 mm 1880 mm

Weight ★ 225 kg 235 kg 420 kg 430 kg 230 kg 240 kg 425 kg 435 kg

Power supply, frequency, consumption Single phase AC 100 V ±10% (grounding required), 50 Hz/60 Hz, 670 VA


/

Roughness measuring detector (option)

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Cutting-Edge Linear Motor Dramatically Boosts Precision Setting A New Standard in Contour Measurement

Higher Precision●�CONTOURECORD 1700 provides measuring accuracy precise

enough for molds and other precision components.

●�Measuring accuracy at a level normally associated with high-end machines greatly expands the range of possible applications.

The First Application of Linear Motor Drive (Patent Pending)●�The new linear motor enables the fastest measurement speeds

in the world, while ensuring low vibration for stable, high-magnification measurement.

●�A linear, non-contact tracing driver and simple configuration (no feed screw or gear box) ensures vibration-free operation and stable long-term performance.

High Efficiency Measuring●�Teaching and playback functions automate the entire process,

from multiple location measurements to creation of an inspection report, which can be generated simply by pasting data into it.

●�A maximum measuring speed of 20 mm/s and a maximum moving speed of 60 mm/s dramatically enhance measuring efficiency.

Smaller Footprint ●��A new, modern design reduces the system footprint by about

25% (compared to previous ACCRETECH models). This means lower expenses when the system is installed in a temperature-controlled room.

Easy Evaluation of General-Purpose Part Contours●�Contours of parts that normally have to be evaluated on a

projector or tool microscope now can be evaluated quickly and easily.

●�Measured results can be incorporated into inspection reports.

Superior ACCRETECH Functions●��Automatic Element Discrimination (AI Function)

Elements such as points, straight lines, and circles are determined automatically without having to be specified by the operator.

●��Dimension DisplayActual measured values such as parameters and geometric deviation can be displayed in the measurement drawing.

●��Automatic CrowningWorkpiece maximum values and minimum values are detected automatically.

●��Calculation Point RepeatGeneral analysis of a workpiece that includes repeating profiles can be performed by analyzing a single pattern.

●��Workpiece TraceA single manual trace can be used to determine the measuring range without setting values. This function is ideal for measuring intricate profiles.

●��Import and ExportImage data can be pasted into measurement results and measurement waveform data can be pasted into commercially available software files.

Printer is optional


CONTOURECORD 1700SD3



Linear series


21

High Accuracy Analog Detector The contour detector, CONTOURECORD 1700, is an analog detector that uses the differential motion inductance method. Born of our efforts to develop high accuracy products that focus on this analog high resolution characteristic, the CONTOURECORD 1700 is a high-accuracy analog contour detector featuring a world-exclusive software correction technique, as well as an improved inner structure.●�Simple inner structure allows high resolution depending on

measuring ranges.

●�Low measuring force leads to less friction between stylus and a workpiece. The shape of the workpiece can be accurately incorporated.

●�Shock resistant and stable measurement.

●�Various contour measuring styli for a wide variety of workpieces from small holes to deep grooves.

Roughness Pickup for Large Magnification (Option)●�A roughness measurement range of 1000 μm enables provision

of minute contour and rough alignment measurement.

●�To support large magnification measurement of high-precision processed parts, magnification of up to 500,000x is provided.

●�Adding an optional roughness pickup allows users to easily upgrade to an integrated measuring instrument.

Adjustment Weight for Low Measuring Force Support for 2 mN low measuring force enables measurement of easily deformed workpieces.

Adjustment Weight for Low Measuring

Force (0102406)

Measuring Force Adjustment Range:

2 mN to 10 mN

φ 14

Specifications


-12 -13 -14 -15 -22 -23 -24 -25

Measuring rangeZ-axis (vertical) 50 mmX-axis (horizontal) 100 mm 200 mm

AccuracyDetector

Z-axis indication accuracy (vertical) ±(1.8 + |2H|/100) μm (H: Measuring height mm)Resolution 0.1 μm/5 mm range, 0.4 μm/20 mm range, 1 μm/50 mm range

Tracing driver

X-axis Indication accuracy (horizontal) ±(1.0 + L/100) μm (L: Measuring length mm)Resolution 0.016 μm


Sensing methodZ-axis (vertical) Differential inductanceX-axis (horizontal) Linear scale

SpeedColumn up/down speed (Z-axis) 3 mm/s to 10 mm/sMeasuring speed (X-axis) 0.03 mm/s to 20 mm/sMoving speed (X-axis) 60 mm/s max.

Detector

Stylus, measuring force Replaceable, 30 mN or less with retract functionStylus radius (stylus material) 25 μmR (24° conical carbide), two pieces equipped as standard




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Integrated Roughness Measuring and High Accuracy Contour Measuring Instrument

New High-Accuracy Contour Detector that Weighs 40% Less Than Previous Models●�The laser optical diffraction scale ensures high resolution over

the entire range.

●�Contours can be measured and analyzed with high accuracy and high resolution.

Linear Motor Drive●�Low vibration, high accuracy, high-speed movement.


2-In-1 Measuring Instrument●��Compact high performance detector for roughness

measurement and high accuracy contour detector are provided as standard.

A Choice of All-In-One Space-Saving ●��Linear series DX type or conventional separate style SD type to

suit specific requirements.

High Accuracy Contour Detector (Digital)●�CONTOURECORD 2700DX3/SD3's contour detector is a high

accuracy detector equipped with an optical diffraction scale.

●�With minimum resolution of 0.025 μm, this instrument provides high accuracy measurement covering the entire detection range of 50 mm in the Z direction.

Roughness Pickup for Large Magnification (Option)●�A roughness measurement range of 1000 μm enables provision

of minute contour and rough alignment measurement.


φ 14

/

SURFCOM 2900DX3

SURFCOM 2900SD3

Printer is optional


Surface Texture and Contour Combined Measuring Instruments

Linear series


23

High Accuracy, Wide-Range Hybrid Detector (Option)●�SURFCOM 2900DX3/SD3 comes with a roughness detector

and a contour detector as standard. A high accuracy, wide-range hybrid detector can also be added.

●�Accurate, efficient measurement of workpieces with various profiles is possible.

For details about the high accuracy, wide-range hybrid detector, see SURFOCM 2000DX3/SD3 (P.14).

Note that this detector is a factory option. Adding the detector to an existing instrument requires that the instrument be shipped to our factory.

SpecificationsModel

SURFCOM 2900DX3/SD3

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Accuracy

Roughness detector Resolution 0.02 μm/1000 μm range to 0.0001 μm/6.4 μm range

Contour detectorZ-axis indication accuracy (vertical) ±(0.8 + |2H|/100) μm (H: Measuring height mm)

Resolution 0.025 μm/Full range

Roughness tracing driver X-axis resolution 0.04 μm or 32000 points (300000 data uptake points)

Contour tracing driver



Straightness accuracy Roughness system: (0.05 + L/1000) μm (L: Measuring length mm), Contour system: 1 μm/100 mm, 2 μm/200 mm

Sensing method

Z-axis(vertical)

Roughness detector Differential inductance

Contour detector Laser optical diffraction scale


Speed




Detector

RoughnessStylus, measuring force Replaceable, 0.75 mN

Stylus radius (stylus material) 2 μmR (60° conical diamond), one piece equipped as standard

Contour

Stylus, measuring force Replaceable, 30 mN or less with retract function

Stylus radius (stylus material) 25 μmR (24° conical carbide), two pieces equipped as standard




Other





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Printer is optional

SURFCOM 1900DX3

SURFCOM 1900SD3

The First Application of Linear Motor Drive (Patent Pending)●�The new linear motor enables the fastest measurement speeds in the

world and low vibration for stable, high-magnification measurement.

●�A linear, non-contact tracing driver and simple configuration (no feed screw or gear box) eliminate vibrations and ensure stable long-term operation.

High-Speed Measurement for Dramatically Improved Productivity●�Very high speeds of 3 mm/s maximum for roughness

measurement, 20 mm/s maximum for wave measurement, and 60 mm/s for movement speed provide incredibly fast performance and better-than-ever measuring efficiency.

●�Teaching and playback functions automate the entire process, from multiple location measurements to creation of the final inspection report, which can be quickly put together by pasting data into it, for measuring efficiency that is five to ten times better than other ACCRETECH instruments.

Smaller Footprint●�A new, modern design reduces the system footprint by about

25% (compared with previous ACCRETECH models). This means lower expenses when the system is installed in a temperature controlled room.

New, High-Performance Compact Pickup (Roughness)●�A new compact built-in pickup allows high-magnification, wide

area measurement.

●�The measurement range is 1000 μm with an outside diameter of 14 mm, and a measurement magnification of 500,000 times.

Higher Precision Allows Measurement of Workpiece Contours that are Impossible for Existing Instruments●�Measurement accuracy of 2.5 μm (measurement range: 5 mm) provides

plenty of accuracy for molds and other precision components.

●�A level of measuring accuracy that is normally associated with high-end instruments greatly broadens the range of possible applications.

Easy Evaluation of General-Purpose Part Contours●�Contours of parts that normally have been evaluated on a projector

or tool microscope now can be obtained quickly and easily.●�Measured results can be incorporated into inspection reports.

Superior ACCRETECH Functions●��Automatic Element Discrimination (AI Function)

Elements such as points, straight lines, and circles are determined automatically without having to be specified by the operator.

●��Dimension DisplayActual measured values such as parameters and geometric deviation can be displayed in the measurement drawing.

●��Automatic CrowningWorkpiece maximum values and minimum values are detected automatically.

●��Calculation Point RepeatGeneral analysis of a workpiece that includes repeating profiles can be performed by analyzing a single pattern.

●��Workpiece TraceA single manual trace can be used to determine the measuring range without setting values. This function is ideal for measuring intricate profiles.

●��Import and ExportImage data can be pasted into measurement results and measurement waveform data can be pasted into commercially available software files.

/



Linear series


With Cutting-Edge Linear Motor High-Speed, Low-Vibration, High-Accuracy Measuring

24

25

High Accuracy Analog Detector●�The analog detector has simple inner structure which allows

high resolution depending on measurement ranges. Low measuring force leads to less friction between a stylus and a workpiece, and the pattern of the workpiece can be faithfully incorporated. The detector resists shock and can obtain stable measurement data.

For details about the high accuracy, wide-range hybrid detector, see SURFOCM 2000DX3/SD3 (P.14).

Roughness Pickup for Large Magnification (Option)●�A roughness measurement range of 1000 μm, enables

provision of minute contour and rough alignment measurement.


φ 14

High Accuracy, Wide-Range Hybrid Detector (Option)●�SURFCOM 1900DX3/SD3 comes with a roughness detector

and a contour detector as standard. A high accuracy, wide-range hybrid detector can also be added.

●�Accurate, efficient measurement of workpieces with various profiles is possible.

Specifications


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Accuracy


Contour detectorZ-axis indication accuracy (vertical) ±(1.8 + |2H|/100) μm (H: Measuring height mm)Resolution 0.1 μm/5 mm range, 0.4 μm/20 mm range, 1 μm/50 mm range


Contour tracing driverX-axis indication accuracy (horizontal) ±(1.0 + L/100) μm (L: Measuring length mm)Resolution 0.016 μm

Straightness accuracyRoughness system: (0.05 + L/1000) μm (L: Measuring length mm),

Contour system: 1 μm/100 mm , 2 μm/200 mm

Sensing methodZ-axis(vertical)

Roughness detectorDifferential inductance

Contour detectorX-axis (horizontal) Linear scale


Detector

RoughnessStylus, measuring force Replaceable, 0.75 mNStylus radius (stylus material) 2 μmR (60° conical diamond), one piece equipped as standard

ContourStylus, measuring force Replaceable, 30 mN or less with retract functionStylus radius (stylus material) 25 μmR (24° conical carbide), two pieces equipped as standardMeasuring direction, position Pull/push and Up/down directions, Max. following angle: 77°



Other




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Printer is optional

CONTOURECORD 1710DX3CONTOURECORD 1710SD3

High-Accuracy Contour Detector With Laser Optical Diffraction Scale●�Indication accuracy of detector: ±(1.8+|2H|/100) μm

Resolution: 0.1μm (full range) This detector allows high-accuracy contour measurements and evaluations of precision processing components.

High-Speed Measurement Dramatically Enhances Productivity●�Contour Measurement: 20 mm/s max.

Moving Speed: 60 mm/s max. Measurement Efficiency: 10 times better (compared to previous models)

Tracing Driver with Linear Motor●�The new linear motor enables the fastest measurement speed

in the world. Low vibration ensures stable measurements, as well as allowing accurate high-magnification measurements. The simple structure of the non-contact driver maintains long-term stability.



Linear series


High-Accuracy Contour DetectorLaser Optical Diffraction Scale EmployedSpace-Saving DX model Allows Efficient Use of a Measuring Room

Specifications


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AccuracyDetector

Z-axis indication accuracy (vertical) ±(1.8 + |2H|/100) μm (H: Measuring height mm)Resolution 0.1 μm/Full range

Tracing driver

X-axis Indication accuracy (horizontal) ±(1.0+L/100) μm (L: Measuring length (mm)), Measuring pitch: 0.1 μm min.Resolution 0.016 μm


Sensing methodZ-axis: Detector (vertical) Laser optical diffraction scaleX-axis: Tracing driver (horizontal) Linear scale


Detector

Stylus, measuring force Replaceable, 30 mN with retract functionStylus radius (stylus material) 25 μmR (24° conical carbide), one piece equipped as standard




Other





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Printer is optional

SURFCOM 1910DX3

SURFCOM 1910SD3

2-in-1 High-accuracy Measuring Instrument●�Indication accuracy of contour detector: ±(1.8+|2H|/100) μm

Resolution: 0.1μm (full range) Measuring magnification of roughness pickup: 500000 times max. This detector allows high-accuracy roughness and contour measurements and evaluation of precision processing components.

High-speed Measurement Dramatically Enhances Productivity●�Roughness Measurement: 3 mm/s max.

Contour Measurement: 20 mm/s max. Moving Speed: 60 mm/s max. Measurement Efficiency: 10 times better (compared to previous models)

Tracing Driver with Linear Motor●�The new linear motor enables the fastest measurement speed

in the world. Low vibration ensures stable measurements, as well as allowing accurate high-magnification measurements. The simple structure of the non-contact driver maintains long-term stability.Specifications


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Accuracy


Contour detectorZ-axis indication accuracy (vertical) ±(1.8 + |2H|/100) μm (H: Measuring height mm)Resolution 0.1 μm/Full range


Contour tracing driverX-axis indication accuracy (horizontal) ±(1.0+L/100) μm (L: Measuring length (mm)), Measuring pitch: 0.1 μm min.Resolution 0.016 μm

Straightness accuracyRoughness system: (0.05 + L/1000) μm (L: Measuring length mm),

Contour system: 1 μm/100 mm , 2 μm/200 mm

Sensing methodZ-axis(vertical)

Roughness detector Differential inductanceContour detector Laser optical diffraction scale



Detector

RoughnessStylus, measuring force Replaceable, 0.75 mNStylus radius (stylus material) 2 μmR (60° conical diamond), one piece equipped as standard

ContourStylus, measuring force Replaceable, 30 mN with retract functionStylus radius (stylus material) 25 μmR (24° conical carbide), one piece equipped as standardMeasuring direction, position Pull/push and Up/down directions, Max. following angle: 77°



Other






Linear series



Roughness and Contour Detectors Provided as StandardMeasurement, Evaluation, Analysis and Printout for Roughness and Contour in One Machine Improves Work EfficiencySpace-Saving DX model Allows Efficient Use of a Measuring Room

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Automated Solution for Production Floor Surface Texture Measurement Management

SURFCOM C5 allows customization of the workpiece

feed unit and jig production to suit particular needs.

Basic specifications are Type-C (mainly for cylinder

heads, cylinder blocks, and other workpieces where

a 5-direction approach is required) and Type-S (for

camshafts and other shaft workpieces that require a

rotary axis).

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SURFCOM C5, a Proposal for Engine Production Processes

Current status of roughness measurement in the engine production process

SURFCOM C5 solves all of these problems at once

Illustration explaining measurement operating sections of the X-axis tracing driver

●�Cylinder block●�Cam shaft●�Cylinder head

●�Connector rod, etc.●�Crankshaft

●�Measurement efficiency improved by multi-axis control.●�Integrated sensor rotating mechanism ensures

measurement in all orientations.●�X-axis tracing driver (200 mm) and Y-axis tracing driver

(30 mm) integrated into a single structure (Patent pending).

●�Low-vibration linear motor drive (X-axis).

① Not universal

② Difficult to record judgment results

③ Subject to human error

Portable texture measuring instruments and measurement of jigs are subject to a number of

problems

[Features of SURFCOM C5]

[Target workpiece]

X-axis drive

Y-axis drive

Sensor rotating mechanism

Type-C

Type-S


Surface Texture Measuring Instruments

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External View

SpecificationsModel

SURFCOM C5

Type-C Type-S

Measuring rangeDetector: Z-axis (vertical) 1000 μm

Tracing driver: X-axis (horizontal) 200 mm

Operation range

Column up/down: Z-axis 500 mm (resolution: 0.1 μm)

Tracing driver: X-axis 200 mm (resolution: 0.1 μm)

Column cross-feed: Y-axis 800 mm (resolution: 0.1 μm)

Pickup tracing driver: Y-axis 30 mm (resolution: 0.1 μm)

Pickup: Rotation angle 0°, 90°, 180°, 270° —

Tracing driver: Straightness accuracy (X-axis) 0.5 μm/200 mm, (Y-axis) 0.5 μm/30 mm

Sensing methodDetector: Z-axis (vertical direction): Differential inductance,

Tracing driver: X-axis (horizontal direction): Optical diffraction scale

Roughness processing function

StandardComplies with JIS2001, JIS1994, JIS1982, ISO1997, ISO1984, DIN1990, ASME1995,

CNOMO

ParameterRa, Rq, Ry, Rp, Rv, Rc, Rz, Rmax, Rt, Rz.J, R3z, Sm, S, R Δ a, R Δ q, R λ a, R λ q, TILT A, Ir, Pc, Rsk, Rku, Rk, Rpk, Rvk, Mr1, Mr2, VO, K, tp, Rmr, Rmr2, R σ c, AVH,

Hmax, Hmin, AREA, NCRX, R, Rx, AR, NR, CPM, SR, SAR

Evaluation curve

Section profile curve, roughness curve, filtered waviness curve, filtered center line waviness curve, rolling circle waviness curve, envelope waviness curve,

rolling circle center line waviness curve, DIN4776 special curve, roughness motif curve,waviness motif curve

Surface characteristics graph Bearing area curve, power spectrum curve, amplitude distribution graph

Tilt correctionLinear correction, round surface correction, first half correction, latter half correction,

both end correction, spline curve correction(linear, round surface and both end correction possible in arbitrary range)

Type of filterGaussian phase compensation filter, standard 2RC filter,

phase compensation 2RC filter

Cutoff value 0.008, 0.025, 0.08, 0.25, 0.8, 2.5, 8, 25, 50 mm (9 stages), selectable (from 0.001)

Data point 32000 max. (without λ s filter); 300000 max. (with λ s filter)

Magnification (vertical) 50, 100, 200, 500, 1 k, 2 k, 5 k, 10 k, 20 k, 50 k, 100 k, 200 k, 500 k

Magnification (horizontal) 0.1, 1, 2, 5, 10, 50, 100, 200, 500, 1 k, 2 k, 5 k, 10 k, 20 k

Speed

Column up/down speed (Z-axis) 100 mm/s max.

Tracing driver measuring speed (X-axis)

0.03 mm/s to 3 mm/s (during roughness measurement), 0.03 mm/s to 20 mm/s (during waviness measurement)

Tracing driver moving speed (X-axis) 100 mm/s max.

Column moving speed (Y-axis) 100 mm/s max.

Detector

Stylus Replaceable

Measuring force 0.75 mN (with standard pickup) 10 mN (with thin pickup)

Stylus radius 2 μmR (standard accessory) 5 μmR

Stylus material Diamond

Dimensions and weight

Power supply, frequency Single-phase AC 100 V to 230 V ±10% (grounding required), 50 Hz/60 Hz

Power consumption 1000 VA

Weight 2000 kg 1700 kg

SURFCOM C5 Type-C

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AI Function (Roughness) (Patented)●��The AI function automatically sets the measurement conditions

and executes measurement.

Automatic Operation Teaching/Playback Function (Roughness/Contour)●��This function automatically stores measurement and analysis

procedures in the memory, including tracing driver and column movements. This enables CNC measurements to be performed.

Dimension Line Display Function (Contour)●��This enables dimension lines to be drawn on the diagram along

with actual measured values for parameters and geometric deviation.

Built-in Shape Merge Function●��The profile synthesis function eliminates the analysis range

limitation created by the stylus angle (contour).

Dimension line display function (TiMS)

Roughness analysis function (TiMS)

Shape merge function

With normal measuring systems, limits are imposed on the measuring angle by the detector stylus angle. ACCRETECH has solved this problem by synthesizing the data for two profiles.

Advanced Functions and Superior Operational Ease

Printer is optional

SURFCOM 2800G

Surface Texture and Contour Analysis Integrated Measuring Instrument

Printer is optional

SURFCOM 1800G

Standard series


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ACCTee Measurement & Analysis Software●��ACCTee is surface texture and contour profile measurement and analysis software with enhanced operability. Provided with wizard

modes for easier operation, as well as a variety of support functions such as "AI function", "self-diagnosis function" and "peak and valley detection function", ACCTee makes all measurement tasks easier and more efficient.

Roughness analysis function (ACCTee) Peak and Valley function (ACCTee)

Print data sheet

ModelSURFCOM 2800G/1800G

-11 -12 -13 -14 -21 -22 -23 -24



Accuracy

S1800Gseries

RoughnessMeasuring range 800 μm range to 25 μm range (6.4 μm range)*4

Resolution 0.02 μm to 0.0004 μm　(0.0001 μm)*4

ContourZ-axis indication accuracy (vertical) ±0.25%　(full scale)Resolution 0.1 μm/5 mm range, 0.4 μm/20 mm range, 1 μm/50 mm range

S2800Gseries

RoughnessMeasuring range 800 μm range to 25 μm range (6.4 μm range)*4

Resolution 0.02 μm to 0.0004 μm　(0.0001 μm)*4

ContourZ-axis indication accuracy (vertical) ±(0.8 + |2H|/100) μm (H: Measuring height mm)Resolution 0.025 μm/Full range

Common itemX-axis indication accuracy (horizontal) ±(1 + 2L/100) μm (L: Measuring length mm)Resolution 0.04 μm

Tracing driver

Straightnessaccuracy

Roughness 0.05 + 1.5L/1000 μm (L: Measuring length mm)Contour 1 μm/100 mm 2 μm/200 mm

Sensing method Moire striped scale Linear scaleMeasuring speed 0.03, 0.06, 0.15, 0.3, 0.6, 1.5, 3, 6 mm/s (8 speeds)Colum up/down speed (Z-axis) — 10 mm/s (3mm/s)*1 — 10 mm/s (3 mm/s)*1

Detector

Sensing method

S1800Gseries

RoughnessContour Differential transducer

S2800Gseries

RoughnessContour Laser optical diffraction scale

Roughness measurement

Stylus, measuring force Replaceable, 0.75 mNStylus radius (material) Roughness: 2 μmR (60° conical diamond)　Waviness: 800 μmR (Ruby ball) Each stylus equipped as standard

Contourmeasurement

Stylus, measuring force, function Replaceable, 30 mN, with retraction functionStylus radius (material) 25 μmR (24° conical carbide)　Two pieces equipped as standardMeasuring direction, position Pull/push and Up/down directions, Max. following angle: 77°

Operation rangeTracing driver stroke 100 mm 200 mmColumn up/down stroke 250 mm 450 mm 250 mm 450 mm

Grinate tableDimensions 600 × 317 mm 1000 × 450 mm 600 × 317 mm 1000 × 450 mmPermissible loading weight*2 40 kg 34 kg 25 kg 40 kg 34 kg 28 kg 19 kg 34 kg

Other

Installation dimensions*3

Width 2000 mm 2300 mm 2000 mm 2300 mmDepth 1000 mm 1000 mmHeight 1700 mm 1900 mm 1700 mm 1900 mm

Weight 120 kg 125 kg 135 kg 240 kg 125 kg 135 kg 140 kg 245 kgPower supply, frequency, consumption Single-phase AC 100 V ±10% (grounding required), 50 Hz/60 Hz, 710 VA

*1: For joystick operation

*2: The value is in use of the desktop anti-vibration table (E-VS-S57B) for -11,-12,-13,-21,-22,-23 and of the large anti-vibration table (E-VS-R16B) for -14,-24.

*3: The dimensions of -11,-12,-13,-21,-22,-23 include the optional stand (E-VS-S13A), desktop anti-vibration table (E-VS-S57B) and computer rack (E-DK-S24A). The dimensions of -14,-24 include the optional large anti-vibration table (E-VS-R16B) and computer rack (E-DK-S24A).

*4: The value is in use of high magnification pickup.

Specifications

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Auto Element Recognition (AI Function)●��This function automatically determines the type of element

(point, line, circle).

Dimension Display Function●��The actual measured values for parameters and geometric

deviation can be displayed on the diagram.

Profile Synthesis Function●��The limitations on the analysis range due to the angle of the

stylus are addressed with the synthesis function.

Peak and Valley Function●��This function enables the maximum workpiece point to be

detected by tracing with the stylus, simplifying alignment.

Calculation Point Repeat Function●��Overall workpiece analysis can be executed after completing

only one pattern analysis for workpieces where certain shapes are repeated.

High Precision Contour Profile Evaluation●��The 2600G and 1600G are ideal for the evaluation of non-

spherical lenses, optical fiber connectors, ball screws and other parts where high profile accuracy is required.

Host of Contour Evaluation Functions●��A wide range of evaluation functions is provided. Standard

functions include a measured data (point data)/design value deviation collation function, design value generation function, best fit function and IGES/DXF conversion function to facilitate communication with CAD systems.

Dimension line display function (TiMS)

Contour profile nominal value collation (TiMS)

High-Accuracy Contour Measurement of 1 μm or Less in Z-Direction (for displacement of 5 mm)

Printer is optional

CONTOURECORD 2600G

Printer is optional

Enhanced Operability

CONTOURECORD 1600G

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Print data sheet

ModelCONTOURECORD 2600G/1600G

-11 -12 -13 -14 -21 -22 -23 -24



Accuracy

C1600G seriesZ-axis indication accuracy (vertical) ±0.25%　(full scale)Resolution 0.1 μm/5 mm range, 0.4 μm/20 mm range, 1 μm/50 mm range

C2600G seriesZ-axis indication accuracy (vertical) ±(0.8 + |2H|/100) μm (H: Measuring height mm)Resolution 0.025 μm/Full range

Common itemX-axis indication accuracy (horizontal) ±(1 + 2L/100) μm (L: Measuring length mm)Resolution 0.04 μm

Tracing driver

Straightness accuracy 1 μm/100 mm 2 μm/200 mmSensing method Moire striped scale Linear scaleMeasuring speed 0.03, 0.06, 0.15, 0.3, 0.6, 1.5, 3, 6 mm/s (8 speeds)Colum up/down speed (Z-axis) — 10 mm/s (3 mm/s)*1 — 10 mm/s (3 mm/s)*1

Detector

Sensing method

C1600G series Differential transducerC2600G series Laser optical diffraction scale

Stylus, measuring force, function Replaceable, 30 mN, with retraction function

Stylus radius (material) 25 μmR (conical carbide)　One piece equipped as standard



Grinate tableDimensions 600 × 317 mm 1000 × 450 mm 600 × 317 mm 1000 × 450 mmPermissible loading weight*2 41 kg 35 kg 26 kg 41 kg 35 kg 29 kg 20 kg 35 kg

Other




*1: For joystick operation

*2: The value is in use of the desktop anti-vibration table (E-VS-S57B) for -11,-12,-13,-21,-22,-23 and of the large anti-vibration table (E-VS-R16B) for -14,-24.

*3: The dimensions of -11,-12,-13,-21,-22,-23 include the optional stand (E-VS-S13A), desktop anti-vibration table (E-VS-S57B) and computer rack (E-DK-S24A). The dimensions of -14,-24 include the optional large anti-vibration table (E-VS-R16B) and computer rack (E-DK-S24A).

Specifications

ACCTee Measurement & Analysis Software●��ACCTee is contour profile measurement and analysis software with enhanced operability. Provided with wizard modes for easier

operation, as well as a variety of support functions such as "AI function", "self-diagnosis function" and "peak and valley detection function", ACCTee makes all measurement tasks easier and more efficient.

Peak and Valley function (ACCTee)Dimension line display function

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Superior Operability &

Automation from Measurements

to Inspection Report Creation




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Printer is optional

AI Function Simplifies Measurements (Patented)●�The unit automatically selects the measuring conditions

without setting them in advance (roughness measurement).

●�A lesson mode is available to teach the user the operation procedures. This is a reflection of ACCRETECH's commitment to create measuring instruments that anyone can use.

Automation Enhances Measurement Efficiency●��The teaching function can be used to automate a series

of operations, from measurement at multiple locations to generation of an inspection report by pasting the data.

Evaluation Functions Dramatically Strengthened●��Reflecting customer requests for more evaluation functions,

this unit includes standards for film thickness measurement (step/area), wear volume calculation (superimposed profile area) and LCD glass substrate (special waviness).

Complies with World Standards●�This model complies with the latest ISO, JIS, DIN, ASME,

CNOMO and other standards, and has cleared the requirements for the European safety standard CE marking.

●�It supports operation using Japanese, Chinese, Korean English, German, French, Italian and Spanish.

Freedom to Re-Analyze●��Re-analysis can be performed easily after changing the

measurement standard (linear, first half, latter half, round surface, both end), configuring the evaluation range, and removing defective data from a notch.

Movement

Measurement

SURFCOM 1400G

Standard series

Outstanding Expandability●��The unit can be easily and efficiently upgraded to meet

evolving needs. This includes upgrading from two-dimensional to three-dimensional roughness, or adding profile capability.

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Measuring screen

Analysis screen

Measurement●�Easy operation with icons and pull-down

menus.

●�Icons can be edited according to individual preferences.

●�Real-time display of data.

●�Unit can be controlled using manual mode, joystick or mouse.

Analysis●�Desired measuring standard and

evaluation range can be set.

●�Evaluation according to different standards can be performed by simply recalculating the data.

●�Superimposition Function

Differences before and after machining can be determined by superimposing data on the screen and calculating the different area figures for both sets of data. Up to 10 data items on the screen can be stored, and evaluation can be performed by superimposing the data sets.

Printing●��The measured results can be formatted

according to individual requirements and printed as an inspection report.

ModelSURFCOM 1400G

-11 -12 -13 -14 -21 -22 -23 -24

Measuring rangeZ-axis (vertical) 800 μmX-axis (horizontal) 100 mm 200 mm

Accuracy

Measuring range 800 μm range to 25 μm range (6.4 μm range)*4

Resolution 0.02 μm to 0.0004 μm (0.0001 μm)*4

X-axis indication accuracy (horizontal) ±(1 + 2L/100) μm (L: Measuring length mm)Resolution 0.1 μm

Tracing driver

Straightness accuracy 0.05 + 1.5L/1000 μm (L: Measuring length mm)Sensing method Moire striped scale Linear scaleMeasuring speed 0.03, 0.06, 0.15, 0.3, 0.6, 1.5, 3, 6 mm/s (8 speed)Colum up/down speed (Z-axis) — 10 mm/s (3 mm/s)*1 — 10 mm/s (3 mm/s)*1

DetectorSensing method Differential transducer

Roughnessmeasurement

Stylus, measuring force Replaceable, 0.75 mNStylus radius (material) Roughness: 2 μmR (60° conical diamond)　Waviness: 800 μmR (Ruby ball)　Each stylus equipped as standard


Grinate tableDimensions 600 × 317 mm 1000 × 450 mm 600 × 317mm 1000 × 450 mmPermissible loading weight*2 48 kg 42 kg 33 kg 48 kg 43 kg 37 kg 28 kg 43 kg

Other




Specifications

*1: For joystick operation.

*2: The value is in the use of the desktop anti-vibration table (E-VS-S57B) for -11,-12,-13,-21,-22,-23 and of the large anti-vibration table (E-VS-R16B) for -14,-24.

*3: The dimensions of -11,-12,-13,-21,-22,-23 include the optional stand (E-VS-S13A) and desktop anti-vibration table (E-VS-S57B) and computer rack (E-DK-S24A). The dimensions of -14,-24 include the optional large anti-vibration table (E-VS-R16B) and computer rack (E-DK-S24A).

*4: The value is in use of high magnification pickup.

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LCD Glass Substrate Waviness Measuring Instrument

PDP Profile Measuring Instrument

Column Cross Feed Device

SURFCOM 1400G-LCD●�A lineup of different measuring ranges (300 × 250) mm,

(500 × 500) mm, (650 × 650) mm) to meet a wide range of needs.

●�Allows measuring of waviness, roughness, bowing, step profiles and other characteristics.

●�Uses SURFCOM 1400G computer for data processing unit.

SURFCOM 1400G-PDP●�Dedicated instrument for optimal measurement of film

deposition thickness on color PDP front substrates and rib height on the back substrates.

●�Motor driven X-axis tracing driver itself (900 mm in the X-direction, 1300 mm in the Y-direction), measurements can be performed within this movement range.

●�Uses SURFCOM 1400G computer for data processing unit.

Cross Feed Device for Surface Texture & Contour Measuring Instrument●�Enables measurement of heavy items like cylinder blocks and

long items such as crankshafts.

●�Ideal for automotive and instrument tool parts.

●�Motor driven or manual type can be selected for the X-axis feed according to individual requirements.

●�Long-lasting granite used for the measuring stand.

X-axis drive distance300 mm type

X/Y-axis drive distance500 mm type650 mm type

X-axis drive distance300 mm type

X/Y-axis drive distance500 mm type650 mm type

Model SURFCOM 1400G-LCDVertical magnification display 50 to 500 k* (arbitrary or auto)Horizontal magnification display 1 to 20 k (arbitrary or auto)Measuring force 0.75 mNStraightness accuracy (0.05 + 1.5L/1000) μm (L: Measuring length mm)Parameters Roughness: 36 types, Waviness: 24 types

* When high magnification pickup is used

Specifications

Specifications

Model SURFCOM 1400G-PDP

X-Y travel rangeX=900 mm (motor drive),Y=1300 mm (motor drive)

X-Y travel speed 100 mm/s max.Measuring height 50 mm Z-axis stroke (manual)Tracing driver title angle ±5˚ (manual)Roughness measuring range 100 mm X-axis directionStraightness accuracy (0.05 + 1.5L/1000) μm (L: Measuring length mm)Vertical recording magnification 50 to 50 k times* (arbitrary or auto)Horizontal recording magnification 1 to 20 k times (arbitrary or auto)Measuring force 0.75 mNLoad 20 kg or lessPower supply, frequency AC100 V ±10% (grounding required), 50 Hz/60 HzDimensions (W x D x H) 2040 mm x 1420 mm x 1350 mm (Excluding CPU)Weight Approx. 1800 kg

Model Cross Feed Device for Surface Texture & Contour Measuring Instrument

Moving rangeX-direction stroke: 660 mmY-direction stroke: 200 mm

Z-direction stroke: 250 mm, 450 mm, 650 mm selectablePermissible loading weight 100 kg or less

Applicable modelsSURFCOM 480B, 1400G, 1800G, 2800G

CONTOURECORD 1600G, 2600G

* When high magnification pickup is used

Photo shows connection with SURFCOM 1400G.(motor-driven X-axis)* Anti-vibration table is optional.

SURFCOM 1400G-LCD

Measuring range: (650 × 650) mm type

SURFCOM 1400G-PDP

Cross Feed Device for Surface texture & Contour Measuring Instrument

Standard series

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Specifications

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Specification

Y-axis CNC table (100 mm)

E-AT-S105A

Travel 100 mm

Max. travel speed 50 mm/s

Positioning accuracy 20 μm

Max. load 30 kg

Weight Approx. 19 kg

Y-axis CNC table (200 mm)

E-AT-S106A

Travel 200 mm

Max. travel speed 50 mm/s

Positioning accuracy 20 μm

Max. load 30 kg

Weight Approx. 22 kg

θ -axis CNC table (Horizontal)

E-AT-S107A

Travel 360°

Max. travel speed 20°/sec

Positioning accuracy 0.03°

Max. load 15 kg

Weight Approx. 2.5 kg

θ -axis CNC table (Vertical)

E-AT-S108A

Travel 360°

Max. travel speed 20°/sec

Positioning accuracy 0.03°

Max. load 5 kg

Weight Approx. 3.2 kg

Applications

CNC Table1. The standard measuring system (S1500, C1700, C1710, C2700, S1900, S1910, S2900, S2000 S1400G, C1600G, S1800G, S2800G Series)

can be automated by adding a CNC table unit.

2. CNC table control, and simplified teaching and playback can be performed from the TIMS integrated measuring software.

3. The Y-axis table and rotary table can be rearranged as needed in order to configure the system to suit the workpiece.

Automatic Adjustment StandAllows auto leveling when used in combination with a SURFCOM Series instrument. Eliminates the need for surface tilt adjustment.

Non-Contact Pickup (E-DT-SL12B)In combination with a SURFCOM Series instrument, the pickup provides surface texture measuring of plastic, film, paper, and other soft objects.

Example of Y-axis CNC table (100 mm) and θ-axis CNC table (horizontal) combination

Specifications

1-axis auto leveling table

E-AT-S72A

Leveling range ±2°

Max. load 10 kg

Weight 3 kg

Specifications

2-axes auto leveling table

E-AT-S62A

Leveling range X-axis: 2° Y-axis: 2°

Max. load 10 kg

Weight 4 kg

Specifications

Measuring range (Z) 300 μm

Resolution (Z) 10 nm

Max. measuring angle 30°*

Spot diameter 2 μm

Workpiece distance 4.5 mm

Detection principle Color confocal system

Light source White light

Supported systems

S480B、S1400G、S1500DX3/SD3、

S1800G、S2800G、

S2000DX3/SD3、S1900DX3/SD3、

S2900DX3/SD3

Detectionprinciple

Light source

Monochrometer

Focus blue

Focus red

Object being measured

Fiber link

Collimator

Measuring range

Focus blue Focus red

Optical fiber

* Depends on workpiece reflectance, material, and color.

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New Measurement Style with New ConceptAll Measurements and Analyses Available in a Document

Integrated Analysis Software ACCTee


Software

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Our newly developed ACCTee software represents the next generation of integrated TiMS software. Based on a new concept in measurement that combines document-based measurement and analysis with leading-edge operability and an intuitive work environment, ACCTee makes all operations available in the document (measurement result sheet), and enables all data and information to be saved with related data . This is the "All in the Document", next generation integrated software, ACCTee.

Easy-to-Use Interface for Leading-Edge OperabilityACCTee is equipped with a Windows style user interface that is easy for anyone to understand and use. User-friendly and intuitive icons guide you through a series of operations from measurement to the printing of analysis results.

More Efficient Re-Analysis and Re-Measurement with Easy OperationAll data including layout, measurement condition, analysis condition, measurement data, and part program is available in the document window, enabling you to easily execute data editing, addition, re-analysis, and re-measurement. Since there's no need to switch between windows, operational efficiency is improved by 40% or more compared to conventional software. In addition to executing re-analysis, ACCTee allows you to quickly obtain measurement results when executing the same measurement and analysis as done previously by selecting the measurement data from the data pool and clicking the re-measurement data.

Document automatic generation at the first measurement

Re-measurement result(displays the detail of the same analysis)

Re-measurement Re-analysis

Re-analysis result(displays the detail of which condition is changed)

Condition change(horizontal magnification change)

Roughness curve result

Contour analysis result

Roughness analysis result

Measurement data pool

Measurement condition

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Software Data ProtectionData measured by ACCTee can be locked to prevent accidental deletion, copying, or moving.

CNC FunctionThis provides a highly efficient measurement work environment, as a series of tasks, from measurement to output of the test result, can be executed automatically. For the case and calculation errors in the measurement result, such operations as "Jump", "Pause", "Stop" and "Continue" can be chosen. Thanks to the system call command, you can display any type of image file during CNC operation, and can check the part setup and stylus configuration with photos so that you can avoid accidental errors in advance.

Macro FunctionOnce repetitive procedures (except axial movement) have been registered, this function lets you easily execute a series of operations at the touch of a button.

Document Comprehensive Judgment DisplayACCTee can provide judgment concerning the 16% rule and the design value for individual parameters. It can also display OK/NG in the graphic image for comprehensive judgment relating to the whole document. As a preset master page is registered, your logo and desired background will appear on all pages of the final inspection sheet output.

Error message display The problem location is indicated by a picture

Language select screenCNC command editing screen

Self-Diagnosis FunctionIn preparation for an emergency, the self-diagnosis function is always in operation. Whenever there is a problem, a message indicating the location and nature of the problem - such as a failure or error with the measurement instrument screen - is displayed, enabling the operator to take appropriate action in to resolve the problem as soon as possible.

Help SystemHelp is always available whenever ACCTee is on. ACCTee features an on-line manual system so that an appropriate help message can be displayed by clicking the soft help key. Help can also be obtained by browsing the index or searching with keywords.

Multi Language SupportACCTee can be used overseas and supports several languages including Japanese, Chinese, Korean, English, German, French, Italian, Spanish, Czech and Polish.

FavoriteFrequently used commands can be stored in "Favorite" and re-organized for easy use.

CNC part program

ACCTee, the standard software associated with the SURFCOM DX3 and SD3 series roughness measurement system, is based on a new concept in roughness measurement that combines document-based measurement and analysis with leading-edge operability and an intuitive work environment. Setting wizards simplify instrument setup and configuration, making it possible for anyone to easily perform a variety of measurement and analysis tasks, optimizing throughput and performance.

Versatile Measured Data Analysis (Patented)●��Once imported into ACCTee, measurement data can be

displayed on a preview screen where you can adjust various measurement conditions (tilt, cut-off filter, etc). This allows you to optimize measurement conditions and re-analyze as many times as necessary.

Simple Operation ●��A Wizard mode guides users through any measurement operation

with easy-to-follow step-by-step instructions. "Favorite box" collects frequently used commands to enhance operability.

Functions that Meet Your Needs ●��Functions such as level difference, area measurement (to

measure PC board thickness), and superimposition (to compare wear assessments) are included.

Fully Automatic Operation Enhances Operability ●��Measuring procedures including column up-and-down and

tracing driver movement are automatically registered by just clicking re-measurement icon.

Change Analysis Conditions with Preview Function●��With ACCTee, you can set and change the roughness parameter calculation standard, cutoff filter, notch level, deletion length and other

conditions. The range of the waveform data used for the roughness parameter calculation can be set to any value. The preview function also allows you to optimum form remove (tilt correction) can also be selected. The specified area and conditions can be cleared and changed quickly and easily.

Display of analysis result after roughness measurement

Analysis condition display Preview display of changed analysis condition

Roughness Measurement and Analysis System

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▶ Wizards make operation easySetting wizards are provided to guide you through instrument setup and configuration, making it easy to conduct different types of measurements, as well as calibration, checking styli and selecting parameters.

Measurement AI Wizard

Pickup Calibration Wizard

●��Parameters and analysis conditions appropriate for the roughness standard and evaluation purpose can be specified for ACCTee's measurement AI function. In addition, the optimum measurement condition can be specified by executing trial measurement. Analysis items for the measurement data selected on the document can be displayed by selecting the display items at the end.

Calibration Alarm and Historical Management●��ACCTee can accept any time as the time of calibration.

In addition to the probe replacement time, a calibration alert based on measurement frequencies or lapsed days is displayed, helping maintain accurate and stable measurement by ensuring periodical calibration.

Stylus Tip Check Wizard●��ACCTee can use a depth specimen or reference specimen

for the stylus tip check. The tip of the stylus is subject to increasing wear so a regular check is necessary to maintain accurate measurement. With the wizard's guidance, anyone can easily check the stylus tip.

Parameter Figure and Symbol Input Wizard●��The same symbols used in the design diagram can be input

into the design values of the analysis condition and parameter pass/fail judgment.

●��Sensitivity calibration is executed by selecting any of the following three options: depth specimen; magnification calibration unit; and reference specimen. Next, the calibration condition is specified (inputting reference value), the installation method for the calibration unit and the measurement start position are confirmed, then calibration is executed.

Example of pickup calibration wizard

Example of parameter figure and symbols wizardS

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Example of measurement AI wizard

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Roughness Peak and Valley Detection Function●��ACCTee detects the maximum

point (minimum point) and automatically shifts the stylus to the maximum point (minimum point ) as the peak and valley function traces the cylindrical profile, convex, concave, and spherical profile using the stylus. In manual operation, the position is reported by an alarm.

Roughness Curve Trace Display●��As the profile traced by the roughness stylus is displayed, the

measurement area can be set on the screen.

Level Difference Parameter●��Level differences can be measured on the concave and convex

profile. The measurement, average height, maximum height, minimum height, and area can be calculated from the data.

Wear-out Analysis for Roughness Curve Data●��The degree of wear can be calculated by overlapping and

displaying two roughness curves and calculating the differences between the data.

Automatic Pass/Fail Judgment under 16% Rule (JIS2001 Standard)●��In the ACCTee analysis process, the 16% rule and the max rule

are standardized for the tolerance criteria of the roughness evaluation parameters. With the 16% rule, if the measurement value for the multiple standard length that exceeds the tolerance is below 16%, it is assumed to pass. With the Max rule, all multiple standard length measurement values must not exceed the allowable tolerance.

Robust Spline Filter●��Various filters are available for roughness measurement and

analysis, including robust spline filter. The robust spline filter dissolves distortion caused by the phase-compensated type filter with distinguished peak and valley on roughness waviness.

3D Roughness Measurement and Analysis●��Functions support 3D roughness analysis. (Optional expanded

hardware required)It is possible to obtain up to 4000 scanning lines and 80 million data. 3D analysis can be conducted by SURFCOM Map (Option) with various visual displays.

Upper: Profile curve without cut-off filterLower: Roughness curve, Gaussian filter

Upper: Profile curve without cut-off filterLower: Roughness curve, Robust spline filter

▶ ACCTee supports roughness measurement and analysis with a host of versatile functions

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Specifications ACCTee roughness measurement and analysis program

Standard Complies with JIS2001, JIS1994, JIS1982, ISO1997, ISO1984, DIN1990, ASME2002/1995, CNOMO

Parameter Ra, Rq, Ry, Rp, Rv, Rc, Rz, Rmax, Rt, Rz.J, R3z, Sm, S, RΔa, RΔq, Rλa, Rλq, TILT A, Ir, Pc, Rsk, Rku, Rk, Rpk, Rvk, Mr1, Mr2, VO, K, tp, Rmr, Rmr2, R σ c, AVH, Hmax, Hmin, AREA, NCRX, R, Rx, AR, NR, CPM, SR, SAR, etc

Parameter judgment The judgment result can be displayed by standard, average value, the maximum value, minimum value, and 16% rule

Evaluation curveProfile curve, roughness curve, filtered waiveness curve, filtered center line waviness curve, rolling circle waiveness curve,

rolling circle center line waiveness curve, ISO13565-1(DIN4776) roughness curve, roughness motif curve, waiveness motif curve, envelope waviness curve

Surface characteristic display

Bearing area curve, power spectrum curve, amplitude distribution graph, ISO13565-2 Bearing area curve, peak height distribution graph/list, auto correlation graph, wear-out amount analysis (two arbitrary curves), overlapping analysis (ten curves or less)

Form remove (tilt correction)

Least square straight line correction, n-dimension polynomial (n=2 to 9) correction, both ends correction, least square circle correction, least square oval correction, spline correction,

robust (spline) correction (arbitrary or first or latter half of the setting range can be specified for all the options)

Filter type Gaussian phase compensation filter, phase uncompensation type 2RC filters, phase compensation 2RC filters, spline filter, robust (spline) filter

FilterCutoff wavelength ( λ c): 0.008, 0.025, 0.08, 0.25, 0.8, 2.5, 8, 25, 50 mm (9 levels), arbitrary (from 0.001 mm)

Cutoff ratio ( λ s): 1/30, 1/100, 1/300, 1/1000, arbitrary (from 1/10)Cutoff wavelength ( λ s): 0.08, 0.25, 0.8, 2.5, 8, 25, 80 μm (7 levels), arbitrary (from 0.05)

Stylus calibration Can be selected from depth specimen (JIS standard), magnification calibration unit, and reference specimen.Maximum 20 units of stylus calibration information can be registered (deadline for the calibration time can be specified)

Number of data points 300000 max.

Vertical magnification display Arbitrary value (unit: 0.01), automatic and 50, 100, 200, 500, 1 k, 2 k, 5 k, 10 k, 20 k, 50 k, 100 k, 200 k, 500 k, 1000 k, 2000 k, 5000 k, 10000 k times

Horizontal magnification display Arbitrary value (unit: 0.01), automatic and 1, 2, 5, 10, 50, 100, 200, 500, 1 k, 2 k, 5 k, 10 k, 20 k, 50 k, 100 k, 200 k, 500 k, 1000 k times

ACCTee, the standard software used with Contourecord DX3 and SD3 series contour measurement system, is based on a new concept in contour profile measurement that combines document-based measurement and analysis with leading-edge operability and an intuitive work environment. Setting wizards simplify instrument setup and configuration, making it possible for anyone to easily perform a variety of measurement and analysis tasks, optimizing throughput and performance.

Flexible Analysis of Measurement Data (Patent Pending)●��Once imported into ACCTee, measurement data can be

displayed on a preview screen where you can adjust various measurement conditions and re-analyze as many times as necessary. This allows you to display a hypothetical result and to optimize measurement conditions.

Simple Operation ●��A Wizard mode guides users through any measurement

operation with easy-to-follow step-by-step instructions. "Favorite box" stores frequently used commands to enhance operability.

Functions to Meet Customer's Needs ●��A comprehensive suite of basic, easy-to-use functions

essential to profile analysis enable you quickly and efficiently measure various workpieces with high precision.

Fully Automatic Operation Enhances Operability●��Measuring procedures including column up-and-down and tracing driver movement are automatically registered just by

clicking the re-measurement icon.

Calculation Result Preview Function (Patent Pending)

Display of contour analysis result

Preview display of calculation result

Calculation area setting

Example of narrow calculation area Example of wide-changed calculation area

Example of calculation result output

Result can be displayed before output.As the calculation area changes, you can preview the result in real time.

Contour Profile Measurement and Analysis System

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Circle Correction Calculation●��Since the probe moves in a circular motion vertically around

the support on the contour measuring instrument's probe arm, error will be produced in the X-axis data because the probe tip position also moves in the X-axis direction. These error elements must be corrected in order to achieve high measuring accuracy. The ACCRETECH contour measuring system performs calibration using a master ball calibration unit which enables simple circle error as well as tip R error calibration.

Tip R-Correction ●��Although the contour measuring instrument's probe tip is R-shaped, tip R-correction is indispensable for high measuring accuracy.

Measurements are taken from the center of probe tip R and correction is performed by offsetting in the normal direction at 11 dividing points on the tip (Figure a). Though there is no problem with fixed quantity correction when probe tip R is near maximal generalized roundness zero, large errors can occur in the correction amount due to tip R processing tolerance error or wear after long term use (Figure b).

Figure bFigure a

Master ball correction screen

Elements calculation: Circle-circle calculation candidate screen

Tip R-correction

Master ball calibration unit and 40 mm probe gage

In order to make it possible to quickly detect errors, ACCRETECH calculates tip R for every 10°and generates correction values. More than just simple R-correction, the system features an original algorithm that monitors the status of the probe tip. The operator is alerted by an error indicator whenever the correction value is outside preset limits.

Stylus Calibration Wizard●��Stylus calibration is performed by the masterball calibration unit.

During masterball measurement and level difference measurement, tip R correction and arc error correction can be executed automatically or manually. The wizard takes you through all necessary steps in the following order: calibration condition (inputting reference value) setting, placement of the calibration unit, confirmation of measurement start point, and execution of calibration.

Calibration Alert●��Calibration can be specified at any time.. In addition to the stylus

replacement time, a calibration alert based on measurement frequencies or elapsed time is displayed periodically, ensuring accurate, stable measurement on a continuous basis.

AI Function (Automatic Element Judgment)(Patented)●��The points, straight lines, and

circles of the basic elements are automatically extracted by turning on the AI function and by selecting the specified area of the measurement data. This eliminates the specification of the menu and icon in each case, which significantly reduces time required to perform the procedure.

Elements Calculation with Icon Guidance●��When making a new calculation

from any of the multiple elements already created, all possible choices are displayed. Multiple inter element calculations can also be selected to suit your requirements.

* The master ball correction unit and its function are included as standard with contour measuring instruments.

▶ Masterball calibration function (patented)

▶ Simple operation supports state-of-the-art technology

Workpieceheight

X-direction deviation Probe arm support

Probe



Probe R-correction only in normal direction Post-correction data

Profile when new

Profile after wear

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Pitch calculation Input range Pitch calculation Calculation result

Work trace measurement area setting Real-time display Manual mode detection start Manual mode maximum point detection

Work Trace Function●��As this function displays a manually traced profile, it is ideal for

determining the measurement limit point when measuring to the edges of a wall or valley with reference to the trace start or end points. It is also useful in situations where a visual check is difficult, such as the inside of a hole. As the start point and the end point can be specified in the profile traced on the screen, the measurement will never fail. The screen changes to show the real-time status of the profile being measured when measurement starts.

Peak and Valley Function●��There are two modes in this function: Auto mode, in which the

minimum point is automatically detected; and Manual mode, in which you turn the knob of the adjustment platform or the tracing driver and changes in color and sound alert you when the level mark on the screen.

Pitch Calculation Function●��For the same multiple profiles composed of circles and straight

lines, the pitch between line intersections or the pitch between circle centers can be automatically output just by specifying the arc with the mouse. Analysis efficiency can be improved by using the dimension line auto output function at the same time.

Profile Synthesis Function●��Even when multiple measurements are required due to stylus

angle limitation, analysis can be facilitated by combining the data using the profile synthesis function.

Edge Detection Measurement (Patent Pending)●��You can set the instrument to detect edges during

measurement and automatically complete measurement. This is useful when you want to measure the far end of the edge.

Non-Spherical Surface Nominal Value Generation Function and Best Fit Function (Option)●��ACCTee generates non-spherical surface nominal values using a

non-spherical surface calculation formula. After inputting the conic constant, circle radius, number of expression terms, non-spherical surface coefficient value, and other parameters as calculation expression variables, the software generates nominal value point data for a non-spherical surface profile. The Best fit function calculates points that are symmetrical to the curve, providing measured data for a non-spherical surface and shifting the origin so these points are the vertices. The origin shift can be configured so X and Z rotation are performed independently, or in combination.

Calculation Point Manual Input ●��When analyzing the same profile repeatedly, it is possible to

switch from manual operation to targeted analysis during CNC execution by setting the condition for recalculation, enabling detailed analysis.

Import External Data ●��CAD IGES/DXF data and Calypso Curve measurement data※

are read and evaluated with contour analysis.

Ball Screw Calculation Function (Option)●��Two calculation methods are supported: approximation for a

round ball screw groove part, and a method that calculates the groove profile as-is. A lead angle projection function makes it possible to analyze and project data measured in the edge direction in groove and line directions.

Specifications ACCTee Contour Profile Measurement and Analysis Program

AI function Automatic distinction of elements including points, straight lines, circles and ovals Automatic distinction of the combination executable of calculation between two elements (point-point, point-straight line, point-circle, point-oval, straight line-straight line, circle-straight line, circle-circle, straight line-oval, circle-oval, oval-oval)

Arithmetic processing

Point (cross point, mid-point, contact point, peak, valley), line (perpendicular, median, contact line, parallel line, bisector, virtual line), circle (partial circle, oval, contact circle, virtual circle), pitch (pitch between line cross, pitch between circle centers), distance, curve length, angle, inter angle (cmplm. angle, suppl. angle), Coord. Diff (X coord. difference, Z coord. difference, dliff. angle, radius difference), polar coord difference, level difference (average level,

max. level, min. level), area, calculation (addition, subtraction, multiplication, division, power operation, surplus, absolute value, square root), statistics (average, max., min., std. dev., total sum), over-pin calculation, dimension line display function, calculation result design value collation,

mirror inverse, smoothing, form combining (whole composition, partial composition), calculation point repeat function, work trace function, peak/valley function, CNC function, nominal collation, best fit (parallel move, rotary move), nominal value preparation function

Data file input and output Input of point sequence, text, CSV, IGES, DXF data and Calypso dataCoordinate control Origin setting, each axis setting, parallel move, and rotary moveCalculation support function Infinite cursor, cursor form vertical/horizontal switch, one point micro motion, setting or error band

Stylus calibration Automatic and manual calibration by master ball calibration unit. Maximum 20 units of stylus calibration information can be registered (deadline for the calibration time can be specified)

Measure pitch 0.01 μm to 1000 μmNumber of data points Maximum 300000 pointsVertical magnification display Arbitrary value (unit:0.01), automatic and 0.01 to 10000000 timesHorizontal magnification display Arbitrary value (unit:0.01), automatic and 0.01 to 10000000 times

Ball Circle Calculation Ball Screw Probe Calculation

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※ Nominal value data output by Calypso optional Form data ASCII input/output program.

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Advanced 3D Roughness Analysis Software

Versatile 3D Analysis, Simple Operation ●��SURFCOM Map imports 3D roughness data measured with SURFCOM Series TiMS software for more than 20 different types of offline

analysis. A rich collection of analysis functions combines with simple operation to make SURFCOM Map the most advanced offline 3D roughness analysis software available.

Rich Collection of Analysis Functions● More than 20 types of analysis, including color display, photograph display, contour line display, 3D display, load curve graph, and more.

Color display

Contour screen

3D display (surface) 3D display (line)

Photograph displayBearing area curve

● Volume calculation, section profile display, distance/angle calculation, level difference calculation

Island volume

Number of islands 3Island average volume 7.4 m3

Island average height 276 mIsland average area 33.7 mmℓAverage height/surface area ratio 8.18 μm/mmℓ

Section profile display

Region (%) 0.832 742 25Space volume (%) 0.168 35 90.2Material volume (%) 90.8 65 9.73Space volume (μm,mm2/mm2) 0.36 150 194

Hole and projection volume

Holes ProjectionsSurface (mm2) 0.000298 1.77Volume (mm2) 0.00e-000 0.162Max. depth/height (μm) 0.00e-000 0.251Average depth/height (μm) 0.00e-000 0.0913

Distance and angle calculation

Cursor 1 Cursor 2X=1.75 mm X=9.38 mmY=7.05 mm Y=3.8 mmZ=670 mm Z=737 mm

Horizontal distance 8.29 mmVertical height 66.8 μmDiagonal distance 8.29 mm

◀− 201 μｍ

◀ 643 μｍ

◀ 245 μｍ

Calculates the volume of islands that exceed a specified level.

Color classification of surfaces higher and lower than a specified level.

Calculates the volume of specified holes and projections.

Calculates the distance between two specified points and the angle formed by two straight lines.

3D display (line: color)Magnification change


Software

46

● Freely selectable display color, viewpoint, magnification scale, light direction, etc.

Wide Range of Visual Representations of Surface Properties

Rotation Background change Pallet change 3D display (line)

● A color palette makes it easy to change the appearance of the display. A custom palette also can be created.

Workpiece movement type

Detector movement type (patent pending)

Workpiece movement type with proven accuracy

A compact Y-axis tracing driver (Y-driver) is located under the X-axis tracing driver, eliminating the need for moving the workpiece. This makes it possible to perform 3D roughness analysis on large, heavy workpieces.

Applicable modelsSURFCOM2000 SURFCOM2900SURFCOM1900 SURFCOM1500SURFCOM2800 SURFCOM1800SURFCOM1400 SURFCOM5000

Applicable modelsSURFCOM2000 SURFCOM1500SURFCOM2900 SURFCOM1900

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Intuitive operation lets you modify conditions simply by using the mouse to click the object on the inspection report.

Condition settings can be configured, while monitoring the effect on the analysis condition modification screen. This makes it easy to set optimal conditions.

Analytical procedures performed by the operator are recorded automatically, which means that the same procedure can be applied easily to another profile.

Help can be displayed by selecting an object on the inspection report and pressing the [F1] key.

Outstanding Ease of Operation Enhances Analysis Efficiency● Object orientation software that enables condition modification on the inspection report.

● Effects can be viewed on the analysis condition modification screen.

● Automatic recording of analysis procedures

● Help function

Three Types of Software●��A color palette makes it easy to change the

appearance of the display. A custom palette also can be created.

Main Function ComparisonAnalysis functions Premium Expert StandardColor display ○ ○ ○Photograph display ○ ○ ×Contour line screen ○ ○ ○3D display (line) ○ ○ ○3D display (continuous surface)

○ ○ ×

Load curve ○ ○ ○Peak distribution ○ ○ ○Island volume ○ ○ ×Section profile display ○ ○ ×Hole and projection volume

○ ○ ×

Distance, angle ○ ○ ×2D surface analysis ○ × ×

Specifications Y-axis fixed pitch tracing driver

Drive system

Detector movement Workpiece movement

Model E-DH-S173A

E-YM-SO6A

E-YM-S12A

E-YM-SO7A

E-YM-S08A

Drive range 13 mm 50 mm 100 mm 150 mm 200 mm

Min. feed pitch 0.001 mm

Number of feed line 2 to 4001 lines

Straightnessaccuracy 1 μm 0.05 + 3L/1000 μm

Table surfacedimensions

— 80 × 120 mm

100 × 120 mm

120 × 150 mm

150 × 150 mm

Max. loadingweight

— 5 kg 10 kg 5 kg 10 kg

AI Functions Allow Measuring Even by Novices (Patented)●�A preliminary measuring mode selects measuring conditions

automatically and a lesson mode provides the operator with guidance on operating procedures, making it easy for just about anyone to perform operations. A customize function can be used to configure the screen with only the icons that are needed, greatly enhancing ease of use.

●�Functions that Meet the Needs of the UserStandard functions included with the system include step and surface measuring that facilitates evaluation of printed circuit board film thickness, an overlap function that makes it possible to compare wear evaluations, and more.

●�Versatile Measured Data Analysis (Patented)Once data is captured, the measuring reference (line, first half, latter half, round surface, both ends, spline)can be changed for reanalysis. The standard can also be changed for reanalysis as many times as desired.

●�Fully Automated Measuring Maximizes EfficiencyTeaching functions include column down, tracing driver, and a tilt device operation which fully automates everything from measuring to inspection report generation.

Roughness Peak & Valley Function (Option)●��As the probe traces the surface of the workpiece, the computer detects the highest

point and lowest point, and notifies the operator of their positions. Y-direction detection is supported through the use of a CNC table.

Measuring screen Analysis screen

Lesson mode

Superimposition

Setup screen

Maximum point of the specified sampling range is detected and moved

Column moves from maximum point to measuring range maximum value and the distance is measured

Specifications TiMS Roughness Measurement and Analysis ProgramStandard Complies with JIS2001, JIS1994, JIS1982, ISO1997, ISO1984, DIN1990, ASME1995, CNOMO

Parameter Ra, Rq, Ry, Rp, Rv, Rc, Rz, Rmax, Rt, Rz.J, R3z, Sm, S, R Δ a, R Δ q, R λ a, R λ q, TILT A, Ir, Pc, Rsk, Rku, Rk, Rpk, Rvk, Mr1, Mr2, VO, K, tp, Rmr, Rmr2, R σ c, AVH, Hmax, Hmin, AREA, NCRX, R, Rx, AR, NR, CPM, SR, SAR (Parameter judgment: The judgment result can be displayed by average value, the maximum value, minimum value, and 16% rule)

Evaluation curve Profile curve, roughness curve, filtered waiveness curve, filtered center line waviness curve, rolling circle waiveness curve, rolling circle center line waiveness curve, DIN4776 special curve, roughness motif curve, waiveness motif curve, envelope waviness curve

Surface characteristic graph Bearing area curve, power spectrum curve, amplitude distribution graph

Tilt correction Linear correction, round surface correction, first half linear correction, latter half linear correction, both end linear, spline curve correction (linear correction and round surface correction can be possible in arbitrary range)

Filter type Gaussian phase compensation filter, standard 2RC filter, phase compensation 2RC filters, spline filter, robust (spline) filter

Filter Cutoff wavelength ( λ c): 0.008, 0.025, 0.08, 0.25, 0.8, 2.5, 8, 25, 50 mm (9 levels), arbitrary (from 0.001 mm to 50 mm) Cutoff ratio ( λ s): 1/30, 1/100, 1/300, 1/1000Cutoff wavelength ( λ s): 0.08, 0.25, 0.8, 2.5, 8, 25, 80 μm

Number of data points 32000 max. (without λ s filter), 300000 max. (with λ s filter)Magnification display Vertical: 50 to 2000 k times (arbitrary from 1 time), Horizontal: 1 to 20 k times (arbitrary from 0.1 time)

TiMSTiMS is short for "TOKYO SEIMITSU Integrated Measuring System." It is an advanced system that provides unrestricted access to data produced by Tokyo Seimitsu measuring machines.TiMS is currently being used by a large number of satisfied customers all around the world.

Easy to operateAn AI function, customize function, auto measuring range expansion function, and much more help achieve our goal of building measuring systems that can be used by anyone (Patented).

MeasuringRange


SoftwareTiMS Evolution

16% Rule Automatic Pass/Fail Judgment (Complies with JIS2001)●��The 16% rule and max rule are the permissible error

standards for roughness evaluation parameters.These rules can be configured in the roughness analysis window. According to the 16% rule, not more than 16% of the measured values for multiple reference lengths can be greater than the tolerance value.According to the max rule, the measured value should not exceed the specified tolerance value.

48

TiMS Integrated Measuring System Software

Surface Roughness Measurement and Analysis Program

Continually Improving Analysis Versatility and Expanding Analysis Scope

Each program can be easily linked to an iconAppropriate windows are provided for each piece of hardware, and hardware can be selected simply by clicking the applicable icon.The system is designed and engineered to maximize performance and efficiency.

High efficiency measuringA collection of powerful tools support high efficiency measuring, including teaching/playback for full automatic measuring, multitasking for parallel processing and high-speed alignment, and much more.

The screen layout can be customized to create a streamlined working environment that balances function and ease of operation for a variety of different workpiece conditions and operator skills.The screen has optimized for the wider screens that will be used in the future. For contour measuring in particular, functions that support measuring itself are arranged to facilitate easy operation.

Measuring screen Analysis screen●�Workpiece Trace

A pre-measuring coordinate trace can be performed to check the measuring surface in cases when there is a partition between the start point and the end point, when ascertaining the measuring limit points while measuring right up to a depression, or when visual inspection is difficult (as with the inside of a hole). To eliminate measuring error, the measuring range can be defined on-screen by specifying the start point and end point.

Automatic Dimension Line Output Function●��Pre-selecting the dimension lines of

the required elements will display the dimension lines along with the calculation.After calculation, dimension lines can be added, moved or deleted as required.

Cursor Profile Discrimination (Patent pending)●��The operator can superimpose a freely

created cursor range on contour data for calculation. This means that a calculation which used to require two clicks can now be done with a single drag operation.

Calculation Result Preview (Patent Pending)●��When auto calculation is turned off, calculation results and

dimension lines appear in the preview screen as soon as the cursor is superimposed, so that calculation results can be previewed before they are finalized.When calculation range expansion is enabled, preview can be used to check the condition of the calculation range expansion, which helps to prevent calculation and operation errors.

Allowable Element Calculation Icon Guidance●��This function provides a visual display of elements

that can be calculated when performing a new calculation using any one of multiple elements for which calculations have already been completed.Even when selecting between complex elements, this function enables intuitive selection in accordance with the objective of the calculation.

Specifications TiMS Contour Measurement and Analysis Program

AI functionAutomatic distinction of elements including points, straight lines and circles Automatic distinction of the combination executable of calculation between two elements (point-point, point-straight line, point-circle, point-oval, straight line-straight line, circle-straight

line, circle-circle, straight line-oval, circle-oval, oval-oval)

Arithmetic processing

Point, line, circle, partial circle, ellipse, max. point/min. point, distance, coordinate difference, polar coordinate difference, orthogonal/polarcoordinate difference display, intersecting elements (point-line, line-line, circle-line, circle-circle, line-ellipse),

symmetric elements (point-point, point-circle, point-ellipse, line-line, circle-circle, circle-ellipse, ellipse-ellipse), surface calculation,over-pin calculation, dimension line display function, calculation result/nominal value collation, mirror reversal, profile synthesis function,macro function, automatic element discrimination, calculation point repeat function, workpiece trace function, peak and valley function,

auto operation log/playback function [profile nominal value collation, best fit, design value generation, IGES/DXF conversion]Coordinate control Origin setting, X-axis setting, parallel move, and rotary moveMeasure pitch 0.1 μm to 1000 μmNumber of data points Maximum 150000 pointsMagnification display 0.01 to 10000000 times (arbitrary and automatic)

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TiMS Integrated Measuring System Software

Contour Profile Measurement and Analysis Program

Operator-Oriented Operation for the WorkplaceNew Surface Texture Measuring Instrument for Easy Operation

TFT Color LCD Touch Panel●��The widescreen color LCD touch panel's sharp, clear display

helps make operation easier. Simply touch the desired icon to execute an operation. Touch panel input is possible using either your finger or the provided touch-pen, facilitating on-site measurements.

Supports International Standards●��The 480B supports analysis parameters for JIS (2001/1994/1982),

ISO, DIN, ASME and CNOMO standards, and can be switched between Japanese, Chinese, English, German, Italian, French and Spanish. In addition, any power source between AC100 V and 240 V can be used, and the unit satisfies the European Directives for the CE Marking.



Customize IconsThe customize function can be used to create a special menu where only the icons that are used most frequently are displayed, substantially enhancing operational efficiency.

AI Function (Patented)The AI (artificial intelligence) function automatically selects the ideal cut-off value, measuring range and other conditions simply by entering the parameters and allowable values denoted on the machining drawing. This automates measurement.

Guidance FunctionThis function guides the user through the measuring procedures, enabling beginners to make measurements.

Memo FunctionA short note or diagram can be entered with the touch pen and printed using the memo function.

Host of Analysis Functions The unit incorporates 34 types of roughness parameters (Ra, Rz, Ry, Sm, S, tp, etc.) and 32 types of waviness parameters. Level difference of electrical parts, film thickness, surface area and other items can be analyzed with maximum precision.

Tilt Correction FunctionSix types of automatic tilt correction are provided: Linear, first half, latter half, both end, round surface and spline curve (patented).

Evaluation Range Setting (Patented)The waveform on the screen is enclosed by two cursors, allowing the desired evaluation range to be set and the parameters to be calculated.

PC Card SlotMeasuring conditions, measured result management or measured data can be output in binary and text format. This data can be easily read from the PC card slot on a personal computer. Storage of data on CF cards and other types of memory cards is possible to use.

50

SURFCOM 480B

Sample DisplayThe customize function on the menu allows icons to be edited and arranged as desired.

Data Sheet

Main Menu Sample Customized Screen

Analysis Results

Load curveRoughness measurement result

Amplitude distribution curve Power graph

Model SURFCOM 480B

Measuring range

X-axis (horizontal) 100 mmZ-axis (vertical) 800 μm (Measuring range/resolution: 800 μm/0.012 μm, 80 μm/0.001 μm, 8 μm/0.0001 μm)

Straightness accuracy (0.05 + 1.5L/1000) μm (L: Measuring length mm)

Analysis items

Standard Complies with JIS2001, JIS1994, JIS1982, ISO1997, ISO1984, DIN1990, ASME1995, CNOMO

Parameter Ra, Rq, Ry, Rp, Rv, Rc, Rz, Rmax, Rt, Rz.J, R3z, Sm, S, RΔa, RΔq, Rλa, Rλq, TILT A, Ir, Pc, Rsk, Rku, Rk, Rpk, Rvk, Mr1, Mr2, VO, K, tp, Rmr, tp2, Rmr2, Rσc, AVH, Hmax, Hmin, AREA, NCRX, R, Rx, AR, NR, CPM, SR, SAR

Evaluation curve Section profile curve, roughness curve, filtered waviness curve, filtered center line waviness curve, rolling circle waviness curve, rolling circle center line waviness curve, DIN4776 special curve, roughness motif curve, waviness motif curve, envelope waviness curve

Surface characteristics graph Bearing area curve, amplitude distribution curve, power spectrum curve

Tilt correction Linear correction, round surface correction, first half correction, latter half correction, both end correction, spline curve correction (linear, round surface and both end correction possible in arbitrary range)

MagnificationVertical (Z-axis) 50, 100, 200, 500, 1 k, 2 k, 5 k, 10 k, 20 k, 50 k, 100 k, 200 k*, 500 k*, autoHorizontal (X-axis) 1, 2, 5, 10, 20, 50, 100, 200, 500, 1 k, 2 k, 5 k, auto

Type of filter Standard filter (2RC), phase compensation filter (2RC), phase compensation filter (Gaussian)Measuring speed 0.03, 0.06, 0.15, 0.30, 0.60, 1.5, 3, 6 mm/s (8 speeds)Detector Tip radius: 2 μm, Material: Diamond, Measuring force: 0.75 mN

Special functions

AI function AI function provide for easy procedures, enabling beginners to conduct measurements.Level difference analysis function Ideal for film thickness and surface area measurement of semiconductor parts.PC card Data output as text file for transfer to a personal computer.

Standard accessories Reference specimen (E-MC-S24B), recording paper (E-CH-S21A), touch pen (E-MA-S54A), operation manual

Dimensions andweight

Power supply, frequency, consumption AC 100 V to 240 V ±10% (grounding required), 50 Hz/60 Hz, 90 VA

Installation dimensions (W x D x H) 1000 mm × 800 mm × 750 mmWeight 98 kg (for SURFCOM 480B-12)

* When high magnification pickup is used.

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Specifications

Operator-Oriented Operation for the WorkplaceCompact Surface Texture Measuring Instrument for Easy Operation

Supported languages; Japanese, English, German,

French, Italian, Spanish and Chinese

LCD Panel Simplifies Operation●��A Color LCD touch panel with a wide field of view is available.

Highly Portable Compact Unit●��The unit is small enough for use at virtually any location.

Complied with International Standard Analysis Parameters●��Desired standards such as JIS, ISO, DIN, ASME or CNOMO

can be selected.

Satisfies European Directives for CE Marking

TFT color LCD

Straightness accuracy is 0.3 μm/50 mm,

highest in its class!!

Simplified 16% rule automatic discrimination



Customize IconsThe customize function can be used to create a special menu where only the icons that are used most frequently are displayed, substantially enhancing operational efficiency.

AI Function (Patented)The AI (artificial intelligence) function automatically selects the ideal cut-off value, measuring range and other conditions simply by entering the parameters and allowable values denoted on the machining drawing. This automates measurement.

Guidance FunctionThis function guides the user through the measuring procedures, enabling beginners to make measurements.

Memo Function A short note or diagram can be entered with the touch pen and printed using the memo function.

Host of Analysis FunctionsThe unit incorporates 34 types of roughness parameters (Ra, Rz, Ry, Sm, S, tp, etc.) and 32 types of waviness parameters. Level difference of electrical parts, film thickness, surface area and other items can be analyzed with maximum precision.

Tilt Correction Function Six types of automatic tilt correction are provided: Linear, first half, latter half, both end, round surface and spline curve (patented).

Evaluation Range Setting (Patented)The waveform on the screen is enclosed by two cursors, allowing the desired evaluation range to be set and the parameters to be calculated.

PC Card Slot Measuring conditions, measured result management or measured data can be output in binary and text format. This data can be easily read from the PC card slot on a personal computer. Storage of data on CF cards and other types of memory cards is possible to use.

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Convenient Mode Select Function for System Manager/Operator

All functions are displayed for the system manager.

Flexible Data Analysis

Only required functions are displayed for the operator.

Customized screenAll-function screen

・RS-232C (E-SC-S288A)・RS-USB adapter

Analysis with ACCRETECH’sintegratedmeasuringsystem

TiMS &ACCTee Display in

EXCEL

Desktop PC

Data Sheet5.08

PC card(E-MU-S50C)

Notebook PC

Model SURFCOM 130A

Measuring range

X-axis (horizontal) 50 mm

Z-axis (vertical) 800 μm (Measuring range/resolution: 800 μm/0.012 μm, 80 μm/0.001 μm, 8 μm/0.0001 μm)

Straightness accuracy 0.3 μm/50 mm

Analysis items

Standards Complies with JIS2001, JIS1994, JIS1982, ISO1997, ISO1984, DIN1990, ASME1995, CNOMO

Parameters Ra, Rq, Ry, Rp, Rv, Rc, Rz, Rmax, Rt, Rz.J, R3z, Sm, S, RΔa, RΔq, Rλa, Rλq, TILT A, Ir, Pc, Rsk, Rku, Rk, Rpk, Rvk, Mr1, Mr2, VO, K, tp, Rmr, tp2, Rmr2, Rσc, AVH, Hmax, Hmin, AREA, NCRX, R, Rx, AR, NR, CPM, SR, SAR

Evaluation curvesSection profile curve, roughness curve, filtered waviness curve, filtered center line waviness curve,

rolling circle waviness curve, rolling circle center line waviness curve, DIN4776 special curve, roughness motif curve, waviness motif curve, envelope waviness curve

Surface characteristics graphs Bearing area curve, amplitude distribution curve, power spectrum curve

Tilt correction Linear correction, round surface correction, first half correction, latter half correction, both end correction, spline curve correction (linear, round surface and both end correction possible in arbitrary range)

MagnificationVertical (Z-axis) 50, 100, 200, 500, 1 k, 2 k, 5 k, 10 k, 20 k, 50 k, 100 k, auto

Horizontal (X-axis) 1, 2, 5, 10, 20, 50, 100, 200, 500, 1 k, 2 k, 5 k, auto

Type of filter Standard filter (2RC), phase compensation filter (2RC), phase compensation filter (Gaussian)

Measuring speed 0.3, 0.6, 1.5, 3 mm/s (4 speeds)

Detector Tip radius: 2 μm, Material: Diamond, Measuring force: 0.75 mN

Special functions

AI function AI function provide for easy procedures, enabling beginners to conduct measurements.

Level difference analysis function Ideal for film thickness and surface area measurement of semiconductor parts.

PC card Data output as text file for transfer to a personal computer.

Standard accessories Reference specimen (E-MC-S24B), recording paper (E-CH-S21A), touch pen (E-MA-S54A), operation manual

Dimensions andweight

Power supply, frequency, consumption AC 100 V to 240 V ±10%, 50 Hz/60 Hz, 30 VA

Installation dimensions (W x D x H) 700 mm × 300 mm × 150 mm

Weight 8 kg

* PC card (E-MU-S50C) and PC connection cable (E-SU-S288A) are optional.

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Specifications

●�TiMS Light/Offline TiMSReliable software, TiMS, provides high operability and various functions, and allows advanced analyses expanding evaluation analyses.

●�Offline ACCTeeNewly developed ACCTee software is new generation of integrated software with new concept. It provides advanced analyses with comfortable operation.

Offline ACCTee Analysis Program

TiMS Light/Offline TiMS Analysis Program

Analysis software for PC-type instruments is available

● RS232C cable (E-SC-S366A) (Combination available with USB-RS conversion adapter)

● RS232C cable (E-SC-S288A) (Combination available with USB-RS conversion adapter)

● PC card (E-MU-S50C)

● RS232C cable (E-SC-S288A)(Combination available with USB-RS conversion adapter)

● PC card (E-MU-S50C)

S130A

PC Card

S480B

SUEFCOM 1500DX

PC Card

●USB connecting cable●USB memory

Notebook PC




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HANDYSURF series

SURFCOM FLEX series

Data is transferred to Offline PC system, and TiMS Light and Offline ACCTee analyze roughness.

● Data can be saved in a file.● On-site measured data can be analyzed at office. Computer-based operation allows sharing of data with other computers.

Sample analysis with TiMS Light

Sample analysis with Offline ACCTee

Machine Connecting system

Macro program for Handysurf (attached with PC connecting

cable)

Support program

TiMS Light Offline TiMS Offline ACCTee

Roughness analysis

Contour analysis

Roughness analysis

Contour analysis

Roughness analysis

Contour analysis

HANDYSURF (RS232C) ◎ ◎ ◎ ○ ◎ ○ ◎ ○

SURFCOM FLEX (USB memory)(USB cable) − ◎ ◎ ○ ◎ ○ ◎ ○

S130A/S480B (PC card)(RS232C cable) − ◎ ◎ ○

◎○ ◎ ○

Roughness measuring instrument with PC

(FD), (CD-RW)(USB memory), (LAN)

− − ◎ ○ ◎ ○ ◎ ○

Contour measuring instrument with PC

(FD), (CD-RW)(USB memory), (LAN)

− − − − − ◎ − ◎

(conversion program required)

◎：Connectable○：Applicable in condition of being added to roughness analysis − ：Not applicable

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Offline Analysis Program

Select Tracing Driver According with Workpiece

Advantage 1 Anywhere! Advantage 2 Anybody! Advantage 3 Any measurement● Easy to carry by compact design.● Use anywhere.● Output quickly by built-in printer.

● Easy to recognize by large color LCD.● Intuitive operation by large LCD.

● Selectable tracing drivers according with workpiece make it possible to conduct tasks flexibly from simple measurements to advanced waviness measurements.

● Tracing drivers used for our existing machines can be replaced for FLEX*.

SURFCOM FLEX-50ASmall genuine type

SURFCOM FLEX-45AHorizontal tracing type

Small Easy Flexible

● Measurement method: Skid/Skidless measurement● Measurement range: X-axis 50 mm (Tracing driver)● Measurement speed: 0.15 mm/s to 1.5 mm/s

● Measurement method: Skid measurement● Measurement range: X-axis 4 mm● Measurement speed: 0.6 mm/s

Model combination with small genuine type 50 mm tracing driver of S130A.Small tracing driver, available skidless measurement and waviness measurement.Achieve class highest straightness accuracy 0.3 μm/50 mm. Easy leveling adjustment by tilting correction function.

Model combination with horizontal tracing type tracing driver.This type is suitable to measure narrow surface like pin and journal of crankshaft.

SURFCOM FLEX-40ARetraction type

● Measurement method: Skidless/skid measurement

● Measurement range: X-axis 50 mm (Tracing driver)● Measurement speed: 0.6 mm/s

Model combination with retraction type tracing driver.Pickup retract at the stand by or the end of measurement to protect the stylus and pickup against the damage.It is available for a built-in detector in an automated equipment.

SURFCOM FLEX-35BStandard type

● Measurement method: Skid Measurement● Measurement range: X-axis 12.5 mm● Measurement speed: 0.6 mm/s

Model combination with standard tracing driver.Measurement in any orientation; flat, vertical, tilt and ceiling surface.

● Tracing driver automatic connection check function

FLEX automatically recognizes a tracing driver model.As a machine is turned on, it recognizes a model of a tracing driver connecting to the machine. A message is displayed when a machine connects a tracing driver which is different from a previous use.

● Automatic connection check of tracing driver and cable

FLEX chooses several kinds of tracing drivers flexibly. This function automatically recognizes a combination of a tracing driver and a connecting cable even when the combination is not correct.



*Tracing driver for HANDYSURF E-35A/B, E-40A, E-45A and S130A.

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Small & Lightweight Design, Potable Roughness Analysis Data Processor with Built-in Printer

3.5-inch Color LCD Shows Measuring Result and Condition Clearly

Correspond USB Memory and USB Data Communication

Built-in Tilt Stand Operability

◆Operate in One Hand● Arrange 3 frequently used keys at upper side of operation panel

① MEAS./STOP : Start/Stop measuring

② GRAPH/PARAM : Display graph/Parameter

③ CONDITION : Measurement condition setting

● Arrange other keys at bottom of operation panel

④ Up/down/left/right・ENTER : Move/Select condition

selection items

⑤ BACK : Return upper menu

⑥ MENU : Setting menu display

⑦ PRINT/FEED : Print/Feed

⑧ RETURN : Return tracing driver for FLEX 50A

Menu screen for measuring and analysis condition Curve and parameter of measurement result Graph of measurement result (BAC and ADF)

●��Mini USB connector is equipped with SURFCOMFLEX and able to connect with PC. The data can be sent to PC and various analyses are available with ACCTee and TiMS.

●��SURFCOM FLEX can be tilted at 15deg. or 36deg. and can be fold when it is not necessary.

●��Simple operation in hand enhances operability at a shop floor. It is easy to complete a measurement with only three touches of buttons.A strap, standard accessory, can be attached either on right or left side.

USB data

MiniUSB cable

36 °

15 °

●��Save up to 5 measurement conditions and 30 measurement results into internal memory of SURFCOM FLEX.Commercial USB memory can be connected in SURFCOM FLEX to save more data.(USB memory in picture is optional)

①②

③

④⑤

⑥

⑦

⑧

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SURFCOM FLEX-35B, 40A, 45A

FLEX-35BStandard type

Standard type for on-site measuring

Detector retracting type during standby and after a measurement

Tight location type for crankshaft pins, journals, etc.

Skidless and the highest straightness accuracy of 0.3 μm/50 mm in its class!!

● Powerful functions in a compact design.

● Selectable roughness pickups, tip radius 2 μm or 5 μm.

● Reduces damages of probe and pickup.● Supports use of pickup with automated devices

built-in.● Selectable roughness pickups, tip radius 2 μm

or 5 μm.

● Allows highly efficient axial direction measuring using horizontal tracing for a tight location which is difficult to accomplish by conventional measurement.

Max. measuring length 12.5 mm

Retraction volume 1.5 mm



Measuring speed 0.6 mm/s

Surfcom Flex combined with Handysurf tracing drivers.

SURFCOM FLEX-50A

● Max. measuring length: 50 mm● Measuring speed: 0.15 mm/s to 1.5 mm/s

Skidless measurements enable authentic roughness measurements.

50 mm tracing driver Sample skidless measurement

Optional post mount (E-CS-S26A) and height gage adapter (E-WJ-S93A) are required.

Sample combination of a tracing driver and height gage

Sample combination with a compact measuring stand (option).

FLEX-40A

FLEX-45A

Retraction type

Horizontal tracing type

● Model combination with small genuine type 50 mm tracing driver of S130A.● Easy leveling adjustment by tilting correction function.● Combination with a compact measuring stand available as stand-mounted measuring instrument.

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SURFCOM FLEX-35B, 40A, 45A, 50A

Model SURFCOM FLEX

-35B -40A -45A5 μmR 2 μmR 5 μmR 2 μmR 5 μmR

Measuring range

Z-axis direction ±160 μmDrive axis X-direction 12.5 mm Y-direction 4.0 mm

Resolution Z-axis direction 0.01 μm/±20 μm to 0.08 μm/±160 μm

Analysis items

Standards Complies with JIS-2001/-1994/-1982, ISO-1997, DIN-1990, ASME-1995/-2002, CNOMO

JIS-2001Parameters

Cross section/Roughness measurement Ra, Pa, Pq, Pt, Rz, Rz.J, Rzmax, Rq, Rp, Rt, R3z, RSm, Pc, AVH, Hmax, Hmin, Pmr, Rmr, Rk, Rpk, Rvk, Mr1, Mr2, V ｏ , KMotif R, Rx, AR, W, Wx, AW, Wte, Mr, Rke, Rpke, Rvke, Mr1, Mr2, Vo, K

Evaluation curves Section profile curve, roughness curve, ISO13565 special roughness curve, roughness motif curve, waviness motif curve, envelope waviness curve

Characteristic graph Bearing area curve (BAC), Amplitude density function (ADF)

FilterCut-off Gaussian filter, 2RC filter (phase compensation type), 2RC filter (non-phase compensation type)

Cut-off values

λ c 0.08, 0.25, 0.8, 2.5 mm 0.08, 0.25, 0.8 mmλ s 2.5, 8 μm 2.5 μm

Evaluation length 0.4 mm to 12.5 mm (unit: 0.1 mm) 0.4 mm to 4.0 mm (unit: 0.1 mm)Drive speed 0.6 mm/s

Pickup

Movement system Standard type Retraction type Horizontal tracing typeSensing method Differential inductance (displacement type)

Measuring force 4 mN or less 0.75 mN or less 4 mN or less 0.75 mN or

less 4 mN or less

Pickup tipDiameter 5 μmR 2 μmR 5 μmR 2 μmR 5 μmRAngle 90°cone 60°cone 90°cone 60°cone 90°coneMaterial Diamond

Measuring method Skid: Sapphire 32 mmR (Tracing direction)

Data processorunit

Display 3.5-inch color LCD (320 × 240 dots) with sleep mode

Data output

Communication function Connector for USB memory, Mini USB connector for USB communication (one port each mounted)Printer Built-in printer: thermal recording paper (roll) Width: 58 mm (Recording width: 48 mm)

Language Japanese, English, Chinese, German, French, Italian, Spanish, Portuguese

OtherPower source

Charge Built-in rechargeable battery (charged with AC adapter), Charging time: 3 hoursVoltage AC adapter single-phase AC 100 V to 240 V　±10%Power consumption Approx. 30VA (Approx. 600 times measurements possible per full charge)

Dimensions (W × D × H) and weight Amplifier: 132 mm × 58 mm × 214 mm, approx. 90 g

Accessories

Reference specimen (E-MC-S24B), AC adapter, strap, recording paper (E-CH-S25A), operation manualPickup

(E-DT-SM10A)Pickup

(E-DT-SM49A)Pickup

(E-DT-SM10A)Pickup

(E-DT-SM49A) Pickup (E-DT-SM39A))

Tracing driver (E-RM-S173A) Tracing driver (E-RM-S168A) Tracing driver (E-RM-S167A)

Rear adjustment piece (E-WJ-S64A) Stand for specimen (E-WJ-S558A)V-type nose piece (E-WJ-S536A)

Tracing driver cable (E-SC-S519A)Tracing driver cable (E-SC-S518A)

Model SURFCOM FLEX

-50A

Measuring range

Z-axis direction ±400 μmDrive axis X-direction　50 mm

Resolution Z-axis direction 0.00016 μm/±4 μm to 0.016 μm/±400 μm

Analysis items

Standard Complied with JIS-2001/-1994/-1982, ISO-1997, DIN-1990, ASME-1995/-2002, CNOMO

JIS-2001Parameters

Cross section/Roughness measurement Ra, Pa, Pq, Pt, Rz, Rz.J, Rzmax, Rq, Rp, Rt, R3z, RSm, Pc, AVH, Hmax, Hmin, Pmr, Rmr, Rk, Rpk, Rvk, Mr1, Mr2, Vo, KMotif R, Rx, AR, W, Wx, AW, Wte, Mr, Rke, Rpke, Rvke, Mr1, Mr2 ,Vo, KWaviness measurement W-a, W-q, W-t, W-p, W-v, W-sm, Wa, Wq, Wt, Wp, Wv, Wsm, Wz, Wmr

Evaluation curvesSection profile curve, roughness curve, ISO13565 special roughness curve,

roughness motif curve, waviness motif curve, envelope waviness curve,filtered waviness curve, waviness curve

Characteristic graph Bearing area curve (BAC), Amplitude density function (ADF)

FilterCut-off Gaussian filter, 2RC filter (phase compensation type), 2RC filter (non-phase compensation type)

Cut-off values

λ c 0.08, 0.25, 0.8, 2.5, 8, 25 mmλ s 0.25, 0.8, 2.5, 8, 25 μm

Evaluation length 0.1 mm to 50 mm (unit: 0.1 mm)Drive speed 0.15 mm/s to 1.5 mm/s

Pickup

Movement system General typeSensing method Differential tranceducerMeasuring force 0.75 mN or less

Pickup tipDiameter 2 μmRAngle 60°coneMaterial Diamond

Measuring method Skidless/Skid

Data processorunit

Display 3.5-inch color LCD (320 × 240 dots) with sleep mode

Data output

Communication function Connector for USB memory, Mini USB connector for USB communication (one port each. mounted)Printer Built-in printer: thermal recording paper (roll)　Width: 58 mm (Recording width: 48 mm)

Language Japanese, English, Chinese, German, French, Italian, Spanish, Portuguese

OtherPower source

Charge Built-in rechargeable battery (charged with AC adapter), Charging time: 3 hoursVoltage AC adapter single-phase AC 100 V to 240 V ±10%Power consumption Approx. 30VA (Approx. 600 times measurements possible per full charge)

Dimensions (W × D × H) and weight Amplifier: 132 mm × 58 mm × 214 mm, approx. 90 g

AccessoriesReference specimen (E-MC-S24B), AC adapter, strap, recording paper (E-CH-S25A), operation manualPickup (E-DT-SE19A), stylus (DM43801),tracing driver (E-RM-S199A), tracing driver cable (E-SC-S517A)

Specifications

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Powerful Functions

- Compact and Easy Operation -

E-35B Tracing Driver: Standard Type

E-40A Tracing Driver: Retraction Type

E-45A Tracing Driver: Horizontal Tracing Type

● Popular standard type for on-site measuring

Powerful functions in a compact design. Large memory capacity holds 10 measurement data. Max. measuring range: 12.5 mm

● Detector retracts during standby and after measuring

Reduces risk of probe and pickup damage. Supports use of pickup with automated devices built- in. Retraction amount: 1.5 mm Max. measuring range: 12.5 mm

● Suitable for constricted locations such as crankshaft pins, journals, etc.Allows highly efficient axial direction measurement using horizontal tracing in a constricted location where conventional measurement is difficult. Max. measuring range: 4.0 mm Measuring speed: 0.6 mm/s

* E-45A cannot be built-in to a main unit.



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Built-in Tracing Driver for E-35B and E-40A

Cable-connected Tracing Driver for Measurement in Tight Locations with E-35B, E-40A and E-45A

Support seven languages!Support various national standards!Computer connectable!

Inspection Report Creation

Data can be imported into a Microsoft EXCEL spreadsheet and used to create an inspection report.

TiMS Light (Option)

Advanced analysis can be performed using ACCRETECH TiMS Light integrated measuring system.

HANDYSURF Lineup●��HANDYSURF provides a choice of types to meet the needs

of a wide range of applications. In addition to the standard type, both a retraction type (which can be built into a device), and a horizontal tracing type for use in tight spaces, make important contributions to on-site measuring.

AI Function for Easy Operation (Patent Pending)●��The AI function automatically configures optimum conditions

for measuring range, evaluation length, cut-off value, and recording magnification (when a printer is being used).

Can be Used Anywhere in the World ●��HANDYSURF conforms to ISO, JIS (2001, 1994, 1982), ASME,

CNOMO and other international standards. It supports operation in English, Japanese, German, French, Italian, Spanish and Portuguese. It meets European safety standard requirements for CE marking.

Replaceable Displacement Pickup ●��A displacement pickup provides

precise surface roughness measurement. Since the pickup is replaceable, optional pickups specialized for file holes and deep grooves can also be used, facilitating a wide range of measurements.

Data Transfer to Computer ●��A serial port (RS-232C) (standard accessory) makes it possible

to transfer measurement conditions, parameter values, and profile curve data directly to a computer.

Measurements from Any Orientation●��The compact, lightweight design of the HANDYSURF enables

measurement from any orientation – horizontally, vertically, or tilted. The display and tracing driver can be used together in an integrated or separated configuration to meet specific measuring needs (E-35B).

Functions to Support On-site Operation Data Storage/Rechargeable Battery●��On-board memory can store 10 sets of measurement data

for unrestricted output whenever it is required. Both the HANDYSURF unit and the printer have built-in rechargeable batteries, making them ideal for on-site measurements.

Computer Connectable

* Notebook computer connection

cable (E-SC-S366A) is an option.

Macro program is included.

Sample of printout with all functions selected

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Option (for E-35B, E-40A)

Magnetic Stand E-ST-MACFor Post Mount φ6 E-CS-S26A Post Mount Holder 0102050For measuring at various heights and angles.

Long Hole Extension AdapterDM57506For long hole measuring with pickup extended 50 mm.

Adapter for Horizontal Direction MeasurementsDM57507For measuring 68 mm inside from the side of the tracing driver.

Nose Piece (For Flat Surfaces)E-WJ-S88AFor handheld measuring of a flat surface whose measuring surface is too small.

Nose Piece (For Cylinders)E-WJ-S85AFor handheld measuring of a cylinder whose measuring surface is too small.

Adapter for Hole MeasurementsE-WJ-S86AFor handheld measuring of holes and grooves that run at a right angle to the object being measured.

ModelHANDYSURF E

-35B -40A -45A5 μmR 2 μmR 5 μmR 2 μmR 5 μmR

Measuring range

Z-direction ±160 μm

Drive axis X-direction　12.5 mm Y-direction　4.0 mm

Resolution Z-direction 0.01 μm/±20 μm to 0.08 μm/±160 μm

Analysis items

Standard Complied with JIS-2001/-1994/-1982, ISO-1997, DIN-1990, ASME-1995, CNOMO

JIS-2001Parameter

Cross section/Roughnessmeasurement

Ra, Pa, Pq, Pt, Rz, Rz.J, Rzmax, Rq, Rp, Rt, R3z, RSm, Pc, AVH, Hmax, Hmin, Pmr, Rmr, Rk, Rpk, Rvk, Mr1, Mr2, Vo, K

Motif R, Rx, AR, W, Wx, AW, Wte

Evaluation curve Section profile curve, roughness curve, ISO13565 special roughness curve, roughness motif curve, waviness motif curve, envelope waviness curve

FilterCutoff Gaussian filter, 2RC filter (non-phase compensation type) (JIS'82)

Cutoffvalue

λ c 0.08, 0.25, 0.8, 2.5 mm 0.08, 0.25, 0.8 mm

λ s 2.5, 8 μm 2.5 μm

Evaluation length 0.4 mm to 12.5 mm (Unit: 0.1 mm) 0.4 mm to 4.0 mm (Unit: 0.1 mm)

Drive speed 0.6 mm/s

Pickup

Movement system Standard type Retraction type Horizontal tracing type

Sensing method Differential inductance (displacement type)

Measuring force 4 mN or less 0.75 mN or less 4 mN or less 0.75 mN or less 4 mN or less

TipDiameter 5 μmR 2 μmR 5 μmR 2 μmR 5 μmR

Angle 90° cone 60° cone 90° cone 60° cone 90° cone

Material Diamond

Measuring method Skid: Sapphire, 32 mmR (tracing direction)

Data processorunit

Display LCD 16 figures × 2 lines with sleep mode

Dataoutput

Communication function Connector supporting RS232C, one port mounted

Printer Printer (Option): thermal recording paper (roll)　Width: 58 mm (Recording width: 48 mm)

Language Japanese, English, German, French, Italian, Spanish, Portuguese

OtherPower source

Charge Built-in rechargeable battery (charged with AC adapter), Charging time: 10 hours

Voltage AC adapter single-phase AC 100 V to 230 V　±10%

Power consumption Approx. 1 VA

Dimension (W x D x H) and weight 180 mm × 68 mm × 54 mm, Approx. 600 g

Accessories

Reference specimen (E-MC-S24B), AC adapter, operation manualPickup (E-DT-SM10A) Pickup (E-DT-SM49A) Pickup (E-DT-SM10A) Pickup (E-DT-SM49A) Pickup (E-DT-SM39A)

Tracing driver (E-RM-S173A) Tracing driver (E-RM-S168A) Tracing driver (E-RM-S167A)

Rear adjustment device (E-WJ-S64A) Stand for specimen (E-WJ-S558A)V-shape nose piece (E-WJ-S536A)Tracing driver cable (E-SC-S466A)

Handy case (E-MA-S97A)

Tracing driver extention cable (E-SC-S255A)

Handy case (E-MA-S35A)

Model E-DT-SM10A E-DT-SM49A E-DT-SM39A E-DT-SM11A E-DT-SM12A E-DT-SM13AApplication General measuring Horizontal tracing Fine hole (min. inner dia. φ6 mm) Extra fine hole (min. inner dia. φ3 mm) Deep groove (max. depth 7 mm)

Applicable model E-35B, E-40A E-35B, E-40A E-45A Option for E-35B, E-40A

Measuring force 4 mN 0.75 mN 4 mN

Pickup tip

Diameter 5 μm 2 μm 5 μm

Angle 90°cone 60°cone 90°cone

Material Diamond

Skid Sapphire　Tracing direction: 32 mmR

Dimension

Pickup Specifications

HANDYSURF Specifications

Name/Model Compact Printer Ⅲ　　E-RC-S30A　(DPU-S245-00A-E)Printing method Thermal line dot

Recording curves Section profile curve, roughness curve, BAC, roughness motif curve, waviness motif curve, envelope waviness curve

Recording magnification Vertical direction: 100, 200, 500, 1 k, 2 k, 5 k, 10 k, Auto Horizontal direction (H): 1, 2, 5, 10, 20, 50, 100, 200, Auto

Other Power supply: AC adapter 100 V, 120 V, 230 V　Weight: Approx. 280 g　Dimension: 83 mm × 130 mm × 45 mm

Accessories Connecting cable (E-SC-S527A), Power cable, Recording paper (E-CH-D26A (2 rolls))

Printer (Option)

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Nose Piece

Measuring application Model External view Applicable stylus Skid shape Remarks

General purpose 010 2701 010 2501

DM43801 32 mmR sapphire • Tip skid• Standard pickup built in

Skidless 010 2702 ※ All styluses ─ • For protection• For front travel adjustment

Horizontaltracing ofordinary planes

010 2703 ※ 010 2501DM43801

• Double sided straddling skid• Skid radius for horizontal

tracking: 4.5 mm

Extra fine holes 010 2704 010 2511DM43811 8 mmR tool steel

• Double sided straddling skid• Position adjustment with stylus required

Fine holes 010 2705 010 2512DM43812 8 mmR tool steel • Tip skid

Thin groovetooth surfaces 010 2706 010 2512

DM43812 8 mmR tool steel • Double sided straddling skid

Curved surfaces 010 2707 010 2515

DM43815 32 mmR sapphire • Sliding skid

Deep grooves 010 2708 010 2515DM43815 32 mmR sapphire • Double sided straddling skid

Narrowdeep grooves 010 2709 ※ 010 2515

DM43815 32 mmR sapphire • Tip skid

R grooves 010 2710 ※ 010 2515DM43815 0.8 mmR ruby

• One sided straddling skid• Magnification: 5,000 or more• Position adjustment with stylus required• Recording only

Small roundbars 010 2711 010 2501

DM43801 32 mmR sapphire

• Double sided straddling skid• Skid position adjustment

required• Three types of skids provided

for φ2 to 4,φ 4 to 8, φ 8 to 16

Long holes 010 2722 ※ 010 2522DM43822 32 mmR sapphire • Tip skid

Deep groovesin holes 010 2723 010 2525

DM43825 32 mmR sapphire• Tip skid• Position adjustment with

stylus required

Extradeep grooves 010 2724 010 2526

DM43826 32 mmR sapphire• Double sided straddling skid• Position adjustment with

stylus required

Bottom surface of O-ring grooves

010 2726 010 2525 DM43825 0.8 mmR ruby

• Double sided straddling skid• Magnification: 5,000 or more• Position adjustment with

stylus required

Measuring application Model External view Applicable stylus Skid shape Remarks

Skidless DM44026 All ─• Front travel adjustment with adjustment screw

• E-DT-SS01A pickup use only

Applicable models ■ FLEX-50　■ S130　■ S480　■ S1400　■ S1800　■ S2800

Applicable models ■ S1500　■ S1900　■ S1910　■ S2900

※ Indicates stylus/nose piece set DM43800 and 010 2640


SURFCOM ・CONTOURECORD Option

Standard Inventory Parts

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Measuring application Model External view Specifications RemarksGeneral purpose

DM438012 μmR, 60° conical diamond,0.75 mN

• All orientations• Horizontal tracing possible• Standard accessory

Fine wires, knife edges DM43802

2 μmR, 60° ax-shaped diamond,0.75 mN

• Downward measurements

Medium fine holes DM43809

2 μmR, 60° conical diamond,0.75 mN

• All orientations• Horizontal tracing possible

Extra fine holes, gear flank DM43811

2 μmR, 60° conical diamond, 0.75 mN


Fine holes/thin grooves DM43812 ※



Hole bottom/conical surfaces DM43813



Corners/tooth surfaces

DM43814 ※ 2 μmR, 60° conical diamond, 0.75 mN


Deep grooves/round grooves

DM43815 ※ 2 μmR, 60° conical diamond,0.8 mN

• Downward measurement• Large waveform distortion

Fine long holes

DM438212 μmR, 60° conical diamond,3 mN

• Downward measurement• Sensitivity: 1/2• Magnification: x10000

Low magnification, long holes DM43822 ※

2 μmR, 60° conical diamond,3 mN


Low magnification, corners

DM43824 　2 μmR, 60° conical diamond,4 mN


Deep groovecorners



Deep hole grooves,O-ring groove bottomsurfaces

DM43825 　2 μmR, 60° conical diamond,3.4 mN

• Downward measurement• Sensitivity: 1/2• Magnification: x20000• Large waveform distortion

Extra deep grooves

DM43826 2 μmR, 60° conical diamond,4 mN

• Downward measurement• Sensitivity: 1/2• Magnification: x10000• Large waveform distortion

Stylus set

DM43800 　 2 μmR

Nosepiece010 2702, 010 2703, 010 2709, 010 2710, 010 2722Stylus DM43812, DM43814,DM43815, DM43822

DM43900 2 μmR

Nosepiece DM44026StylusDM43801, DM43811,DM43812, DM43814,DM43815, DM43822

Replaceable Roughness Profile Measuring Styli (Tip Radius 2 μm)Applicable models　■ FLEX-50　■ S130　■ S1400　■ S1500　■ S1900　■ S1910　■ S480　■ S1800　■ S2800　■ S2900

※ Indicates stylus/nose piece set DM43800. The value of measuring force is when E-DT-S03A/E-DT-SE19A are mounted

E-DT-SS01A pickup use only



SURFCOM・CONTOURECORD Option

64

Measuring application Model External view Specifications RemarksGeneral purpose

010 25015 μmR, 90°conical diamond, 4 mN


Fine wires, knifeedges 010 2502

5 μmR,90°knife edge-shapeddiamond, 5 mN

Medium fine holes 010 2509

5 μmR, 90°conical diamond, 4 mN


Extra fine holes, gear flank

010 2511 5 μmR, 90°conical diamond,4 mN


Fine holes/thin grooves 010 2512 ※

5 μmR, 90°conical diamond, 4 mN


Hole bottom/conical surfaces 010 2513

5 μmR, 90°conical diamond,4 mN


Corners/toothsurfaces

010 2514 ※5 μmR, 60°conical diamond, 4 mN


Deep grooves/round grooves

010 2515 ※5 μmR, 90°conical diamond,5 mN

Gear tooth profiles,thread flank


• Magnification: x20000

Fine long holes


• Sensitivity: 1/2• Magnification: x10000

Low magnification, long holes

010 2522 ※ 　5 μmR, 90°conical diamond,5 mN


Low magnification, corners



Deep groove corners

010 2527 　5 μmR, 60°conical diamond,8 mN

• Sensitivity: 1/2• Magnification: x10000• Large waveform distortion

Stylus set 010 2640 5 μmR

Nosepiece010 2702, 010 2703, 010 2709, 010 2710, 010 2722Stylus010 2512, 010 2514,010 2515, 010 2522

Replaceable Roughness Profile Measuring Styli (Tip Radius 5 μm)Applicable models　■ FLEX-50　■ S130　■ S1400　■ S1500　■ S1900　■ S1910　■ S480　■ S1800　■ S2800　■ S2900

※ Indicates stylus/nose piece set 010 2640. The value of measuring force is when E-DT-S01A/E-DT-SE18A are mounted

ø0.6

3

0.9

22

6

0.5 or greater

0.2～0.3

90°

0.3

(0.5)

40°


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Measuring application Model External view Specifications RemarksSoft materials

010 2508 10 μmR, 90° conical diamond, 0.75 mN

• All orientations• Horizontal tracing possible• Specifications are for when

E-DT-S02A is mountedDeep hole grooves,bottom surface of Oring groove

010 2525 10 μmR, 90° conical diamond,8 mN

• Downward measurements• Sensitivity: 1/2• Magnification: x25000• Large waveform distortion

Extra deep grooves


• Downward measurements• Sensitivity: 1/2• Magnification: x10000• Large waveform distortion

Bottom surface of holes


• Magnification: x20000• Large waveform distortion• Dedicated connecting rod used

High magnification measurement 010 2506


• All orientations• Horizontal tracing possible• Specifications are for when

E-DT-S04A is mounted.

High magnification contour profiles 010 2528


• Downward measurements• Sensitivity: 1/2• Magnification: x10000• For E-DT-S01A, -S03A

Measuring application Model External view Specifications RemarksSteps

010 2504 250 μmR, 60° conical saphire, 5 mN

• All orientations

Waviness

010 2505 800 μmR, ruby, 4 mN • All orientations

Extra fine hole profiles

010 2510 250 μmR, tool steel,4 mN

• All orientations• Magnification: x5000• Excluding E-DT-S03A/

-SS01A/SE19A

Fine long hole waviness

010 2520　　 800 μmR, ruby,5 mN

• Downward measuring• Sensitivity: 1/2• Magnification: x10000

Large steps

010 2523 250 μmR, sapphire,5 mN

• Downward measuring• Sensitivity: 1/2• Magnification: x25000

Replaceable Roughness Profile Measuring Styli

Replaceable Waviness Profile Measuring Styli

Applicable models　■ FLEX-50　■ S130　■ S1400　■ S1500　■ S1900　■ S1910　■ S480　■ S1800　■ S2800　■ S2900

Applicable models　■ FLEX-50　■ S130　■ S1400　■ S1500　■ S1900　■ S1910　■ S480　■ S1800　■ S2800　■ S2900

* The value of measuring force is when E-DT-S01A/E-DT-SE18A are mounted

* The value of measuring force is when E-DT-S01A/E-DT-SE18A are mounted





66

Measuring application Model External view Specifications Remarks

Low measuring force E-DT-SS01A


• All orientations• Horizontal tracing possible• Provided as standard• With DM43801 stylus

General purpose E-DT-SS08A For S1500, S1900, and S2900 DX/SD types5 μmR, 90° conical diamond,4 mN

• All orientations• Horizontal tracing possible• With 0102501 stylus

General purposeE-DT-S01AE-DT-SE18A　


• All orientations• Horizontal tracing possible• With 0102501 stylus• E-DT-SE18A: for S130A

Soft materials

E-DT-S02A 10 μmR, 90° conical diamond,0.75 mN


Low measuring force

E-DT-S03AE-DT-SE19A


• All orientations• Horizontal tracing possible• Standard specifications• With DM43801 stylus• E-DT-SE19A: for S130A

High magnification

E-DT-S04A 1 μmR, 60° conical diamond,0.75 mN


Non-continuous measurement

E-DT-S05A5 μmR, 90° conical diamond,4 mN

• All orientations• Horizontal tracing possible• Front travel: 110 to 120 μm• Other specifications are same as for

E-DT-S01A

Grooves in holes

E-DT-S06A 5 μmR, 90° conical diamond,4 mN

• Skidless measurement only• Max. magnification: x10000• Dedicated connecting rod required (010 2746)• With 0102542 dedicated stylus

Ultra deep grooves E-DT-S07A

5 μmR, 90° conical diamond,5 mN • Stylus can not be replaced

• Max. magnification: x10000• Sensitivity: 1/2

E-DT-S122A2 μmR, 60° conical diamond,4 mN

Ultra long holesE-DT-S08A 5 μmR, 90° conical diamond,

4 mN • Stylus can not be replaced• Max. magnification: x10000• Sensitivity: 1/5E-DT-S137A 2 μmR, 60° conical diamond,

4 mNHigh magnification

E-DT-SH01A• Max. magnification: x500000• Measuring force:0.2 mN• With 016 2854 stylus

Stylus forE-DT-SH01A

0162854 1 μmR, 90° conical diamond • Included with E-DT-SA01A as standard010 2567 1 μmR, 60° conical diamond010 2210 10 μmR, 60° conical diamond010 2211 5 μmR, 60° conical diamond010 2212 0.5 μmR, 60° conical diamond

010 2213 90° 2.5 μm width knife edge, diamond

Thin pickupDM42001DM42011DM42012

5 μmR, 90° conical diamond10 mN, horizontal tracing possibleMax. magnification: x5000 or less

• With 0102501 dedicated stylus DM42001: for S1400, S1800, S2800 DM42011: for S480 DM42012: for models preceding S590A

Pickup holderfor thin pickup E-DH-S60A

• Used for horizontal tracing of crankshaft pins, journals, or other such parts.

Non-contactmeasurement E-DT-SL12B

Measuring range: 300 μm Spot diameter: 2 μm Work distance: 4.5 mm

• Color confocal point type• Light source: Halogen light bulb• Life: 1000h

PickupsApplicable models　■ FLEX-50　■ S130　■ S1400　■ S1500　■ S1900　■ S1910　■ S480　■ S1800　■ S2800　■ S2900


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General purpose

DM48505

2 μmR, 60° conical diamond,0.75 mNLH ＝ 50　LV ＝− 14.35

• Standard length• S3000A standard

accessory• For roughness and contour

measurement

General purposehighly rigid stylus

DM48507


• Standard length• S5000DX/SD standard

accessory• For roughness and contour

measurement

Highly rigid stylus for contours

DM48508500 μmR, ruby ball,0.75 mNLH ＝ 100　LV ＝− 21.5

• 2x length• Standard accessory• For contour measurement

only

DM48509 500 μmR, ruby ball,3.2 mNLH ＝ 125　LV ＝− 25.5

• 2.5x length• For contour measurement

only

Up/downmeasuring stylus

DM48510


• Standard length• For roughness and contour

measurement

Right angle stylus

DM48511


• Standard length• Offset: 13.5 mm• For roughness and contour

measurement

Small hole stylus

DM48513


• Standard length• Probe height: 2 mm• For roughness and fine

contour measurement

Extra small hole stylus

DM48514



contour measurement

Deep hole stylus

DM48515



contour measurement

Stylus forfine contours

DM48588


• Standard length• For roughness and fine

contour measurement

Replaceable Styli for S5000DX/SDApplicable models　■ S5000DX/SD　■ S3000A　




68


General purpose


• Standard accessory• Stroke: 5 mm• For roughness and contour

measurement


• Stroke: 5 mm• Stylus height: 13 mm• For roughness and contour

measurement


• Stroke: 5 mm• For roughness and contour

measurement

Contour stylus2X arm DM47513

25 μmR, 24° conical carbide,5 mN

• Standard accessory• Stroke: 10 mm• For contour measurement

only

Right angle stylus DM47504


• Stroke: 5 mm• Offset: 13.5 mm• Probe height: 9 mm• For roughness and contour

measurement

Small hole stylus DM47505 　


• Stroke: 5 mm• Probe height: 2 mm• For roughness

measurement only

Extra small holestylus DM47506


• Stroke: 5 mm• Probe height: 1 mm• For roughness

measurement only

Deep groove stylus


• Stroke: 5 mm• Probe height: 25 mm• For roughness and contour

measurement



measurement

General purposestylus 2x arm DM47547



measurement

Corner/toothsurface stylus DM47523


• Stroke: 5 mm• Probe height: 8.3 mm• For roughness

measurement only


Wide-range hybrid detector holder

E-DH-S182A

. Magnification: x5000 or less. Straightness: 0.5 μm/100 mm

• Max. protrusion amount: 90 mm from left edge of Tracing driver

• Column height: 10 mm from normal height

Small hole stylusMaster ballcalibration unit

E-MC-D59A. Block gage: 1.5 mm. Calibration ball: φ 1.5 mm

• For measurements with probe pointing downwards, for small hole stylus

• C1700DX/SD• C2700DX/SD

Replaceable Styli for S2000DX/SD

Replaceable Styli for S2000DX/SD

LH ＝ 65, LV ＝− 14.35

LH ＝ 130, LV ＝− 21.5

LH ＝ 65, LV ＝− 14.5

LH ＝ 65, LV ＝− 5.025

LH ＝ 65, LV ＝− 4.625

LH ＝ 65, LV ＝− 30.5

LH ＝ 130, LV ＝− 15.5

LH ＝ 65, LV ＝− 12.525

S2000DX/SD series represent S2000DX/DX2/DX3 and S2000SD/SD2/SD3 model.

663

30

Block gage1.5mm

Calibration ballø1.5

0.7511

Reference plate

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Measuring application Model External view d L1 L2 Applicable arm RemarksGeneral purpose

DM45501 3 60 52 010 2804

DM45502 3 34 26 010 2800

DM45503 2 21 13 010 2801

General purposeDM45504 3 60 52 010 2804

• Standard accessoryDM45505 ※ 3 34 26 010 2800

DM45506 2 21 13 010 2801

Edge lineDM45507 3 60 52 010 2804

DM45508 ※ 3 34 26 010 2800

DM45509 2 21 13 010 2801

Small holesDM45081 — 12 9

010 2802DM45082 — 7 5

DM45083 — 3.5 1.5

Small hole twistDM45084 ※ — 12 9

010 2802DM45085 — 7 5

DM45086 ※ — 3.5 1.5

Ordinary offsetDM45087 — 12 9

010 2802 • Offset: 25 mmDM45088 — 7 5

DM45089 — 3.5 1.5

Helix surface offsetDM45090 — 12 9

010 2802 • Offset: 25 mmDM45091 — 7 5

DM45092 — 3.5 1.5

High precisionDM45522 3 60 52 010 2804

• φ 0.7 ruby ballDM45523 3 34 26 010 2800

DM45524 2 21 13 010 2801

DM45525 3 60 52 010 2804

• φ 1 ruby ballDM45526 3 34 26 010 2800

DM45527 2 21 13 010 2801

　

Contour StyliApplicable models　■ C1600　■ C1700　■ C1710　■ S1800　■ S1900　■ S1910 Stylus material: Cemented carbide

※ Indicates stylus/arm set 010 2999




24° conical, R0.025

L2

ød

L1

24° conical, R0.025L1

17L2

7

65

L1

12° angular, R0.025L2

25 65

17

L124° conical, R0.025L2

25 65

17

70

Contour Detectors and ArmsApplicable models　■ C1600　■ C1700　■ C1710　■ S1800　■ S1900　■ S1910Measuring application Model External view Applicable stylus Remarks

Contour detector

E-DT-CE02A ─ • C1600, S1800D/G

E-DT-CE03B ─ • C1700DX/SD, S1900DX/SD

General purpose

010 2800

DM45502DM45505DM45508DM45523DM45526

Inner surface

010 2801

DM45503DM45506DM45509DM45524DM45527

Small holes

010 2802 ※DM45081 toDM45092

Deep grooves

010 2804

DM45501DM45504DM45507DM45522DM45525

• Max. magnification: x50• 010 2744 pickup holder

coupling required• Provided with auxiliary weight

Offset measurement

010 2805 　

DM45502DM45505DM45508DM45523DM45526

• Max. magnification: x100• Offset: 50 mm• Provided with auxiliary weight

010 2806

DM45502DM45505DM45508DM45523DM45526


010 2807

DM45503DM45506DM45509DM45524DM45527


Long items

010 2808

DM45501DM45504DM45507DM45522DM45525

• Max. magnification: x10• Lever movement range: 100 mm• Sensitivity: 1/2• Provided with auxiliary weight• 010 2744 pickup holder

coupling required

Long holes

010 2810

DM45503DM45506DM45509DM45524DM45527

• Max. magnification: x25• Lever movement range: 100 mm• Sensitivity: 1/2• Provided with auxiliary weight

Arm/stylus set 010 2999Stylus : DM45505, DM45508, DM45084, DM45086Arms : 010 2802, 010 2805

※ Indicates stylus/arm set 010 2999 Standard Inventory Parts

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71

Measuring application Model External view d L1 L2 Applicable arm RemarksGeneral purpose

DM45501 3 60 52 DM45531

DM45502 3 34 26 DM45528

DM45503 2 21 13 DM45529

General purposeDM45504 3 60 52 DM45531

• Standard accessory: DM45505DM45505 ※ 3 34 26 DM45528

DM45506 2 21 13 DM45529

Edge lineDM45507 3 60 52 DM45531

DM45508 ※ 3 34 26 DM45528

DM45509 2 21 13 DM45529

Small holesDM45510

　

— 12 9

DM45530

• Measuring force: 10 mN or less

• Deflection: Approx. 1.5 μm for 10 mN

DM45511 — 8 5

DM45512 — 4.5 1.5

Small hole twistDM45513 ※ — 12 9

DM45530


• Deflection: Approx. 1.5 μm for 10 mN

DM45514 — 8 5

DM45515 ※ — 4.5 1.5

Ordinary offsetDM45516 — 12 9

DM45530


• Deflection: Approx. 3 μm for 10 mN

DM45517 — 8 5

DM45518 — 4.5 1.5

Helix surface offsetDM45519 — 12 9

DM45530


• Deflection: Approx. 3 μm for 10 mN

DM45520 — 8 5

DM45521 — 4.5 1.5

High precision

DM45580 3 21 13 DM45733 • φ 0.5 ruby ball

DM45583 — 16.5 8.5 — • φ 0.5 ruby ball　• Integrated with arm

DM45522 3 60 52 DM45531

• φ 0.7 ruby ballDM45523 3 34 26 DM45528

DM45524 2 21 13 DM45529

DM45525 3 60 52 DM45531

• φ 1 ruby ballDM45527 3 34 26 DM45528

DM45527 2 21 13 DM45529

Contour StyliApplicable models　■ C1710　■ C2600　■ C2700　■ S1910　■ S2800　■ S2900 Stylus material: Cemented carbide

※�Indicates stylus/arm set DM45500




L2

ød

L1



L117

L2

5

65

L1

12° angular, R0.025L2

25 65

17

L124° conical, R0.025L2

25 65

17

13ø3

21ø0.5 ruby ball

72

Measuring application Model External view Applicable stylus Remarks

Contour detector

E-DT-CH07A • C2600, S2800E/G

E-DT-CH08A • C2700DX/SD, S2900DX/SD

E-DT-CH10B • C1710DX/SD, S1910DX/SD

General purpose

DM45528 　

DM45502DM45505DM45508DM45523DM45526

• Standard configuration• Deflection: Approx. 1.2 μm for 10 mN Approx. 3.7 μm for 30 mN

Inner surface

DM45529

DM45503DM45506DM45509DM45524DM45527

• Deflection: Approx. 1.2 μm for 10 mN Approx. 3.7 μm for 30 mN

Small holes

DM45530※DM45510 toDM45521

• Stylus combination arm for measuring small holes

Deep grooves

DM45531

DM45501DM45504DM45507DM45522DM45525

• Measuring force: 10 mN or less (Provided with auxiliary weight)• Deflection: Approx. 1.2 μm for 10 mN Approx. 3.7 μm for 30 mN

Offset measurement

DM45532※

DM45502DM45505DM45508DM45523DM45526


DM45533

DM45503DM45506DM45509DM45524DM45527


Arm/stylus set DM45500• Stylus : DM45505, DM45508, DM45513, DM45515• Arms : DM45530, DM45532

Contour Detectors and ArmsApplicable models　■ C1710　■ C2600　■ C2700　■ S1910　■ S2800　■ S2900

※�Indicates stylus/arm set DM45500 Standard Inventory Parts

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Name Model External viewOrthogonal axis adjustment (mm) Swivel adjustment Tilt adjustment Table size

(mm)Allowable load

(net wt.) (kg)Remarks

X Y Z Fine Coarse Fine Coarse

Adjustment stand E-AT-S01D 50 50 8° 360° φ 150 20(7)

• Min. reading increment 10 μm

Levelingadjustment stand E-AT-S02A ±1.5° 80×110 15

(3)

E-AT-S03A ※ 2 ±2.5 ±2° 80×58 3(0.9) • For E-RM-S75A

Adjustment stand

E-AT-S04A ±8 ±3° 80×125 15(8)

E-AT-S05A ※ 2 ±3 ±1° 120×58 3(1.4) • For E-RM-S76A

E-AT-S36A ※ 2 ±3 ±1° 200×120 5(4.5) • For E-RM-S77A

X-directionmovementadjustment stand

E-AT-S08A 400 150×150 20(25)

3D fineadjustment stand E-AT-S10A 55 55 28 75×40 1

(3.4) • Straightness: 0.03 mm

1-axis precisionfine adjustment stand E-AT-S11B 50 125×150 20

(4.9)

• Straightness: 3 μm• Min. reading value:

10 μm

Swivel finerotation stand E-AT-S12A ±5° 360° φ 90 3

(0.58) • Min. reading value: 5’

1-axis ultra precisionfine adjustment stand E-AT-S13B

10

60×60 10(0.7)

• Straightness: 3 μm　• Min. reading value:

0.5 μm

Tilting stand E-AT-S64B ±20° 60×120 10(1) • Min. reading value: 5’

Universal stand E-WJ-S03A 360° ±90° φ 110 3(2.5)

• X/Y-direction adjustment

Column rotary spacerE-CS-S31A※1

H:100 360° ─ • Inserted between table and column

E-CS-S76A※3

Column spacerE-CS-S32A※1

H:200 • Inserted between table and column

E-CS-S77A※3

Tracing driver spacer E-CS-S33A ※ 1 L : 70• Inserted between

column and tracing driver

Tracing driver tilting device

E-CA-S24A ※ 2

E-CA-S85A ※ 3

E-CA-S92A

±15° ─

• For contour measurements E-CA-S85A: For tracing driver 100 mm E-CA-S92A: For tracing driver 200 mm

E-CA-S32A ※ 2 ±5° ─ (5) • For roughness measurements

　

Adjustment DevicesApplicable models　■ S480　■ S1400　■ S1500　■ S2000　■ S5000　■ C1600　■ S1800　■ C1700/C1710　■ S1900/S1910　■ S2000　■ C2600　■ S2800　■ C2700　■ S2900

※1: Cannot be used with S3000A Series and S5000 Series. ※2: Cannot be used with S1500, S1900, C1700, S2000, S3000A or S5000 Series. This device is for S1400D, S1800D, S2800E, C1600D, C2600E ※3: For S1500, S1900, C1700, S2000, S1400G, S1800G, S2800G, C1600G, C2600G and C2800 Series.

Coarse movement:

10 μmFine

movement: 0.5 μm)




74

Name Model External view V Holder(mm)

Chucking(mm)

Vice(mm)

Clamp(mm)

Flat surface(mm)

Allowable load(net wt.) (kg) Remarks

Double-side open vice E-WJ-S01B

Inside: 59outside: 38 to 105

5(0.8)

Consult us whencombining with the tilt stand.

V-stand set E-WJ-S02A φ1 to φ150 (1.5) Provided withworkpiece clamper

V-stand holder set E-WJ-S04A φ12 to φ150 (3)Two pieces used just for T-groove clamp

Compact stand E-WJ-S05A φ4 to φ10 (0.4)

Load plate E-WJ-S06A 150×150

angle plate

(1)

Static electricity holding plate E-WJ-S11A

80×130 angle plate

(1.3)

Holding strength 0.2 kgIdeal for paper, aluminum, and film

Scroll chuck E-WJ-R01C

OD: φ2 to φ75ID: φ56 to φ91

(1)

Iris chuck E-WJ-R10AE-WJ-R378A

OD: φ 5 to φ110OD: φ 5 to φ150

00( 3 )00( 5 )

Manufactured afterreceipt of order

Clamp set JC-3 Height40 to 60 ─

Ceramic load plate

E-WJ-S252A 300×300angle plate

(5.3) Manufactured afterreceipt of order

E-WJ-S234A500×500angle plate

(15) Manufactured afterreceipt of order

HoldersApplicable models　■ S480　■ S1400　■ S1500　■ S2000　■ S5000　■ C1600　■ S1800　■ C1700/C1710　■ S1900/S1910　■ S2000　■ C2600　■ S2800　■ C2700 ■ S2900

V-stand setE-WJ-S02A

X-direction movement adjustment standE-AT-S08A

Adjustment standE-AT-S04A

Scroll chuckE-WJ-R01C

Leveling adjustment standE-AT-S02A

Universal standE-WJ-S03A




Tracing driverE-RM-S76A

Adjustment standE-AT-S01D


X-direction movementadjustment standE-AT-S08A

Double-side open viceE-WJ-S01B

Universal standE-WJ-S03A

Adjustment standE-AT-S01D

V-holder setE-WJ-S04A

Sample Adjustment Stand/Holder Configurations


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Name Model External view Specifications Remarks

Pickupmovementtracing driver(For standard series)

E-RM-S72B/S138B

Drive distance: 100 mmDriving speed: 0.03 mm/s to 6.0 mm/s, 8 speedsStraightness accuracy: (0.05 + 1.5L/1000) μmWeight: Approx. 9 kg

• S480: E-RM-S71B Specifications

same as shown to left

E-RM-S178A/S182A


• S480: E-RM-S73B Specifications


E-RM-S141A


• S480: E-RM-S78A Specifications


Pickupmovementtracing driver(For linear series)

E-RM-S205A

Drive distance: 100 mmDriving speed: 0.03 mm/s to 6.0 mm/sStraightness accuracy: (0.05 + L/1000) μmWeight: Approx. 9 kg

E-RM-S183E

Drive distance: 200 mmDriving speed: 0.03 mm/s to 6.0 mm/sStraightness accuracy: (0.05 + L/1000) μmWeight: Approx. 15 kg

Workpiecemovementtracing driver

E-RM-S75A

Drive distance: 50 mmDriving speed: 0.03 mm/s to 6.0 mm/s, 8 speedsStraightness accuracy: (0.05 + 1.5L/1000) μmWeight: Approx. 15 kgLoad weight: 5 kgLeveling range: ±1.5°

E-RM-S76A

Drive distance: 150 mmDriving speed: 0.03 mm/s to 6.0 mm/s, 8 speedsStraightness accuracy: (0.05 + 1.5L/1000) μmWeight: Approx. 20 kgLoad weight: 5 kgLeveling range: ±1°

E-RM-S77A

Drive distance: 300 mmDriving speed: 0.03 mm/s to 6.0 mm/s, 8 speedsStraightness accuracy: (0.05 + 1.5L/1000) μmWeight: Approx. 32 kgLoad weight: 10 kgLeveling range: ±0.8°

Outer peripheryroughnesstracing driver

E-RM-S85B

Measuring OD: φ 12 mm to 20 mmLength: 30 mm to 150 mmOD: φ 20 to 150 mmLength: 30 mm to 250 mmPeripheral velocity: 0.3, 0.6, 1.5 mm/sWeight: Approx. 7 kgLoad weight: 5 kg

Round surfaceroughnesstracing driver

E-RM-S84A

Measuring radius: 0.25 mm to 40 mmRotation accuracy: ±0.25 μm (180° arbitrary)Peripheral velocity: 0.3 mm/s (stepless)Weight: Approx. 15 kg

Column crossfeed device E-ST-S131A

For measurement of large and heavy parts (Manufactured upon receipt of order)

Auto tilting table E-AT-S72A Leveling range: ±2°Load weight: 5 kg

Peripherals

Range of movement : X : 660 mmY : 200 mmWeight: Approx. 370 kg




Y-axis direction stroke

76


Pickupholder stand E-CA-S25A Weight: Approx. 1.5 kg • When workpiece movement

tracing driver is used

Connecting rodfor ultra-long holemeasurement

010 2736

Magnification: Up to x10000Min. inner dia: Up to φ 25 mmMax. depth: 650 mmWeight: Approx. 1.2 kgRod diameter: φ 21.7 mm

• Used with large measuring stand

• For measurement of ultra-long holes (Skid measurement)

Pickup holdercoupling

010 2744 Coupling length: 30 mmWeight: Approx. 0.25 kg

• Used with 010 2804 and 010 2808 contour profile

arms

010 2745Measuring depth: Up to 131 mm beneath tracing driverWeight: Approx. 0.47 kg

Pickup rightangle coupling/connecting rod

010 2746

Measuring depth: 142 mmbeneath detector holderWeight: Approx. 0.2 kgRod diameter: φ 21.7 mm

• Pickup vertical measurement using hole bottom stylus

Ordinary standfor desktopanti-vibration table

E-VS-S13ADimensions: 510 mm × 430 mm × 643 mmWeight: 22 kg

• For E-VS-S57A/B, E-VS-S58A

Desktopanti-vibration table

E-VS-S57B

Anti-vibration: Pneumatic diaphragm springNatural frequency: 2.5 Hz to 3.5 HzLoad weight: 130 kgDimensions: 600 mm × 530 mm × 60 mmAir source: 350 kPa to 700 kPaWeight: 25 kg

• Requires nylon tube with φ 6 mm outer and φ 4 mm inner diameter for quick joint connecting aperture.

E-VS-S58A

Anti-vibration: Pneumatic diaphragm springNatural frequency: 2.5 Hz to 3.5 Hz Load weight: 130 kgDimensions: 600 mm × 530 mm × 60 mmWeight: 25 kg

• Air source: Pump

Desktop largeanti-vibration table E-VS-S45A

Anti-vibration: Pneumatic diaphragm springNatural frequency: 4 Hz Load weight: 300 kgDimensions: 1000 mm × 750 mm × 143 mmWeight: 80 kg

• Air source: Pump

Anti-vibration table

E-VS-R16A

Anti-vibration: Pneumatic diaphragm springNatural frequency: V: 2 Hz; H: 2.2 HzLoad weight: 250 kgDimensions: 980 mm × 780 mm × 700 mmAir source: 350 kPa to 700 kPaWeight: 170 kg

E-VS-S21B

Anti-vibration: Pneumatic diaphragm springNatural frequency: V: 1.6 Hz; H: 2 HzLoad weight: 550 kgDimensions: 1100 mm × 850 mm × 700 mmAir source: 350 kPa to 700 kPaWeight: 340 kg

Dimensions in (parentheses) are for the E-VS-S21A

700

560760

980 780（1074）（824）

（850）（600）

（700）


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System rack

E-DK-S24ADimensions: 800 mm × 800 mm × (1070 to 1370) mmWeight: 44.5 kg

E-DK-S25A Dimensions: 1200 mm × 800 mm × (1070 to 1370) mm

Side desk E-DK-S10A Dimensions: 400 mm × 700 mm × 700 mm

High magnificationdust cover

E-CV-S02ADimensions: 750 mm × 614 mm × 810 mmWeight: 8 kg

• Used with desktop anti-vibration table/stand for roughness measuring

• For Standard/Linear series SD type (Excluding S5000, S3000)

E-CV-S03ADimensions: 1000 mm × 629 mm × 810 mmWeight: 13 kg

• Used with desktop anti-vibration table/stand for contour profile measurement

• For Standard/Linear series SD type (Excluding S5000, S3000)

Dust cover E-CV-S25ADimensions: 1070 mm × 750 mm × 1050 mmWeight: 20 kg

• Used with E-VS-S21A anti-vibration table for large measuring table

Measuringpositionverification unit

E-MA-S81A Magnification: x20Focal distance: 60 mm • Stand type

DM59014 Magnification: x20 Focal distance: 60 mm

• Can be used with workpiece movement tracing driver

Light E-MA-S84A • Stand type

Color cameramonitoringsystem

DM59103

Image sensor: Interline type CCDEffective pixels: 768 mm × 494 mm

Configuration (1) Color camera (2) Color monitor(3) Power adapter(4) Microscope adapter(5) Connection cable (6) Instruction manual




H

Transparent acrylic plate

DW

Transparent vinyl sheet

Microscope knob

Stand

Microscope

Focal

distan

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60

X25

Light guide (option)

CCD camera(option)

Microscope

115 70

Flexible arm

Fine movement knob Light guide

Fixing knobFlexible arm

Microscope (sold separately)

Light guide (option)

CCD camera(option)

78


Tape tension jig DM58526 　 • For pickup movement tracing driver

Reference specimen E-MC-S24B 　　　　　　

Calibration surface: Approx. 3.1 μm RaStylus check surface: Approx. 0.4 μm RaMeasured value described.

• For sensitivity calibration and for checking stylus

Level difference reference specimen E-MC-S57A

Large range: Approx. 20 μmSmall range: Approx. 2 μmMeasured value described.

• Standard accessory for linear series roughness system

• For detector sensitivity calibration and stylus check

Magnificationcalibrator E-MC-50B

Narrow range accuracy: 0 to 10 μm ±0.1 μmWide range accuracy: 0 to 400 μm ±1.0 μm

• For magnification calibration

Master ballcalibration unit

E-MC-S34A 　　• For measurements with stylus

pointing downwards• Standard accessory for C1600D/G,

C2600E/G, C1700DX/SD, C2700DX/SD

E-MC-S48A

• For measurements with stylus pointing downwards

• Standard accessory for S3000A, S5000DX/SD

E-MC-S51A

• For measurements with stylus pointing upwards

• For C2600E/G, S3000A, C2700DX/SD, S5000DX/SD

E-MC-S59C Block gage: 1.5 mmReference sphere: φ 1.5 mm

• For measurements with stylus pointing downwards and stylus for small bore measurement

• For C1600, C1700DX/SD, C2600, S3000A

• For C2700DX/SD, S2000DX/SD, S5000DX/SD

Pitch gage E-MG-S02A

Pin diameter: 7.9 mmPitch: 15 mmDimensions: 144 mm × 38 mm × 49 mm

Stylus checkmaster E-MG-S24A Tip radius: 0.1 μm or less

Material: Knife edge diamond

Powertransformer box E-TF-R25A

Input: 90 V to 240 VOutput: 100 VCapacity: 2.1 kVADimensions: 300 mm × 350 mm × 296 mmWeight: 45 kg

• Specify the input voltage


8560

46

Block gageMaster ballø12.7mm(1/2)

Y-direction adjustment table25

149

52

130120

1016

72

663

30

Block gage1.5mm

Calibrationballø1.5

0.7511

Reference plate

90°

ø64

28.2

1(Edge line length)

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Compact measuringstand E-ST-S130A 　　

Table size: 410 mm × 200 mm Max. measuring height: 200 mm Weight: Approx. 18 kg

• Tracing driver height and tilt can be adjustable depending on a size and form of a workpiece

Pickup

E-DT-SE18A 5 μm R90°conical diamond, 4mN

E-DT-SE19A 2 μm R60°conical diamond, 0.7mN • Standard accessory

Touch pen E-MA-S54A • Specialized for S130A

Battery set E-MA-S65A

• Battery charger for 130A • Size: 80 mm × 85 mm × 45 mm • Weight: Approx. 400g • Charging time: 4 hours

Measurements and recording are available on-site where there is no power source

Contents: AC adapter, battery charger, battery

• Battery for 130A • Size: 203 mm × 58 mm × 67 mm • Weight: Approx. 1.2g

Roll foot

E-MA-S62A

• Attachment for placing the tracing driver on a roll shaped object for measurement

• Roll outer diameter: φ 60 mm or more

E-MA-S63A • Photo shows unit of E-MA-63A

Dust proof cover E-MA-S64A • For Amplification indicator• Specilized for S130A

All position pickup holder E-DH-S107A

• For measuring surface roughness of slanted surfaces, vertical surfaces, ceiling surfaces and other non-flat surfaces

Horizontal tracing pickup holder E-DH-S17A

• Attachment for horizontal tracing of items, such as crankshafts which have obstacles in the front and back in the measuring direction (using double-side stradding skid)

Attachment for tracing driver E-CA-S62A • 50 mm tracing driver attached to

manual column (E-CL-S26A)

RS-232C cable E-SC-S288A Support 9pin Windows PC • Cable connected• Specialized for S130A

PC card E-MU-S50C 128 MB

• Provides registrations of approx. 500 measurement conditions and storage of approx. 500 measurement data (200 text management items)

• For 130A

USB memory Memory capacity：2 GB • For FLEX

USB connecting cord miniUSB 1.8 m on FLEX side • For FLEX

Accessories for SURFCOM 130A, FLEX-50A



80

Accessories for HANDYSURF E-35B, 40A, 45A and SURFCOM FLEX-35B, 40A, 45A


Pickup

E-DT-SM10AE-DT-SM49AE-DT-SM39A

5 μm, 90° conical diamond, 4 mN (For 35B・40A) 2 μm, 90° conical diamond, 0.75 mN (For 35B・40A) 5 μm, 90° conical diamond, 4 mN (For 45A)

• For general measurement • Standard accessory

E-DT-SM11A E-DT-SM40A

5 μm, 90° conical diamond, 4 mN (For 35B・40A)2 μm, 90° conical diamond, 0.75 mN (For 35B・40A)

• For fine hole • Min. inner diameter: φ 5 mm

E-DT-SM12AE-DT-SM41A


• For extra fine hole • Min. inner diameter: φ 3 mm

E-DT-SM13AE-DT-SM42A


• For deep groove • Max. depth: 7 mm

Reference specimen E-MC-S24BCalibration surface: Approx. 3.1 μmRaStylus check surface: Approx. 0.4 μmRa Measured value described

• For sensitivity calibration and stylus check

• Standard accessory

Adjustment device (Rear)

E-WJ-S64A • Standard accessory for 35B, 40A

E-WJ-S559A • Standard accessory for 45A

Adjustment device (Front)

E-WJ-S80A • For 35B, 40A

E-WJ-S560A • For 45A

Nose piece (Cylinder)

E-WJ-S85A

　

Place a V-shaped part at lower side on a workpiece for measurement

• For 35B


Nose piece (Flat)

E-WJ-S88A Place a protrusion and lower side of tracing driver on a workpiece for measurement

• For 35B


Nose piece (V-shape) E-WJ-S536A • Standard accessory for 45A

Nose piece (contact type) E-WJ-S563A • For 45A

Extension adapter for long hole DT57506 • For 35B, 40A

Adapter for horizontal measurement

DT57507 • For 35B, 40A

Adapter for bore measurement E-WJ-S86A Place a central pin on a lower bore • For 35B, 40A

Holder for tracing driver E-MD-S200A Mounted on side of FLEX amplifier • For FLEX-35B, 40A

Magnetic stand E-ST-MAC

Post mount holder 010 2050

Post mount E-CS-S26A 　 • For φ 6

Adapter for height gage E-WJ-S93A

Cross-section surface on scriber of height gage:9 mm × 9 mm

• Used with post mount, E-SC-S26A

RS-232C cableE-SC-S366A

Support 9 pin Windows PC

• With sample program for communication

USB-RS adapter

• Used with E-SC-S366A in case PC has no RS port

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Name Model Device model Specifications Remarks

PC card E-MU-S50C 130A, 480B

• 128MB Provides registrations of approx. 500 measurement conditions and storage of approx. 500 measurement data (200 text management items)

Recording paper

E-CH-S21A

130A, 480B

• 10 rolls/box• Width: 58 mm × 25 m

E-RC-S24A E35A high-speed printer

E-CH-S25A E-RC-S23A, E-RC-S25AE-RC-S29A

Compact printer for E35A,built-in printer for FLEX,compact printer II for E35A/B, E40A, E45A

• 10 rolls/box • Width: 58 mm × 7 m

E-CH-50A

E-RC-S01A/B 100B, 300B, 400B, 500B, 700B, 720B 550A, 900A/B, 920A, 730A, 470A, 740A

• 10 rolls/box • Width: 50 mm × 40 mE-RA-S01A 200B

E-RA-S03A 200C

E-CH-S05B

570A, 590A, 750A, 790A

• 10 rolls/box • Width: 60 mm × 40 m

E-RC-S09A 440A, 470A, 740A, 900B, 920B

E-CH-S02A 110A, 350A, 550A, 470A730A, 740A, 920 • 20 rolls/box

JIS No.121 E-RC-XY16 600B/C/D • 100 sheets/leaflet • A3 leaflet

SP-319 E-RC-XY17 600B/C/D • 10 rolls/box

E-CH-S26A E-RC-S30A Compact printer II for E35B, E40A, E45A

• 10 rolls/box• Width: 58 mm × 19 m

Ink ribbon E-IR-S01A 110A, 350A, 550A, 470A730A, 740A, 920A

Consumables


SURFCOM CONTOURECORD Option


82

Comparison of National Standards of Surface Texture Measurement


Explanation of Surface Characteristics・Standards

BS1134 part 2-'90

former U.K.Analog signal without filtering

μm (μin)

mm (inch)

2RC

λB

———

Rr

Re = 5 Rr

———

Ry

Rz

———

———

0,1 < Rz 0,5μm

0,5 < Rz 10μm

10 < Rz 50μm

Ra

———

———

0,02 < Ra 0,1μm

0,1 < Ra 2μm

2 < Ra 10μm

Sm

———

tp

S

Pt

———

———

———

———

———

———

———

———

———

———

———

———

———

Pt

———

R, AR, Rx, W, AW, Wx, Wte

———

———

———

———

———

Ry =1.6

Max rule for parameter with suffix "max"

DIN4771-'77

former GermanyDigital data

without filtering0,5, 1,5, 5, 15

& 50mm= 1 sampling length

= Length of the measured feature

15 / Pt 1,6 U 0.008- /Pt 1.5

Rmax = 1,6

μm

mm

Phase correct

λc

———

Rc

5 Rc

Rt

———

Ten point height Rz

———

0,1 < Rz 0,5μm

0,5 < Rz 10μm

10 < Rz 50μm

Ra

———

———

0,02 < Ra 0,1μm

0,1 < Ra 2μm

2 < Ra 10μm

———

———

———

———

Maximum two point height Rmax

Max rule for Rmax

3.21.6

3,21,6

3.21.61.6~3.2

N8N7

former Japan U.S.A.Digital data

without filtering

μm

mm

Phase correct

λc

———

Rr

Re = 5 Rr

———

Ten point height Rz

Maximum height Ry

———

0.1 < Rz, Ry 0.5μm

0.5 < Rz, Ry 10μm

10 < Rz, Ry 50μm

Ra

———

———

0.02 < Ra 0.1μm

0.1 < Ra 2μm

2 < Ra 10μm

Sm

———

tp

S

μm (or μin.)

mm (or in.)

Phase correct (or 2RC)

λc

λs

Cutoff length : R

L = 5 R

Rt

Rmax

———

Rz

Rp, Rpm, Rv

0.02 < Ra 0.1μm

0.1 < Ra 2μm

2 < Ra 10μm

Ra

Rq

Rsk, Rku

0.02 < Ra 0.1μm

0.1 < Ra 2μm

2 < Ra 10μm

Sm

Δq

tp

μm

mm

Phase correct

λc

λs

Rr

Rz max

———

Average method Rz

Rp, Rv, Rc

0.1 < Rz 0.5μm

0.5 < Rz 10μm

10 < Rz 50μm

Ra

Rq

Rsk, Rku

0.02 < Ra 0.1μm

0.1 < Ra 2μm

2 < Ra 10μm

RSm

RΔq

Rmr (c)

Maximum height Ry in 1 Rr

average value of all sampling lengths

Ry1.6~0.8λc 0.25

U 0.008-2.5/Rz 1.5L -0.25/Rz 0.7

Digital data with λs filter Digital data with λs filter

Htp, Δa, SAE Peak PPI,Peak density Pc

Rδc, Rmr, Rpk, Rvk, Rk, Mr 1, Mr 2, Rpq, Rvq, Rmq

not defined

not defined

not defined

average value of all sampling lengths

16% rule default

Max rule for parameter with suffix "max"

———

16% rule for Ra, Rz

———

16% rule ———

———

Rmax = 1.6

U“2RC” -0.8/Ra75 3.1L“2RC” -0.8/Ra75 1.5

Pp, Pv, Pc, Pa, Pq, Psk, Pku, PSm, PΔq, Pmr (c), Pδc, Pmr, Ppq, Pvq, Pmq

Re = 5 RrCalculate for each sampling length Rr

Maximum height Rz in 1 Rror total height Rt in 1 Re

——— ——— ———

ID. of national

country

Specification

Indication of maximum height

< 1.5μm

Profile format

Evaluation length

Maximum height

Ten point height

Other P parameters

Motif parameters

Maximum peak to valley height

Average peak to valley height

Other peak height parameters

Rr & λc for peak height parameter

Indication of Maximum heightin case of Rz < 1.5μm

R profileaveragingparameter

0.25mm

0.8mm

2.5mm

R profile otherparameter

Mean spacing

RMS slope

material ratio

Other parameters

Comparison rule of measured value with

tolerance limits

Average

16% rule

Maximum rule

R profileHeight

parameter

Primary profile P

P profile parameter

Roughnessprofile R

Unit of height

Unit of length

Filter

Long cutoff

Short cutoff

Sampling length

Evaluation length

Maximum height

Ten point height

0.25mm

0.8mm

2.5mm

Arithmetic average

root mean square

Skewness, kurtosis

Rr & λc for Ra on non-periodic profile

Indication of Rain case of 1.5 < Ra < 3.1μm

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Definition of Surface Texture and Stylus InstrumentDefinition of Surface texture and Stylus instrumentProfile by stylus and phase correct filterISO4287: ’97 and ISO3274: ’96

Measure perpendicular to lay

Stylus method probe

Real surface

Traced profile perpendicular to real surface

Total profile

λs profile filter

• Stylus deformation• Noise

Primary profile P

P-parameter

λc profile filter

Phase correct filter 50% transmission at cutoffNo phase shift / low distortion

Roughness profile R

Transmission

R-parameter

Form deviation profile=Mean line for roughness profile=Waviness profile on old DIN & JIS

λf profile filter

Waviness profile W(Filtered center line waviness profile)

W-parameter

X axis Z axis

θ

rtip

Stylus tip geometryθ = 60 (or 90) conertip = 2μm (or 5, 10μm)

100%

50%

0

Roughness profile Waviness profile

Cutoff (Wavelength) λc

λs λc λfWavelength λ

Selection of λc & Stylus Tip r tip

λc (mm) λs (μm) λc/λs r tip (μm)

0.08 30

0.25 2.5 100

0.8 2 (5 at RZ > 3μm)

2.5 8 300 5 or 2

8 25 10, 5 or 2

2

Sampling length setting procedure

1. View the surface and decide whether profile is periodic or non-periodic.

2. Estimate roughness and measure it in corresponding condition in the table.

3. Change condition according with above result and measure it again.

4. Repeat “3.” if the result does not reached the condition.

5. When the result reaches the condition, it will be the final value.Check it in shorter sampling length at non-periodic and change it if it meets.

Measure the most critical surface.The surface is acceptable if not more than 16% of all values averaged through evaluation length are exceed the limit

Measure the surface that can be expected the lowest roughness.The surface is acceptable if not more than 16% of all values averaged through evaluation length are less than the limit.

The surface is acceptable when none of values averaged through evaluation length in entire surface are over the limit.

Measuring condition: R -parameter ISO4288: ’96

Measuring condition : P -parameter ISO4288: ’96

Stylus radius λs λc No. of

Rp = nS. length

RpE. length

Rn

2μm 2.5μm Length offeature

(Plane, Line)

Length offeature5μm 8μm – 1

10μm 25μm

Measuring condition: W -parameter ISO1302: ,02

λc λf S. length RwNo. ofRw = m E. length Rn

λc (for roughness)

nλc (n: specified) m: specified λf mλf

Non-periodic profilePeriodic profile

or RSm

Measuring Condition

Ra,Rq,Rsk,Rku or R q

Rz,Rv,Rp,Rc,or Rt Sampling

length:Rr =

CutOffλc (mm)

Evaluationlength

Rn (mm) =5xRr Ra (μm) Rz (μm) RSm (mm)

Over> Less

0.006 0.02 0.025 0.1 0.013 0.04 0.08 0.40.02 0.1 0.1 0.5 0.04 0.13 0.25 1.250.1 2 0.5 10 0.13 0.4 0.8 42 10 10 50 0.4 1.3 2.5 12.510 80 50 200 1.3 4 8 40

Over> Less Over> Less



84

Indication of surface textureISO 1302: ’02

Sampling length and evaluation lengthISO4287: ’97

Primary profile P

Mean line

Profile peak

Top of profile peak

Profile valleyBottom of profile valley

Roughness profile R Mean line

Profile element width XsSampling length ℓr = Cutoff λc

Evaluation length ℓn＝n×ℓr (n: Default 5)

Tracing length Lt＝Lp＋Ln＋Lp Post travelℓp (λc/2)

Pre travelℓp (λc/2)

ℓr ℓr ℓr ℓr

U “2RC” 0.008–2.5/Rz3max 12.3

not allowed Required

Material removal

Manufacturing method Surface parameter and condition

Machining allowance (mm)

The second surface parameter and condition

Parameter

Profile TypeValue limit

(μm)

e d

c

a

b 3 ＝ L“2RC”0.008 － 0.8/Ra75 0.2

ground

U 0.008 － 2.5/Rz3max 12.3Example

Transmission bandλs － λc (mm)

Default is table below

Comparison rule

16% or max

Surface lay and orientation＝,⊥, X, M, C, R, P

Upper Uor

Lower Lor

2RC

Filter Phase correct

Note.:Default item (red) is not indicated.Additional item (blue) is indicated if necessary.

No. of S. lengthn

(Default 5)

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85

Basic Surface Texture Parameters and Curves

Amplitude average parameters

RaPaWa

Arithmetical mean deviation

Arithmetic mean of the absolute ordinate values Z(x) within a sampling length.

RqPqWq

Root mean square deviation

Root mean square value of the ordinate values Z(x) within a sampling length.

Ra75 Center line average(Old Ra, AA, CLA)

Arithmetic mean of the absolute ordinate value Z(x) in a sampling length of roughness profile with 2RC filter of 75% transmission.

Annex of JIS onlySame as Ra at old ISO, ANSI & DIN

Rq, Pq, Wq = Z 2 (x) dx1 L

Ra, Pa, Wa = Z (x) dx L

0

1 L

Ra75= Z (x) dxrn

0

1L

RpPpWp

Maximum profile peak height

The largest profile peak height Zp within a sampling length.

Rp, Pp, Wp = max (Z(x))

RcPcWc

Mean height of profile elements

Mean value of the profile element heights Zt within a sampling length.

Amplitude parameters (peak and valley)

RvPvWv

Maximum profile valley depth

The largest profile valley depth Zp within a sampling length.

Rv, Pv, Wv = min (Z(x))

RzPzWz

Maximum height of profile(Rz = Ry at ISO4287 ’84)

Sum of height of the largest profile peak height Rp and the largest profile valley Rv within a sampling length.

Rz = Rp + Rv

Different from Rz at old ISO, ANSI & JIS

RtPtWt

Total height of profile(Pt = Rmax at JIS’82)

Sum of height of the largest profile peak height Rp and the largest profile valley Rv within an evaluation length.

Rt, Pt, Wt = max (Rpi) + max (Rvi)

Rzjis Ten point height of roughness profile (Rz at JIS’94)

Sum of mean value of largest peak to the fifth largest peak and mean value of largest valley to the fifth largest valley within a sampling length.

Annex of JIS only and confirm to JIS’94Different from Rz at JIS’82　　　

Profile element:Profile peak & the adjacent valley

m

l = 1

1mRc, Pc, Wc = Zti

Rzjis= (Zpj + Zvj)5

j = 1

15

Basic surface texture parameters and curves

L

0

Sampling length L

Zp1 Zp2 Zpi

Rp

Sampling length LZv1 Zv2 Zvi

Rv

Sampling length L

Rv

Rp

Rz

Evaluation length Rn

Rv2

Rp2

Rt

rr Rv4

Rp5

Sampling length L

Z t2Z t1 Z tmZ t3

Z ti

Sampling length L

Zp2ndZp5thZp4thZp3rd

Zp1st

Rzjis

Zv5th Zv3rd Zv4th Zv2nd Zv1st

Sampling length L

Ra

Sampling length L

Rq2

Sampling length L

Ra75



86

Spacing parameters

RSmPSmWSm

Mean width of the profile elements(RSm = Sm at ISO4287 ’84)

Mean value of the profile element width Xs within a sampling length.

m

i = 1

1mRSm, PSm, WSm = Xsi

Hybrid parameters

RΔqPΔqWΔq

Root mean square slope

Root mean square value of the ordinate slopes dZ/dX within a sampling length.

= Z (x) dx2 L

0

1L

R qP q

W q

ddx

Height characteristic average parameters

RskPskWsk

Skewness

Quotient of mean cube value of the ordinate values Z (x) and cube Pq, Rq, Wq respectively, within a sampling length.

RkuPkuWku

Kurtosis of profile

Quotient of mean quartic of the ordinate values Z (x) and 4th power of Pq, Rq, Wq respectively, within a sampling length.

Rsk = Z (x) dx3Rr

0

1Rq 3

1Rr

Parameter from bearing ratio curve and profile height amplitude curve

Material ratio curve of the profile (Abbott Firestone curve)

Curve representing the material ratio of the profile as a functional of level c.

Rmr(c)Pmr(c)Wmr(c)

Material ratio of profile(Rmr (c) = ex- tp)

Ratio of the material length of the profile elements Ml (c) at a given level c to the evaluation length.

RmrPmrWmr

Relative material ratio

Material ratio determined at a profile section level Rδc, related to a reference c0.

Rmr = Rmr (c 1)C1 = C0 -- R c, C0 = C (Rmr0)

RδcPδcWδc

Profile section height difference

Vertical distance between two section levels of given material ratio.

R c =c(Rmr1) --c(Rmr2) : Rmr1<Rmr2

Profile height amplitude curve

Sample probability density function of ordinate Z (x) within an evaluation length.

Rmr (c) = MR(c)i (%)m

i = 1

100rn

Rku = Z (x) dx4Rr

0

1Rq 4

1Rr

Sampling length L

Xs1 Xs2 Xs3 Xsi Xsm

Evaluation length RnProfile

Mr(c) 1 Mr(c) i

c

Probabilitydensity

0% 100% 0Rmr (c)

100%

0%

Rt

Bearing ratio curve Profile height amplitude curve

Evaluation length Rn

MR(c) MR(c)

c

Rt

Sampling length L

dZ (x) / dx

0

c (Rmr 1)

c (Rmr 2)

100% orRt (μm)

0% Rmr 1 Rmr 2 100%

0

C0

C1

100% orRt (μm)

0% Rmr 0 Rmr 100%

Probability density

Rku > 3

Rku < 3

Probability density

Rsk > 0

Rsk < 0

R cδ R cδ

Exp

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